• 제목/요약/키워드: barrier-free

검색결과 415건 처리시간 0.029초

Effect of Plasma Pretreatment on Superconformal Cu Alloy Gap-Filling of Nano-scale Trenches

  • 문학기;이정훈;이수진;윤재홍;김형준;이내응
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.53-53
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    • 2011
  • As the dimension of Cu interconnects has continued to reduce, its resistivity is expected to increase at the nanoscale due to increased surface and grain boundary scattering of electrons. To suppress increase of the resistivity in nanoscale interconnects, alloying Cu with other metal elements such as Al, Mn, and Ag is being considered to increase the mean free path of the drifting electrons. The formation of Al alloy with a slight amount of Cu broadly studied in the past. The study of Cu alloy including a very small Al fraction, by contrast, recently began. The formation of Cu-Al alloy is limited in wet chemical bath and was mainly conducted for fundamental studies by sputtering or evaporation system. However, these deposition methods have a limitation in production environment due to poor step coverage in nanoscale Cu metallization. In this work, gap-filling of Cu-Al alloy was conducted by cyclic MOCVD (metal organic chemical vapor deposition), followed by thermal annealing for alloying, which prevented an unwanted chemical reaction between Cu and Al precursors. To achieve filling the Cu-Al alloy into sub-100nm trench without overhang and void formation, furthermore, hydrogen plasma pretreatment of the trench pattern with Ru barrier layer was conducted in order to suppress of Cu nucleation and growth near the entrance area of the nano-scale trench by minimizing adsorption of metal precursors. As a result, superconformal gap-fill of Cu-Al alloy could be achieved successfully in the high aspect ration nanoscale trenches. Examined morphology, microstructure, chemical composition, and electrical properties of superfilled Cu-Al alloy will be discussed in detail.

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장수풍뎅이 유충 내에 있는 전장 상피세포들의 미세구조 (Ultrastructure of the Foregut Epithelial Cells in the Scarab Beetle, Allomyrina dichotoma Linne)

  • 류재혁
    • Applied Microscopy
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    • 제35권3호
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    • pp.177-186
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    • 2005
  • 장수풍뎅이 (Allomyrina dichotoma; Dynastidae; Coleoptera)를 사육하여 종령 유충의 전장 상피를 구성하는 세포들에 대한 미세구조를 전자현미경으로 관찰하였다. 상피조직은 편상피 세포들이 단층의 점막상피를 이루었으며, 그 내면은 얇은 큐티클 층으로 덮여 있었다. 상피세포의 유리면 원형질막은 미세융모로 변형되었고, 기저 원형질막은 기저막주름이 잡혀 "canaliculi"를 만들며 크게 발달한 사립체와 접해 있었다. 핵은 크게 발달하였고 세포질 내에는 발달한 사립체가 산재해 있었으며, 지질 및 단백질 과립과 글리코겐 입자들이 많이 축적되었다. 상피의 기저막은 여러겹으로 된 기저초를 이루고 있으며, 기저막내 또는 섬유상 결합조직인 점막하조직내에는 기관지세포와 신경이 뻗어 있었다. 그리고 점막하 조직 바깥쪽에는 환상근과 종주근이 관찰되었다.

시각장애인 복지관의 화재 피난행태 특성분석 연구 (A Study on the Fire Drill Behavior Characteristics in Rehabilitation Center for Visually Impaired Persons)

  • 이정수;권흥순;김응식
    • 한국산학기술학회논문지
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    • 제16권8호
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    • pp.5646-5653
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    • 2015
  • 본 연구는 시각장애인 복지관 건축계획, 실내디자인 및 운영관리 개선방안을 제시하는 것을 목적으로 하고 있다. 이를 위하여 시각장애인 이동 특성을 고찰하고, 피난실험을 통하여 피난행태를 분석하였다. 이상의 연구결과 다음과 같은 결론을 얻었다. 첫째, 시각장애인의 피난을 위해 '一자형'의 연속된 직선형 피난통로(보행안전통로) 및 실내 랜드마크 배치를 하고, 장애인 거주시설 및 프로그램 운영실을 가능하면 1층에 배치하여 지면과 무단차로 직접적인 피난이 이루어지도록 하는 것이 바람직하다. 둘째, 실내디자인 측면에서 수평이동을 위한 연속적인 핸드레일이 중요하며, 길찾기 및 피난경로를 안내하는 바닥재료의 재질변화, 색채대비, 촉지정보, 음성안내 등 세심한 계획이 요구된다. 셋째, 장애유형에 따른 장애인 이동특성 및 피난행태를 고려한 세분화된 건축계획, 실내디자인 기준 및 운영관리 매뉴얼을 제공할 필요성이 있다.

R&D 성과물 공동활용에 대한 연구자들의 인식에 관한 연구 (Perceptions of Researchers on Cooperative Utilization of Research Outcomes)

  • 장덕현;노류하;이수상
    • 정보관리연구
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    • 제39권4호
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    • pp.1-20
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    • 2008
  • 최근 학술커뮤니케이션에 나타난 변화 중 괄목할 만한 것이 '오픈액세스(Open Access)인데, 세계적으로 정보공유를 위한 연구자들의 참여와 학계와 정부에서의 지원 정책 발표가 이어면서 서구를 중심으로 급속히 확산되고 있다. 정보공유에 있어서 가장 중요한 것은 정보의 생산자이면서 소비자인 연구자들의 참여의지와 인식이다. 따라서 연구성과 정보의 공유에 대한 인식 조사는 대단히 긴요하다. 본 조사는 특정 주제 분야의 연구자들을 대상으로 오픈액세스 환경에 대한 인식도를 조사하였다. 이 조사를 바탕으로 오픈액세스 환경에서 이슈가 되고 있는 저작권 문제를 조명하였다. 결과적으로 국내 연구자들에게 있어서 '오픈액세스'에 대한 인식은 아직은 미비한 것으로 나타난 반면, 저작권이 침해되지 않는 범위 내에서 명확한 출처를 밝히고 합법적인 목적으로 연구물을 사용한다면 오픈액세스 활동에 참여할 의사를 가지고 있는 것으로 조사되었다. 이러한 결과를 바탕으로 이 논문에서는 저작권과 라이선스의 마련, 그리고 산재한 연구성과물의 원활한 관리와 접근 및 활용을 극대화시킬 수 있는 연구정보관리 체제의 구축이 필요함을 밝혔다.

중성염이 견의 반응염색에 미치는 영향 (Ⅱ) - 음이온의 영향 - (Effect of Neutral Salts on the Reactive Dyeing of Silk (Ⅱ) - Effect of Anions -)

  • 도성국;박찬헌;권지윤
    • 한국염색가공학회지
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    • 제13권2호
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    • pp.28-28
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    • 2001
  • Four kinds of neutral sodium salts with different anions, NaF, NaCl, NaBr, and NaI, were added to the dye bath to accurately understand the effect of anions on the reactive dyeing of silk with C. I. Reactive Black 5. The sodium cation lowered the negative surface potential of the silk and increased the dye-uptake on fille fabric as reported previously. However, because of the discrepancy in the anions′inhibition power from cation′s lowering the surface negative potential the amount of the dye on the silk fiber was different from each other in the order of $F^-\;>\;Cl^-\;>\; Br^-\;>\;I^-$. The activation energy($E_a$) for the dyeing was in the order of $F^-\;>\;Cl^-\;>\; Br^-\;>\;I^-$ but the dye-uptake on the fabric and the activation free energy(Δ$G^*$), the real energy barrier for the reaction, were in the order of $F^-\;>\;Cl^-\;>\; Br^-\;>\;I^-$ because the strength of the interaction of the anions with sodium cations was the same as the order of the latter. In other words $F^-$ exerted the weakest electrostatic force on $Na^+$and competed with the dyestuff anions least of all. The decrease in Δ$S^*$may be due to the looesly bonded activated complex of dyestuff anions, sodium cations and fiber molecules at transition state. It was clarified from the Bronsted equation that sodium salts with different anions also had fille ionic strength effect and the specific salt effect on the reactive dyeing.

AE-MDB시험 시 인체모형 상해치에 대한 시험 인자 영향성 연구 (The Study on influence of test factors for WorldSID injury through AE-MDB side crash test)

  • 선홍열;한표경;오은경;윤일성
    • 자동차안전학회지
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    • 제7권1호
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    • pp.7-12
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    • 2015
  • NCAP(New Car Assessment Program) makes vehicle manufacturer improve safety performance through free competition and customers guarantee vehicle selection by providing information of vehicle safety. That's why it is important not only to meet the regulation, but also to cope with NCAP. EuroNCAP(European New Car Assessment Program) side tests have conducted by using Progressive MDB and Euro SID II in order to reproduce crash test between two vehicles over 10 years. However various researches report that Progressive MDB and Euro SID II do not reflect evolving vehicle design, impact performance and biofidelity of human. Therefore EuroNCAP has the plan to conduct AE-MDB side crash test using WorldSID which is more evolved from 2015 by replacing Progressive MDB and EuroSID II. Automobile manufacturers need to develop safety performance for new test closely. This paper is to find test set-up parameters which affect into dummy injury instead of restraint system and to research on its tendency. It is processed with mini and small car to know influence as changing vehicle size and also analyzed by DFSS(Design for six sigma) which is one of optimization tools. DFSS is vaildated by simulating CAE with L18 orthogonal array of 6 control factors adjustable as EuroNCAP requirement.

Infrared Multiphoton Dissociation Spectroscopy of Protonated 1,2-Diaminoethane-water Clusters: Vibrational Assignment via the MP2 Method

  • Boo, Bong Hyun;Kang, Sukmin;Furuya, Ari;Judai, Ken;Nishi, Nobuyuki
    • Bulletin of the Korean Chemical Society
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    • 제34권11호
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    • pp.3327-3334
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    • 2013
  • Infrared multiphoton dissociation (IRMPD) spectra of various protonated 1,2-diaminoethane-water clusters DAE-$H^+-(H_2O)_n$ (n = 1-6) were measured in the wavelength range of 3000-3800 $cm^{-1}$. The IRMPD spectra of the well separated ionic clusters were simulated by the MP2 method employing various basis sets. Comparison of the IRMPD spectra with the theory indicates that each cluster may exist as several low-lying conformers, and the sum spectra of the various conformers reveal almost one to one correspondence between theory and experiment. Free N-H and O-H stretches are observed in the ranges of 3400-3500 and 3600-3800 $cm^{-1}$, respectively. The $O-H{\cdots}N$ and $N-H{\cdots}O$ stretches are, however, observed in the broad region of 3000-3600 $cm^{-1}$. The theoretical calculations on DAE-$H^+-(H_2O)_n$ (n = 1-4) show gradual decrease of the average binding energy between DAE-$H^+$ and $H_2O$ as the cluster size increases, attaining the lowest value of 55 kJ/mol when n = 4. We found a low energy barrier of 21 kJ/mol to the isomerization converting the lowest energy cluster of DAE-$H^+-(H_2O)_n$ to the second lowest one.

일본 국민보양온천의 지역 특성화 관광에 관한 연구 (A Study on the Regional Specialization Tourism of National Health Seeking Spa in Japan)

  • 우연섭
    • 한국경제지리학회지
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    • 제8권2호
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    • pp.301-314
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    • 2005
  • 본 연구의 목적은 일본 국민보양온천 관광지역에 있어 관광객의 일반적 특성과 다양한 관광자원에 대한 평가를 통하여 쇠퇴하고 있는 지역관광의 특성화된 개발전략을 고찰하는데 있다. 버블경제 붕괴이후 성숙기에 접어든 오늘날 일본 국내관광은 지역 관광산업의 질적 변화를 요구하고 있다. 온천 개발의 역사가 길고, 문화자원이 풍부한 카케유지역은 `보양과 요양` 테마를 강화한 리허빌리테이션 기능으로 특성화되고 있다. 노년층의 여성 관광객 비중이 높은 카케유온천은 건강회복이나 병 치료를 목적으로 방문하기 때문에 체류기간이 비교적 길고, 대중교통을 이용하는 단골고객이 많다. 관광자원에 대한 평가는 숙박시설에서 가깝고, 편안한 산책로나 엄숙한 사찰경관에 대한 관심이 높게 나타났다. 이러한 수요 특성을 반영하기 위하여 지역사회는 풍부한 온천 $\cdot$ 문화 $\cdot$ 자연을 토대로 리허빌리테이션 강화, 건강음식 개발, 자원봉사활동 강화, 배리어프리 사업 등을 적극적으로 전개해 나가고 있다.

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TN 및 TT 계통에서의 감전사고 분석 프로그램 개발 (The Development of the Analysis Program for the Electric Shock Accidents Occurred in the TN and TT System)

  • 이석원;류보혁;김형석;정원제
    • 한국안전학회지
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    • 제24권6호
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    • pp.32-38
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    • 2009
  • According to the statistics from the Ministry of labor, 70~80 people died by work-related electric shock accidents in the workplace and this number is about 10~20 times higher than those of the foreign countries such as Japan and the United Kingdom in frequencies and rates per 100,000. The electrocution deaths had decreased from several hundred in 1990s to 67 in 2002, since then there has been little change over the last 5 years. To reduce this number of the electrocution death, it is necessary to analyze the sources of the accidents and to implement the suitable measures for preventing the similar accidents from occurring. But there is not any consensus standard method or procedures for accident investigation yet. And the results solely depend on the ability of the investigator. Because of the demand of eliminating technical barrier for free trading, the IEC 60364 is adopted as a regulation for low voltage electrical installations in Korea. The facilities designed and constructed by IEC 60364 are increasing. The facilities by IEC 60364 have different features in comparison with the facilities by Korea eletro technical regulation, and these features combined with parameters of electric shock accident can greatly affect the consequences of the electric accidents. The accident analysis program for electric shock injuries in Terra Neutral(TN) and Terra Terra(TT) system was developed in this paper, which was based on KOSHA Electric Shock Analysis Program(ESAP).

농촌고령자 공동급식시설의 현황 및 이용 만족도 연구 - 2014~15년 농촌고령자 공동시설지원 시범사업을 중심으로 - (A Research on Using Satisfaction and Situation Survey of Common Meal Facilities for Seniors in Rural Areas - Focusing on the Pilot Project of Common Facilities for Rural Seniors from 2014 to 2015-)

  • 김승근
    • 한국농촌건축학회논문집
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    • 제18권4호
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    • pp.41-51
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    • 2016
  • This The purpose of this study is to evaluate user satisfaction with village bathhouses, selected from a two-year pilot project of common facilities for senior in rural areas from 2014 to 2015. A survey was conducted using a questionnaire to evaluate user satisfaction, and 135 questionnaires were collected from 18 common meal facilities. User satisfaction was evaluated in five categories with a five-point scale: location and spatial composition; emotions and intimacy; safety; nutrition; and maintenance and management. The results are as follows. First, when overall user satisfaction was evaluated on a five-point scale, the average score stood at 4.24 out of five points and 90.03 out of 100 points. These findings suggest that users were generally satisfied with the common meal facilities. Among five categories, scores except safety stood at four points or higher, indicating higher user satisfaction. Second, communal meal in rural areas have been carried out already but the environment for communal meal like cooking equipment, wastewater disposal, and space have been poor. However, the environment is improved through this pilot project, which has a positive effect to user satisfaction. Third, space planning for barrier-free or sanitary in storage of food containers are not adequate, which is necessary to detailed planning and concrete guideline.