• Laser Solutions
• /
• v.17 no.2
• /
• pp.5-10
• /
• 2014

Aluminum has been widely used in the electric applications because of light metals. When mechanical element is periodically moving with contacting other surfaces, the anodizing process for aluminum is useful for avoiding the abrasive damage. The anodized element has quietly different characteristics with respect to the distribution of hardness and crystal structure. In this work, the laser drilling of anodized surface is studied experimentally. Fusion drilling method - laser drilling with inert gas blowing - is used. The effect of various process parameters (gas pressure, laser power, focus position) is investigated with respect to the hole size and circularity.

• Korean Chemical Engineering Research
• /
• v.49 no.5
• /
• pp.652-656
• /
• 2011

Thin film of titania nanotubes(TNT) and titania nanofilms(TNF) was fabricated by anodizing for the study of the photo-catalytic reaction(PC) and photoelectrocatalytic reaction(PEC). Removal efficiency of methylene blue was investigated by UV radiation on the TNT coated titanium plate. Removal efficiency was increased with longer TNT length. Degradation efficiency of the PEC reaction was less sensitive than that of PC reaction. And Effect of TNT length is relatively small. Titania nanofilms(TNF) showed low efficiency than TNT. The efficiency drop of PC was larger than that of PEC.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.31 no.12
• /
• pp.1139-1143
• /
• 2007

A simple method for the fabrication of 3D micro-nano hybrid patterns was presented. In conventional fabrication methods of the micro-nano hybrid patterns, micro-patterns were firstly fabricated and then nano-patterns were formatted on the micro-patterns. Moreover, these micro-nano hybrid patterns could be fabricated on the flat substrate. In this paper, we suggested the fabrication method of 3D micro-nano hybrid patterns using micro-indentation on the anodized aluminum substrate. Since diameter of the hemispherical nano-pattern can be controlled by electrolyte and applied voltage in the anodizing process, we can easily fabricated nano-patterns of diameter of loom to 300nm. Nano-patterns were firstly formatted on the aluminum substrate, and then micro-patterns were fabricated by deforming the nano-patterned aluminum substrate. Hemispherical nano-patterns of diameter of 150nm were fabricated by anodizing process, and then micro-pyramid patterns of the side-length of $50{\mu}m$ were formatted on the nano-patterns using micro-indentation. Finally we successfully replicated 3D micro-nano hybrid patterns by hot-embossing process. 3D micro-nano hybrid patterns can be applied to nano-photonic device and nano-biochip application.

• Proceedings of the KSME Conference
• /
• 2004.11a
• /
• pp.899-903
• /
• 2004

A limit switch box is used for a indicator of a valve actuator. This device indicates an opening and closing of a valve or throttle in a valve actuator. In ship, equipments are required safe and robust because of a rough environment and a specific condition during a voyage. However, the limit switch box is used in an indoor environment generally. Thus, a new limit switch box must be developed which can be used at an outdoor environment. This study designed the limit switch box. The housing of the limit switch box was made by an aluminium die cast method with surface painting after anodizing or chromate coating. In order to evaluate the endurance of the housing, the endurance tests against salt water have been conducted. Experiment results showed that the proposed device provides a reliable performance against salt water.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.26 no.1
• /
• pp.1-5
• /
• 2017

This study investigated the mechanical tearing of a cell membrane using a nanostructured alumina filter for easy and quick mechanical cell disruption. Nanostructured alumina filters were prepared by a multi-step aluminum anodizing process and nanopore etching process. Six different types of nanostructures were formed on the surface of the nanoporous alumina filters to compare the mechanical cell disruption characteristics according to the shape of the nanostructure. The prepared alumina filter was assembled in a commercial filter holder, and then, NIH3T3 fibroblast cells in a buffer solution were passed through the nanostructured alumina filter at a constant pressure. By measuring the concentration of proteins and DNA, the characteristics of mechanical cell disruption of the nanostructured alumina filter were investigated.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.43-43
• /
• 2010

반도체 및 디스플레이의 진공부품은 알루미늄 모제에 전해연마법(electrolytic polishing), 양극산화피막법(anodizing), 플라즈마 용사법(plasma spray) 등을 사용하여 $Al_2O_3$ 피막을 성장시켜 사용되고 있다. 반도체 제조공정 중 30~40% 이상의 비중을 차지하는 식각(etching) 및 증착(deposition) 공정의 대부분 은 플라즈마에 의해 화학적, 물리적 침식이 발생하여 피막에 손상을 일으켜 피막이 깨지거나 박리되면서 다량의 particle을 생성함으로써 생산수율에도 문제를 야기 시킨다. 본 연구에서는 이러한 진공부품의 하나인 etcher용 상부전극을 양극산화피막법(Anodizing)으로 $Al_2O_3$ 피막을 성장시킨 샘플을 제작하여 플라즈마 처리에 따른 내전압, 식각율, 표면 미세구조의 변화를 관찰하였고 이를 종합적으로 고려하여 etcher용 상부전극의 Life Time 평가 방법을 연구하였다. 이러한 실험을 통해 플라즈마 처리 후 피막에 크랙이 발생되는 것을 확인할 수 있었고 피막의 손상으로 전기적 특성이 감소되는 것을 확인할 수 있었다. 또한 플라즈마 처리 중 ISPM 장비를 이용하여 플라즈마 공정에서 발생하는 오염입자를 실시간으로 측정할 수 있는 방법을 연구하였다. 이러한 결과를 이용하여 진공공정에서 사용되는 코팅부품이 플라즈마에 의한 손상정도를 정량화 하고 etcher용 상부전극의 Life Time 평가 방법을 개발하여 부품 양산업체의 진공장비용 코팅부품의 개발 신뢰성 향상이 가능할 것으로 기대된다.

• Journal of the Korean institute of surface engineering
• /
• v.35 no.6
• /
• pp.383-390
• /
• 2002

To investigate behaviors of Ti and O elements and microstructures of anodic titanium oxide films, the films were prepared by anodizing pure titanium in $H_2$S $O_4$, $H_3$P $O_4$, and $H_2O$$_2$ mixed solution at 180V. The microstructures and chemical states of the elements were analyzed using SEM, X-ray mapping, AFM, XRD, XPS (depth profile). The films formed on a titanium substrate showed porous layers which were composed of pore and wall, And with increasing anodizing time a hexagonal shape of cell structures were dominant and solace roughness increased. From the XRD result the structure of the Ti $O_2$ layer was anatase type of crystal on the whole. In the XPS spectra it was found that Ti and O were chemically binded in forms of Ti $O_2$, TiOH, $Ti_2$ $O_3$ at Ti 2p, and Ti $O_2$, $Ti_2$ $O_3$, $P_2$ $O_{5}$, S $O_4^{2-}$ at O ls respectively. Concentration of Ti $O_2$ decreased as the depth increased from the surface of the oxide film towards the substrate, but to the contrary concentrations of TiOH and $Ti_2$ $O_3$ increased.d.

• Journal of the Korean institute of surface engineering
• /
• v.1 no.1
• /
• pp.14.1-18
• /
• 1967

The characteristics of sulfuric acid anodized layer was studied under various Conbitions, acid concentration : 5-20%, temperature : 5-25$^{\circ}C$, bath voltate : 16 volts , bath agitain : mech agitation : mechanical . The Al+++ ion increase in anodizing baty, the film thickness under microscope, the comparative porosity and the thickness were determined. It was found that film thickness and the porosithy which are the main factors of determining andoized layet quality, rule the corrosing and abrasiion tesistance of the film, and that the porosity is increasing in the outerlayer. The formation mechanism was assumed as follows : The film thickness -increase is due to OH_ ion diffusion into compact non-conductive layer and Al+ + OH_ \longrightarrowAl(OH), Al(OH)+ + OH_ \longrightarrowAl(OH)+$_2$ , Al(OH)+$_2$ + OH_ \longrightarrowAl(OH)$_3$., the strong adhesion force is alse due to Al(OH) or Al(OH)$_2$ in transtion layer. And the pore-nucleation is produced by volume change between Al and Al$_2$O$_3$ and activated H$_2$O gas created by large reaction heat of Al+(x) +OH_ \longrightarrowAl(OH)x.

• Journal of the Korean Electrochemical Society
• /
• v.5 no.2
• /
• pp.43-46
• /
• 2002

Commercial titanium rod was anodized in three types of electrolytes such as 0.06 mol/L $\beta-glycerophosphate+0.3mol/L$ calcium acetate, 0.06mol/L $\beta-glycerophosphate+0.3mol/L$ sodium acetate and 0.06 mol/L $\beta-glycerophosphate+5mol/L$ calcium phosphate. The titanium oxide layer $(TiO_2)$ was characterized by scanning electron microscope (SEM), X-ray diffraction (XRD) and electron spectroscopy chemical analysis (ESCA). Numerous micropores were observed on the titanium oxide layer by SEM. The diameter of micropores increased with the increase of electrolytic voltage. The titanium oxide layer was composed of anatase structure. The phosphorous element was detected at 130 eV binding energy, but calcium was not found in the oxide layer because of lower contents. After anodizing the oxide layer was etched in the 30g/L NaOH solution at $80^{\circ}C$ for 1hr. The surroundings of micropores were much more smoothed and rounded than before alkaline etching.

• Applied Science and Convergence Technology
• /
• v.25 no.1
• /
• pp.15-18
• /
• 2016

Study investigated the optimal anodizing conditions for fabricating an oxide film that produces less contamination in a corrosive plasma environment, using oxalic acid and tartaric acid. Oxide films were produced using sulfuric acid, oxalic acid, and tartaric acid electrolyte mixtures with various mole ratios. The oxide film made by adding 0.05M tartaric acid to 0.3M oxalic acid showed higher breakdown voltage and lower leakage current. Additionally, contamination particles were reduced during plasma etching, thus demonstrates that this mixture presented optimal conditions. However, higher tartaric acid content (0.1 M, 0.15 M) led to lower breakdown voltages and higher leakage currents. Also, it resulted in more cracking during thermal shock tests as well as the generation of more contamination particles during plasma processing.