A Study on the Reaction Mechanism of Selective Epitaxial Growth in $SiH_2Cl_2-H_2-HCl$ System
($SiH_2Cl_2-H_2-HCl$ 시스템에서의 실리콘 선택적 성장에 대한 표면 반응메커니즘 고찰)
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- Proceedings of the KIEE Conference
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- 1998.07d
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- pp.1288-1290
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- 1998