• 제목/요약/키워드: aerosol generator

검색결과 31건 처리시간 0.023초

극미세 절연체 박막 증착을 위한 액상전구체 공급장치 제작 (Liquid precursor delivery system for ultra thin film preparation)

  • 안태준;최범호;유윤섭
    • 한국정보통신학회:학술대회논문집
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    • 한국정보통신학회 2018년도 춘계학술대회
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    • pp.175-176
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    • 2018
  • 본 논문에서는 반도체 소자에 적용되는 극미세 박막을 낮은 온도에서 증착하기 위한 액상 전구체 공급 장치 개발 및 이의 특성 평가를 소개한다. 액상전구체 공급장치는 aerosol generator, vaporizer, vapor storage로 구성되어 있으며, 액체 상태의 전구 물질을 기화하여 박막 증착에 사용하는 장치이다. 이를 이용하여 알루미나 극미세 박막을 증착하여 그 특성을 평가하였다.

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공기 분위기에서 스파크 방전을 이용한 은 나노입자 생성 (Generation of Silver Nanoparticles by Spark Discharge Aerosol Generator Using Air as a Carrier Gas)

  • 오현철;정재희;박형호;지준호;김상수
    • 대한기계학회논문집B
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    • 제30권2호
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    • pp.170-176
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    • 2006
  • A spark discharge aerosol generator using air as a carrier gas has successfully been applied to silver nanoparticle production. The spark discharge between two silver electrodes, which was periodically obtained by discharging the capacitor, produced sufficient high temperatures to evaporate a small fraction of the silver electrodes. The silver vapor was subsequently supersaturated by rapid cooling and condensed to silver nanoparticles by nucleation and condensation. The morphology of the generated particles observed by transmission electron microscope was spherical. The element composition of the nanoparticles was silver, which was determined by energy dispersive X-ray spectroscopy. The crystal phase of the particles spark-generated under air atmosphere was composed of silver and silver oxides phase, which was determined by Xray diffraction analysis. While the nanoparticles generated under nitrogen atmosphere had only silver phase. This XRD data indicates that some fraction of the evaporated silver vapor could be oxidized in air atmosphere by the reaction with oxygen. A stable operation of the spark discharge generator has been achieved. The size and concentration of the particles can be easily controlled by altering the repetition frequency, capacitance, gap distance and flow rate of the spark discharge system.

Generation of Model Diesel Particles by Spark Discharge and Hydrocarbon Condensation

  • Kim, Hak-Joon;Kim, Jin-Ho;Choi, Young-Joo;Oh, Hyen-Chul;Chu, Jung-Bum;Kim, Sang-Soo
    • Journal of Mechanical Science and Technology
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    • 제20권11호
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    • pp.1972-1979
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    • 2006
  • This study was conducted in order to generate model particles which were similar to particles in diesel emission. Spark discharge was used for carbon agglomerates and hydrocarbon condensation for particles that consist of carbon agglomerates and hydrocarbon. The size of the carbon agglomerates, whose mean size were 30 and 70 nm, ranged between 15 and 200 nm, and the total number concentration of the particles ranged from 3 to $5{\times}10^7#/cm^3$ as the controllable variables in spark discharge generator changed. The result of the hydrocarbon condensation experiment showed that the final sizes of the particles enlarged by condensation did not depend on the initial sizes, but the maximum condensational growth of carbon agglomerates by dodecane ($C_{12}H_{26}$) condensation was 112 times the initial size of 40 nm, while the size of the agglomerates by benzene ($C_6H_6$) was 3.25 times its initial size.

흡입 독성 평가를 위한 다중벽 탄소나노튜브의 에어로졸 발생장치 개발 및 성능 평가 (Development and Performance Evaluation of Aerosol Generator of MWCNTs for Inhalation Toxicology)

  • 이건호;전기수;유일재;안강호
    • 한국입자에어로졸학회지
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    • 제9권4호
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    • pp.231-238
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    • 2013
  • Carbon nanotubes (CNTs) are one of the nanomaterials that were discovered by Iijima in 1991 for the first time. CNTs have long cylindrical and axi-symmetric structures. CNTs are made by rolling graphene sheets. Because of their large length-to-diameter ratio, they are called nanotubes. CNTs are categorized as single-walled carbon nanotubes (SWCNTs) or multi-walled carbon nanotubes (MWCNTs) based on the shell structures. CNTs are broadly used in various fields, such as scanning probe microscopy, ultra fine nano balance and medicine, due to their extraordinary thermal conductivity, electrical and mechanical properties. Because long, straight CNTs have the same shape as asbestos, which cause cancer in cells lining the lung, there have been many studies on the effects of MWCNTs on human health that have been conducted. Stable atomization of CNTs is very important for the estimation of inhalation toxicity. In the present study, electro-static assisted axial atomizer (EAAA), which is the instrument that uses MWCNTs and aerosolizes them by transforming the single fiber shape using ultrasonic dispersion and electric field, was invented. EAAA consists of a ultrasonic bath for dispersion of MWCNTs and a particle generator for atomizing single fibers. The performance evaluation was conducted in order to assess the possibilities of 6-hour straight atomization with stability, which is the suggested exposure time in a day for the estimation of inhalation toxicity.

에어로졸, 수증기 측정 라만 레이저 레이다 시스템 개발 (Development of Raman Laser Radar System for Aerosol and Water Vapor Measurements)

  • 박찬봉;이영우
    • 한국정보통신학회:학술대회논문집
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    • 한국정보통신학회 2012년도 춘계학술대회
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    • pp.158-161
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    • 2012
  • 대기 중 에어로졸과 수증기 농도를 측정하기 위한 라만방식 레이저 레이다 시스템을 개발하였다. 송신시스템은 Nd:YAG laser 3rd harmonic Generator 및 빔 확대기로 구성되며, 대기 중에 송신되는 파장은 355 nm 이다. 수신시스템은 500 mm 망원경과 3채널 분광기, 광전자증배관 검출기 및 신호처리모듈로 구성되며 최종적으로 처리되는 신호의 파장은 355 nm. 387 nm, 그리고 408 nm 이다. 본 시스템은 대기권의 수증기의 수직 농도분포를 약 100~200 m 의 분해능과 3~4 km의 가 측정거리를 가지고 측정할 수 있다.

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액적 발생 장치 개발 및 성능 평가 (Development and Performance Evaluation of a Liquid Particle Generator)

  • 허정혁;김대성
    • 한국산학기술학회논문지
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    • 제13권9호
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    • pp.4334-4340
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    • 2012
  • 본 연구에서는 미세 액적을 발생시키는 액적 발생 장치를 개발 제작하고 이에 대한 성능 평가를 실시하였다. 액적 발생 장치는 spray-evaporation method를 기초로 제작하였으며, 0.3mm, 0.5mm의 오리피스를 사용하였다. 압축 공기 공급 압력을 1bar에서 4bar로 증가시키면서 공급 압력에 따른 발생되는 액적 크기의 미세 정도를 비교하였다. 또한 SMPS(Scanning Mobility Particle Sizer)와 OPC(Optical Particle Counter)를 이용하여 서로 다른 오리피스를 장착한 액적 발생 장치에서 발생되는 액적의 크기 분포를 측정하였다. 연구 결과, 0.3mm 오리피스를 장착한 장치에서 발생되는 액적은 $0.3{\mu}m$ 인근의 크기가 가장 많았으며, 미립화되는 입자는 매우 안정적이었다. 또한 0.5mm 오리피스를 장착한 장치가 0.3mm 오리피스를 장착한 장치에 비해 발생되는 액적의 크기가 큰 것으로 나타났다. 이러한 액적 발생 장치는 입자의 미세한 응집 현상이 나타나는데, 이것은 내부 액체가 미세한 액적으로 미립화되어 분사되기 때문인 것으로 사료된다. 본 연구에서 제작한 액적 발생 장치는 미세 입자를 미립화하기 위한 에어로졸 발생 장치로 사용 가능한 것으로 판단된다.

액적 발생기의 종류 및 액적 발생 원리에 대한 고찰 (A Survey on the Droplet Generators and Principle of Droplet Generation)

  • 박봉엽;한재섭;김선진;김유
    • 한국추진공학회지
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    • 제4권2호
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    • pp.54-60
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    • 2000
  • 액적 발생기는 Rayleigh의 액적 분열 이론에 기초한 액적 발생기가 주류를 이루고 있으며, 모세관 액주의 진동 방법에 따라 여러가지 액적 발생기가 고안되었다. 현재는 액전 발생의 표준장비로 VOAG(Vibrating Orifice Monodisperse Aerosol Generate)가 사용되고 있다. 단일 액적을 사용한 연소실험에는 적하방법이나 필라멘트에 매달린 액적을 분리하여 사용하는 방법이 더 효과적임을 알았다 단일 액적을 분리하는 방법은 액적을 대전시켜 액적 흐름에서 단일 액적을 분리하는 방법을 사용한다.

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SMPS 시스템에서 용매(물)가 나노입도측정결과에 미치는 영향 (The Effect of Water Droplets on the Nano Particle Size Distribution using the SMPS System)

  • 황보선애;추민철
    • 한국분말재료학회지
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    • 제20권2호
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    • pp.129-133
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    • 2013
  • In this paper we have studied the effect of water droplet size on nano-particle size distribution using SMPS(Scanning Mobility Particle Sizer)system. It can be seen that the unknown peak at >100 nm was caused by water droplets which did not dry completely when DI water was used as a solvent in the SMPS system. Therefore, it is important to dry water droplets generated from atomizer in the SMPS system when measuring the particle size distribution using less than 100 nm nano-particles in diameter. From this study, It can be concluded that the napion was a useful material as dryer ones and using EAG(Electro Aerosol Generator) as a particle generator was the most effective in reducing the effect of water droplets.

Performance evaluation of an improved pool scrubbing system for thermally-induced steam generator tube rupture accident in OPR1000

  • Juhyeong Lee;Byeonghee Lee;Sung Joong Kim
    • Nuclear Engineering and Technology
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    • 제56권4호
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    • pp.1513-1525
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    • 2024
  • An improved mitigation system for thermally-induced steam generator tube rupture accidents was introduced to prevent direct environmental release of fission products bypassing the containment in the OPR1000. This involves injecting bypassed steam into the containment, cooling, and decontaminating it using a water coolant tank. To evaluate its performance, a severe accident analysis was performed using the MELCOR 2.2 code for OPR1000. Simulation results show that the proposed system sufficiently prevented the release of radioactive nuclides (RNs) into the environment via containment injection. The pool scrubbing system effectively decontaminated the injected RN and consequently reduced the aerosol mass in the containment atmosphere. However, the decay heat of the collected RNs causes re-vaporization. To restrict the re-vaporization, an external water source was considered, where the decontamination performance was significantly improved, and the RNs were effectively isolated. However, due to the continuous evaporation of the feed water caused by decay heat, a substantial amount of steam is released into the containment. Despite the slight pressurization inside the containment by the injected and evaporated steam, the steam decreased the hydrogen mole fraction, thereby reducing the possibility of ignition.