• Title/Summary/Keyword: beam growth

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Copper Film Growth by Chemical Vapor Deposition: Influence of the Seeding Layer (ICB seeding에 의한 CVD Cu 박막의 증착 및 특성 분석)

  • Yoon, Kyoung-Ryul;Choi, Doo-Jin;Kim, Seok;Kim, Ki-Hwan;Koh, Seok-Keun
    • Korean Journal of Materials Research
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    • v.6 no.7
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    • pp.723-732
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    • 1996
  • Cu films were deposited by chemical wapor deposition on the as-received substrates (TiN/Si) and three kinds of Cu-seeded substrates (Cu/TiN/Si) which had seeding layer in the thick ness of 5 ${\AA}$ and 130 ${\AA}$ coated by ICB(Ionized Cluster Beam) method. The effect of Cu seeding layers on the growth rate, crystallinity, grain size uniformity and film adhesion strength of final CVD-Cu films was investigated by scanning eletron microscopy(SEM), X-ray diffractometry and scratch test. The growth rate was found to incresase somewhat in the case of ICB-seeding. The XRD patterns of the Cu films on the as-received substrate and ICB Cu-seeded substrates exhibited the diffraction peaks corresponding to FCC phase, but the peak intensity ratio($I_{111}/I_{200}$) of Cu films deposited on the ICB Cu-seeded substrates increased compared with that of Cu films on the as-received substrate. The resistivity of final Cu film on 40 ${\AA}$ seeded substrate was observed as the lowest value, 2.42 $\mu\Omega\cdot$cm compared with other Cu films. In adhesion test, as the seeding thickness increased from zero to 130 ${\AA}$, the adhesion strength increased from 21N to 27N.

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A Cytotoxicity of Carrier Oil and Essential Oils on Cells by Using of Aromatherapy (향기요법에 사용하는 캐리어 오일과 에션셜 오일의 세포에 대한 독성)

  • Yu, Byong-Soo;Kim, Sha-Sha;Yun, Young-Han;Kim, Ki-Young
    • Korean Journal of Human Ecology
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    • v.17 no.5
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    • pp.1027-1035
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    • 2008
  • Essentail oils and carrier oils are generally used for Aromatherapy. Therefore the toxicity, possibilities of irritations and sensitive reactions and injury of essential oils must be considered for clients and therapists. So that, in this studies a toxicity of jojoba and 4 species essential oils (fennel, mandarine, tea tree and cedarwood) were investigated by the measurement of MTT-assay and sirius red staining. Liver, kidney and brain tell were chosen for the cell viability assay and observation of morphological change. In the result, no cytotoxicity was observed on live., kidney and brain cell at concentration of 0.01 $\mu\el/m\el$ jojoba oil. And lysis and nucleus breaking were not observed at same concentration of jojoba oil on live., kidney and brain cell. fennel oil was showed 50% of cell viability and inhibited cell growth on liver, kidney and brain cell at relatively high concentration compared with the other oils. 50% of liver, kidney and brain cell viability and delayed cell growth of tea tree and mandarine oil were revealed at lower concentration than fennel oil. In cedarwood oil, 50% of liver cell viability at concentration of 0.00067 $\mu\el/m\el$ was showed, but cell viability and cell growth of kidney and beam cell were effected at the lowest concentration compared with other oils. So that, jojoba oil as using of carrier oil may be not harmful. And 3 essential oils from the fennel, tea tree and mamdarine may have very low toxicity, but cedarwood may be used carefully for inhalation. And over dosage of concentrated cedarwood oil should be not directly touched and exposured, and absolute essential oils must be diluted with carrier oils for topical and systematic massage.

Properties of ZnO nanostructures by metal deposited on Si substrates (Metal 증착한 Si 기판 상의 ZnO 나노 구조 특성)

  • Jang, Hyeon-Gyeong;Jung, Mi-Na;Park, Seung-Hwan;Shin, Dae-Hyeon;Yang, Min;Yao, Takafumi;Chang, Ji-Ho
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • v.9 no.1
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    • pp.1034-1037
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    • 2005
  • The variation of shapes and related properties of ZnO nanostructures grown on the metal pattern and Si substrate have been investigated. Ni, Cr metal patterns were formed on Si (111) substrates by e-beam evaporation, and ZnO nanostructures were fabricated on it by using thermal evaporation of Zn powder in air. Growth temperature was controlled from 500 $^{\circ}$C to 700 $^{\circ}$C. When the growth temperature was relatively low, no considerable effect was found. However, UV emission intensity decreased, and Green-emission intensity, which is regarded as originated from the defect state in the ZnO nanostructure, increased as growth temperature increase. Also, the variation of nanostructure shape at high temperature (700 $^{\circ}$C) is understood in terms of the enhanced incorporation of metal vapor during the nanostructure formation.

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A Study on THz Generation and Detection Characteristics of InGaAs Semiconductor Epilayers (InGaAs 반도체 박막의 테라헤르쯔(THz) 발생 및 검출 특성 연구)

  • Park, D.W.;Kim, J.S.;Noh, S.K.;Ji, Young-Bin;Jeon, T.I.
    • Journal of the Korean Vacuum Society
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    • v.21 no.5
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    • pp.264-272
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    • 2012
  • In this paper, we report THz generation and detection characteristics investigated by InGaAs semiconductor epilayers, as results of a basic study obtained from the InGaAs-based THz transmitter/receiver (Tx/Rx). High-temperature and low-temperature (LT) grown InGaAs epilayers were prepared by the molecular beam epitaxy technique for the characterization of THz generation and detection, respectively, and the surface emission based on the photo-Dember effect was tried for THz generation. THz wave was generated by irradiation of a Ti:Sapphire fs pulse laser (60 ps/83 MHz), and a LT-GaAs Rx was used for the THz detection. The frequency band shown in the spectral amplitudes Fourier-transformed from the measured current signals was ranging in 0.5~2 THz, and the signal currents were exponentially increased with the Tx beam power. The THz detection characteristics of LT-InGaAs were investigated by using an Rx with dipole (5/20 ${\mu}m$) antenna, and the cutoff frequency was ~2 THz.

Part I Advantages re Applications of Slab type YAG Laser PartII R&D status of All Solid-State Laser in JAPAN

  • Iehisa, Nobuaki
    • Proceedings of the Korean Society of Laser Processing Conference
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    • 1998.11a
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    • pp.0-0
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    • 1998
  • -Part I- As market needs become more various, the production of smaller quantities of a wider variety of products becomes increasingly important. In addition, in order to meet demands for more efficient production, long-term unmanned factory operation is prevailing at a remarkable pace. Within this context, laser machines are gaining increasing popularity for use in applications such as cutting and welding metallic and ceramic materials. FANUC supplies four models of $CO_2$ laser oscillators with laser power ranging from 1.5㎾ to 6㎾ on an OEM basis to machine tool builders. However, FANUC has been requested to produce laser oscillators that allow more compact and lower-cost laser machines to be built. To meet such demands, FANUC has developed six models of Slab type YAG laser oscillators with output power ranging from 150W to 2㎾. These oscillators are designed mainly fur cutting and welding sheet metals. The oscillator has an exceptionally superior laser beam quality compared to conventional YAG laser oscillators, thus providing significantly improved machining capability. In addition, the laser beam of the oscillator can be efficiently transmitted through quartz optical fibers, enabling laser machines to be simplified and made more compact. This paper introduces the features of FANUC’s developed Slab type YAG laser oscillators and their applications. - Part II - All-solid-state lasers employing laser diodes (LD) as a source of pumping solid-state laser feature high efficiency, compactness, and high reliability. Thus, they are expected to provide a new generation of processing tools in various fields, especially in automobile and aircraft industries where great hopes are being placed on laser welding technology for steel plates and aluminum materials for which a significant growth in demand is expected. Also, in power plants, it is hoped that reliability and safety will be improved by using the laser welding technology. As in the above, the advent of high-power all-solid-state lasers may not only bring a great technological innovation to existing industry, but also create new industry. This is the background for this project, which has set its sights on the development of high-power, all-solid-state lasers with an average output of over 10㎾, an oscillation efficiency of over 20%, and a laser head volume of below 0.05㎥. FANUC Ltd. is responsible for the research and development of slab type lasers, and TOSHIBA Corp. far rod type lasers. By pumping slab type Nd: YAG crystal and by using quasi-continuous wave (QCW) type LD stacks, FANUC has already obtained an average output power of 1.7㎾, an optical conversion efficiency of 42%, and an electro-optical conversion efficiency of 16%. These conversion efficiencies are the best results the world has ever seen in the field of high-power all-solid-state lasers. TOSHIBA Corp. has also obtained an output power of 1.2㎾, an optical conversion efficiency of 30%, and an electro-optical conversion efficiency of 12%, by pumping the rod type Nd: YAG crystal by continuous wave (CW) type LD stacks. The laser power achieved by TOSHIBA Corp. is also a new world record in the field of rod type all-solid-state lasers. This report provides details of the above results and some information on future development plans.

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Fe3O4/CoFe2O4 superlattices; MBE growth and magnetic properties

  • Quang, Van Nguyen;Shin, Yooleemi;Duong, Anh Tuan;Nguyen, Thi Minh Hai;Cho, Sunglae;Meny, Christian
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.242-242
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    • 2016
  • Magnetite, Fe3O4, is a ferrimagnet with a cubic inverse spinel structure and exhibits a metal-insulator, Verwey, transition at about 120 K.[1] It is predicted to possess as half-metallic nature, 100% spin polarization, and high Curie temperature (850 K). Cobalt ferrite is one of the most important members of the ferrite family, which is characterized by its high coercivity, moderate magnetization and very high magnetocrystalline anisotropy. It has been reported that the CoFe2O4/Fe3O4 bilayers represent an unusual exchange-coupled system whose properties are due to the nature of the oxide-oxide super-exchange interactions at the interface [2]. In order to evaluate the effect of interface interactions on magnetic and transport properties of ferrite and cobalt ferrite, the CoFe2O4/Fe3O4 superlattices on MgO (100) substrate have been fabricated by molecular beam epitaxy (MBE) with the wave lengths of 50, and $200{\AA}$, called $25{\AA}/25{\AA}$ and $100{\AA}/100{\AA}$, respectively. Streaky RHEED patterns in sample $25{\AA}/25{\AA}$ indicate a very smooth surface and interface between layers. HR-TEM image show the good crystalline of sample $25{\AA}/25{\AA}$. Interestingly, magnetization curves showed a strong antiferromagnetic order, which was formed at the interfaces.

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Study on the deposition Characteristics of Bi Thin Film (Bi 박막의 성막 특성에 관한 연구)

  • Yang, Dong-Bok;Park, Yong-Pil;Lee, Hee-Kab
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05d
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    • pp.61-64
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    • 2003
  • This paper presents Bi thin films have been fabricated by atomic layer-by-layer deposition and co-deposition at an IBS method. The growth rates of the films was set in the region from 0.17 to 0.27 nm/min. Mg(100) was used as a substrate. In order to appreciate stable existing region of Bi 2212 phase with temperature and ozone pressure, the substrate temperature was varied between 655 and $820^{\circ}C$ and the highly condensed ozone gas pressure$(PO_3)$ in vacuum chamber was varied between $2.0{\times}10^{-6}$ and $2.3{\times}10^{-5}$ Torr. Bi 2212 phase appeared in the temperature range of 750 and $795^{\circ}C$ and single phase of Bi 2201 existed in the lower region than $785^{\circ}C$. Whereas, $O_3$ dependance on structural formation was scarcely observed regardless of the pressure variation. And high quality of c-axis oriented Bi 2212 thin film with $T_c$(onset) of about 90 K and $T_c$(zero) of about 45 K is obtained. Only a small amount of CuO in some films was observed as impurity, and no impurity phase such as $CaCuO_2$ was observed in all of the obtained films.

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Multi-layered Coating Deposited on PEMFC (Proton Exchange Membrane Fuel Cell) Bipolar Plates (고분자전해질 연료전지용 바이폴라 플레이트의 다층 코팅의 증착)

  • Yun, Young-Hoon;Chung, Hoon-Taek;Cha, In-Su;Choi, Jeong-Sik;Kim, Dong-Mook;Jung, Jin-Ho
    • Journal of the Korean Ceramic Society
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    • v.45 no.8
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    • pp.472-476
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    • 2008
  • The surface region of commercial stainless steel 304 and 316 plates has been modified through deposition of the multi-layered coatings composed of titanium film ($0.1{\mu}m$) and gold film ($1-2{\mu}m$) by an electron beam evaporation method. XRD patterns of the stainless steel plates deposited with conductive metal films showed the peaks of the external gold film and the stainless steel substrate. Surface microstructural morphologies of the stainless steel bipolar plates modified with multi-layered coatings were observed by AFM and FE-SEM images. The stainless steel plates modified with $0.1{\mu}m$ titanium film and $1{\mu}m$ gold film showed microstructure of grains of under 100 nm diameter. The external surface of the stainless steel plates deposited with $0.1{\mu}m$ titanium film and $2{\mu}m$ gold film represented somewhat grain growth of Au grains in FE-SEM image. The electrical resistance and water contact angle of the stainless steel bipolar plates modified with multi-layered coatings were examined with the thickness of the gold film.

Synthesis of Graphene Using Thermal Chemical Vapor Deposition and Application as a Grid Membrane for Transmission Electron Microscope Observation (열화학증기증착법을 이용한 그래핀의 합성 및 투과전자현미경 관찰용 그리드 멤브레인으로의 응용)

  • Lee, Byeong-Joo;Jeong, Goo-Hwan
    • Korean Journal of Materials Research
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    • v.22 no.3
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    • pp.130-135
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    • 2012
  • We present a method of graphene synthesis with high thickness uniformity using the thermal chemical vapor deposition (TCVD) technique; we demonstrate its application to a grid supporting membrane using transmission electron microscope (TEM) observation, particularly for nanomaterials that have smaller dimensions than the pitch of commercial grid mesh. Graphene was synthesized on electron-beam-evaporated Ni catalytic thin films. Methane and hydrogen gases were used as carbon feedstock and dilution gas, respectively. The effects of synthesis temperature and flow rate of feedstock on graphene structures have been investigated. The most effective condition for large area growth synthesis and high thickness uniformity was found to be $1000^{\circ}C$ and 5 sccm of methane. Among the various applications of the synthesized graphenes, their use as a supporting membrane of a TEM grid has been demonstrated; such a grid is useful for high resolution TEM imaging of nanoscale materials because it preserves the same focal plane over the whole grid mesh. After the graphene synthesis, we were able successfully to transfer the graphenes from the Ni substrates to the TEM grid without a polymeric mediator, so that we were able to preserve the clean surface of the as-synthesized graphene. Then, a drop of carbon nanotube (CNT) suspension was deposited onto the graphene-covered TEM grid. Finally, we performed high resolution TEM observation and obtained clear image of the carbon nanotubes, which were deposited on the graphene supporting membrane.

Multi-Scale Heterogeneous Fracture Modeling of Asphalt Mixture Using Microfabric Distinct Element Approach

  • Kim Hyun-Wook;Buttler William G.
    • International Journal of Highway Engineering
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    • v.8 no.1 s.27
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    • pp.139-152
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    • 2006
  • Many experimental and numerical approaches have been developed to evaluate paving materials and to predict pavement response and distress. Micromechanical simulation modeling is a technology that can reduce the number of physical tests required in material formulation and design and that can provide more details, e.g., the internal stress and strain state, and energy evolution and dissipation in simulated specimens with realistic microstructural features. A clustered distinct element modeling (DEM) approach was implemented In the two-dimensional particle flow software package (PFC-2D) to study the complex behavior observed in asphalt mixture fracturing. The relationship between continuous and discontinuous material properties was defined based on the potential energy approach. The theoretical relationship was validated with the uniform axial compression and cantilever beam model using two-dimensional plane strain and plane stress models. A bilinear cohesive displacement-softening model was implemented as an intrinsic interface and applied for both homogeneous and heterogeneous fracture modeling in order to simulate behavior in the fracture process zone and to simulate crack propagation. A disk-shaped compact tension test (DC(T)) with heterogeneous microstructure was simulated and compared with the experimental fracture test results to study Mode I fracture. The realistic arbitrary crack propagation including crack deflection, microcracking, crack face sliding, crack branching, and crack tip blunting could be represented in the fracture models. This micromechanical modeling approach represents the early developmental stages towards a 'virtual asphalt laboratory,' where simulations of laboratory tests and eventually field response and distress predictions can be made to enhance our understanding of pavement distress mechanisms, such its thermal fracture, reflective cracking, and fatigue crack growth.

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