• 제목/요약/키워드: batch method

검색결과 782건 처리시간 0.027초

Batch 형태 LPCVD법에 의한 폴리실리콘의 인농도 및 Rs 특성에 관한 연구 (A Study on the Phosphorous Concentration and Rs Property of the Doped Polysilicon by LPCVD Method of Batch type)

  • 정양희;김명규
    • 한국전기전자재료학회논문지
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    • 제11권3호
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    • pp.195-202
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    • 1998
  • The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

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GAL promoter에 적합한 효모변이주 Y334를 이용한 재조합 단백질 생산 최적화 방법 개발 (The Optimization of Recombinant Protein Production using S. cerevisiae Mutant Y334 Suitable for GAL Promoter)

  • 강환구;전희진;이문원
    • KSBB Journal
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    • 제15권2호
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    • pp.181-187
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    • 2000
  • 본 연구에서 갈락토즈를 거의 사용하지 않고 glucose repression 정도가 줄어든 변이주를 이용하여 fed-batch를 통한 발현최적화를 수행하였다. 두 균주에서의 GAL promoter에 의한 외래단백질 생산시 glucose repression 정도에 대해 조사하였는데 대조구 Y2805는 글루코즈가 다 소비된 후 2∼3시간 지난 후 발현이 시작되나 변이주 Y334는 약 0.5 g/L 글루코즈 농도에서 25%정도의 발현이 이루어짐에 따라 변이주 Y334는 GAL promoter에 미치는 glucose repression 정도가 매우 약한 장점을 확인하였다. 배양 중 재조합 미생물인 두균주 변이주 Y334와 대조구 효모 Y2805의 plasmid stability에 대해 안정한 균주임을 알 수 있었으며 대조구 Y2805의 경우도 plasmid stability는 90%로 유지됨을 알 수 있었다. GAL promoter에 의한 외래 단백질 생산시 글루코즈와 갈락토즈, 에탄올의 소비속도를 조사하였는데, 글루코즈와 에탄올의 소비속도는 거의 비슷하였으나 갈락토즈 소비속도는 Y2805는 0.1232 g/L/hr/O.D.이고 변이주 Y334는 0.0131 g/L/hr/O.D. 이다. 또한 mutant Y334와 대조구 효모 Y2805의 Fed-batch 시의 올바른 feeding 방법을 구하기위한 실험을 수행하여 각 균주의 Fed-batch 실험에서의 최적 발현 방법을 획득하였다.

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GaAs Scrap으로부터 熱分解法에 의한 갈륨 回收 (Recovery of Gallium from GaAs Scraps by Thermal Decomposition)

  • 최영윤;남철우;유연태;김완영
    • 자원리싸이클링
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    • 제14권2호
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    • pp.28-32
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    • 2005
  • 화합물반도체 제조 공정에서 발생하는 GaAs scrap으로부터 열분해법을 이용하여 갈륨을 회수하기 위한 기초 실험으로 200 g/batch 규모의 진공 열분해 실험을 수행하였고, 이 결과를 이용하여 30 kg/batch 용량의 Packed Tower가 부착된 열분해 장치를 제작하였다. 기초실험 결과 GaAs의 열분해속도는 온도가 높아짐에 따라 커지지만, 특히 1000$^{\circ}C 이상에서는 갈륨의 증기압 또는 증가하므로 갈륨의 회수율이 낮아지는 것을 알 수 있었다. 노 내 압력이 2~2.5${\times}10^{-2} mmHg일 때 1000~1050$^{\circ}C에서 가장 좋은 결과를 보였고, 이때 89% 정도의 갈륨 회수율을 나타내었다. GaAs의 열분해 시 비소의 분압은 온도가 높아짐에 따라 증가하고 융점인 1237$^{\circ}C를 전환점으로 온도는 낮아져도 증기압은 높은 이력현상(Hysteresis)을 보이는데, 이와 같은 특성을 이용하여 산업 생산에 적용한 열분해장치 제작에서는 반응기 위에 충진탑을 설치하였다. 그 결과, 열분해 반응기 내의 온도가 융점 이상의 고온에서도 99% 정도의 높은 회수율을 얻을 수 있었다.

이단계 그룹검사를 갖는 대기행렬모형의 분석 (Analysis of a Queueing Model with a Two-stage Group-testing Policy)

  • 양원석
    • 산업경영시스템학회지
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    • 제45권4호
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    • pp.53-60
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    • 2022
  • In a group-testing method, instead of testing a sample, for example, blood individually, a batch of samples are pooled and tested simultaneously. If the pooled test is positive (or defective), each sample is tested individually. However, if negative (or good), the test is terminated at one pooled test because all samples in the batch are negative. This paper considers a queueing system with a two-stage group-testing policy. Samples arrive at the system according to a Poisson process. The system has a single server which starts a two-stage group test in a batch whenever the number of samples in the system reaches exactly a predetermined size. In the first stage, samples are pooled and tested simultaneously. If the pooled test is negative, the test is terminated. However, if positive, the samples are divided into two equally sized subgroups and each subgroup is applied to a group test in the second stage, respectively. The server performs pooled tests and individual tests sequentially. The testing time of a sample and a batch follow general distributions, respectively. In this paper, we derive the steady-state probability generating function of the system size at an arbitrary time, applying a bulk queuing model. In addition, we present queuing performance metrics such as the offered load, output rate, allowable input rate, and mean waiting time. In numerical examples with various prevalence rates, we show that the second-stage group-testing system can be more efficient than a one-stage group-testing system or an individual-testing system in terms of the allowable input rates and the waiting time. The two-stage group-testing system considered in this paper is very simple, so it is expected to be applicable in the field of COVID-19.

Nanosulfated Silica as a Potential Heterogeneous Catalyst for the Synthesis of Nitrobenzene

  • Khairul Amri;Aan Sabilladin;Remi Ayu Pratika;Ari Sudarmanto;Hilda Ismail;Budhijanto;Mega Fia Lestari;Won-Chun Oh;Karna Wijaya
    • 한국재료학회지
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    • 제33권7호
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    • pp.265-272
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    • 2023
  • In this study, the synthesis of nitrobenzene was carried out using sulfated silica catalyst. The study delved into H2SO4/SiO2 as a solid acid catalyst and the effect of its weight variation, as well as the use of a microwave batch reactor in the synthesis of nitrobenzene. SiO2 was prepared using the sol-gel method from TEOS precursor. The formed gel was then refluxed with methanol and calcined at a temperature of 600 ℃. SiO2 with a 200-mesh size was impregnated with 98 % H2SO4 by mixing for 1 h. The resulting 33 % (w/w) H2SO4/SiO2 catalyst was separated by centrifugation, dried, and calcined at 600 ℃. The catalyst was then used as a solid acid catalyst in the synthesis of nitrobenzene. The weights of catalyst used were 0.5; 1; and 1.5 grams. The synthesis of nitrobenzene was carried out with a 1:3 ratio of benzene to nitric acid in a microwave batch reactor at 60 ℃ for 5 h. The resulting nitrobenzene liquid was analyzed using GC-MS to determine the selectivity of the catalyst. Likewise, the use of a microwave batch reactor was found to be appropriate and successful for the synthesis of nitrobenzene. The thermal energy produced by the microwave batch reactor was efficient enough to be used for the nitration reaction. Reactivity and selectivity tests demonstrated that 1 g of H2SO4/SiO2 could generate an average benzene conversion of 40.33 %.

Micro Bonding Using Hot Melt Adhesives

  • Bohm, Stefan;Hemken, Gregor;Stammen, Elisabeth;Dilger, Klaus
    • 접착 및 계면
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    • 제7권4호
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    • pp.28-31
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    • 2006
  • Due to the miniaturization of MEMS and microelectronics the joining techniques also have to be adjusted. The dosing technology with viscous adhesives does not permit reproducible adhesive volumes, which are clearly under a nano-liter. A nano-liter means however a diameter of bonding area within the range of several 100 micrometers. Additional, viscous adhesives need a certain time, until they are cross linked or cured. The problem especially in the MEMS is the initial strength, since it gives the time, which is needed for joining an individual adhesive joint. The time up to the initial strength is with viscous, also with fast curing systems, within the range of seconds until minutes. Until the reach of the initial strength, the micro part must be fixed/held. Without sufficient adjustment/clamping it can come to a shift of the micro parts. Also existing micro adhesive bonding processes are not batch able, i.e. the individual adhesive joints of a micro system must be processed successively. In the context of the WCARP III 2006 now an innovative method is to be presented, how it is possible to solve the existing problems with micro bonding. i.e. a method is presented, which is batch able, possess a minimum joining geometry with some micrometers and is so fast that no problems with the initial strength arise. It is a method, which could revolutionize the sticking technology in the micro system engineering.

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환경조건간 합동을 이용한 복합재료 허용치 생성 기법 (Pooling-Across-Environments Method for the Generation of Composite-Material Allowables)

  • 이승윤
    • 항공우주시스템공학회지
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    • 제10권3호
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    • pp.63-69
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    • 2016
  • The properties of composite materials, when compared to those of metallic materials, are highly variable due to many factors including the batch-to-batch variability of raw materials, the prepreg manufacturing process, material handling, part-fabrication techniques, ply-stacking sequences, environmental conditions, and test procedures. It is therefore necessary to apply reliable statistical-analysis techniques to obtain the design allowables of composite materials. A new composite-material qualification process has been developed by the Advanced General Aviation Transport Experiments (AGATE) consortium to yield the lamina-design allowables of composite materials according to standardized coupon-level tests and statistical techniques; moreover, the generated allowables database can be shared among multiple users without a repeating of the full qualification procedure by each user. In 2005, NASA established the National Center for Advanced Materials Performance (NCAMP) with the purpose of refining and enhancing the AGATE process to a self-sustaining level to serve the entire aerospace industry. In this paper, the statistical techniques and procedures for the generation of the allowables of aerospace composite materials will be discussed with a focus on the pooling-across-environments method.

불확실한 공정과 불량품 처리체계를 포함하는 공정-저장조 망 최적설계 (Optimal Design of Batch-Storage Network Including Uncertainty and Waste Treatment Processes)

  • 이경범;이의수
    • Korean Chemical Engineering Research
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    • 제46권3호
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    • pp.585-597
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    • 2008
  • 본 연구의 목적은 가동 시간과 생산량에 있어서 무작위 변동을 일으키는 공정 시스템에서 최종 제품의 수요를 만족하는 공정-저장조 망구조의 최적용량을 결정하는 문제의 해석적인 해를 유도하는 것이다. 여기서 논의되는 공장의 구조는 회분식 공정과 저장조가 병렬 또는 직렬로 연결된 망구조를 구성하고 있다. 생산공정은 다수의 원료물질을 다수의 제품으로 일정 비율로 전환한다. 최종제품의 수요는 주문주기와 물량이 무작위 변동을 일으킨다. 일부 생산공정은 생산량에 있어서 무작위 변동을 일으키며, 오염된 물질은 재생공정이나 폐기과정을 거쳐서 처리된다. 다른 공정들은 모두 가동시간이 무작위로 변한다. 최적화의 목적함수는 총비용을 최소화하는 것인데, 여기서 총비용은 준비비와 재고 유지비 그리고 공정과 저장조의 자본비용으로 구성되어 있다. 새로운 생산 재고 분석도구인 사각파 모형은 무작위 흐름의 상한값과 하한값을 계산하는 도형적 방법을 제공한다. 이 모형의 장점은 공정과 저장조 사이의 무작위 흐름을 사실적으로 묘사하면서도 간단한 해석적인 해를 제공하는데 있다. 결과적으로 계산량이 획기적으로 줄어든다.

PPM 관리 체제하의 탄력적인 공정관리기법 (Elastic Process Control Method under PPM Management System)

  • 류영근;신숙현;조남호
    • 한국산업정보학회:학술대회논문집
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    • 한국산업정보학회 1998년도 춘계공동학술대회 발표논문집 IMF시대의정보화 추진전략
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    • pp.129-135
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    • 1998
  • The present automated manufacturing environment is very different when the classical statiscal process control method based on batch processing were used. Therefore these must be replaced by automated statiscal process control method. In this point of view , this study intends to develop the automated statiscal process control method which can be implemented in the proesent automated manufacturing environment . Specially this study suggested modified control limit line and developed the rule to identify the special cause of the manufacturing process in the aspect of the ppm manegement.

Batch입력 팻킷교환망에 있어서 유한 길이 큐의 특성에 관한 연구

  • 이근식;이재호
    • 한국통신학회:학술대회논문집
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    • 한국통신학회 1986년도 춘계학술발표회 논문집
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    • pp.156-159
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    • 1986
  • In this paper, we discribed characteristics of two buffer which are limited area in packet communication networks, we selected JSQ(Join the Shortest Queue) method for buffrt management and compared it with single, random methods. The blocking probabilities of massage using JSQ method is decreased about (2.5 times) in compared with that of single queue method and (0.5 times) in random selection method. This results could be used in designing packet switching communication networks.

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