• 제목/요약/키워드: ablation properties

검색결과 130건 처리시간 0.027초

Dielectric Characteristics of $Al_2O_3$ Thin Films Deposited by Reactive Sputtering

  • Park, Jae-Hoon;Park, Joo-Dong;Oh, Tae-Sung
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
    • /
    • pp.100-100
    • /
    • 2000
  • Aluminium oxide (Al2O3) films have been investigated for many applications such as insulating materials, hard coatings, and diffusion barriers due to their attractive electrical and mechanical properties. In recent years, application of Al2O3 films for dielectric materials in integrated circuits as gates and capacitors has attracted much attention. Various deposition techniques such as sol-gel, metalorganic decomposition (MOD), sputtering, evaporation, metalorganic chemical vapor deposition (MOCVD), and pulsed laser ablation have been used to fabricate Al2O3 thin films. Among these techniques, reactive sputtering has been widely used due to its high deposition rate and easy control of film composition. It has been also reported that the sputtered Al2O3 films exhibit superior chemical stability and mechanical strength compared to the films fabricated by other processes. In this study, Al2O3 thin films were deposited on Pt/Ti/SiO/Si2 and Si substrates by DC reactive sputtering at room temperature with variation of the Ar/O2 ratio in sputtering ambient. Crystalline phase of the reactively sputtered films was characterized using X-ray diffractometry and the surface morphology of the films was observed with Scanning election microscopy. Effects of Th Ar/O2 ratio characteristics of Al2O3 films were investigated with emphasis on the thickness dependence of the dielectric properties. Correlation between the dielectric properties and the microstructure was also studied

  • PDF

펄스 레이저 증착기술에 의한 $Y_{3}Fe_{5)O_{12}$ 에피택셜 박막제조 (Magnetic Properties of Heteroepitaxial $Y_{3}Fe_{5)O_{12}$ Films Grown by a Pulsed Laser Ablation Technique)

  • 양충진;김상원
    • 한국자기학회지
    • /
    • 제5권2호
    • /
    • pp.128-133
    • /
    • 1995
  • YIG 단결정 소재가 주로 circulator, isolator, filter 및 resonator 등의 고주파 협대역 이동통신용 소자에 사용되고 있으나, 최근 소형/경량화에 따른 YIG 박막의 소요가 예상되면서 에피택셜 박막성장 기술이 많이 연구되고 있다. 본 연구에서 KrF excimer laser 를 사용하고, 산소분압을 20~500 mTorr로 조절하면서 박막을 제조하여 산소분압과 박막두께가 박막의 조직, 조성 및 자기특성에 미치는 영향을 조사하였다. 기판으로는 GGG(111)을 사용하였고 $700^{\circ}C$에서 증착을 실시하였다. 사용한 laser beam의 에너지 밀도는 $7.75\;J/cm_{2}$였다. 20 mTorr 산소분압 하에서 증착한 박막은 항상 에피택셜 성장을 보이고, $2.75\;{\mu}$ 두께의 시편은 $800\;^{\circ}C/20분$ 열처리 후에 $4{\pi}M_{s}$가 1500 Gauss, $H_{c}$는 3 Oe의 값을 보였고, 특히 $0.8\;\mu\textrm{m}$ 두께의 시편은 열처리 없이 $4{\pi}M_{s}$ 값이 1730 Gauss, $H_{c}$는 7 Oe의 우수한 특성을 보여, YIG 단결정의 자기특성에 육박하는 값을 보였다.

  • PDF

펨토초 레이저 절삭 공정을 이용한 생분해성 나노섬유 표면 미세 패터닝 공정 (Micropatterning on Biodegradable Nanofiber Scaffolds by Femtosecond Laser Ablation Process)

  • 정용우;전인동;김유찬;석현광;정석;전호정
    • 한국표면공학회지
    • /
    • 제49권6호
    • /
    • pp.555-559
    • /
    • 2016
  • A biodegradable nanofiber scaffolds using electrospining provide fibrous guidance cues for controlling cell fate that mimic the native extracellular matrix (ECM). It can create a pattern using conventional electrospining method, but has a difficulty to generate one or more pattern structures. Femtosecond(fs) laser ablation has much interested in patterning on biomaterials in order to distinguish the fundamental or systemic interaction between cell and material surface. The ablated materials with a short pulse duration using femtosecond laser that allows for precise removal of materials without transition of the inherent material properties. In this study, linear grooves and circular craters were fabricated on electrospun nanofiber scaffolds (poly-L-lactide(PLLA)) by femtosecond laser patterning processes. As parametric studies, pulse energy and beam spot size were varied to determine the effects of the laser pulse on groove size. We confirmed controlling pulse energy to $5{\mu}J-20{\mu}J$ and variation of lens maginfication of 2X, 5X, 10X, 20X created grooves of width to approximately $5{\mu}m-50{\mu}m$. Our results demonstrate that femtosecond laser processing is an effective means for flexibly structuring the surface of electrospun PLLA nanofibers.

MoS2/Montmorillonite Nanocomposite: Preparation, Tribological Properties, and Inner Synergistic Lubrication

  • Cheng, Lehua;Hu, Enzhu;Chao, Xianquan;Zhu, Renfa;Hu, Kunhong;Hu, Xianguo
    • Nano
    • /
    • 제13권12호
    • /
    • pp.1850144.1-1850144.13
    • /
    • 2018
  • A nano-$MoS_2$/montmorillonite K-10 (K10) composite was prepared and characterized. The composite contains two types of 2H-$MoS_2$ nanoparticles. One is the hollow spherical $MoS_2$ with a size range of 75 nm, and the other is the spherical nano cluster of $MoS_2$ with a size range of 30 nm. The two kinds of nano-$MoS_2$ were formed via assembly of numerous $MoS_2$ nano-platelets with a size of ~10 nm. A tribological comparison was then made among nano-$MoS_2$/K10, K10, nano-$MoS_2$ and a mechanical mixture of K10 and nano-$MoS_2$. K10 reduced the wear but slightly increased the friction. Nano-$MoS_2$ remarkably reduced both friction and wear. The mechanical mixture demonstrated better wear resistance than nano-$MoS_2$, indicating a synergistic anti-wear effect of nano-$MoS_2$ and K10. The synergistic effect was reinforced using nano-$MoS_2$/K10 instead of the mechanical mixture. A part of the $MoS_2$ in the contact region always lubricated the friction pair, and the rest formed a tribofilm. K10 segregated the friction pair to alleviate the ablation wear but magnified the abrasive wear. S-$MoS_2$ protects K10 and they together function as both a lubricant and an isolating agent to reduce the ablation and abrasive wear.

Effects of sodium dodecyl sulfate surfactant on up-conversion luminescence of Er3+/Yb3+-codoped NaLa(MoO4)2 nanocolloidal phosphor prepared by pulsed laser ablation in water

  • Kang, SukHyun;Jung, Kyung-Hwan;Kim, Kang Min;Kim, Won Rae;Han, HyukSu;Mhin, Sungwook;Son, Yong;Shim, Kwang Bo;Lee, Jung-Il;Ryu, Jeong Ho
    • Journal of Ceramic Processing Research
    • /
    • 제20권2호
    • /
    • pp.158-163
    • /
    • 2019
  • Er3+/Yb3+-codoped NaLa(MoO4)2 colloidal nanocrystals were synthesized by pulsed laser ablations in de-ionized water and sodium dodecyl sulfate (NaC12H25SO4, SDS) aqueous solution for up-conversion (UC) luminescence bio-labeling applications. The influences of the SDS molecules on the crystallinities, crystal morphologies, crystallite sizes, and UC luminescence properties of the prepared Er3+/Yb3+-codoped NaLa(MoO4)2 colloidal nanocrystals were investigated in detail. Under a 980-nm excitation, the Er3+/Yb3+-codoped nanocolloidal NaLa(MoO4)2 suspension exhibited a weak red emission near 670 nm and strong green UC emissions at 530 and 550 nm, corresponding to the intra 4f transitions of Er3+ (4F9/2, 2H11/2, 4S3/2) → Er3+ (4I15/2). When the SDS solution was used, a smaller average crystallite size, narrower size distribution, and enhanced UC luminescence were observed. These characteristics were attributed to the amphoteric SDS molecules attached to the positively charged Er3+/Yb3+-codoped NaLa(MoO4)2 colloidal nanocrystals, effectively occupying the oxygen defect on their surfaces. The Er3+/Yb3+-codoped nanocrystalline NaLa(MoO4)2 suspension prepared in the SDS solution exhibited a remarkably strong green emission visible to the naked eyes.

아크릴섬유의 기계적 물성에 대한 알곤플라즈마 처리의 영향 (Effect of Ar- Plasma Treatment on Mechanical Properties of Acrylic Fiber)

  • 서은덕
    • 한국염색가공학회지
    • /
    • 제16권6호
    • /
    • pp.30-34
    • /
    • 2004
  • Polyacrylontrile fiber was modified with argon low temperature plasma by RF glow discharge at 240 mTorr, 40 W to investigate the surface morphological changes and mechanical characteristics such as elongation, tenacity, and modulus. Analysis of the SEM images revealed that the plasma treatment resulted in significant ablation on the surfaces rendering a severe crack formation. The morphological changes were evident with short treatment time of argon plasma although longer treatment time damaged the surface more severely. The mechanical characteristics such as tenacity and elongation were deteriorated due to the plasma treatment. The tenacity of the fiber treated with argon-plasma for 5 min showed a decreased value up to 21.9 % when compared to the untreated fiber. While the corresponding initial modulus(0 - 1 %) increased markedly up to 44.3 %.

레이저 공정을 이용한 전력용 고유전율 PLT 박막 개발 (Development of high dielectric PLT thin films by laser processing for high power applications)

  • 이상렬
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
    • /
    • pp.1046-1049
    • /
    • 1998
  • PLT(28) ($Pb_{0.72}La_{0.28}Ti_{0.93}O_3$) dielectric thin films have been deposited on Pt/Ti/$SiO_2$/Si substrates in situ by a laser ablation. We have systematically changed the laser fluence from $0.5\;J/cm^2$ to $3\;J/cm^2$, and deposition temperature from $450^{\circ}C$ to $700^{\circ}C$. The surface morphology was changed from planar grain structure to columnar structure as the nucleation energy was increased. The PLT thin film with columnar structure showed good dielectric properties. It is shown that the deposition temperature strongly affect the film nucleation compared with the laser fluence.

  • PDF

펄스 레이저 증착법으로 제작된 $Pb_{1-x}La_xTi_{1-x/4}O_3$ (PLT(x)) 박막의 화학양론겅인 변화에 대한 연구 (Study of Stoichiometrical Changes in Pulsed Laser Deposited $Pb_{1-x}La_xTi_{1-x/4}O_3$ (PLT(x)) Thin Films)

  • 은동석;이상렬
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1998년도 하계학술대회 논문집 D
    • /
    • pp.1309-1311
    • /
    • 1998
  • $Pb_{1-x}La_xTi_{1-x/4}O_3$ (PLT(x)) thin film has been regarded as one of the most promising materials for applications of sensor, optic devices, and memory devices, because it exhibits various properties as changing the amount of Lanthanum component. So we have prepared PLT thin films on platinized silicon (actually Pt/Ti/$SiO_2$/Si) substrates in oxygen ambient by laser ablation. Energy dispersive X-ray (EDX) revealed that the stoichiometric thin films were fabricated.

  • PDF

Upwind Navier-Stokes 방법을 이용한 굴곡면에 충돌하는 초음속 제트유동의 수치 해석적 연구 (A Numerical Analysis of Supersonic Impinging Jet Flows on Curved Surfaces using Upwind Wavier-Stokes Method)

  • 서정일;송동주
    • 대한기계학회:학술대회논문집
    • /
    • 대한기계학회 2002년도 학술대회지
    • /
    • pp.229-232
    • /
    • 2002
  • For the purpose of Thermal Protection Material design problem, a numerical analysis of axisymmetric high temperature supersonic impinging jet flows of exhaust gas from combustor on curved surfaces has been accomplished. A modifed CSCM Upwind Navier-Stokes method which is able to cure the carbuncle Phenomena has been developed to study strong shock wave structure and thermodynamic wall properties such as pressure and heat transfer rate on various curved surfaces. The results show that the maximum heat transfer rate which is the most important parameter affecting thermo-chemical surface ablation on the plate did not occur at the center of jet impingement, but rather on a circle slightly away from the center of impingement and the shear stress distribution alone the wall is similar to the wall heat transfer late distribution.

  • PDF

Microstructure and Property Relationship of Laser Ablated YBCO Thin Films from Modified Melt-Textured Grown Targets

  • Kim, C.H.;Hahn, T.S.;Hong, K.S.
    • Progress in Superconductivity
    • /
    • 제2권1호
    • /
    • pp.15-19
    • /
    • 2000
  • [ $YBa_2Cu_3O_{7-\delta}$ ] thin films were deposited by laser ablation using modified melt-textured grown targets. As the laser energy density was increased, the films showed an increasing c-axis orientation and an improvement of superconducting properties. However, at 4 $J/cm^2$, the degree of c-axis alignment and $J_c$ of the film were considerably reduced. These were attributed to the enhanced a-axis outgrowths. It was shown that the increased laser energy density resulted in the formation of $Y_2O_3$ inclusions during the c-axis film growth, and that these inclusions nucleated the a-axis outgrowths.

  • PDF