• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.26 no.2
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• pp.119-138
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• 2016

Objectives: The purpose of this study is to review size, shape, and crystal structure-dependent toxicity of major metal oxide particles such as silicon dioxide, tungsten trioxide, aluminum oxide, and titanium dioxide as byproducts generated in semiconductor fabrication facility. Methods: To review the toxicity of major metal oxide particles, we used various reported research and review papers. The papers were searched by using websites such as Google Scholar and PubMed. Keyword search terms included '$SiO_2$(or $WO_3$ or $Al_2O_3$ or $TiO_2$) toxicity', 'health effects $SiO_2$(or $WO_3$ or $Al_2O_3$ or $TiO_2$). Additional papers were identified in references cited in the searched papers. Results: In various cell lines and organs of human and animals, cytotoxicity, genotoxicity, hepatoxicity, fetotoxicity, neurotoxicity, and histopathological changes were induced by silicon dioxide, tungsten trioxide, aluminium oxide, and titanium dioxide particles. Differences in toxicity were dependent on the cell lines, organs, doses, as well as the chemical composition, size, surface area, shape, and crystal structure of the particles. However, the doses used in the reported papers were higher than the possible exposure level in general work environment. Oxidative stress induced by the metal oxide particles plays a significant role in the expression of toxicity. Conclusions: The results cannot guarantee human toxicity of the metal oxide particles, because there is still a lack of available information about health effects on humans. In addition, toxicological studies under the exposure conditions in the actual work environment are needed.

• Transactions on Electrical and Electronic Materials
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• v.17 no.3
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• pp.159-162
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• 2016

We studied an electrolyte-dielectric metal (EDM) device based on a Si₃N₄ layer-coated anodic aluminium oxide (AAO) template for chemical sensors. The AAO templates were fabricated using a two-step anodization procedure at 0℃ and 70 V in 0.3 M oxalic acid, after which the Si₃N₄ was deposited on them using plasma enhanced chemical vapor deposition (PECVD). The average pore size was approximately 106 nm and the depth of the AAO templates was 24.6 nm to 86.5 nm. The Si₃N₄ layer-coated AAO is more stable than a single AAO template.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.372.2-372.2
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• 2016

Various nanobiosensors have been developed and extensively investigated. For their practical applications, however, the reproducibility and uniformity should be good enough and the mass-production should be possible. To fabricate anodized aluminium oxide (AAO)-based nanobiosesnor on wafer scale, we have designed and constructed a wafer-scale anodizing system. $1{\mu}m$-thick-aluminum is deposited on 4 inch SiO2/Si substrate and then anodized, resulting in uniform nanopores with an average pore diameter of about 65 nm. Furthermore, most AAO sensors constructed on this wafer provide capacitance values of 30 nF ~ 60 nF in PBS, demonstrating their uniformity.

• Journal of Powder Materials
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• v.22 no.3
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• pp.216-220
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• 2015

Vertically oriented nickel nanowire arrays with a different diameter and length are synthesized in porous anodic aluminium oxide templates by an electrodeposition method. The pore diameters of the templates are adjusted by controlling the anodization conditions and then they are utilized as templates to grow nickel nanowire arrays. The nickel nanowires have the average diameters of approximately 25 and 260 nm and the crystal structure, morphology and microstructure of the nanowires are systematically investigated using XRD, FE-SEM and TEM analysis. The nickel nanowire arrays show a magnetic anisotropy with the easy axis parallel to the nanowires and the coercivity and remanence enhance with decreasing a wire diameter and increasing a wire length.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1526-1529
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• 2005

Zinc oxide films have been actively investigated as transparent electrode materials for display. We report the effect of the working pressures on electro-optical properties of Al-doped ZnO thin films deposited by d.c. magnetron sputtering. The resistivity of the ZnO thin films was depended on atomic bombardment effect by working pressure.

• Bulletin of the Korean Chemical Society
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• v.33 no.4
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• pp.1235-1241
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• 2012

Aluminium (Al)-doped zinc oxide (AZO) thin films with different Al concentrations were prepared by the solgel spin-coating method. Optical parameters such as the optical band gap, absorption coefficient, refractive index, dispersion parameter, and optical conductivity were studied in order to investigate the effects of the Al concentration on the optical properties of AZO thin films. The dispersion energy, single-oscillator energy, average oscillator wavelength, average oscillator strength, and refractive index at infinite wavelength of the AZO thin films were found to be affected by Al incorporation. The optical conductivity of the AZO thin films also increases with increasing photon energy.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.535-538
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• 2004

Zinc Oxide (ZnO) films have attracted considerable attention for transparent conducting films, because of their high conductivity, good optical transmittance from UV to near IR as well as a low-cost fabrication. To increase the conductivity of ZnO, doping of group III elements (Al, Ga, In and B) has been carried out. Transparent conducting films have been applied for optoelectric devices, the development of the transparent conducting thin films on flexible light-weight substrates are required. In this research, the transparent conducting ZnO thin films doped with Aluminum (Al) on polymer substrates were deposited by the RF magnetron suputtering method, and the structural, optical and electrical properties were investigated.

• Journal of Ceramic Processing Research
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• v.21 no.1
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• pp.99-102
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• 2020

Structural ceramics are generally superior in strength to metal at high temperatures. However, they must be sintered at high temperatures to achieve this high strength. Therefore, lowering the sintering temperature would have economic benefits, including in terms of energy consumption. This study investigated the possibility of reducing the sintering temperature by adding bismuth oxide(Bi2O3) to the sintering of aluminium oxide(Al2O3). The amount of Bi2O3 additive was changed to 12~19. 1wt.% and the sintering temperature was in the range of 850~1200 ℃, and the compressive strength was evaluated under these conditions. The addition of Bi2O3 can decrease the necessary sintering temperature by about 400 ℃. Ceramic structures that can be low temperature sintering can save costs due to reduced manufacturing costs, replacement costs, shutdowns, etc., which will ensure enormous economic efficiency.

• The Korean Fashion and Textile Research Journal
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• v.17 no.6
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• pp.1004-1012
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• 2015

The purpose of this study is to investigate the loess dyeability of soybean fabric using loess as colorants. Recent days, various textile products such as inner wears, sheets and interior goods are manufactured using materials dyed with loess emphasizing its improved metabolism, anti-bacterial, deodorizing properties, and far infrared ray emissions. Soybean fabric was dyed with loess solution according to concentration of loess, dyeing temperature and dyeing time. To improve washing fastness, soybean fabric and dyed soybean fabric with loess were mordanted by mordanting agents such as sodium chloride(NaCl), Acetic acid(CH₃COOH) and Aluminium Potassium Sulfate(AlK(SO₄)₂·12H₂O). Dyeability and color characteristics of dyed soybean fabric were obtained by CCM observation. Particle size distribution of loess, the dyeability(K/S) of soybean fabric, morphology and washing durability of loess dyed soybean fabric were investigated. The results obtained were as follows; Mean average diameter of loess was 1.08µm. The main components of loess used in this study were silicon dioxide(SiO₂), aluminium oxide(Al₂O₃), and iron oxide(Fe₂O₃). The content of these three component was above 75 weight %. The dyeability of soybean fabric was increased gradually with increasing concentration of loess. The optimum dyeing temperature and dyeing time were 90℃ and 60minutes expectively. The fastness to washing according to concentration of loess and mordanting method indicated good grade result as more than 4 degree in all conditions.

• Bulletin of the Korean Chemical Society
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• v.33 no.10
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• pp.3258-3264
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• 2012

Aluminum oxide ($Al_2O_3$) nanofibers were treated thermally under an ammonia ($NH_3$) gas stream balanced by nitrogen to form a thin aluminum nitride (AlN) layer on the nanofibers, resulting in the enhancement of thermal conductivity of $Al_2O_3$/epoxy nanocomposites. The micro-structural and morphological properties of the $NH_3$-assisted thermally-treated $Al_2O_3$ nanofibers were characterized by X-ray diffraction (XRD) and atomic force microscopy (AEM), respectively. The surface characteristics and pore structures were observed by X-ray photoelectron spectroscopy (XPS), Zeta-potential and $N_2$/77 K isothermal adsorptions. From the results, the formation of AlN on $Al_2O_3$ nanofibers was confirmed by XRD and XPS. The thermal conductivity (TC) of the modified $Al_2O_3$ nanofibers/epoxy composites increased with increasing treated temperatures. On the other hand, the severely treated $Al_2O_3$/epoxy composites showed a decrease in TC, resulting from a decrease in the probability of heat-transfer networks between the filler and matrix in this system due to the aggregation of nanofiber fillers.