• JSTS:Journal of Semiconductor Technology and Science
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• 제6권4호
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

• 대한기계학회논문집B
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• 제37권5호
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• pp.495-501
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• 2013

곤충을 비롯한 많은 생물은 매질의 진동을 감지할 수 있는 다양한 감각기관을 이용하여 외부 교란을 감지하고 서로 통신하며 생명 유지활동을 하고 있다. 가장 가까이 접하는 진동유동의 대표적인 예로는 인체의 호흡을 들 수 있다. 본 연구에서는 마이크로제조 공정을 통해 메소스케일 저항식 감지소자, 특히 외팔보 형상의 유연 감지소자를 이용한 유량측정법을 제안하고, 무선통신을 이용한 유동측정 시스템화 및 휴대화의 가능성을 고찰하였다. 탄성계수가 낮은 기질재료를 사용함으로써 온 습도에 영향을 받지 않는 건강 진단용 호흡센서로서의 가능성 및 확장성을 확인하였다. 또한 유동감지 센서의 측정 데이터를 분석한 결과, 정밀성과 신뢰성은 마이크로 컨트롤러의 분해능, 노이즈 제거기술에도 의존하는 것으로 나타났다. 이 시스템에서 패킷 간의 최소 전송소요 시간은 약 16 ms로 나타났다.

• 대한기계학회논문집B
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• 제41권11호
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• pp.743-748
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• 2017

체외 및 체내 삽입형 이미징 기술 등에 의해서는 판별이 어려운 질환의 조기 진단을 위해 인체 내 삽입이 가능하며 체내 국소부위의 정밀 측정이 가능한 새로운 진단기술이 필요하다. 동맥경화로 발전할 수 있는 죽상경화반의 경우 이미징 기술로는 판별이 어려우나 건강한 조직 대비 미세한 기계적 물성치의 차이를 가질 것으로 예상되어 정밀한 국소 조직의 기계적 강도 측정을 통한 조기 진단이 가능할 것으로 기대된다. 본 연구에서는 궁극적으로 체내 삽입이 가능하며 국소 조직의 강도 측정이 가능한 압전 재료 기반 캔틸레버 센서를 제작하고자 하였다. 압전 기능을 갖는 캔틸레버 제작을 위해 $BaTiO_3$ 나노입자 기반의 압전 고분자 복합재 최적화 연구 및 열 인장 공정으로 캔틸레버 끝 단에 마이크로 콘 구조의 팁을 제작하였다. 이 압전 캔틸레버 센서를 이용하여 기계적 물성치가 다른 생체 조직의 강도 측정을 통해 센서로서의 기능을 확인하였다.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.198-201
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• 2006

In this paper, we fabricated drag force type and pressure difference type gas flow sensor with dry etching technology which used Deep RIE(reactive ion etching) and etching stop technology which used SOI(silicon-on-insulator). we fabricated four kinds of sensor, which are cantilever, paddle type, diaphragm, and diaphragm with orifice type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03mV/V kPa. Sensitivity of the fabricated diaphragm and diaphragm with orifice type sensor were relatively high as about 3.5mV/V kPa, 1.5mV/V kPa respectively.

• 센서학회지
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• 제19권3호
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• pp.214-220
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• 2010

Three-dimensional(3D) structure of specific DNA can be changed between two conformations under an external environmental transition such as pH and salt concentration variations. We have experimentally observed the conformational transitions of i-motif DNA using AFM cantilever bioassay. It is shown that pH change of a solvent induces the bending defleciton change of a cantilever functionalized by i-motif DNA. This indicates that cantilever bioassay enables the label-free detection of DNA structural changes upon pH change. It is implied that cantilever bioassay can be a de novo route to quantitatively understand the conformational transitions of biological molecules under environmental changes.

• 센서학회지
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• 제19권2호
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• pp.112-117
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• 2010

A high-throughput sorting (HTS) system has been designed to separate target particles using a negative dielectrophoretic (n-DEP) force. The system consists of a meso-sized channel and a cantilever-type electrode(CE) array designed to separate a large number of target particles by discerning subtle difference of weight and dielectric material property of the particles. Using the polystyrene beads with various sizes of 10, 25 and $50{\mu}m$, the developed system exhibits high-throughput sorting of about 200 beads/sec and more than 80 % of separation efficiency.

• 제어로봇시스템학회논문지
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• 제3권4호
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• pp.343-349
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• 1997

In a lightly damped cantilever beam, most of the vibration energy is found around natural frequencies. Based on this, a phase delay control for suppressing vibration of the beam is proposed in this paper. This controller is designed to behave like a velocity feedback controller at the frequencies of modes to be controlled. Also, this controller is designed in consideration with uncontrolled modes for robust stability and improving of the sensitivity function of the control system. This phase delay control is applied to vibration suppression of a cantilever beam with a pair of a piezoelectric actuator and a piezoelectric sensor. Experimental results showed that the phase delay control functions efficiently.

• 한국재료학회지
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• 제17권2호
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• pp.121-123
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• 2007

Energy harvesting from the vibration through the piezoelectric effect has been studied for powering the wireless sensor node. As piezoelectric unimorph cantilever structure can transfer low vibration to large displacement, this structure was commonly deployed to harvest electric energy from vibrations. Piezoelectric unimorph structure was composed of small stiff piezoelectric ceramic on the large flexible substrate. As there is the large Young's modulus difference between the flexible substrate and stiff piezoelectric ceramic, flexible substrate could not homogeneously transfer the vibration to stiff piezoelectric ceramic. As a result, most piezoelectric ceramics had been broken at the certain point. We measured and analyzed the stress distribution on the piezoelectric ceramic on the cantilever.

• 센서학회지
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• 제30권3호
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• pp.185-189
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• 2021

Herein, we propose a functional polymer cantilever to enhance maturation and contractile force of cardiomyocytes. The proposed cantilever consists of a surface-patterned polymer substrate and silver nanowires (AgNWs). The AgNWs are transferred to the PDMS substrate using conventional molding techniques. This thin metallic surface significantly improves the adhesion of cardiomyocyte on the surface-patterned PDMS with the hydrophobic characteristics. In addition, the use of AgNWs improves the visibility of the conducting PDMS substrate for the observation of cardiomyocyte through an inverted microscope. The AgNWs also assist in synchronizing each cardiomyocyte to maximize its contractile force.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.493-494
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• 2012