• 한국기계기술학회지
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• 제13권4호
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• pp.93-99
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• 2011

This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE) and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 Ⅲ
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• pp.1279-1282
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• 2003

Estimation of human motion states is important enabling technologies for realizing a pervasive computing environment. In this paper, an improved method fur estimating human motion state from accelerometer data is introduced. Our method fur estimating human motion state utilizes various statistics of accelerometer data, such as mean, standard variation, skewness, kurtosis, eccentricity, as features for classification, and therefore is expected to be more robust than other existing methods that rely on only a few simple statistics. A series of experiments fur testing the effectiveness of the proposed method has been performed, and its result is presented.

• 소음진동
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• 제4권3호
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• pp.337-343
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• 1994

A method of the leak detection from the pipe system by using accelerometer is proposed. The signal detected from accelerometer is proved experimentally to be a dispersive wave. Based on the experiments, a method using the narrow band pass filter and the unit impulse response function is analyzed. The method uses the characteristics of the unit impulse response function, that the function is available evenin the narrow band signal because, unlike the cross correlation, it is normalized by the auto spectrum. The accelerometer is quite easier to use than the hydrophone in adapting to the pipe system.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1989년도 한국자동제어학술회의논문집; Seoul, Korea; 27-28 Oct. 1989
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• pp.54-58
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• 1989

The purpose of this paper is to develop a more accurate attitude algorithm with low grade gyro output. The proposed algorithm estimates attitudes by combining accelerometer and gyro output. For performance improvement of the algorithm, a method of velocity compensation is proposed for a better attitude estimation which is calculated from the accelerometer output. Velocity compensation is done by using Kalman Filter to estimate another velocity component.

• International Journal of Control, Automation, and Systems
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• 제4권5호
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• pp.615-623
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• 2006

The gyroscope free strap-down INS is composed only of accelerometers. Any gyroscope free INS navigation error is deeply affected by the accuracy of the sensor bias, scale factor, orientation and location error. However these parameters can be found by calibration. There is an important research issue about a multi-position calibration method in this paper. It provides a novel method to find the error parameters for the six-accelerometer INS. A superior simulation is shown that the multi-position calibration can find the specifications of a six-accelerometer INS in laboratory. From these parameters the six-accelerometer INS could apply in realistic navigation.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 학술대회지
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• pp.872-875
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• 2004

In this paper, thermal response analysis of a temperature controlled three-axis accelerometer for high temperature environments with integrated micro-heaters and temperature sensors is investigated with finite element method (FEM) program, ANSYS and infrared thermal measurement systems. And availability to application fields from a viewpoint about short thermal response time is discussed. In this paper, the time of three-axis accelerometer for high temperatures becoming $300^{\circ}C$ by integrated micro-heaters and temperature sensors to reduce thermal drift characteristics was analyzed as a thermal response time of this device. The simulated thermal response time (time until SOI piezoresistors actually becomes $300^{\circ}C$) of three-axis accelerometer for high temperatures with ANSYS is about 0.6s, and measured result with infrared temperature measurement systems is about 0.64s. Experimental results using infrared thermal measurement systems agreed well with these theoretical results.

• 센서학회지
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• 제13권6호
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• pp.430-435
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• 2004

The resolution of the accelerometer, fabricated with MEMS technology is mainly affected by mechanical and electrical noise. To reduce mechanical noise, we have to increase mass of the structure part and quality factor related with the degree of vacuum packaging. On the other hand, to increase mass of the structure part, the thickness of the structure must be increased and ICP-RIE is used to fabricate the high aspect ratio structure. At this time, footing effect make the sensitivity of the accelerometer decreasing. This paper presents a hybrid SOG(Silicon On Glass) Process to fabricate a lateral silicon accelerometer with differential capacitance sensing scheme which has been designed and simulated. Using hybrid SOG Process, we could make it a real to increase the structural thickness and to prevent the footing effect by deposition of metal layer at the bottom of the structure. Moreover, we bonded glass wafer to structure wafer anodically, so we could realize the vacuum packaging at wafer level. Through this way, we could have an idea of controlling of quality factor.

• International Journal of Control, Automation, and Systems
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• 제6권6호
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• pp.873-883
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• 2008

This paper presents a parametric study on the controller design scheme for a gyro-accelerometer to have robust performance under some parameter variations. In particular, an integral and derivative based controller design method is suggested to achieve the desired performances of stability margin, bandwidth, and uniformity of scale for both gyroscopes and accelerometers with uncertainties of quality factor and resonant frequency. The simulation result shows that the control loop based on the suggested method gives satisfactory performance robustness under parameter variations, demonstrating the usefulness of the proposed design scheme.

• International Journal of Automotive Technology
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• 제6권5호
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• pp.475-481
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• 2005

This paper deals with the algorithm of estimating the longitudinal speed of a braking vehicle using measurements from an accelerometer and a standard wheel speed sensor. We evolve speed estimation algorithms of increasing complexity and accuracy on the basis of experimental tests. A final speed estimation algorithm based on a Kalman filtering is developed to reduce measurement noise of the wheel speed sensor, error of the tire radius, and accelerometer bias. This developed algorithm can give peak errors of less than 3 percent even when the accelerometer signal is significantly biased.

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 제14회 정기총회 및 03년 동계학술발표회
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• pp.322-323
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• 2003

Silicon substrate was fabricated by bulk silicon micromachining and it's structure is based on a proof mass suspended by two beam. To monitor the acceleration, dynamic excitation of accelerometer was performed using a shaker. The attached FFPI and suspension beam are bent because support beam move with variation of the proof mass. Thus phase difference detected by the acceleration change. So we can know that resonance frequency of fabricated accelerometer is about 557 Hz and dynamic range was measured from 0 g to 2 g.