• 한국정밀공학회지
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• 제23권10호
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• pp.103-112
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• 2006

This paper describes a theoretical analysis and experimental verification on the performances of a vacuum-compatible air bearing, which is designed with a cascaded exhaust scheme to minimize the air leakage in a vacuum environment. The design of the vacuum-compatible air bearing equipped with the differential exhaust system requires great care because several design parameters, such as the number of exhaust stages, diameter of exhaust tube, pumping speed of a vacuum pump, and bearing clearance greatly influence the air leakage and thus degree of vacuum. In this study, a performance analysis method was proposed to estimate the performances of the air bearing, such as load capacity, stiffness, and air leakage. Results indicate that the load capacity and stiffness of the air bearing was improved as its boundary pressure, which was determined by the $1^{st}$ exhaust method, was lowered, and the dominant factors on the chamber's degree of vacuum were the number of exhaust stages, exhaust tube diameter and bearing clearance. A vacuum chamber and air bearing stage using porous pad were fabricated to verify the theoretical analysis. The results demonstrate that chamber pressure up to an order of $10^{-3}$ Pa was achieved with the air bearing stage operating inside the chamber, and this analysis method was valid by comparing predicted values with experimental data, for the mass flow rates from the porous pad, and pressures at each exhaust port and chamber, respectively.

• 한국정밀공학회지
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• 제23권2호
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.73-74
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• 2009

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2001년도 유체기계 연구개발 발표회 논문집
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• pp.469-474
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• 2001

The feasibility of a oil-free motor-driven two-stage centrifugal compressor supported by air bump bearings is investigated. This centrifugal compressor is driven by 75kW motor at an operating speed of 39,000RPM md a pressure ratio of the compressor is up to 4. The analysis is performed, based upon bearing equilibrium position, bearing stiffness, Campbell diagram, unbalance response and stability. It is demonstrated in this paper that air bump bearings can be adopted well to a oil-free motor-driven centrifugal compressor.

• 한국정밀공학회지
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• 제30권12호
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• pp.1321-1325
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• 2013

In this paper, we proposed an air bearing stage with active magnetic preloads in vertical directions compensating motion errors and attenuating vibrations to improve dynamic characteristics. This preloaded design gives simpler configuration of the stage, and active control of preload can be used for compensating motion errors by feedforward method. To improve dynamic characteristics, vibration of the table is monitored by an accelerometer, and controlled by a DSP based digital controller with integrator and band pass filters for suppressing roll and pitch vibration modes. The modes were evaluated by measuring frequency response functions, and compared with compensated responses. This showed effective results for suppressing poorly damped regenerative vibration of air bearings.

• 한국유체기계학회 논문집
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• 제5권1호
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• pp.55-61
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• 2002

The feasibility of an oil-free, motor-driven, two-stage centrifugal compressor supported by air bump bearings is investigated. This centrifugal compressor is driven by a 75 kW motor at an operating speed of 39,000 RPM, and a pressure ratio of the compressor is set up to 4. The analysis is performed by using bearing equilibrium position, heaving stillness, Campbell diagram, unbalance response, and stability. It is demonstrated in this paper that air bump bearings can be adopted well to an oil-free, motor-driven, centrifugal compressor. Specially, Cu-coated bump bearings have enough damping force to reduce a synchronous unbalance for rigid modes of the two-stage compressor. Futhermore, this concept may be applied to the flexible rotor system such as high speed turbomachinery with a super critical speed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.33-34
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• 2007

• 한국공작기계학회논문집
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• 제13권5호
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• pp.38-48
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• 2004

Recently the use of high-speed equipment in machine-tool industry has greatly increased, which requires the development of prognostics and prediction methods on the design stage. Conversion of the test/experiments stage from real to virtual reality will not only significantly reduce the design and manufacturing cost, but will also increase design quality. This paper shows how it is possible to develop the automated system for the design calculations of the air-bearing spindles. First, the general calculation method is introduced. It contains several steps, namely, geometry identification, pressure calculation, stiffiness calculation, dynamics characteristics calculation. For geometry identification reducing spindle shaft to rings was proposed, which helps to automate the calculation process. For pressure calculation the Peshti method was implemented. For stiffiness calculation the analysis was made, which shown the necessity of correct calculation step selection. Then the system of ordinary differential equations containing influence coefficients was evolved, which is used for trjectories calculation. The graphical representation of the calculation results shows the dynamic behavior of the spindle unit concerning various working conditions. Finally, this automated system is illustrated by an example of the air-bearing spindle calculation.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 1998년도 유체기계 연구개발 발표회 논문집
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• pp.159-165
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• 1998

Bearing design of turbo type geared centrifugal air compressor for low vibration level has been studied. The Transfer Matrix Method was used in this paper to analyze the air-compressor consisting of impellers, multi-stage geared rotors, and oil-film hearings. We have to consider this air-compressor as multi-geared rotating system, because characteristics of rotor-bearing system are different from conventional characteristics of non-rotating system. From the view point of Rotordynamics, the stiffness and damping coefficient of oil-film bearing in case of compressor system are more sensitive than other design parameters such as shaft length, shaft diameter and the weight of impellers, etc. Therefore, the stiffness and damping coefficients on each bearing were considered as design parameters. As the result of this study, turbo type air compressor with low vibration level can be achieved.

• 한국산학기술학회논문지
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• 제21권11호
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• pp.554-560
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• 2020

평판 디스플레이 제조 공정에서 대상물의 위치 결정을 위해 고정밀 평면 모션 스테이지를 사용한다. 이 유형의 스테이지는 일반적으로 마찰이 없는 선형 모터와 에어 베어링을 사용하며, 고정밀 위치 센서로 레이저 간섭계를 사용한다. 스테이지의 불가피한 기생 운동에 의해 야기되는 요 모션 오차는 위치 결정 대상체의 향 변화를 의미하므로, 스테이지의 성능과 공정 정밀도 향상을 위해 요 모션 오차의 실시간 동적 보정은 매우 중요하다. 요 모션 오차 보상에는 갠트리 제어가 일반적이며, 이 방법을 공기베어링 가이드를 사용하는 스테이지에 적용하기 위해서 회전 모션을 허용하는 유연기구가 스테이지에 적용된다. 본 논문은 공기베어링과 유연기구를 갖춘 H형 XY 스테이지의 정속 구동 성능을 개선하는 방법을 제안한다. 유연기구를 포함한 스테이지의 갠트리 제어 시 선형 모터로부터 발생하는 상호 리플의 발생 원인을 분석하고, 이러한 상호 리플을 보상하는 방안으로 적응 학습 제어를 제시한다. 제시 방안의 검증을 위해 시뮬레이션을 수행하여, 보상 제어를 통해 속도 리플이 약 22 % 수준으로 감소함을 확인하였다. 그리고 요 모션 오차가 발생하는 스테이지 상태를 가정하여 리플 저감 효과를 검증하였다.