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검색결과 364건 처리시간 0.023초

고정입자 패드를 이용한 텅스텐 CMP에 관한 연구 (The Study of Metal CMP Using Abrasive Embedded Pad)

  • 박재홍;김호윤;정해도
    • 한국정밀공학회지
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    • 제18권12호
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    • pp.192-199
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    • 2001
  • Chemical mechanical planarization (CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There hale been serious problems in CMP in terms of repeatability and deflects in patterned wafers. Especial1y, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasives and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using CeO$_2$is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method fur developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

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하이브리드 방식 (CNC+Laser)을 이용한 폴리머용접공정 (Hybrid (CNC+Laser) Process for Polymer Welding)

  • 유종기;이춘우;최해운
    • Journal of Welding and Joining
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    • 제28권3호
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    • pp.42-48
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    • 2010
  • Polycarbonate (PC) and Acrylonitrile Butadiene Styrene (ABS) were welded by a combination of a diode laser and a CNC machining center. Laser beam delivered through the transparent PC and was absorbed in an opaque ABS. Polymers were melted and joined by absorbed and conducted heat. Experiments were carried out by varying working distance from 44mm to 50mm for the focus spot diameter control, laser input power from 10W to 25W, and scanning speed from 100 to 400mm/min. The weld bead and cross-section were analyzed for weld quality, and tensile results were presented through the joint force measurement. With focus distance at 48mm, laser power with 20W, and welding speed at 300mm/min, experimental results showed the best welding quality which bead size was measured to be 3.75mm. The shear strength at the given condition was $22.8N/mm^2$. Considering tensile strength of ABS is $43N/mm^2$, shear strength was sufficient to hold two materials. A single process was possible in a CNC machining system, surface processing, hole machining and welding. As a result, the process cycle time was reduced to 25%. Compared to a typical process, specimens were fabricated in a single process, with high precision.

Optimum design of steel floor system: effect of floor division number, deck thickness and castellated beams

  • Kaveh, A.;Ghafari, M.H.
    • Structural Engineering and Mechanics
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    • 제59권5호
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    • pp.933-950
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    • 2016
  • Decks, interior beams, edge beams and girders are the parts of a steel floor system. If the deck is optimized without considering beam optimization, finding best result is simple. However, a deck with higher cost may increase the composite action of the beams and decrease the beam cost reducing the total cost. Also different number of floor divisions can improve the total floor cost. Increasing beam capacity by using castellated beams is other efficient method to save the costs. In this study, floor optimization is performed and these three issues are discussed. Floor division number and deck sections are some of the variables. Also for each beam, profile section of the beam, beam cutting depth, cutting angle, spacing between holes and number of filled holes at the ends of castellated beams are other variables. Constraints include the application of stress, stability, deflection and vibration limitations according to the load and resistance factor (LRFD) design. Objective function is the total cost of the floor consisting of the steel profile cost, cutting and welding cost, concrete cost, steel deck cost, shear stud cost and construction costs. Optimization is performed by enhanced colliding body optimization (ECBO), Results show that using castellated beams, selecting a deck with higher price and considering different number of floor divisions can decrease the total cost of the floor.

20피트급 파워보트의 구조강도 평가 및 최적화 (Structural Strength Assessment and Optimization for 20 Feet Class Power Boat)

  • 염재선;유재훈
    • 대한조선학회논문집
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    • 제53권2호
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    • pp.108-114
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    • 2016
  • Recently, there has been a growing interest in marine leisure sports and high speed power boat for fishing. The prototype of 20 feet class power boat was developed and authors are joined in this government-led project. The research was performed to evaluate the optimal structure and design of the structural strength necessary to ensure the structural safety of the power boat. A new material ROCICORE fiber added to the mat and roving was adopted for high-power tenacity. ANSYS Workbench has been used to make the structural model, evaluate the strength and optimize the structural design. The response of the structure to quasi-static slamming loads according to the rules and regulations of ISO 12215-5, Lloyd’s Register of Shipping and Korean Register has been implemented and studied. An optimization study for the structural response is carried out by changing the plate thickness and section modulus of stiffeners. The power boat structure derived fuel efficiency is optimized by performing the best possible structural design to minimize the hull weight.

Experimental study on concrete-encased composite columns with separate steel sections

  • Xiao, Congzhen;Deng, Fei;Chen, Tao;Zhao, Zuozhou
    • Steel and Composite Structures
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    • 제23권4호
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    • pp.483-491
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    • 2017
  • This paper presents an experimental study on the behavior of concrete-encased composite columns with multiseparate steel sections subjected to axial and eccentric loads. Six 1/4-scaled concrete-encased composite columns were tested under static loads. The specimens were identical in geometric dimensions and configurations, and the parameter of this experiment was the eccentricity ratio of the applied load. Each two of the specimens were loaded with 0, 10%, and 15% eccentricity ratios. The capacity, deformation pattern, and failure mode of the specimens were carefully examined. Test results indicate that full composite action between the concrete and the steel sections can be realized even though the steel sections do not connect with one another. The concrete-encased composite columns can develop stable behavior and sufficient deformation capacity by providing enough transverse reinforcing bars. Capacities of the specimens were evaluated based on both the Plain Section Assumption (PSA) method and the superimposition method. Results show that U.S. and Chinese codes can be accurate and safe in terms of bending capacities. Test results also indicate that the ACI 318 and Mirza methods give the best predictions on the flexural stiffness of this kind of composite columns.

이세이 미야케 패션의 컬래버레이션과 예술화 특성 (Characteristics of collaboration and artification in the fashion of Issey Miyake)

  • 오미연;이연희
    • 복식문화연구
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    • 제30권2호
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    • pp.173-188
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    • 2022
  • The purpose of this study is to analyze the collaboration and artification of the Issey Miyake fashion brand and to suggest the best course of artification that can secure the brand's value. The research methods are as follows: i) identifying the companies' strategy and flow through collaboration concepts and examples from Issey Miyake; ii) selecting Issey Miyake fashion brands and carrying out a literature review through websites, articles, and books; and iii) examining prior studies on the relationship between fashion and art. Results are as follows. The exhibition is divided into spaces for brand intangible assets, artistic collaboration with partners, art co-creation, and the aesthetics and tradition of the brand. Using exhibitions to share the artistic work of collaboration partners is expected to positively affect the brand's likability. The exhibit shares art collaborations in display cases for clothes and photographs. Artists and brands appear as an extension of the creative space and convergence design area. The artist's improvisation forms the creative space that communicates with the audience, and the convergence design area is expanded through the unifying organic connection between the various media in the fashion brand. The photographers and brands section displays the nature images of Pleats Please, as well as human and prism garment images. In these images, the viewer can perceive a story in the interplay between the human body and nature.

Investigation of expanding-folding absorbers with functionally graded thickness under axial loading and optimization of crushing parameters

  • Chunwei, Zhang;Limeng, Zhu;Farayi, Musharavati;Afrasyab, Khan;Tamer A., Sebaey
    • Steel and Composite Structures
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    • 제45권6호
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    • pp.775-796
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    • 2022
  • In this study, a new type of energy absorbers with a functionally graded thickness is investigated, these type of absorbers absorb energy through expanding-folding processes. The expanding-folding absorbers are composed of two sections: a thin-walled aluminum matrix and a thin-walled steel mandrel. Previous studies have shown higher efficiency of the mentioned absorbers compared to the conventional ones. In this study, the effect of thickness which has been functionally-graded on the aluminum matrix (in which expansion occurs) was investigated. To this end, initial functions were considered for the matrix thickness, which was ascending/descending along the axis. The study was done experimentally and numerically. Comparing the experimental data with the numerical results showed high consistency between the numerical and experimental results. In the final section of this study, the best energy absorber functionally graded thickness was introduced by optimization using a third-order genetic algorithm. The optimization results showed that by choosing a minimum thickness of 1.6 mm and the exponential coefficient of 3.25, the most optimal condition can be obtained for descending thickness absorbers.

Gamma and neutron shielding properties of B4C particle reinforced Inconel 718 composites

  • Gokmen, Ugur
    • Nuclear Engineering and Technology
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    • 제54권3호
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    • pp.1049-1061
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    • 2022
  • Neutron and gamma-ray shielding properties of Inconel 718 reinforced B4C (0-25 wt%) were investigated using PSD software. Mean free path (MFP), linear and mass attenuation coefficients (LAC,MAC), tenth-value and half-value layers (TVL,HVL), effective atomic number (Zeff), exposure buildup factors (EBF), and fast neutron removal cross-sections (FNRC) values were calculated for 0.015-15 MeV. It was found that MAC and LAC increased with the decrease in the content of B4C compound by weight in Inconel 718. The EBFs were computed using G-P fitting method for 0.015-15 MeV up to the penetration depth of 40 mfp. HVL, TVL, and FNRC values were found to range between 0.018 cm and 3.6 cm, between 2.46 cm and 12.087 cm, and between 0.159 cm-1 and 0.194 cm-1, respectively. While Inconel 718 provides the maximum photon shielding property since it offered the highest values of MAC and Zeff and the lowest value of HVL, Inconel 718 with B4C(25 wt%) was observed to provide the best shielding material for neutron since it offered the highest FNRC value. The study is original in terms of several aspects; moreover, the results of the study may be used in nuclear technology, as well as other technologies including nano and space technologies.

Comparing automated and non-automated machine learning for autism spectrum disorders classification using facial images

  • Elshoky, Basma Ramdan Gamal;Younis, Eman M.G.;Ali, Abdelmgeid Amin;Ibrahim, Osman Ali Sadek
    • ETRI Journal
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    • 제44권4호
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    • pp.613-623
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    • 2022
  • Autism spectrum disorder (ASD) is a developmental disorder associated with cognitive and neurobehavioral disorders. It affects the person's behavior and performance. Autism affects verbal and non-verbal communication in social interactions. Early screening and diagnosis of ASD are essential and helpful for early educational planning and treatment, the provision of family support, and for providing appropriate medical support for the child on time. Thus, developing automated methods for diagnosing ASD is becoming an essential need. Herein, we investigate using various machine learning methods to build predictive models for diagnosing ASD in children using facial images. To achieve this, we used an autistic children dataset containing 2936 facial images of children with autism and typical children. In application, we used classical machine learning methods, such as support vector machine and random forest. In addition to using deep-learning methods, we used a state-of-the-art method, that is, automated machine learning (AutoML). We compared the results obtained from the existing techniques. Consequently, we obtained that AutoML achieved the highest performance of approximately 96% accuracy via the Hyperpot and tree-based pipeline optimization tool optimization. Furthermore, AutoML methods enabled us to easily find the best parameter settings without any human efforts for feature engineering.

Discovery of Raman-scattered He II Features at 6545 Å in Planetary Nebulae NGC 6886 & NGC 6881 from BOES Spectroscopy

  • Choi, Bo-Eun;Lee, Hee-Won
    • 천문학회보
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    • 제45권1호
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    • pp.50.4-51
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    • 2020
  • We report our discovery of Raman-scattered He II λ6545 feature in young planetary nebulae NGC 6886 and NGC 6881 which indicates the existence of atomic hydrogen components. Considering sharply increasing cross-section of hydrogen atom near the resonance, Raman-scattered He II features are a useful diagnostic tool to investigate the distribution and kinematics of H I region in planetary nebulae. The high-resolution spectroscopic observation was carried out using BOES installed on the 1.8 m telescope of BOAO. We estimate the column density of H I region and its expansion velocity using our grid-based Monte-Carlo radiative transfer code. We assume that the H I region is uniformly distributed in spherical shell geometry with an opening angle and expands with constant speed. Our best-fit model is shown with the column density NHI = 3 × 1020 cm-2 and expansion speed vexp = 25 km s-1 with the opening angle ~ 25° for NGC 6886, and NHI = 4 × 1020 cm-2 and vexp = 30 km s-1 with the opening angle ~ 35° for NGC 6881. We present brief discussions on the late-stage of evolution of stars with mass > 3 M⊙.

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