• 제목/요약/키워드: a-C:Ti

검색결과 3,740건 처리시간 0.022초

TiW 박막을 이용한 극한 환경 MEMS용 3C-SiC의 Ohmic contact 형성 (Ohmic Contact Formation of SiC for Harsh Environment MEMS Using a TiW Thin-film)

  • 정수용;노상수;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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    • pp.133-136
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    • 2004
  • In this study, the characteristics of 3C-SiC ohmic contact were investigated. Titanium-tungsten(TiW) films were used for contact metalization. The ohmic contact resistivity between 3C-SiC and TiW was measured by HP4155 and then calculated with the circular transmission line method(C-TLM). And also the physical properties of TiW and the interface between TiW and 3C-SiC were analyzed using XRD and AES. TiW films make a good role of a diffusion barrier and their contact properties with 3C-SiC are stable at high temperature.

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Ag-Ti계 합금을 사용한 SiC/SiC 및 SiC/연강 브레이징에 대한 연구 (A Study on SiC/SiC and SiC/Mild steel brazing by the Ag-Ti based alloys)

  • 이형근;이재영
    • Journal of Welding and Joining
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    • 제14권4호
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    • pp.99-108
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    • 1996
  • The microstructure and bond strength are examined on the SiC/SiC and SiC/mild steel joints brazed by the Ag-Ti based alloys with different Ti contents. In the SiC/SiC brazed joints, the thickness of the reaction layers at the bond interface and the Ti particles in the brazing alloy matrices increase with Ti contents. When Ti is added up to 9 at% in the brazing alloy. $Ti_3SiC_2$ phase in addition to TiC and $Ti_5Si_3$ phase is newly created at the bond interface and TiAg phase is produced from peritectic reaction in the brazing alloy matrix. In the SiC/mild steel joints brazed with different Ti contents, the microstructure at the bond interface and in the brazing alloy matrix near SiC varies similarly to the case of SiC/SiC brazed joints. But, in the brazing alloy matrix near the mild steel, Fe-Ti intermetallic compounds are produced and increased with Ti contents. The bond strengths of the SiC/SiC and SiC/mild steel brazed joints are independent on Ti contents in the brazing alloy. There are no large differences of the bond strength between SiC/SiC and SiC/mild steel brazed joints. In the SiC/mild steel brazed joints, Fe dissolved from the mild steel does not affect on the bond strength of the joints. Thermal contraction of the mild steel has nearly no effects on the bond strength due to the wide brazing gap of specimens used in the four-point bend test. The brazed joints has the average bond strength of about 200 MPa independently on Ti contents, Fe dissolution and joint type. Fracture in four-point bend test initiates at the interface between SiC and TiC reaction layer and propagates through SiC bulk. The adhesive strength between SiC and TiC reaction layer seems to mainly control the bond strength of the brazed joints.

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SiC입자와 Al-Ti합금 용탕간반응에 의한 in situ 생성 TiC입자강화 Al합금복합재료의 조직과 기계적특성 (Microstructure and Mechanical Properties of in situ TiCp/Al Composites Fabricated by the Interfacial Reaction between SiC Particles and Liquid Al-Ti Alloy)

  • 임석원;중전박도
    • 한국주조공학회지
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    • 제17권2호
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    • pp.170-179
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    • 1997
  • A noble technique has been developed for fabricating in situ formed $TiC_p/Al$ composites. In this process, fairly stable TiC particles were in situ synthesized in liquid aluminum by the interfacial reaction between an Al-Ti melt and SiC, which is a comparatively unstable carbide from the view-point of thermodynamics. It is possible in the present process to generate TiC particles of nearly 1 ${\mu}m$ in diameter, even utilizing SiC of 14 ${\mu}m$ as raw material. However, the dispersion behavior of TiC particles in the matrix depends on the size of the raw material SiC. Decomposing finer SiC makes the dispersion of TiC particles more uniform and the mechanical properties of composites are improved accordingly. The structure of in situ composites and their mechanical properties are affected by the fabrication temperature and the stirring time. It has been found that the most suitable condition for fabrication should be applied depending on the size of the raw material, even if the same kinds of carbide are used. Furthermore, although Al-Ti-Si system intermetallic compounds are detected in a $TiC_p/Al-Si$ composite which is fabricated by conventional melt-stirrng method, these compounds can not be observed in a $TiC_p/Al-Si$ composite made by this in situ production method. Hence the mechanical properties of the in situ $TiC_p/Al-Si$ composite are superior to those of the conventional $TiC_p/Al-Si$ composites.

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Ni/Ti 금속침투에 의한 반응결합소결 TiC계 복합체의 미세구조 및 기계적 특성 (Microstructure and Mechanical Properties of Reaction-Bonded Sintering TiC-Based Composite Prepared by Ni-Ti Metal Infiltration)

  • 한인섭;우상국;김홍수;양준환;정윤중
    • 한국세라믹학회지
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    • 제33권9호
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    • pp.995-1002
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    • 1996
  • The TiC-(Ni/Ti) composites were prepared by reaction bonding between TiC preforms and the melted mixture of Ni/Ti metal the atomic ratio of which were the ranges of 0.3 to 3. And their microstructures phase composi-tions and mechanical properties were investigated. During reaction bonding Ni/Ti metal mixture had a good wettability an permeability with TiC preforms and pore-free and fully dense sintered bodies were fabricated. TiC particle shape changed from spherical to angular platelet-like and grain size was grown with Ni/Ti atomic ratio increasing from 0.3 to 1. whereas grain growth of TiC particle was restrained and its shape changed gain from angular platelet-like to spherical when Ni/Ti atomic ratio was more than 2. Maximum bending strength and fracture toughness were obtained at the Ni/Ti atomic ratio being 1 their values were 582 MPa and 11.1 MPa.m1/2 respectively.

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Ti−TiH2−C−N2계에서 연소반응에 의한 TiC0.7N0.3 분말의 제조 (Preparation of Ti−TiH2−C−N2Powder by Combustion Reaction in the System of TiC0.7N0.3)

  • 신창윤;;원창환
    • 한국세라믹학회지
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    • 제44권1호
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    • pp.37-42
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    • 2007
  • The preparation of $TiC_{0.7}N_{0.3}$ powder by SHS in the system of $Ti-TiH_2-C$ ($N_2$ atmosphere) was investigated in this study. In the preparation of $TiC_{0.7}N_{0.3}$ powder, the effect of gas pressure, compositions such as Ti, $TiH_2$, C, and additive in mixture on the reactivity were investigated. At 50 atm of the initial inert gas pressure in reactor, the optimum composition for the preparation of pure $TiC_{0.7}N_{0.3}$ was $0.75Ti+0.25TiH_2+0.7C+0.5NaCl$. The $TiC_{0.7}N_{0.3}$ powder synthesized in this condition was a single phase with irregular shape.

Dissolution and Reprecipitation Behavior of TiC-TiN-Ni Cermets During Liquid-Phase Sintering

  • Yoon, Choul-Soo;Shinhoo Kang;Kim, Doh-Yeon
    • The Korean Journal of Ceramics
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    • 제3권2호
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    • pp.124-128
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    • 1997
  • An attempt was made to understand the dissolution and reprecipitation behavior of the constituent phases such as TiC, TiN, and Ti(CN) in TiC-TiN-Ni system. During the liquid-phase sintering the TiC phase was found to dissolve preferentially in Ni binder. The solid-solution phase, Ti(CN), formed around the TiN phase, resulting in a core/rim structure. This result was reproduced when large TiC particles were used with fine TiN particles. The path for the microstructural change in TiC-TiN-Ni system was largely controlled by the difference in the interfacial energy of each phase with the liquid binder phase. The results were discussed with thermodynamic principles.

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nc-TiC/a-SiC 나노복합체코팅의 기계적 특성 및 미세구조에서 비정질 SiC의 역할 (Role of Amorphous Silicon carbide in Microstructure and mechanical Properties of nc_TiC/a-SiC Nanocpomposite Coatings Prepared by PECVD )

  • 이주희;김광호
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2007년도 추계학술대회 논문집
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    • pp.123-124
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    • 2007
  • 3성분계 Ti-Si-C 코팅은 PECVD 기술에 의해 WC-Co 기판에 합성되었다. 이 연구에서 Ti-Si-C코팅에서의 비정질 silicon carbide 상의 효과는 XRD, XPS, TEM에 의해 분석되었다. TiC 결정의 입자크기는 비정질 silicon carbide의 침투 현상 때문에 Si의 함유량이 증가됨에 따라 감소된다. Ti-Si-C 코팅은 5.2%의 Si함유량에서 나노크기의 nc-TiC결정과 비정질 a-SiC로 이루어져 있고 최고 경도 33GPa와 탄성율 330GPa를 각각 보여주고 있다. 이 수치들은 순수한 TiC(-21GPa, 260Gpa)보다 눈에 띄게 높아졌다.

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PECVD 로 합성된 Ti-Si-C-N 코팅막의 미세구조 및 기계적 성질 (Microstructure and Mechanical Properties of Ti-Si-C-N Coatings Synthesized by Plasma-Enhanced Chemical Vapor Deposition)

  • 홍영수;김광호
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2008년도 추계학술대회 초록집
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    • pp.83-85
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    • 2008
  • 4성분계 Ti-Si-C-N 코팅막은 $TiCl_4$, $SiH_4$, $CH_4$, Ar, 그리고 $N_2$ 가스 혼합체를 이용하여 RF-PECVD 기법에 의해 Si 와 AISI 304 기판위에 합성하였다. Ti-C-(0.6)-N(0.4) 조성의 코팅막에 Si를 첨가함으로 Ti(C,N) 결정질은 줄어들고, Si3N4 및 SiC 비정질상이 나타났다. Ti-Si(9.2 at.%)-C-N의 조성에서 나노 크기의 nc-Ti(C,N) 결정질을 비정질 a-Si3N4/SiC가 둘러싸고 있는 형태의 나노 복합체를 나타내었다. 경도 24 Gpa의 Ti-C-N 코팅막은 Si를 첨가함으로 Ti-Si(9.2 at.%)-C-N 조성에서 46 Gpa의 최고 경도를 나타내었으며, 마찰계수의 경우에도 Ti-C-N 코팅막에 Si를 첨가함으로 크게 낮아졌다.

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가압 소결법으로 합성된 Ti3SiC2 소결체의 기계적 특성 (Mechanical Properties of Bulk Ti3SiC2 Synthesized by a Hot Press Sintering)

  • 조경선;황성식;권혁보;박상환
    • 한국세라믹학회지
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    • 제47권6호
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    • pp.560-565
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    • 2010
  • Nano laminated bulk $Ti_3SiC_2$ was synthesized by hot press process using TiCx/Si powder mixture at the temperature range of $1300^{\circ}C\sim1500^{\circ}C$. pure $Ti_3SiC_2$ was synthesized by a hot pressing above $1400^{\circ}C$, while unreacted TiCx were remained in bulk $Ti_3SiC_2$ which synthesized below $1400^{\circ}C$. The sintering density of bulk $Ti_3SiC_2$ were varied with the amount of TiCx. It was found that the mechanical properties and micro structures of bulk $Ti_3SiC_2$ were closely related to the amounts of TiCx which was controlled by the hot pressing temperature. The TiCx increase the flexural strength of bulk $Ti_3SiC_2$, while the fracture toughness and thermal shock resistance of bulk $Ti_3SiC_2$ were decreased with the content of TiCx. The plastic deformations of bulk $Ti_3SiC_2$ were appeared above $1000^{\circ}C$.

PECVD법에 의해 증착된 Ti-B-C코팅막 내의 보론함량과 증착온도에 따른 미세구조 및 기계적 물성의 변화 (The Effect of Boron Content and Deposition Temperature on the Microstructure and Mechanical Property of Ti-B-C Coating Prepared by Plasma-enhanced Chemical Vapor Deposition)

  • 옥정태;송풍근;김광호
    • 한국표면공학회지
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    • 제38권3호
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    • pp.106-111
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    • 2005
  • Ternary Ti-B-C coatings were synthesized on WC-Co and Si wafers substrates by a PECVD technique using a gaseous mixture of $TiCl_4,\;BCl_3,\;CH_4,\;Ar,\;and\; H_2$. The effects of deposition variables such as substrate temperature, gas ratio, $R_x=[BCl_3/(CH_4+BCl_3)]$ on the microstructure and mechanical properties of Ti-B-C coatings were investigated. From our instrumental analyses, the synthesized Ti-B-C coatings was confirmed to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB2, and amorphous carbon at low boron content, on the contrary, nanocrystallites $TiB_2$, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti-B-C coatings increased from $\~23 GPa$ of TiC to $\~38 GPa$ of $Ti_{0.33}B_{0.55}C_{0.11}$ coatings with increasing the boron content. The $Ti_{0.33}B_{0.55}C_{0.11}$ coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of $TiB_2$ and TiC. The microstruture and microhardness value of Ti-B-C coatings were largely depend on the deposition temperature.