• Journal of the Semiconductor & Display Technology
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• v.2 no.4
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• pp.23-26
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• 2003

The general users find difficulties in using ellipsometers. Thus, the object of this study is to construct an ellipsometer with simple operation principle. We developed an ellipsometer which does not require alignment and calibration before measuring sample. A basis structure model after rotating a compensator spectroscopic ellipsometry, the fixed incidence angle at $70^{\circ}$. This ellipsometer does not demand calibration, because the plane of incidence is not changed due to the novel sample holder structure. The results for various standard samples were compared with those from conventional RCSE to test the performance of this instrument. Also repeated measurements were performed to test the precision of the calibration coefficient in a plane of incidence fixed.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.171-171
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• 2000

차세대 반도체 제조에서 Design rule 이 점점 더 shrink 됨에 따라 shallow junction 분석의 중요성이 강조되고 있다. 이러한 shallow junction에 대한 분석방법중의 하나인 SIMS 분석에 있어서 depth resolution을 향상시키는 것이 중요하며, 일차이온의 에너지를 낮추어 줌으로써 이러한 효과를 달성할 수 있다. 그러나 최근의 연구에 따르면 O2+를 이용한 low energy SIMS 분석 시에 non-zero incidence angle로 분석할 경우 surface roughness가 발생한다는 사실이 보고되었으며, surface roughness를 줄이고 분석 초기의 transient region을 줄이기 위한 방법으로 oxygen flooding을 사용하는 경우 특정 각도에서 surface roughness가 여전히 존재할 뿐 아니라 분석 초기영역에서의 sputter rate이 변화하는 문제가 있음이 보고된바 있다. 본 연구에서는 2keV O2+ 일차이온을 이용하여 oxygen flooding 하에서 기존 조건인 60도 incidence로 분석하는 방법의 문제점을 파악하고 incidence angle을 45도로 바꾸어 분석하는 방법을 검토하였다. 그 결과 기존의 분석조건에서는 분석도중 표면부근에서 sputter rate이 변화하고 surface roughness가 증가하는 것을 확인하였고, 그로 인하여 oxygen flooding을 하지 않은 경우와 많은 차이가 발생하는 것을 발견하였다. Incidence angle을 45도로 바꾼 결과 이러한 문제가 해결되는 것을 확인하였으며, 특히 GaAs $\delta$layer 분석을 통하여 이 분석조건이 기존의 분석조건에 비하여 획기적으로 향상되는 것을 확인 할 수 있었다. 또한 여러 가지 shallow junction 분석을 통하여 이 분석방법이 상당히 신뢰성이 있음을 알 수 있었다. 그러나 여전히 oxygen flooding을 하지 않은 경우에 비하여 다소간의 차이가 있는 것이 발견되었는데, 이는 주로 표면에 잔존하는 산화막에 의한 효과와 oxygen flooding에서 보다 더 depth resolution이 좋음으로 인하여 발생하는 것으로 추정되었으며 그 밖에 다른 가능성도 제기되었다. 따라서 이 방법은 표면 산화막이 거의 없는 시료에 대하여 적용한다면 oxygen flooding을 하지 않은 경웨 비하여 transient region이 거의 없고 junction depth를 보다 신뢰성 있게 측정할 수 잇는 장점이 있는 것으로 판단되었다. As, P의 저 에너지이온 주입시료에 대해 이 분석방법을 적용할 경우 C+s 분석법에 비하여 depth resolution을 비교적 쉽게 향상시킬 수 있었고, oxygen follding을 쓰지 않은 경우에 비해서는 검출한도를 약 100배 정도 향상시킬 수 있었다. 그러나 2.5keV Cs+ 분석법에 비하면 아직 depth resolution이 불충분하여 실제로 shallow As 분석에 적용하기에는 다소 문제점이 있었다.

• Aerospace Engineering and Technology
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• v.3 no.2
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• pp.34-41
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• 2004

In this paper, the SAR operational mode for achieving mission is designed. Each mode, which is the strip mode, scan mode, and fine mode, is basically considered. Based on the characteristics, which includes incidence angle, of the topography in Korean Peninsula, look angle for SAR satellite is determined. The limited region of operating the mission, which is considered to be able to receive and transmit the radar data, was defined to use determined operational mode. In the future, as considering full requirements and conditions for the SAR satellite, requirements and parameters will be discussed and studied.

• Journal of computational fluids engineering
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• v.14 no.2
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• pp.52-58
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• 2009

Turbulent flow past an inclined square cylinder immersed in a cross stream is numerically investigated. The angle of incidence of main flow is one of the key factors determining at which edges the flow separates. In the present study, based on comprehensive numerical simulations, effects of inclination angle on the flow characteristics are elucidated and the related physical explanation is presented.

• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.31-36
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• 1997

We measured refractive indices and thicknesses of SiO$_2$ thin films that have been plated on LCD glass substrate for the purpose of preventing the out-diffusion of sodium ions. The best experimental condition to determine refractive index and thickness of SiO$_2$ thin film by using ellipsometry is searched for, where ⅰ) the film thickness is increased uniformly by 20 $\AA$ from 0 $\AA$ to the period thickness while the angle of incidence is fixed and ⅱ) the angle of incidence is increased uniformly by 1$^{\circ}$ from 45$^{\circ}$ to 70$^{\circ}$ while the film thickness is fixed. We estimated the errors in determining the refractive index and thickness by comparing the measurement error of $\Delta$ and Ψ with the calculated one. The ellipsometric constants of SiO$_2$ thin film on LCD glass substrate are measured at several angle of incidence around the Brewster angle, which is the best angle if the experimental error of ellipsometer is not sensitive to the incident angle. Also the best fit refractive index and thickness of SiO$_2$ thin film to these ellipsometric constants measured at several angle of incidenc eas well as the best fit ones to the SE data are obtained using regressional analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.310-310
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• 2011

Morphological evolution of amorphous carbon film is investigated by molecular dynamics simulation. Here, energetic carbon atoms (75 eV) are deposited on the diamond (001) substrate to find effect of incidence angles. At normal and near-normal incidences ($0^{\circ}{\sim}30^{\circ}$) atomically smooth surfaces are observed during their growth. However, rough surfaces emerge and develop into a ripple structure at grazing incidences ($60^{\circ}{\sim}70^{\circ}$). The different growth modes according to the incidence angles can be described by impact-induced displacements of atoms. Downhill transport along any sloped surfaces is predominant for the case of normal incidence. As the incidence angles become grazing, uphill transport is allowed along the surfaces, which have smaller slopes than incidence angle, so the surface features can be amplified. Impact-induced transport and self-shadowing effect can be responsible to the initial growth of seeding structures at a grazing incidence, which would be grown up as tilted columnar structures in further depositions.

• Wind and Structures
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• v.34 no.1
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• pp.15-27
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• 2022

This work comes within the framework of the "Benchmark on the Aerodynamics of a Rectangular Cylinder" that investigates a rectangular cylinder of length-to-depth ratio equal to 5. The present study reports and discusses velocity fields acquired using planar Particle Image Velocitmetry for several angles of attack and Reynolds numbers. In particular, for a cylinder depth-based Reynolds number of 2 × 10⁴ and zero incidence angle, the flow features along the lateral (parallel to the freestream) upper and lower surfaces of the cylinder are reported. Using first and second order statistics of the velocity field, the main flow features are discussed, especially the size and location of the time-averaged flow structures and the distribution of the Reynolds stresses. The variation of the flow features with the incidence is also studied considering angles of attack up to 6°. It is shown that the time-averaged flow is fully detached for incidence higher than 2°. For an angle of attack of 0°, the effects of the Reynolds number varying between 5 × 10³ and 2 × 10⁴ are investigated looking at flow statistics. It is shown that the time-averaged location of the reattachment point and the shape and position of the time-averaged main vortex are mostly constant with the Reynolds number. However, the size of the inner region located below the time-averaged shear layer and just downstream the leading edge corner appears to be strongly dependent on the Reynolds number.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.825-830
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• 2004

A numerical analysis based on two-dimensional and three-dimensional incompressible Navier-Stokes equations has been carried out for double-circular-arc (DCA) compressor cascades. Two types of double-circular-arc cascades were used in this analysis. The appropriate turbulence model for compressor analysis was selected among the conventional turbulence models such as Baldwin-Lomax, k-$\varepsilon$ and k-$\varepsilon$ models. The results of current study were compared with available experimental data at various incidence angles. The 2-D and 3-D computational codes based on SIMPLE/PWIM algorithm for collocated grid and hybrid scheme for the convective terms were the main features of numerical tools. As commonly known, turbulence modeling is very important for the prediction of cascade flows, which are extremely complex with separation and reattachment by adverse pressure gradient. For selection of turbulence model, 2-D analysis was performed. And then, k-$\varepsilon$ turbulence model with wall function chosen as the reasonable turbulence model for 3-D calculation was used to increase the efficiency of computation times. A reasonable result of 3-D flow pattern passing through the double-circular-arc cascade was obtained.

• International Journal of Fluid Machinery and Systems
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• v.3 no.1
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• pp.20-28
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• 2010

This paper deals with the Design and Analysis of a Controlled Diffusion Aerofoil (CDA) Blade Section for an Axial Compressor Stator and Effect of incidence angle and Mach No. on Performance of CDA. CD blade section has been designed at Axial Flow Compressor Research Lab, Propulsion Division of National Aerospace Laboratories (NAL), Bangalore, as per geometric procedure specified in the U.S. patent (4). The CFD analysis has been performed by a 2-D Euler code (Denton's code), which gives surface Mach No. distribution on the profiles. Boundary layer computations were performed by a 2-D boundary layer code (NALSOF0801) available in the SOFFTS library of NAL. The effect of variation of Mach no. was performed using fluent. The surface Mach no. distribution on the CD profile clearly indicates lower peak Mach no. than MCA profile. Further, boundary layer parameters on CD aerofoil at respective incidences have lower values than corresponding MCA blade profile. Total pressure loss on CD aerofoil for the same incidence range is lower than MCA blade profile.

• The Journal of Churna Manual Medicine for Spine and Nerves
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• v.3 no.1
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• pp.55-64
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• 2008

Objective : Spondylothesis is a disease which sagittal facet of vertebral body's invariable alignment is being broken and vertebral body being pushed forward. Main pattern of spondylothesis is isthmic spondylothesis by isthmus defect or fracture, degenerative spondylothesis occurred by desiccated change of intervertebral disc or vertebral condyle joint's ligament. The purpose of this study is to assess the difference of the Pelvic angles, Lumbosacral angles, Pelvic tilt, and Lumbar lordotic angles of the spondylothesis patients. Methods : We analyzed the lateral view of lumbar spine of 49 isthmic spondylothesis patients, 45 degenerative spondylothesis patients and 26 patients who haven't been diagnosed as vertebra disease. We investigated each patient's pelvic angle, lumbosacral angle, pelvic tilt and lumbar lordotic angle. Results and Conclusion : 1. Pelvic incidence, in cases of degenerate spondylothesis patients, is higher than spondylothesis patients but shows less significance. On the contrary significance is higher than the group haven't been diagnosed as vertebra disease. 2. Lumbosacral incidence, in cases of isthmic spondylothesis patients, shows higher significance than degenerative spondylothesis patients and the group haven't been diagnosed as vertebra disease. 3 Pelvic tilt, in cases of degenerative spondylothesis patients, shows higher significance than isthmic spondylothesis patients and the group haven't been diagnosed as vertebra disease. 4. Lumbar lordotic angle, in cases of isthmic spondylothesis patients, shows higher significance than degenerative spondylothesis patients and the group haven't been diagnosed as vertebra disease. 5. Degenerative spondylothesis patient shows specific impression, a forwardly moved high femoral axial and as a result of large lumbrosacral angle and lumbar lordotic angle shows specific impression, an increased weight pressure on sacrum.