1 |
F. Zhu, J. W. Spronck, and W. C. Heerens, 'A simple capacitive displacement Sensor', Sensor and Actuator A, vol. 25-27 pp. 265-269, 1991
|
2 |
M. H. Bonse, F. Zhu, and H. F. van Beek, 'A longrange capacitive displacement sensor having micrometre resolution', Meas. Sci. Technol. vol. 4, pp. 801-807, 1993
DOI
ScienceOn
|
3 |
A. Pedrocchi, S. Hoen, G. Ferrigno, and A. Pedotti, 'Perspectives on MEMS in bioengineering: a novel capacitive position microsensor', IEEE Trans. Biomed. Eng. vol. 47, no. 1, pp. 8-11, 2000
DOI
ScienceOn
|
4 |
D. K. Cheng, 'Field and wave electromagnetics', Addison Wesley, pp. 121-124, New York, 1989
|
5 |
'Nano positioning catalog', Physik Instrumente, 1998
|
6 |
P. W. Kolb, R. S. Decca, and H. D. Drew, 'Capacitive sensor for micropositioning in two dimensions', Rev. Sci. Instrum. vol. 69, no. 1, pp. 310312, 1998
DOI
ScienceOn
|
7 |
박영태, 권성원, 강전홍, '물리센서 변위측정용 LVDT의 개선에 관한 연구', 센서학회지, 제5권, 제3호, pp. 1-8, 1996
|
8 |
이래덕, 김한준, 박세일, 세묘노프, '물리센서 : 미소 변위 측정용 비접촉식 4 - 전극형 전기용량 센서', 센서학회지, 제7권, 제2호, pp. 90-6, 1998
|
9 |
P. B. Kosel, G. S. Munro, and R. Vaughan, ' Capacitive transducer for accurate displacement control', IEEE Trans. Instrum. Meas., IM-30, no. 2, pp. 114-123, 1981
DOI
ScienceOn
|
10 |
L. K. Baxter, 'Capacitive sensors: design and application', IEEE Press, Piscataway, 1997
|