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Characteristics of ZnO Thin Films of FBAR using ALD and RF Magnetron Sputtering (ALD와 RF 마그네트론 스퍼터링을 이용한 FBAR 소자의 ZnO 박막증착 및 특성)

  • Shin, Young-Hwa;Kwon, Sang-Jik;Yoon, Young-Soo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.2
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    • pp.164-168
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    • 2005
  • Piezoelectric ZnO thin films were for the first time formed on SiO$_2$/Si(100) substrate using 2-step deposition, atomic layer deposition(ALD) and RF magnetron sputtering deposition, for film bulk acoustic resonator(FBAR) applications. The ZnO buffer layer by ALD was deposited using alternating diethyl zinc(DEZn)/$H_2O$ exposures and ultrahigh purity argon gas for purging. The ZnO films by 2-step deposition revealed stronger c-axis-preferred orientation and smoother surface than those by the conventional RF sputtering method. The solidly mounted resonator(SMR)-typed FBAR fabricated by using 2-step deposition method revealed higher quality factor of 580 and lower return loss of -17.35dB. Therefore the 2-step deposition method in this study could be applied to the FBAR device fabrication.

Hydrogen Reduction Behavior of Oxide Scale in Water-atomized Iron Powder (수분사 Fe 분말의 산화물 및 이의 수소가스 환원거동)

  • Shin, Hea-Min;Baik, Kyeong-Ho
    • Journal of Powder Materials
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    • v.21 no.6
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    • pp.422-428
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    • 2014
  • In this study, the reduction kinetics and behaviors of oxides in the water-atomized iron powder have been evaluated as a function of temperature ranging $850-1000^{\circ}C$ in hydrogen environment, and compared to the reduction behaviors of individual iron oxides including $Fe_2O_3$, $Fe_3O_4$ and FeO. The water-atomized iron powder contained a significant amount of iron oxides, mainly $Fe_3O_4$ and FeO, which were formed as a partially-continuous surface layer and an inner inclusion. During hydrogen reduction, a significant weight loss in the iron powder occurred in the initial stage of 10 min by the reduction of surface oxides, and then further reduction underwent slowly with increasing time. A higher temperature in the hydrogen reduction promoted a high purity of iron powder, but no significant change in the reduction occurred above $950^{\circ}C$. Sequence reduction process by an alternating environment of hydrogen and inert gases effectively removed the oxide scale in the iron powder, which lowered reduction temperature and/or shortened reduction time.

EVOLUTION OF INTERNAL WAVES NEAR A TURNING POINT IN THE SOUTH CHINA SEA USING SAR IMAGERY AND NUMERICAL MODELS

  • Kim, Duk-Jin;Lyzenga, David R.;Choi, Woo-Young;Kim, Youn-Soo
    • Proceedings of the KSRS Conference
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    • 2007.10a
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    • pp.61-64
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    • 2007
  • Subsurface Internal Waves (IWs) can be detected in satellite images as periodic alternating brighter/darker stripes. It is known that there are two types of IWs - depression type and elevation type - depending on the water depth in stratified oceans. In this study, we have quantitatively verified the process of converting polarity from depression waves to elevation waves using ERS-2 SAR images acquired over the northern South China Sea. We simulated the evolution of IWs near a turning point with a numerical model for internal wave propagation. The simulation results near the turning point clearly showed us not only a conversion process of IWs from depression to elevation waves, but also a similar wave pattern with the observed SAR image. We also simulated SAR intensity variation near the turning point. The upper layer currents were computed at regular intervals using the numerical model, as the IWs were passing through the turning point. Then, an integrated hydrodynamic-electromagnetic model was used for simulating SAR intensity profiles from the upper layer currents at each position. The simulated SAR intensity profiles at each position were compared with the observed SAR intensities.

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Effect of Stainless Steel Properties on Performance of Multi-layer Bellows (다층형 벨로우즈의 성능에 미치는 스테인리스강 물성의 영향)

  • Suh, C.H.;Oh, S.K.;Jung, Y.C.;Lee, R.G.;Park, M.K.;Kim, Y.S.
    • Transactions of Materials Processing
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    • v.18 no.3
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    • pp.223-228
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    • 2009
  • Generally ferritic stainless steels are used for parts of exhaust system in commercial vehicle, because they have many advantages as low price and high corrosion resistant compared with austenitic stainless steels. Even though ferritic stainless steels have such various merits, austenitic stainless steels have been used to manufacture multi-layer bellows with complex geometry because of their high ductility. Recently, the mechanical properties of the ferritic stainless steels are getting improved and alternating austenitic stainless steel. In this paper, the possibility of mass production of multi-layer bellows made of ferritic stainless steel like MH1 and 443CT was studied. Tensile test, ridging test and corrosion test were carried out to observe material properties of STS304, MH1 and 443CT. Three types of prototype bellows were made using STS304, MH1 and 443CT stainless steels, and stiffness and fatigue tests were carried out to evaluate performance of the prototype bellows.

Comparative Study of Text Entry Speed and Accuracy Using the Three Different Keyboard Type in Students with Cerebral Palsy: Case Study (키보드 유형에 따른 뇌성마비 학생의 문자입력 속도 및 정확도 비교: 사례연구)

  • Jeong, Dong-Hoon
    • Journal of the Korean Society of Physical Medicine
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    • v.10 no.1
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    • pp.23-35
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    • 2015
  • PURPOSE: People with physical disabilities such as cerebral palsy usually experience obstacles when interacting with computer through conventional keyboard because of their motor disabilities. The purpose of this study is empirically compare of text entry(alphabet and word) speed and accuracy using the three different keyboard type on four students(male 2 and female 2) with cerebral palsy. METHODS: This research design used a replicated single-case experimental approach to compare the individual performance. An alternating treatments design was used to examine the effectiveness of standard QWERTY keyboard and alternative keyboard(mini and big keyboard) on computer access for students with cerebral palsy. To avoid changes in posture that influence a keyboard character entry training and evaluation was carried out using his sitting in a wheelchair. Compass software program used in this study as an assessment tool to measure speed and accuracy when performance of text entry(alphabet and word). This was repeated until the stable status of reaction time. RESULTS: As a result, the alternative keyboard seems to be the most effective device for students with cerebral palsy to perform text entry. But various factors such as peculiarity of motor disabilities, experience and preferences of the user are heavily related. CONCLUSION: Thus, we must perform the objective and systematic assessment for computer access and if sustained training is accomplished, it could to improve speed and accuracy of text entry(alphabet and word).

Equivalency Assessment for an Eddy Current System Used for Steam Generator Tubing Inspection

  • Cho, Chan-Hee;Lee, Tae-Hun;Yoo, Hyun-Ju;Moon, Gyoon-Young
    • Journal of the Korean Society for Nondestructive Testing
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    • v.35 no.4
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    • pp.258-267
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    • 2015
  • Eddy current testing is widely used for inspecting steam generator tubing in nuclear power plants (NPPs). The inspection technique for steam generator tubing in NPPs should be qualified in accordance with examination guidelines. When the components of a qualified system such as eddy current tester, probe, and data analysis program, are changed, the equivalency of the modified system to the originally qualified system must be verified. The eddy current tester is the most important part of an eddy current testing system because it excites and transmits alternating currents to the probe, receives coil impedance of the probe and generates signals for anomalies. The Korea Hydro & Nuclear Power Co., Ltd. (KHNP) developed an eddy current testing system with an eddy current tester and data acquisition-analysis program for inspecting the steam generator tubing in NPPs; this system can be used for an array probe and as a bobbin and rotating probes. The equivalency assessment for the currently developed system was carried out, and we describe the results in this paper.

Electrodynamic Behavior of a Charged Particle among Two-Dimensional Quadrupole Electrodes (2차원 4극 전극 사이에서의 하전 입자의 동전기력학적 거동)

  • Park, Seok-Joo;Lim, Jeong-Hwan;Kim, Sang-Do;Choi, Ho-Kyung;Park, Hyun-Seol;Park, Young-Ok;McMurry, Peter-H.
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.5
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    • pp.741-749
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    • 2001
  • An inhomogeneous hyperbolic electric field is established among two-dimensional quadrupole electrodes to which an ac voltage is applied. Conditions under which charged particles are focused into a narrow axis region of the plug laminar flow are discussed. The aerodynamic forces influence the behavior of the charged particles in the quadrupole electric field. We derived the dimensionless equations of motion of a charged particle in the alternating quadrupole electric field, and discussed particle trajectories and focusing performance in terms of two dimensionless parameters, which are functions of particle size, operating pressure, and the amplitude and frequency of applied AC voltage, with the results of numerical simulations and experiments.

Nanophotonics of Hexagonal Lattice GaN Crystals Fabricated using an Electron Beam Nanolithography Process

  • Lee, In-Goo;Kim, Keun-Joo;Jeon, Sang-Cheol;Kim, Jin-Soo;Lee, Hee-Mok
    • International Journal of Precision Engineering and Manufacturing
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    • v.7 no.4
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    • pp.14-17
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    • 2006
  • A thin GaN semiconducting film that grows on sapphires due to metalorganic chemical vapor deposition was machined for nanophotonic applications. The thin film had multilayered superlattice structures, including nanoscaled InGaN layers. Eight alternating InGaN/GaN multilayers provided a blue light emission source. Nanoscaled holes, 150 nm in diameter, were patterned on polymethylmethacrylate (PMMA) film using an electron beam lithography system. The PMMA film blocked the etching species. Air holes, 75 nm in diameter, which acted as blue light diffraction sources, were etched on the top GaN layer by an inductively coupled plasma etcher. Hexagonal lattice photonic crystals were fabricated with 230-, 460-, 690-, and 920-nm pitches. The 450-nm wavelength blue light provided the nanodiffraction destructive and constructive interferences phenomena, which were dependent on the pitch of the holes.

Fabrication of Organic-Inorganic Nano Hybrid Superlattice Thin Films by Molecular Layer Deposition

  • Cho, Bo-Ram;Yang, Da-Som;Sung, Myung-M.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.115-115
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    • 2011
  • Nano hybrid superlattices consisting of organic and inorganic components have great potential for creation of new types of functional material by utilizing the wide variety of properties which differ from their constituents. They provide the opportunity for developing new materials with new useful properties. Herein, we fabricated new type of organic-inorganic nano hybrid superlattice thin films by a sequential, self-limiting surface chemistry process known as molecular layer depostion (MLD) combined with atomic layer deposition (ALD). An organic layer was formed at $150^{\circ}C$ using MLD with repeated sequintial adsorption of Hydroquinone and Titanium tetrachloride. A $TiO_2$ inorganic nanolayer was deposited at the same temperature using ALD with alternating surface-saturating reactions of Titanium tetrachloride and water. Using UV-Vis spectroscopy, we confirmed visible light absorption by LMCT. And FTIR spectroscopy and XPS were employed to determine the chemical composition. Ellipsometry and TEM analysis were also used to confirm linear growth of the film versus number of MLD cycles at all same temperature. In addition, p-n junction diodes domonstrated in this study suggest that the film can be suitable for n-type semiconductors.

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Palaeomagnetism of Tertiary Basins in Southern Korea : 3. Chongja-Ulsan Basins and its Vicinities (남한 제3기 분지지역에 대한 고자기 연구 : 3. 정자-울산분지와 그 일원)

  • Son, Moon;Kang, Hee-Cheol;Kim, In-Soo
    • Economic and Environmental Geology
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    • v.29 no.4
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    • pp.509-522
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    • 1996
  • A total of 460 palaeomagnetic samples was collected from the Tertiary Chongja-Ulsan basins and surrounding area in the southeastern part of Korean peninsula. All samples were stepwise demagnetized by either alternating field or thermal method. It was found that most sample-sites have ChRM declination which has been rotated clockwise from the north-south reference direction of Tertiary East Asia, although other two extrusive sample-sites within the Chongja sedimentary basin show counterclockwise rotation of ChRM declination. Fold tests for the site-mean ChRMs of the latter two sites reveal insignificant result and negative result with 95% confidence level, respectively. The amount of the clockwise deflection of declination varies from about $20^{\circ}$ upto about $80^{\circ}$ according to the block to which each sample-site belongs. The amount of the counterclockwise deflection is about $20^{\circ}$. It is concluded that the clockwise ChRM rotation has been caused by dextral simple shearing accompanied by NNW-SSE spreading of the East Sea which has been active until about 16Ma, and that the counterclockwise rotation is a result of sinistral simple shearing associated with WNW-ESE contraction in the Korean Strait-SW Japan region at about 15 Ma.

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