한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

다공성 알루미나 박막을 이용한 나노마스크 제작

Fabrication of Nano-mask Using Porous Alumina Membrane

  • 정경한 (동아대학교 전기공학과) ;
  • 류길용 (동아대학교 전기공학과) ;
  • 장정수 (동아대학교 전기공학과) ;
  • 권영수 (경일대학교 전기공학과)
  • Jung, Kyung-Han (Department of Electrical Engineering Dong-A University) ;
  • Ryu, Kil-Yong (Department of Electrical Engineering Dong-A University) ;
  • Chang, Jeong-Soo (Department of Electrical Engineering Dong-A University) ;
  • Kwon, Young-Soo (Department of Electrical Engineering Kyungil University)
  • 발행 : 2006.06.22
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초록

One of the promising routes for producing highly ordered nanostructures is a template method using the porous alumina membrane (PAM). Because the PAM is mechanically, chemically, thermally stabile with highly ordered structure, many researchers have studied under various experimental conditions to fabricate nanostructures. We present the information on the fabrication of about 300 nm nano-mask which have important applications for various patterned nanostructures.

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