• Nuclear Engineering and Technology
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• v.54 no.10
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• pp.3703-3716
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• 2022

Target alignment technology is one of the most critical technologies in laser fusion experiments and is an important technology related to the success of laser fusion experiments. In this study, by combining the open-loop and closed-loop errors of the target alignment, the Kalman state observer is used to estimate the position of the target, which improves the observation precision of the target alignment. Then the optimized result is used to guide the alignment of the target. This method can greatly optimize the target alignment error and reduce uncertainty. With the improvement of the target alignment precision, it will greatly improve the reliability and repeatability of the experiments' results, thereby improving the success rate of the experiments.

• Journal of the Optical Society of Korea
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• v.17 no.6
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• pp.525-532
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• 2013

Contrary to the academic interests of other existing studies elsewhere, this study deals with how the alignment algorithms such as sensitivity or Differential Wavefront Sampling (DWS) can be better used under effects from field, compensator positioning and environmental errors unavoidable from the shop-floor alignment work. First, the influences of aforementioned errors to the alignment state estimation was investigated with the algorithms. The environmental error was then found to be the dominant factor influencing the alignment state prediction accuracy. Having understood such relationship between the distorted system wavefront caused by the error sources and the alignment state prediction, we used it for simulated and experimental alignment runs for Infrared Optical System (IROS). The difference between trial alignment runs and experiment was quite close, independent of alignment methods; 6 nm rms for sensitivity method and 13 nm rms for DWS. This demonstrates the practical usefulness and importance of the prior error analysis using the alignment algorithms before the actual alignment runs begin. The error analysis methodology, its application to the actual alignment of IROS and their results are described together with their implications.

• Journal of the Korean Society for Precision Engineering
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• v.11 no.1
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• pp.150-156
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• 1994

To meet the process requirement of semiconductor device manufacturing, it is necessary to improve the alignment accuracy in exposure equipments. We developed the excimer laser stepper and will describe the methodology for alignment measurement and experimental results. Our wafer alignment system consists of off-axis optics, TTL(Through The Lens) optics and high precision stage. Off-axis alignment utilizes the image processing and /or diffraction from thealign marks of off-centered chip area. On the other hand, TTL alignment can be used for the die-by-die alignment using dual beam interferometry. When only off-axis alignment was used, the experimental alignment error(lml+3 .sigma. ) was 0.26-0.29 .mu. m, and will be reduced down to 0.15 .mu. m by adding TTL alignment.

• Proceedings of the Korean Institute of Communication Sciences Conference
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• 2004.11a
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• pp.138-138
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• 2004

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.273-277
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• 2003

A general process of electronic assembly is composed of a series of geometric alignments and bonding/screwing processes. After assembly, the function is tested in a following process of inspection. However, assembly of micro-optic devices requires both processes to be performed in equipment. Coarse geometric alignment is made by using vision and optical function is improved by the following fine motion based on feedback of tunable laser interferometer. The general system is composed of a precision robot system for 3D assembly, a 3D vision guided system for geometric alignment and an optical feedback system with a tunable laser. In this study, we propose a new fast alignment algorithm of micro-optic devices for both of visual and optical alignments. The main goal is to find a fastest alignment process and algorithms with state-of-the-art technology. We propose a new approach with an optimal sequence of processes, a visual alignment algorithm and a search algorithm for an optimal optical alignment. A system is designed to show the effectiveness and efficiency of the proposed method.

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.6 no.1
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• pp.229-240
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• 2012

Advances in MEMS and CMOS technologies have motivated the development of low cost/power sensors and wireless multimedia sensor networks (WMSN). The WMSNs were created to ubiquitously harvest multimedia content. Such networks have allowed researchers and engineers to glimpse at new Machine-to-Machine (M2M) Systems, such as remote monitoring of biosignals for telemedicine networks. These systems require the acquisition of a large number of data streams that are simultaneously generated by multiple distributed devices. This paradigm of data generation and transmission is known as event-streaming. In order to be useful to the application, the collected data requires a preprocessing called data fusion, which entails the temporal alignment task of multimedia data. A practical way to perform this task is in a centralized manner, assuming that the network nodes only function as collector entities. However, by following this scheme, a considerable amount of redundant information is transmitted to the central entity. To decrease such redundancy, data fusion must be performed in a collaborative way. In this paper, we propose a collaborative data alignment approach for event-streaming. Our approach identifies temporal relationships by translating temporal dependencies based on a timeline to causal dependencies of the media involved.

• Bulletin of the Korean Space Science Society
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• 2011.04a
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• pp.31.1-31.1
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• 2011

In this study, we investigated alignment state estimation performances of the three methods i.e. merit function regression (MFR), differential wavefront sampling (DWS) and Multiple Design Configuration Optimization (MDCO). The three target optical systems are 1) a two-mirror Cassegrain system for deep space Earth observation, 2) intermediate size three-mirror anastigmat for Earth ocean monitoring, and 3) extremely large segmented optical system for astronomical observation. We ran alignment state estimation simulation for several alignment perturbation cases including 1mm to 10mm in decenter and from 0.1 to 1 degree in tilt perturbation error for the two-mirror Cassegrain system. In general, we note that MDCO shows more competitive estimation performance than MFR and DWS. The computational concept, case definition and the simulation results are discussed with implications to future works.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.391-396
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• 2004

Spaceborne earth observation or astronomical payloads often use Cassegrain-type telescopes due to the limits in mass and volume. Precision optical alignment of such a telescope is vital to the success of the mission. This paper describes the simulated optical alignment methods using interferograms, wavefront error, and reverse-optimization method for different levels of alignment accuracy. It concludes with the alignment experiment results of a Cassegrain type spaceborne camera with 300mm entrance pupil diameter.

• Korean Journal of Optics and Photonics
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• v.15 no.3
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• pp.254-257
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• 2004

A null optical system for monitoring the alignment of the optical beam director is proposed instead of the conventional autocollimator alignment system. A null optical system for the optical beam director of aperture 30 cm is designed and its performance is analysed.