• 제목/요약/키워드: alumina membrane

검색결과 163건 처리시간 0.026초

다공성 알루미나 박막을 이용한 나노마스크 제작 (Fabrication of Nano-mask Using Porous Alumina Membrane)

  • 정경한;류길용;장정수;권영수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.364-365
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    • 2006
  • One of the promising routes for producing highly ordered nanostructures is a template method using the porous alumina membrane (PAM). Because the PAM is mechanically, chemically, thermally stabile with highly ordered structure, many researchers have studied under various experimental conditions to fabricate nanostructures. We present the information on the fabrication of about 300 nm nano-mask which have important applications for various patterned nanostructures.

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알루미나 한외여과막의 제조에 관한 연구(2) (A Study on Preparation of Alumina Membranes(2))

  • 유재근;이응상
    • 한국세라믹학회지
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    • 제31권4호
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    • pp.359-366
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    • 1994
  • Tow types of supports were made using $\alpha$-Al2O3 powder and optimum conditions to prepare for supports were provided. Sol solution for coating was synthesized by sol-gel method with aluminum isopropoxide. Supports were coated and heat-treatemented, where the thickness of coating layer was controlled by dipping time. Flux and permeability of alumina membrane were measured by liquid and gas filtration apparatus and these were compared with the provided model. It was confirmed that the coating was done very well without micro~crack and defect.

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HI-$H_2O$ 기상 혼합물에서 Silica 막의 안정성 (Stability of a Silica Membrane in the HI-$H_2O$ Gaseous Mixture)

  • 황갑진;박주식;이상호;최호상
    • 멤브레인
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    • 제14권3호
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    • pp.201-206
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    • 2004
  • 열화학적 IS 공정에서 요오드화수소의 분해에 적용하기 위하여 화학증착법(CVD)으로 제조된 silica 막의 안정성을 HI-$H_2O$ 기상 혼합물에서 평가하였다. Si 원천으로 tetraethoxysilane을 사용하여 서로 다른 CVD 온도로 기공크기가 100 nm인 $\alpha$-alumina를 처리하였다. CVD온도는 $700^{\circ}C$, $650^{\circ}C$, $600^{\circ}C$이었다. $600^{\circ}C$에서 수행한 단일 성분의 투과 실험에서 측정한 막의 $H_2$/$N_2$ 선택도는 CVD 온도 $700^{\circ}C$의 M1 막은 43.2, $650^{\circ}C$의 M2 막은 12.6, $600^{\circ}C$의 M3 막은 8.7을 나타내었다. HI-$H_2O$ 기상 혼합물에서 안정성 실험은 $450^{\circ}C$에서 수행하였는데, CVD 온도 $650^{\circ}C$에서 처리된 막이 다른 온도에서 처리된 막보다 더 안정성이 더 좋은 결과를 얻었다.

양극산화를 이용한 알루미나 나노세공 멤브레인의 제조 (Fabrication of Alumina Membrane Using Anodic Oxidation Process)

  • 임완순;조경철;조유석;최규석;김도진
    • 한국재료학회지
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    • 제13권9호
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    • pp.593-597
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    • 2003
  • Anodic aluminum oxide (AAO) membrane was made of aluminum sheet (99.6%, 0.2 mm thickness). The regular array of hexagonal nano pores or channels were prepared by two step anodization process. A detail description of the AAO fabrication is presented. After the 1st anodization in oxalic acid (0.3 M) at 45 V, The formed AAO was removed by etching in a solution of 6 wt% $H_3$$PO_4$+1.8 wt% $H_2$$CrO_4$. The regular arrangement of the pores was obtained by the 2nd anodization, which was carried out in the same condition as the 1st anodization. Subsequently, the alumina barrier layer at the bottom of the channel layer was removed in phosphoric acid (1M) after removing of aluminum. Pore diameter, density, and thickness could be controlled by the anodization process parameters such as applied voltage, anodizing time, pore widening time, etc. The pore diameter is proportional to the applied voltage and pore widening time. The pore density and thickness can be controlled by anodization temperature and voltage.

기체분리용 세라믹 복합분리막의 개발 : IV. ${\gamma}$-알루미나 분리막의 투과 특성 (Development of Ceramic Composite Membranes for Gas Separation: IV. Permeation Characteristics of ${\gamma}$-Alumina Membranes)

  • 현상훈;강범석;최두진
    • 한국세라믹학회지
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    • 제29권12호
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    • pp.970-980
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    • 1992
  • ${\gamma}-alumina$ membranes were prepared by sol-gel dip coating or pressurized coating of boehmite sols on slipcasted ${\gamma}-alumina$ support tubes. The particle size of sols synthesized via the modified Yoldas-method could be controlled below 5 mn according to the mole ratio of nitric acid/aluminumtri-sec-butoxide (0.07~1.0). The reproducible crack-free composite membranes were produced by the 2nd dip coating or the pressurized coating technique using very stable sols with the particle size of 45 nm. Nitrogen gas permeability through the top-layer in the composite membrane was about $70~55{\times}10^{-7}\;mol/m^2{\cdot}s{\cdot}Pa$. The thermal stability of the top layer was proved to be good enough upto the heat-treatment temperature of $500^{\circ}C$.

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표면개질한 소수성 막을 이용한 menthol/water 혼합물의 분리 (Separation of Menthol/Water Mixture with Surface-Modified Hydrophobic Membrane)

  • 한상오;송근호;이광래
    • 산업기술연구
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    • 제22권A호
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    • pp.249-254
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    • 2002
  • The surface of tube-type alumina substrate was modified with a silane coupling agent in order to modify the membrane surface with hydrophobicity. Contact angle of water drops on modified membrane was greater than $90^{\circ}$. The modified membrane was tested in pervaporation and vapor permeation for the recovery of menthol from dilute menthol/water mixture. With increasing menthol concentration in the feed at $45^{\circ}C$, permeation rate of menthol in pervaporation and vapor permeation increased from $0.039(g/m^2hr)$ to $0144(g/m^2hr)$ and from. $0.077(g/m^2hr)$ to $0.297(g/m^2hr)$ respectively. When feed concentration is 0.005(g/L) at $45^{\circ}C$, separation factor for menthol in pervaporation and vapor permeation is 20,7 and 40.5 respectively.

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