• Title/Summary/Keyword: a-C:Ti

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InGaN/GaN Blue LED device 제조시 ALD (Atomic Layer Deposition) 방법으로 증착된 Al2O3 Film의 Passivation 효과

  • Lee, Seong-Gil;Bang, Jin-Bae;Yang, Chung-Mo;Kim, Dong-Seok;Lee, Jeong-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.211-212
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    • 2010
  • GaN 기반의 상부발광형 LED는 동작되는 동안 생기는 전기적 단락, 그리고 칩 위의 p-형 전극과 n-형 전극 사이에 생기는 누설전류 및 신뢰성 확보를 위하여 칩 표면에 passivation 층을 형성하게 된다. SiO2, Si3N4와 같은 passivation layers는 일반적으로 PECVD (Plasma Enhanced Chemical Vapor Deposition)공정을 이용한다, 하지만 이는 공정 특성상 plasma로 인한 damage가 유발되기 때문에 표면 누설 전류가 증가 한다. 이로 인해 forward voltage와 reverse leakage current의 특성이 저하된다. 본 실험에서는 원자층 단위의 박막 증착으로 인해 PECVD보다 단차 피복성이 매우 우수한 PEALD(Plasma Enhanced Atomic Layer Deposition)공정을 이용하여 Al2O3 passivation layer를 증착한 후, 표면 누설전류와 빛의 출력 특성에 대해서 조사해 보았다. PSS (patterned sapphire substrate) 위에 성장된 LED 에피구조를 사용하였고, TCP(Trancformer Copled Plasma)장비를 사용하여 에칭 공정을 진행하였다. 이때 투명전극을 증착하기 위해 e-beam evaporator를 사용하여 Ni/Au를 각각 $50\;{\AA}$씩 증착한 후 오믹 특성을 향상시키기 위하여 $500^{\circ}C$에서 열처리를 해주었다. 그리고 Ti/Au($300/4000{\AA}$) 메탈을 사용하여 p-전극과 n-전극을 형성하였다. Passivation을 하지 않은 경우에는 reverse leakage current가 -5V 에서 $-1.9{\times}10-8$ A 로 측정되었고, SiO2와 Si3N4을 passivation으로 이용한 경우에는 각각 $8.7{\times}10-9$$-2.2{\times}10-9$로 측정되었다. Fig. 1 에서 보면 알 수 있듯이 5 nm의 Al2O3 film을 passivation layer로 이용할 경우 passivation을 하지 않은 경우를 제외한 다른 passivation 경우보다 reverse leakage current가 약 2 order ($-3.46{\times}10-11$ A) 정도 낮게 측정되었다. 그 이유는 CVD 공정보다 짧은 ALD의 공정시간과 더 낮은 RF Power로 인해 plasma damage를 덜 입게 되어 나타난 것으로 생각된다. Fig. 2 에서는 Al2O3로 passivation을 한 소자의 forward voltage가 SiO2와 Si3N4로 passivation을 한 소자보다 각각 0.07 V와 0.25 V씩 낮아지는 것을 확인할 수 있었다. 또한 Fig. 3 에서는 Al2O3로 passivation을 한 소자의 output power가 SiO2와 Si3N4로 passivation을 한 소자보다 각각 2.7%와 24.6%씩 증가한 것을 볼 수 있다. Output power가 증가된 원인으로는 향상된 forward voltage 및 reverse에서의 leakage 특성과 공기보다 높은 Al2O3의 굴절률이 광출력 효율을 증가시켰기 때문인 것으로 판단된다.

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The characteristics of bismuth magnesium niobate multi layers deposited by sputtering at room temperature for appling to embedded capacitor (임베디드 커패시터로의 응용을 위해 상온에서 RF 스퍼터링법에 의한 증착된 bismuth magnesium niobate 다층 박막의 특성평가)

  • Ahn, Jun-Ku;Cho, Hyun-Jin;Ryu, Taek-Hee;Park, Kyung-Woo;Cuong, Nguyen Duy;Hur, Sung-Gi;Seong, Nak-Jin;Yoon, Soon-Gil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.62-62
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    • 2008
  • As micro-system move toward higher speed and miniaturization, requirements for embedding the passive components into printed circuit boards (PCBs) grow consistently. They should be fabricated in smaller size with maintaining and even improving the overall performance. Miniaturization potential steps from the replacement of surface-mount components and the subsequent reduction of the required wiring-board real estate. Among the embedded passive components, capacitors are most widely studied because they are the major components in terms of size and number. Embedding of passive components such as capacitors into polymer-based PCB is becoming an important strategy for electronics miniaturization, device reliability, and manufacturing cost reduction Now days, the dielectric films deposited directly on the polymer substrate are also studied widely. The processing temperature below $200^{\circ}C$ is required for polymer substrates. For a low temperature deposition, bismuth-based pyrochlore materials are known as promising candidate for capacitor $B_2Mg_{2/3}Nb_{4/3}O_7$ ($B_2MN$) multi layers were deposited on Pt/$TiO_2/SiO_2$/Si substrates by radio frequency magnetron sputtering system at room temperature. The physical and structural properties of them are investigated by SEM, AFM, TEM, XPS. The dielectric properties of MIM structured capacitors were evaluated by impedance analyzer (Agilent HP4194A). The leakage current characteristics of MIM structured capacitor were measured by semiconductor parameter analysis (Agilent HP4145B). 200 nm-thick $B_2MN$ muti layer were deposited at room temperature had capacitance density about $1{\mu}F/cm^2$ at 100kHz, dissipation factor of < 1% and dielectric constant of > 100 at 100kHz.

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Impurity analysis and acid leaching purification of silica minerals (실리카광물의 산침출 정제와 불순물 분석법 연구)

  • Lee, Kil Yong;Yoon, Yoon Yeol;Cho, Soo Young;Chae, Young-Bae
    • Analytical Science and Technology
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    • v.20 no.6
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    • pp.516-523
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    • 2007
  • Purification of silica mineral has been investigated by acid leaching of pulverized silica. A series of studies has been carried out on the effect of leaching silica powder as a function of the leaching time at the constant temperature of $80^{\circ}C$ in oxalic acid, aqua regia, and two mixed acids of HF/HCl, $HF/HNO_3$. The impurities of silica and leachantes were measured by neutron activation analysis (NAA), inductively coupled plasma atomic emission spectrometry (ICP-AES), atomic absorption spectrometry, x-ray fluorescence (XRF) method and wet analysis (WA). Certain metals, such as sodium, calcium, iron, aluminium and titanium, have been found in concentrations of hundreds or even thousands of mg/kg. Comparison of purification processes of silica and analytical methods of impurities in the silica was conducted in this study.

Mineralogy and Geochemistry of Quaternary Fault Gouges in the Southeastern Korean Peninsula (한반도 동남부 제4기 단층 비지의 광물학적 및 지구화학적 연구)

  • 손승완;장태우;김영규
    • Journal of the Mineralogical Society of Korea
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    • v.15 no.2
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    • pp.85-94
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    • 2002
  • XRF, XRD, EPMA have been used to investigate microstructures and mineralogical changes caused by the faulting and fluids associated with faulting in the Quaternary fault gouge zones at the Sangchon, Ipsil and Wangsan faults located at the southeastern part of the Korean Peninsula. The chemical compositions of faulted rocks and protoliths analyzed by XRF show that the fault gouges are relatively enriched in TiO$_2$, P$_2$O$_{5}$, MgO, and Fe$_2$O$_3$) compared with protoliths, indicating that the fluids associated with faulting were highly activated. XRD results show that the fault gouges predominantly consist of quartz, feldspar, calcite and clay minerals. Clay minerals formed in the gouge zones are mainly composed of smectite characterized by a dioctahedral sheet. Based on EPMA analyses various kinds of sulfide, carbonate, phosphate minerals were identified in the gouge zones and protoliths. Xenotime of grey fault gouge of the Sangchon fault and sulfide minerals of contact andesitic rock of Ipsil fault and contact grey andesitic rock of Wangsan fault were probably formed by inflow of hydrothermal solution associated with faulting prior to the Quaternary. Carbonate minerals of contact andesitic rock and gouge zone of the Ipsil fault were formed by inflow of fluid associated with faulting prior to the Quaternary. They are heavily fractured and have reaction rim on their edge, indicating that faultings and inflow of fluids were highly activated after carbonate minerals were formed. Calcites of Wangsan fault seemed to be formed in syntectonic or posttectonic Quaternary faulting.g.

A histomorphometric study on the effect of surface treatment on the osseointegration (티타늄 임플란트의 표면처리가 골유착에 미치는 영향에 관한 조직형태계측학적 연구)

  • Choi, Woong-Jae;Cho, In-Ho
    • The Journal of Korean Academy of Prosthodontics
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    • v.47 no.4
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    • pp.445-456
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    • 2009
  • Statement of problem: Many studies have been conducted to improve the primary stability of implants by providing bioactive surfaces via surface treatments. Increase of surface roughness may increase osteoblast activity and promote stronger bonding between bone and implant surface and it has been reported that bioactive surface or titanium can be obtained through alkali and heat treatment. Purpose: The purpose of this study was to evaluate the stability of alkali and heat treated implants via histomorphometric analysis. Material and methods: Specimens were divided into three groups; group 1 was the control group with machined surface, the other groups were treated for 24 hours in 5 M NaOH solution and heat treated for 1 hour at $600^{\circ}C$ in the atmosphere (group 2) and vacuum (group 3) conditions respectively. Surface characteristics were analyzed and fixtures were implanted into rabbits. The specimens were histologically and histomorphometrically compared according to healing periods and change in bone composition were analyzed with EPMA (Electron Probe Micro Analyzer). Results: 1. Groups treated with alkali and heat showed increase of oxidization layer and Na ions. Groups 2 which was heat treated in atmosphere showed significant increase of surface roughness (P<.05). 2. Histomorphometric analysis showed significant increase in BIC (bone to implant contact) according to increase in healing period and there was significant increases in groups 2 and 3 (P<.05). 3. BA(bone area) ratio showed similar results as contact ratio, but according to statistical analysis there was significant increase according to increase in healing period in group 2 only (P<.05). 4. EPMA analysis revealed no difference in gradation of bone composition of K, P, Ca, Ti in surrounding bone of implants according to healing periods but groups 2 and 3 showed increase of Ca and P in the initial stages. Conclusion: From the results above, it can be considered that alkali and heat treated implants in the atmosphere have advantages in osseointegration in early stages and may decrease the time interval between implantation and functional adaptation.

Crystal Structures of Dehydrated Partially $Sr^{2+}$-Exchanged Zeolite X, $Sr_{31}K_{30}Si_{100}A1_{92}O_{384}\;and\;Sr_{8.5}TI_{75}Si_{100}AI_{92}O_{384}$ (부분적으로 스트론튬이온으로 교환되고 탈수된, 제올라이트 X의 결정구조)

  • Kim Mi Jung;Kim Yang;Seff Karl
    • Korean Journal of Crystallography
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    • v.8 no.1
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    • pp.6-14
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    • 1997
  • The crystal structures of $Sr_{31}K_{30}-X\;(Sr_{31}K_{30}Si_{100}A1_{92}O_{384};\;a=25.169(5) {\AA}$) and $Sr_{8.5}Tl_{75}-X (Sr_{8.5}Tl_{75}Si_{100}A1_{92}O_{384};\;a=25.041(5) {\AA}$) have been determined by single-crystal X-ray diffraction techniques in the cubic space group $\=F{d3}\;at\;21(1)^{\circ}C$. Each crystal was prepared by ion exchange in a flowing stream of aqueous $Sr(ClO_4)_2\;and\;(K\;or\;T1)NO_3$ whose mole ratio was 1 : 5 for five days. Vacuum dehydration was done at $360^{\circ}C$ for 2d. Their structures were refined to the final error indices $R_1=0.072\;and\;R_w=0.057$ with 293 reflections, and $R_1= 0.058\;and\;R_w=0.044$ with 351 reflections, for which $I>2{\sigma}(I)$, respectively. In dehydrated $Sr_{31}K_{30}-X,\;all\;Sr^{2+}$ ions and $K^+$ ions are located at five different crystallographic sites. Six-teen $Sr^{2+}$ ions per unit cell are at the centers of the double six-rings (site I), filling that position. The remaining 15 $Sr^{2+}$ ions and 17 $K^+$ ions fill site II in the supercage. These $Sr^{2+}$ and $K^+$ ions are recessed ca $0.45{\AA}\;and\;1.06{\AA}$ into the supercage, respectively, from the plane of three oxygens to which each is bound. ($Sr-O=2.45(1){\AA}\;and\;K-O=2.64(1){\AA}$) Eight $K^+$ ons occupy site III'($K-O=3.09(7){\AA}\;and\;3.11(10){\AA}$) and the remaining five $K^+$ ions occupy another site III'($K-O=2.88(7){\AA}\;and\;2.76(7){\AA}$). In $Sr_{8.5}Tl_{75}-X,\;Sr^{2+}\;and\;Tl^+$ ions also occupy five different crystallographic sites. About 8.5 $Sr^{2+}$ ions are at site I. Fifteen $Tl^+$ ions are at site I' in the sodalite cavities on threefold axes opposite double six-rings: each is $1.68{\AA}$ from the plane of its three oxygens ($T1-O=2.70(2){\AA}$). Together these fill the double six-rings. Another 32 $Tl^+$ ions fill site II opposite single six-rings in the supercage, each being $1.48{\AA}$ from the plane of three oxygens ($T1-O=2.70(1){\AA}$). About 18 $Tl^+$ ions occupy site III in the supercage ($T1-O=2.86(2){\AA}$), and the remaining 10 are found at site III' in the supercage ($T1-O=2.96(4){\AA}$).

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Electrochemical Characteristics of Dental Implant in the Various Simulated Body Fluid and Artificial Saliva (다양한 유사체액과 인공타액에서 치과용 임플란트의 전기화학적 특성)

  • Kim, T.H.;Park, G.H.;Son, M.K.;Kim, W.G.;Jang, S.H.;Choe, H.C.
    • Journal of the Korean institute of surface engineering
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    • v.41 no.5
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    • pp.226-231
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    • 2008
  • Titanium and its alloy have been widely used in dental implant and orthopedic prostheses. Electrochemical characteristics of dental implant in the various simulated body fluids have been researched by using electrochemical methods. Ti-6Al-4V alloy implant was used for corrosion test in 0.9% NaCl, artificial saliva and simulated body fluids. The surface morphology was observed using scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX). The electrochemical stability was investigated using potentiosat (EG&G Co, 263A). The corrosion surface was observed using scanning electron microscopy (SEM). From the results of potentiodynamic test in various solution, the current density of implant tested in SBF and AS solution was lower than that of implant tested in 0.9% NaCl solution. From the results of passive film stability test, the variation of current density at constant 250 mV showed the consistent with time in the case of implant tested in SBF and AS solution, whereas, the current density at constant 250mV in the case of implant tested in 0.9% NaCl solution showed higher compared to SBF and AS solution as time increased. From the results of cyclic potentiodynamic test, the pitting potential and |$E_{pit}\;-\;E_{corr}$| of implant tested in SBF and AS solution were higher than those of implant tested in 0.9% NaCl solution.

Expression of EGFR on the Rat Gingival Epithelia During the Experimental Tooth Movement (실험적 치아이동시 백서 치은 상피의 표피성장인자 수용체의 발현)

  • Lee, Sang-Seon;Kim, Young-Ho;Bae, Chang
    • The korean journal of orthodontics
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    • v.28 no.5 s.70
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    • pp.775-782
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    • 1998
  • The purpose of this study is to investigate the change of the EGFR mRNA expression in the rat gingival epithelium by the experimental tooth movement. We applied reciprocal force between the upper anterior teeth using NiTi open coil spring and stainless steel wire for 1, 2 3, 7 days. For the detection of EGFR mRNA, in situ hybridization was done in the tissue samples which were taken from the pressure and tension sides of teeth. The results were as follows ; 1. The expression of EGFR mRNA was increased application-time dependently. a. Day 1 mild expression on the basal and spinous cell layers b. Day 2 . moderate expression on the whole layers c. Day 3 : severe expression on the basal and spinous cell layers 4. Day 7 severe expression on the whole layers 2. The expression level of EGFR mRNA in the pressure and tension sides were similar during the whole Period of experiment except seven day application at which the cornified layer of the tension side showed moderate expression. 3. Removal of the appliance after 7-day force application lowered the level of EGRF mRNA expression. It was returned to the mild and control (rare) level at three and seven days after the removal, respectively. In conclusion, EFGR mRNA was increased by the experimental tooth movement on the rat ginigval epithelium. Up-regulation of EGFR mRNA in the gingival epithelium can be regarded as responses to the possible changes caused by the physical stersses to the oral environment to maintain the homeostatic conditions of the periodontium.

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Effects of Dietary $\omega$-Fatty Acids on Fatty Acids Composition and Storage Characteristics of Meats from Spent Hens (오메가 계열 지방산 급여가 산란노폐계육의 지방산 조성 및 저장성에 미치는 영향)

  • 박구부;김진형;이한기;김영직;김용곤;이정일;박태선;정태철
    • Korean Journal of Poultry Science
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    • v.24 no.2
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    • pp.73-83
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    • 1997
  • This study was conducted to investigate the influence of dietary $\omega$-fatty acids on fatty acids composition and storage characteristics in meat samples of spent hens. Spent hens were randomly assigned to one of the four dietary treatments : 1) Control (commercial feed), 2) T1 (commercial feed supplemented with 10% olive oil, 3) T2 (commercial feed with 10% canola oil), and 4) T3 (commercial feed with 10% sardine oil). They were fed one of the experimental diets for three weeks and slaughtered. The meat samples were stored at 4 ${\pm}$ 1 ˚C The storage characteristics and fatty acid contents were analyzed for meat samples stored over a period of 1, 3, 5, 7 and 9 days. The pH of all treatments significantly increased during the storage periods(P<0.05). The per-oxide values (POV) of all treatments were significantly increased up to 5 days ; after that the POV decreased significantly (P<0.05). The POV of treated groups were significantly higher than those of the Control in the thigh meat(P<0.05). The TBARS showed the highest POV among all treatments. Although the breast meat tended to he lower in POV than the thigh meat, no significant difference was detected between the two meats. The TBARS(thiobarbituric acid reactive substances) of all treatments were significantly increased as the storage period extended(P<0.05). After 3 days, the TB ARS of oil-treated groups were aignificantly higher than that of the Control (P<0.05). The T3 showed the highest TBARS among all treatments (P<0.05). The TBARS of the breast meat was lower than that of the thigh, but no statistical difference was found be- tween them. The unsaturated fatty acid content of the breast and thigh meats in all treatments were slightly decreased as the storage period extended. The oleic acid was higher in Ti, and the linoleic acid and linolenic acid were higher in T2 than the other treatments. The eicosapentaenoic acid and docosahexaenoic acid were higher in T3 than the other treatments. The unsaturated fatty acid contents of the breast meat were slightly lower than those of the thigh meat. The n-6 fatty acid contents of the breast and thigh meats were slightly increased as the storage periods ex-tended. The n-3 fatty acid content of T3 was the highest among all treatments. The n-6 fatty acid content of breast meat was lower than that of thigh meat. The n-6 fatty acid content of the breast meat was slightly lower than that of the thigh meat.

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Astaxanthin Biosynthesis in Transgenic Arabidopsis by Using Chyb Gene Encoding β-Carotene Hydroxylase (β-Carotene Hydroxylase 관련 Chyb 유전자를 이용한 형질전환 Arabidopsis에서 Astaxanthin의 생합성)

  • Lee, Ho-Jae;Kang, Kwon-Kyoo
    • Journal of Plant Biotechnology
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    • v.31 no.3
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    • pp.231-237
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    • 2004
  • Oxycarotenoids are oxygenated carotenoids that perform critical roles in plants. $\beta$-Carotene hydroxylase adds hydroxyl groups to the $\beta$-rings of carotenes and has been cloned from several bacteria and plants including Arabidopsis. This study was carried out to investigate the effect of $\beta$-carotene hydroxylase gene (Chyb) on the oxycarotenoids biosynthesis in the transgenic Arabidopsis. Construct of pGCHYB containing Chyb was established onto Gateway vector system (pENTR3C gateway vector and pH2GW7 destination vector). Arabidopsis thaliana (cv. Columbia) was transformed with Agrobacterium tumerfacience GV3101 harboring pGCHYB construct driven by 35S promoter and hygromycin resistant gene. Seven hundred bases paired PCR products, indicating the presence of Chyb gene, were found in the transformants by PCR analysis using Chyb primers. Hygromycin resistance assay showed that transgenes were stably inherited to next generation. The overexpression of the Chyb gene resulted in the decrease carotenoid content. Especially, astaxanthin unusual oxycarotenoid in wild type Arabidopsis was detected in the transgenic plants. This means that decreased carotenoids might be converted into astaxanthin metabolism with the aid of silent gene in the host.