• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.2004-2006
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• 1996

A thermally driven polysilicon micro actuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS (tetracthylorthosilicate) as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE (vapor phase etching) process was also used as an effective release method for the elimination of sacrificial TEOS layer. The thickneas of polysilicon is $2{\mu}m$ and the lengths of active and passive polysilicon cantilevers are $500{\mu}m$ and $260{\mu}m$, respectively. The actuation is incurred by die thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon micro actuator was experimentally conformed as large as $21{\mu}m$ at the input voltage level of 10V and 50Hz square wave. The actuating characteristics are investigated by simulating the phenomena of heat transfer and thermal expansion in the polysilicon layer. The displacement of actuator is analyzed to be proportional to the square of input voltage. These micro actuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as micro relay, which requires large displacement or contact force but relatively slow response.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.1
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• pp.39-46
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• 2013

Smart material such as SMA (Shape Memory Alloy) has been studied in various ways because it can perform continuous, flexible, and complex actuation in simple structure. Smart soft composite (SSC) was developed to achieve large deformation of smart material. In this paper, a shell actuator using woven type SSC was developed to enhance stiffness of the structure while keeping its deformation capacity. The fabricated actuator consisted of a flexible polymer and woven structure which contains SMA wires and glass fibers. The actuator showed various actuation motions by controlling a pattern of applied electricity because the SMA wires are embedded in the structure as fibers. To verify the actuation ability, we measured its maximum end-edge bending angle, twisting angle, and actuating force, which were $103^{\circ}$, $10^{\circ}$, and 0.15 N, respectively.

• Smart Structures and Systems
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• v.15 no.6
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• pp.1601-1623
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• 2015

Electroactive polymers have attracted considerable attention in recent years due to their sensing and actuating properties which make them a material of choice for a wide range of applications including sensors, biomimetic robots, and biomedical micro devices. This paper presents an effective modeling strategy for nonlinear large deformation (small strains and moderate rotations) dynamic analysis of polymer actuators. Considering that the complicated electro-chemo-mechanical dynamics of these actuators is a drawback for their application in functional devices, establishing a mathematical model which can effectively predict the actuator's dynamic behavior can be of paramount importance. To effectively predict the actuator's dynamic behavior, a comprehensive mathematical model is proposed correlating the input voltage and the output bending displacement of polymer actuators. The proposed model, which is based on the rigid finite element (RFE) method, consists of two parts, namely electrical and mechanical models. The former is comprised of a ladder network of discrete resistive-capacitive components similar to the network used to model transmission lines, while the latter describes the actuator as a system of rigid links connected by spring-damping elements (sdes). Both electrical and mechanical components are validated through experimental results.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.294-298
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• 2008

The ionic polymer-metal composite actuators with selectively grown multiple electrodes were developed to mimic the swimming locomotion of a fish. The developed method is based on combining electroplating with the electroless chemical reduction using the patterned mask. The advantages of this fabrication method are that the initial compositing between the polymer and platinum particles can be assured by the chemical reduction method, and the thickness of each electrode can be controlled easily and rapidly by electroplating. By using the fabricated actuator with a multiple degree of freedom, the oscillatory wave of the flexible membrane actuator was generated and a twisting motion was also realized to verify the possibility of mimicking the fish-like locomotion. The frequency response function was analyzed to investigate the natural frequency and the damping factor by a mechanical shaker and direct electrical excitation through the swept-sine method. Present results show that this novel method can be a promising technique to easily pattern each of multiple electrodes and to implement the biomimetic motion of the polymer actuators with good mechanical bending performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.146-150
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• 1996

A thermal micro actualtor has been fabricated using surface micromachining techniques. It consists of doped ploysilicon as a moving part and TEOS(Tetra Ethyl Ortho Silicate) as a sacrificial layer. The polysilicon was annealed for the reduction of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE(vapor phase etching)process was also used as an effective release method for the elimination of sacrificaial layer. With noliquid involved during any of the steps for relasing, unlike other reported relase techniques, the HF VPE pocess has produced polysilicon microstructures with virtually no process-induced stiction problem. The actuation is incured by the thermal expasion due to current flow in active polysilicon cantilever, which motion is amplified bylever mechanism. The thickness of pllysilicon is 2 .mu. m and the length of active and passive polysilicon cantilever are 500 .mu. m, respectively. The moving distance of polysilicon actuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10 V and 50Hz square wave. These micro actuator technology can be utilized for the fabrication of MEMS (microlectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response.

• Korean Journal of Optics and Photonics
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• v.29 no.1
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• pp.28-31
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• 2018

In this paper, we have proposed and demonstrated a variable optical attenuator (VOA) incorporating a dual-fiber collimator and a bimetallic actuator. The optical attenuation between input and output single-mode fibers was tuned by tilting the angle of a reflection mirror fixed on the bimetal. The bimetal was heated or cooled by a thermoelectric cooler (TEC) and then moved the reflection mirror, due to bending and unreeling. The desired optical attenuation can be obtained through adjusting the electrical input into the TEC. The fabricated device showed 0.5 dB of insertion loss, 0.2 dB of maximum polarization-dependent loss, and 40 dB of dynamic range. The response time was measured to be about 5 s.

• Smart Structures and Systems
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• v.24 no.1
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• pp.27-35
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• 2019

This paper proposes a quantitative criterion for optimization of actuator placement for the Prestress-Accumulation Release (PAR) strategy of mitigation of vibrations. The PAR strategy is a recently developed semi-active control approach that relies on controlled redistribution of vibration energy into high-order modes, which are high-frequency and thus effectively dissipated by means of the natural mechanisms of material damping. The energy transfer is achieved by a controlled temporary removal of selected structural constraints. This paper considers a short-time decoupling of rotational degrees of freedom in a frame node so that the bending moments temporarily cease to be transferred between the involved beams. We propose and test a quantitative criterion for placement of such actuators. The criterion is based on local modal strain energy that can be released into high-order modes. The numerical time complexity is linear with respect to the number of actuators and potential placements, which facilitates quick analysis in case of large structures.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.73-76
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• 2007

Electro-Active paper (EAPap) is a new smart material that has a potential to be used in biomimetic actuator and sensor. It is made by cellulose that is abundant material in nature. EAPap is fascinating with its biodegradability, lightweight, large displacement, high mechanical strength and low actuation voltage. Actuating mechanism of EAPap is known to be the combined effects of ion migration and piezoelectricity. However, the electromechanical actuation mechanisms are not yet to be established. This paper presents the modeling of the actuation behavior of water infused cellulose samples and their composite dielectric constants calculated by Maxwell-Wagner theory. Electro-mechanical forces were calculated using Maxwell stress tensor method. Bending deflection was evaluated from simple beam model and compared with experimental observation, which result good correlation with each other.

• Journal of KSNVE
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• v.7 no.1
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• pp.161-168
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• 1997

The present paper describes the vibration control experiment of composite plates with bonded piezoelectric sensor and actuator. The system is modeled as two degree-of-freedom system using modal coordinates and the system parameters are obtained from vibration tests. Kalman filter is adopted for extracting modal coordinates from sensor signal, and control algorithms applied to the system are Linear Quadratic Gaussian(LQG) control, Bang-Bang Control (BBC), Negative Velocity Feedback(NVF), Proportional Derivative Control(PDC). From observation of the spillover and control perfomance, it is concluded that a higher order control algorithm such as LQG rather than BBG, NVF, PDC is suitable for efficient simultaneous control of both bending and twisting modes of composite plates.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.163-168
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• 2006

In a micro-unit of electronic-machine, vibration can be excited by a small impact, and this vibration acts as a fatigue load. To measure the vibration effect on the micro unit, a micro dynamic tester is needed to test a micro specimen. In this paper, it has confirmed a movement of the PZT(piezo actuator) to use a sine signal. And, it has confirmed a fracture of specimens by using a tension-tension input signal in PZT. A metal-material property in the micro scale has been tested to compare with the macro scale. A fatigue test has been conducted by using PZT actuator to give a bending-tension effect.