• 한국의학물리학회지:의학물리
• /
• 제28권3호
• /
• pp.129-133
• /
• 2017

The machine log files recorded by a scanning control unit in proton beam therapy system have been studied to be used as a quality assurance method of scanning beam deliveries. The accuracy of the data in the log files have been evaluated with a standard calibration beam scan pattern. The proton beam scan pattern has been delivered on a gafchromic film located at the isocenter plane of the proton beam treatment nozzle and found to agree within ${\pm}1.0mm$. The machine data accumulated for the scanning beam proton therapy of five different cases have been analyzed using a statistical method to estimate any systematic error in the data. The high-precision scanning beam log files in line scanning proton therapy system have been validated to be used for off-line scanning beam monitoring and thus as a patient-specific quality assurance method. The use of the machine log files for patient-specific quality assurance would simplify the quality assurance procedure with accurate scanning beam data.

• 한국생산제조학회지
• /
• 제21권1호
• /
• pp.58-64
• /
• 2012

Instead of the surface pattern arranged repeatedly in two axial direction on a plane, we propose double patterns superposing two one-axial linear patterns as a reference target for surface encoding. A upper layer of the superposed pattern is the transparent glass with grooves cut in it at a fixed pitch. The position is sensed by detecting a shift of beam due to difference of a refractive index. And a lower layer is the aluminum with color-coated grooves. The amount of beam reflected on the layer varies according to its targeting position and is detected for encoding. For the above reference pattern, we can detect two-axial positions using only the single beam. Furthermore, the pattern size can be expanded with a size of the detector kept constant, meaning that the measured range can be expanded easily. In this paper, we review the existing optical encoding methods for grid pattern, and discuss the hardware implementation of the suggested surface encoding method.

• 한국산업융합학회 논문집
• /
• 제4권2호
• /
• pp.149-155
• /
• 2001

The use of primitive cell volume and zero order Laue (ZOLZ) pattern is proposed to identify phase in a complex microstructure. Single convergent beam electron pattern containing higher order Laue zone ring from a nanosized region is sufficient to calculate the primitive cell volume of the phase, while ZOLZ pattern is used to determine the zone axis of the crystal. A computer program is used to screen out possible phases from the value of measured cell volume from convergent beam electron diffraction (CBED) pattern. Indexing of ZOLZ pattern follows in the program to find the zone axis of the identification from a single CBED pattern. An example of the analysis is given from the rapidly solidified $Al-Al_3Ti$ system.

• 반도체디스플레이기술학회지
• /
• 제8권2호
• /
• pp.1-10
• /
• 2009

This study describes the electron beam lithography pattern fabrication using the proximity effect correction. When electron beam exposes into electron beam resist, the beam tends to spread inside the substance (forward scattering). And the electron beam reflected from substrate spreads again (back scattering). These two effects influence to distribution of the energy and give rise to a proximity effect while a small pattern is generated. In this article, an electron energy distribution is modeled using Gaussian shaped beam distribution and those parameters in the model are computed to solidify the model. The proximity effect is analyzed through simulations and appropriate corrections to reducing the proximity effect are suggested. It is found that the proximate effect can be reduced by adopting schemes of dose adjustment, and the optimal dose is determined through simulations. The proposed corrected proximity effect correction is proved by experiments.

• 한국광학회지
• /
• 제20권6호
• /
• pp.361-365
• /
• 2009

본 연구에서는 패턴 빔을 이용하여 표면이 거친 물체의 단차를 비접촉 방식으로 측정 하는 방법에 대하여 연구하였다. 본 연구에 사용된 방법은 장치가 매우 간단하고 스페클 노이지가 영상에 미치는 영향이 작아 재현성 면에서 매우 우수하였다. 특히 기준면에 문양이 없는 경우에는 기존의 자동 초점 측정 장치로는 측정하기 어려우나, 본 연구 방법에 의해 측정이 가능함을 보였다. 그리고 측정 시간이 매우 짧고 재현성이 좋으며 장치가 간단하여 산업 현장에서 응용하기 적절한 방법이다.

• 한국해양공학회지
• /
• 제7권1호
• /
• pp.107-113
• /
• 1993

Sidescan sonar uses the fan type beam which has horizontally narrow and vertically somewhat wide beam pattern. To construct such a beam we will use an array of transducers. In case of using single transducer it must have a high frequency to have the fan type beam, but in case of using an array it must have to be high frequency. We are planning to use 30 kHz transducers for our sidescan sonar under development. This paper shows ways of designing a narrow beam for the sidescan sonar system by illustrating various shapes of the beam patterns.

• 전자공학회논문지
• /
• 제51권6호
• /
• pp.228-236
• /
• 2014

견인 선배열 소나는 해양이라는 유체에서 작동하기 때문에 그 형상이 왜곡되고, 특히 견인 함정이 회전하는 경우 형상이 심하게 변형된다. 이러한 경우 선배열이 갖는 빔 패턴 형성은 제한되며, 이로 인한 신호 대 잡음비 등의 성능 저하를 야기한다. 본 논문에서는 2단 최소자승법에 기초한 개선된 2단 최소자승법 알고리즘을 제안하였으며, 해양에서 운용되는 선배열의 형상을 변침각도로 모델링하여 알고리즘을 적용하였다. 변침각도와 주엽의 위치를 변경하면서, 알고리즘별 조향 빔의 신호 대 잡음비를 분석하였다. 그 결과 제안한 알고리즘이 다른 알고리즘보다 2dB 정도 성능이 향상되었으며, 비교적 일정한 빔 패턴을 형성하였다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
• /
• pp.243-243
• /
• 2004

상용화된 주사식 전자현미경(SEM)을 기본 구조로 하는 가공 시스템을 구축하여 전자빔(Electron beam)을 이용한 초미세 패턴(Nano pattern) 등 형상의 직접 성형, 혹은 직접 묘화(Direct writing) 가공을 수행하기 위해서는 크게 분류하여 연속적으로 스캐닝되는 전자빔을 요구에 따라 적절하게 극히 짧은 시간 내에 개폐하는 빔 블랭커(Beam blanker)와 효율적으로 초미세 패턴 등의 형상을 설계ㆍ가공하기 위한 전용 S/W의 두 가지 요소가 반드시 적용되어야 한다.(중략)

• 한국레이저가공학회지
• /
• 제1권1호
• /
• pp.24-29
• /
• 1998

A new wide laser beam optical system for the laser materials processing has been developed with a polygonal mirror. It consists of polygonal mirror and cooling part that prevents the surface of rotating polygonal mirror from damage by heat. The polygonal minors have been designed and made as 24 and 30 facets in pyramid type. This system provides a uniform linear laser heat source with the surface scanning width from 15 to 50mm according to the scanning height To examine the wide laser beam, He-Ne laser is used. Also, Acryl is used to confirm the laser beam pattern by bum-pattern print To analyze the energy distribution of the wide laser ben empirical values and theoretical values are compared and discussed. To improve the efficiency of the wide laser beam optical system, methods are suggested by the optical theories. For larger area processing like turbine blade, drawing blade, cold roller and guide plate, optimal overlapping locations have been calculated and analyzed by geometric and optical theories.

• Journal of the Optical Society of Korea
• /
• 제13권1호
• /
• pp.75-79
• /
• 2009

A four beam interference optical system for laser micro structuring using a pulse laser was demonstrated. The four beam interference optical system using a pulse laser(picosecond laser) can fabricate micro structure on mold material(NAK80) directly. Micro structure on the polymer can be reproduced economically by injection molding of the micro structure on the mold material. The four beam interference optical system was composed by the DOE(Diffractive Optical Element) and two lenses. The laser intensity distribution of four beam interference was explained by an interference optics point of view and by the image optics point of view. We revealed that both views showed the same result. The laser power distribution of a $1{\mu}m$ peak pattern was made by the four beam interference optical system and measured by the objective lens and CCD. A $1{\mu}m$ pitch dot pattern on the mold material was fabricated and measured by SEM(Scanning Electron Microscopy).