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http://dx.doi.org/10.5012/bkcs.2012.33.4.1235

Effects of Al Concentration on Structural and Optical Properties of Al-doped ZnO Thin Films  

Kim, Min-Su (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University)
Yim, Kwang-Gug (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University)
Son, Jeong-Sik (Department of Visual Optics, Kyungwoon University)
Leem, Jae-Young (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University)
Publication Information
Abstract
Aluminium (Al)-doped zinc oxide (AZO) thin films with different Al concentrations were prepared by the solgel spin-coating method. Optical parameters such as the optical band gap, absorption coefficient, refractive index, dispersion parameter, and optical conductivity were studied in order to investigate the effects of the Al concentration on the optical properties of AZO thin films. The dispersion energy, single-oscillator energy, average oscillator wavelength, average oscillator strength, and refractive index at infinite wavelength of the AZO thin films were found to be affected by Al incorporation. The optical conductivity of the AZO thin films also increases with increasing photon energy.
Keywords
Zinc oxide; Aluminum; Thin film; Sol-gel; Optical parameter;
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