• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.25-28
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• 2001

Recently, STI(Shallow Trench Isolation) process has attracted attention for high density of semiconductor device as a essential isolation technology. Without applying the conventional complex reverse moat process, CMP(Chemical Mechanical Polishing) has established the Process simplification. However, STI-CMP process have various defects such as nitride residue, torn oxide defect, damage of silicon active region, etc. To solve this problem, in this paper, we discussed to determine the control limit of process, which can entirely remove oxide on nitride from the moat area of high density as reducing the damage of moat area and minimizing dishing effect in the large field area. We, also, evaluated the reliability and reproducibility of STI-CMP process through the optimal process conditions.

• Proceedings of the Earthquake Engineering Society of Korea Conference
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• 1997.04a
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• pp.77-87
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• 1997

The earthquake data(M$\geq$4.0) for post-1900 in the Korean Peninsula show temporal variation with active and quiet periods. The pattern is quite similar to northeastern China and Inner Zone of Southwest Japan. Yeongweol earthquake occurred in the seismic gap region of the Korean Peninsula. This is the first medium-size earthquake in inland region of the southern peninsula since 1978. The intensity based on the felt area estimation of about 400 places shows MMI III-Ⅷ in inland region. IIon Cheju Island and Ion Ulreung Island. The isoseismal of MMI Ⅶ shows an elongated circle in the direction of NE-SW and covers some parts of Jungdong-myon, Yeongweol-kun, Sindong-eup and Nam-myun, Jeongseon-kun. There occurred quite strong shaking, numerous cracks on the walls of buildings, falling and movement of slate and tiles on the roofs, falling of tiles from the wall and falling of materials from desks, rook falling from mountain and collapse of gravel lauers on the river side. The least square fitting of the intensity data of the Yeongweol earthquake by a popular intensity attenuation relation yields the following : I=Io＋1.82249 - 0.65295*InR - 0.00707*R

• Earthquakes and Structures
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• v.20 no.3
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• pp.325-335
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• 2021

The majority of Turkey's geography is at risk of earthquakes. Within the borders of Turkey, including the two major active faults contain the North-Eastern and Eastern Anatolia, earthquake, threatening the safety of life and property. On January 24, 2020, an earthquake of magnitude 6.8 occurred at 8:55 p.m. local time. According to the data obtained from the stations in the region, peak ground acceleration in the east-west direction was measured as 0.292 g from the 2308 coded station in Sivrice. It is thought that the earthquake with a magnitude of Mw 6.8 was developed on the Sivrice-Puturge segment of the Eastern Anatolian Fault, which is a left lateral strike slip fault, and the tear developed in an area of 50-55 km. Aftershocks ranging from 0.8 to 5.1 Mw occurred following the main shock on the Eastern Anatolian Fault. The earthquake caused severe structural damages in Elazığ and neighboring provinces. As a result of the field investigations carried out in this study, significant damage levels were observed in the buildings since it did not meet the criteria in the earthquake codes. Within the study's scope, the structural damage cases in reinforced concrete and masonry structures were investigated. Many structural deficiencies and mistakes such as non-ductile details, poor concrete quality, short columns, strong beams-weak columns mechanism, large and heavy overhangs, masonry building damages and inadequate reinforcement arrangements were observed. Requirements of seismic codes are discussed and compared with observed earthquake damage.

• Journal of the Korea Society for Simulation
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• v.23 no.3
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• pp.27-32
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• 2014

In this paper, We are going to propose the novel structure with improved behavior than the conventional vertical structure for VLSI CMOS circuits. For this, the proposed structure is the moat shape for STI. We want to analysis the characteristics of simulations about the electron concentration distribution, oxide layer shape of hot electron stress, potential flux and electric field flux, electric field fo themal damage and current-voltage characteristics in devices. Physically based models are the ambient and stress bias conditions of TCAD tool. As a analysis results, shallow trench structure were trended to be electric functions of passive as device dimensions shrink. The electrical characteristics influence of proposed STI structures on the transistor applications become stronger the potential difference electric field and saturation threshold voltage, are decreased the stress effects of active region. The fabricated device of based on analysis results data were the almost same characteristics of simulation results data.

• Korean Journal of Heritage: History & Science
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• v.45 no.3
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• pp.100-113
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• 2012

In the midst of recent active excavation, lots of Silla(新羅) roof-end tiles are unearthed in Yeongnam area(嶺南地域). These are confirmed the same tile frame as the Silla tiles excavated in Gyeongju(慶州). It is represented by the Silla tiles excavated in Ingaksa Temple(麟角寺) excavation research. Roof-end tile with arabesque design(唐草文平瓦當) etc. including roof-end tile with lotus design(蓮花文圓瓦當) are judged to be the tile frame produced by the same frame of roof-end tile that was excavated in Gyeongju, Wolseong(月城) and Hwangyongsa Temple(皇龍寺址). There are three kinds of cases concerning the transportation of tile manufacture ; the roof-end tile manufactured in Gyeongju directly moved to each region, only tile frame moved to site to be manufactured there, and tile manufacturer moved to site to manufacture there. This article considers the case of the roof-end tile manufactured in Gyeongju that was directly moved to each region. In case of the Silla tiles excavated in region especially Ingaksa Temple, the aspects of tiles in accordance with different era show the repeated coexistence, expansion and maintenance. This situation is significant as a clue to understand the supply from Gyeongju not as temporary, but as continuous. On the other hand, if the Gyeongju tiles flowed directly into each region, and if the road was built of gravels and the means of transportation was cart, the damage from movement must never be prevented. On the contrary, transportation through waterway might be advantageous due to the reduction of labor and damage rate and the easiness of loading. Accordingly, it tells us why the ruins where roof-end tiles were excavated located near big and small rivers or streams. Of course there are some ruins located in a fixed distance, but the distance may be enough to endure the impact put on tiles from the overland movement. Therefore, in case of direct inflow form long distance, transportation must be finished by overland movement after waterway movement.

• Economic and Environmental Geology
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• v.47 no.2
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• pp.133-146
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• 2014

There are many studies for the economic impact assessment of natural disasters, but there are few for volcanic disasters. Domestic academic research is not under active discussion because of the lack of national and social interest for volcanic eruption. This study investigated the research methodology for the economic impact assessment of natural disasters and discussed whether these can be applied to the economic impact analysis for the Baekdu Mountain volcanic disaster. The main findings are as follows: Firstly, Asia-Pacific region is the most affected by natural disasters and has the largest scale of damage. Asian and American Continent have the most economic damage. Secondly, Considering the types of damage caused by natural disasters and its complex structure, several methodologies that could be possible to estimate economic consequential damages have been compared. When applying each methodology to the Baekdu Mountain volcanic disaster, the scale of damage is likely to be over-estimated or under-estimated because of model-specific features. Thus, estimated values should be compared to each other after calculating the damage results. Thirdly, Japanese academic research on the volcanic disaster will be used as the starting point of the economic impact assessment studies for Baekdu Mountain. Using computer SW such as Hazus which is used in United States and RiskScape from New Zealand is also a good method to predict economic impact of the Baekdu Mountain volcanic disaster.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.149-153
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• 2003

Chemical mechanical polishing (CMP) technology for global planarization of multi-level inter-connection structure has been widely studied for the next generation devices. CMP process has been paid attention to planarized pre-metal dielectric (PMD), inter-layer dielectric (ILD) interconnections. Expecially, shallow trench isolation (STI) used to CMP process on essential. Recently, the direct STI-CMP process without the conventional complex reverse moat etch process has established by using slurry additive with the high selectivity between $SiO_2$ and $Si_3N_4$ films for the purpose of process simplification and n-situ end point detection(EPD). However, STI-CMP process has various defects such as nitride residue, tom oxide and damage of silicon active region. To solve these problems, in this paper, we studied the planarization characteristics using a high selectivity slurry(HSS). As our experimental results, it was possible to achieve a global planarization and STI-CMP process could be dramatically simplified. Also we estimated the reliability through the repeated tests with the optimized process conditions in order to identify the reproducibility of HSS STI-CMP process.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.12
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• pp.1039-1045
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• 2016

We investigated the protection capability of a plate against high speed projectiles demonstrating collision and penetration behaviors by finite element analysis. The element erosion method was used for penetration analysis, which showed that the speed of the projectile was slightly reduced by the collision with the protection plate. Protection capability was measured by the projectile's attitude angle change because the damage of our tanks by projectiles was also dependent on the projectile-tank collision angle. When the length of the protection plate was sufficiently long, the projectile was severely deformed and incapacitated. In the case of a small plate, the projectile was deformed only in the collision region. Thus, projection capability was investigated by the change of attitude angle. The effect of collision angle, velocity, and length of the plate on the rotational and vertical velocities of the projectile was investigated.

• Earthquakes and Structures
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• v.18 no.6
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• pp.731-742
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• 2020

Due to incessant earthquakes, many historic South Nias traditional timber houses have been damaged while some still stand today. As Nias is part of an extremely active tectonic region and the buildings are getting older by day, it is essential that these unique houses are well maintained and functioning well. A post-earthquake condition assessment was conducted on 2 selected buildings; 'Building A' survived the seismic shakings while 'Building B' got severely damaged. The overall condition assessment of "Building A' was found out to be poor and the main structural members were not performing as intended. In 'Building B', the columns were not well anchored to the ground, no tie beams to tie the columns together, and eventually, the timber columns moved in various directions during the earthquake. The frequent earthquakes along with deterioration due to lack of proper maintenance program are responsible for the non-survival of the buildings. Thus, a process guideline for managing the maintenance of these buildings was proposed. This is necessary because managing the maintenance works could help to extend the life of the buildings and seek to avoid the need for potentially expensive and disruptive intervention works, which may damage the cultural significance of the buildings.

• Journal of the Korean Geotechnical Society
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• v.23 no.3
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• pp.111-121
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• 2007

The paper presents a reliability-based method that can capture the impact of uncertainty of seismic loadings. The proposed method incorporates probabilistic concepts into the classical limit equilibrium and the Newmark-type deformation techniques. The risk of damage is then computed by Monte Carlo simulation. Random process and RMS hazard method are introduced to produce seismic motions and also to use them in the seismic slope analyses. The geotechnical variability and sampling errors are also considered. The results of reliability analyses indicate that in a highly seismically active region, characterization of earthquake hazard is the more critical factor, and characterization of soil properties has a relatively small effect on the computed risk of slope failure and excessive slope deformations. The results can be applicable to both circular and non-circular slip surface failure modes.