• Nuclear Engineering and Technology
• /
• 제54권10호
• /
• pp.3703-3716
• /
• 2022

Target alignment technology is one of the most critical technologies in laser fusion experiments and is an important technology related to the success of laser fusion experiments. In this study, by combining the open-loop and closed-loop errors of the target alignment, the Kalman state observer is used to estimate the position of the target, which improves the observation precision of the target alignment. Then the optimized result is used to guide the alignment of the target. This method can greatly optimize the target alignment error and reduce uncertainty. With the improvement of the target alignment precision, it will greatly improve the reliability and repeatability of the experiments' results, thereby improving the success rate of the experiments.

• Journal of the Optical Society of Korea
• /
• 제17권6호
• /
• pp.525-532
• /
• 2013

Contrary to the academic interests of other existing studies elsewhere, this study deals with how the alignment algorithms such as sensitivity or Differential Wavefront Sampling (DWS) can be better used under effects from field, compensator positioning and environmental errors unavoidable from the shop-floor alignment work. First, the influences of aforementioned errors to the alignment state estimation was investigated with the algorithms. The environmental error was then found to be the dominant factor influencing the alignment state prediction accuracy. Having understood such relationship between the distorted system wavefront caused by the error sources and the alignment state prediction, we used it for simulated and experimental alignment runs for Infrared Optical System (IROS). The difference between trial alignment runs and experiment was quite close, independent of alignment methods; 6 nm rms for sensitivity method and 13 nm rms for DWS. This demonstrates the practical usefulness and importance of the prior error analysis using the alignment algorithms before the actual alignment runs begin. The error analysis methodology, its application to the actual alignment of IROS and their results are described together with their implications.

• 한국정밀공학회지
• /
• 제11권1호
• /
• pp.150-156
• /
• 1994

To meet the process requirement of semiconductor device manufacturing, it is necessary to improve the alignment accuracy in exposure equipments. We developed the excimer laser stepper and will describe the methodology for alignment measurement and experimental results. Our wafer alignment system consists of off-axis optics, TTL(Through The Lens) optics and high precision stage. Off-axis alignment utilizes the image processing and /or diffraction from thealign marks of off-centered chip area. On the other hand, TTL alignment can be used for the die-by-die alignment using dual beam interferometry. When only off-axis alignment was used, the experimental alignment error(lml+3 .sigma. ) was 0.26-0.29 .mu. m, and will be reduced down to 0.15 .mu. m by adding TTL alignment.

• 한국통신학회:학술대회논문집
• /
• 한국통신학회 2004년도 추계종합학술대회 논문 초록집
• /
• pp.138-138
• /
• 2004

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2003년도 ICCAS
• /
• pp.273-277
• /
• 2003

A general process of electronic assembly is composed of a series of geometric alignments and bonding/screwing processes. After assembly, the function is tested in a following process of inspection. However, assembly of micro-optic devices requires both processes to be performed in equipment. Coarse geometric alignment is made by using vision and optical function is improved by the following fine motion based on feedback of tunable laser interferometer. The general system is composed of a precision robot system for 3D assembly, a 3D vision guided system for geometric alignment and an optical feedback system with a tunable laser. In this study, we propose a new fast alignment algorithm of micro-optic devices for both of visual and optical alignments. The main goal is to find a fastest alignment process and algorithms with state-of-the-art technology. We propose a new approach with an optimal sequence of processes, a visual alignment algorithm and a search algorithm for an optimal optical alignment. A system is designed to show the effectiveness and efficiency of the proposed method.

• 한국광학회지
• /
• 제4권1호
• /
• pp.15-21
• /
• 1993

본 연구에서는 설계제작된 KrF 엑시머 레이저 스텝퍼는 광원인 KrF엑시머 레이저, 조명광학계, 축소트영광학계, 정밀구동 웨이퍼 스테이지, 정렬시스템 및 이들을 제어하기 위한 제어계로 구성되어 있다. 본 실험에서 사용한 KrFdprtlaj 레이저는 밴드폭 3pm, 반복주파수 200Hz, 평균축력 3W이고, 5:1 투영렌즈는 N.A. 0.42, 전체 필드영역 $\varphi$21.2mm, 왜곡수차 최대 60nm 이하이다. 또한 정밀구동 웨이퍼 스테이지의 재현성과 해상도는 각각 $\pm$0.08$\mu\textrm{m}$/200mm(3 sigma), 100mm 반경에서 0.05 $\mu\textrm{m}$이다. 자동 초점 시스템은 $\pm$50$\mu\textrm{m}$범위에서 0.1$\mu\textrm{m}$의 해상도를 나타냈으며, 자동수평시스템은 120 arcsec 범위에서 larcsec의 해상도를 나타냈다. OFF-AXIS 정렬방식에서는 0.2$\mu\textrm{m}$의 해상도를 가지며, 두빔의 간섭을 이용한 새로운 TTL 정렬은 0.1$\mu\textrm{m}$의 해상도를 나타냈다. 스텝퍼 패턴 실험결과 SAL603레지스트를 사용하였을 때 웨이퍼의 노광후 열처리 $105^{\circ}C$, 60초에서 0.3$\mu\textrm{m}$ Lines and Spaces(L/S)까지 해상되었으며, 0.34$\mu\textrm{m}$ L/S에서 1$\mu\textrm{m}$의 초점심도를 얻을 수 있었다. 마스크 패턴과 레지스트 패턴의 선형성은 0.4$\mu\textrm{m}$ L/S가지 유지 되었다. 또한 XP-89131레지스트의 경우 노광후 열처리 $110^{\circ}C$, 60초에서 0.34$\mu\textrm{m}$ L/S까지 해상됨을 알수 있었다.

• KSII Transactions on Internet and Information Systems (TIIS)
• /
• 제6권1호
• /
• pp.229-240
• /
• 2012

Advances in MEMS and CMOS technologies have motivated the development of low cost/power sensors and wireless multimedia sensor networks (WMSN). The WMSNs were created to ubiquitously harvest multimedia content. Such networks have allowed researchers and engineers to glimpse at new Machine-to-Machine (M2M) Systems, such as remote monitoring of biosignals for telemedicine networks. These systems require the acquisition of a large number of data streams that are simultaneously generated by multiple distributed devices. This paradigm of data generation and transmission is known as event-streaming. In order to be useful to the application, the collected data requires a preprocessing called data fusion, which entails the temporal alignment task of multimedia data. A practical way to perform this task is in a centralized manner, assuming that the network nodes only function as collector entities. However, by following this scheme, a considerable amount of redundant information is transmitted to the central entity. To decrease such redundancy, data fusion must be performed in a collaborative way. In this paper, we propose a collaborative data alignment approach for event-streaming. Our approach identifies temporal relationships by translating temporal dependencies based on a timeline to causal dependencies of the media involved.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
• /
• 한국우주과학회 2011년도 한국우주과학회보 제20권1호
• /
• pp.31.1-31.1
• /
• 2011

In this study, we investigated alignment state estimation performances of the three methods i.e. merit function regression (MFR), differential wavefront sampling (DWS) and Multiple Design Configuration Optimization (MDCO). The three target optical systems are 1) a two-mirror Cassegrain system for deep space Earth observation, 2) intermediate size three-mirror anastigmat for Earth ocean monitoring, and 3) extremely large segmented optical system for astronomical observation. We ran alignment state estimation simulation for several alignment perturbation cases including 1mm to 10mm in decenter and from 0.1 to 1 degree in tilt perturbation error for the two-mirror Cassegrain system. In general, we note that MDCO shows more competitive estimation performance than MFR and DWS. The computational concept, case definition and the simulation results are discussed with implications to future works.

• 한국광학회지
• /
• 제15권4호
• /
• pp.391-396
• /
• 2004

인공위성용 지구관측 카메라나 우주관측 망원경에는 크기와 무게의 제약 때문에 Cassegrain 방식의 망원경이 많이 쓰인다. 이와 같은 우주광학계의 성공적인 임무수행을 위해서는 망원경부의 정밀한 광학정렬이 매우 중요하다. 본 논문에서는 정렬 정밀도에 따른 Cassegrain 방식 망원경부의 광학정렬 방법 중, 간섭무늬를 이용한 방법, 파면오차를 이용한 방법, 역최적화 광학정렬 방법 등을 모사를 통해 제시하고, 현재 개발 중인 구경 300 mm급 소형 위성용 카메라에 적용한 광학정렬 실험 결과를 정리한다.

• 한국광학회지
• /
• 제15권3호
• /
• pp.254-257
• /
• 2004

광집속장치의 광학정렬 광학계로 기존의 자동시준 광학계 대신 null 광학계를 제안하였다. 구경 30 cm 급 광집속장치 집속광학계의 광학정렬을 위한 null 광학계를 설계하고 성능을 분석하였다. null 광학계의 기울기 정럴오차에 대한 비축수차는 매우 작지만, 기울기 정렬오차에 대한 출력 광선의 기울기 변화는 4배로 확대되어 집속광학계 광학정렬 점검장치로서 우수하게 사용될 수 있다.