Improvement of the Adhesion Properties between Aluminum and a Parylene-C Film by Using the Duoplasmatron Ion Source (Duoplasmatron Ion Source를 이용한 Parylene과 Al의 접착력 향상에 관한 연구)
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- Journal of the Korean Vacuum Society
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- v.21 no.2
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- pp.78-85
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- 2012