• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1994-1996
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• 1996

This paper presents the fabrication and testing of a polysilicon piezoresistive accelerometer with p+ silicon diaphragm by simple process such as two step photolithography for the RIE process to form the cantilevers and a deep anisotropic etch process for the complete fabrication of the accelerometer. The fabricated accelerometer consists of a seismic mass and four cantilevers on which polysilicon piezoresistors are formed. The measurement of the output signal from the bridge circuit of the fabricated accelerometer is carried out with the HP 3582A spectrum analyzer. The analysis of the experimental result is showed in terms of the sensitivity and the resonant frequency. At atmospheric condition, the measurement values of the sensitivity and the resonant frequency are $11\;{\mu}V/Vg$ and 475 Hz, respectively.

• Journal of Power System Engineering
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• v.7 no.2
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• pp.36-43
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• 2003

In this paper, the strain-gauge type accelerometer is developed. This type of accelerometer has simple structure and cost for manufacturing is cheap, compared with other types of accelerometer such as piezoelectric, capacitance and servo, etc. Also it is very sensitive to the low frequency vibration which is the prominent characteristics of the vibration occurring by vehicles moving across a bridge. Two prototype accelerometers are designed and manufactured based upon the FE(Finite Element) method and static and dynamic calibration tests are performed to check out the linearity, sensitivity and cross sensitivity, etc. Experimental results designate that the proposed accelerometer show reasonable performances compared to the commercial one.

• The Journal of Korea Robotics Society
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• v.5 no.4
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• pp.279-285
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• 2010

This paper presents the use of 3 axis accelerometer for getting the gait information including the number of gaits, stride and walking distance. Travel distance is usually calculated from the double integration of the accelerometer output with respect to time; however, the accumulated errors due to the drift are inevitable. The orientation change of the accelerometer also causes error because the gravity is added to the measured acceleration. Unless three axis orientations are completely identified, the accelerometer alone does not provide correct acceleration for estimating the travel distance. We proposed a way of minimizing the error due to the change of the orientation. Pedestrian localization is implemented with the heading angle and the travel distance. Heading angle is estimated from the rate gyro and the magnetic compass measurements. The performance of the localization is presented with experimental data.

• Journal of the Semiconductor & Display Technology
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• v.23 no.2
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• pp.33-37
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• 2024

Recently, wearable virtual reality devices are widely used. These instruments include a 3-axis accelerometer. User's heart rate information in virtual reality contents can be useful for measuring user experience. In this paper, we propose a method to measure the heart rate through a 3-axis accelerometer based on the principle of ballistocardiography without additional sensors. The angular velocity was successively measured in a time series by the 3-axis accelerometer mounted to the head. The frequency of the maximum magnitude is determined as the heart rate through frequency transform and band pass filtering of the time series signal. For verification, the heart rate calculated from photoplethysmography sensors acquired at the same time was compared as ground-truth. In the virtual reality, the user's heart rate information can be extracted without additional heart rate sensor, and the emotional state and fatigue can be measured.

• Journal of Institute of Control, Robotics and Systems
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• v.16 no.5
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• pp.440-445
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• 2010

This paper proposes a single accelerometer sensor control algorithm to mobile inverted pendulum, generally called 'Segway', and evaluates the performance of this system comparing to the conventional ones. The commercialized 'Prototype Segway-PT' is initially considered as a next-generation transport vehicle. However, this robot is operated by three gyroscopes and two accelerometers to control the posture and speed, and it requires the complex signal processing for fusing the two sets of data. As the result of this, the growth rate of market size of 'Segway' is slow because of its high price mainly. In this paper, the mobile inverted pendulum is operated by a single accelerometer to simplify the control system to lower the price. Low pass filter is one of the good sensors to reducing the variation of an accelerometer, but it has time delay. This time delay disturbs real-time mobile inverted pendulum control. Like this, other various algorithms are used for this system, but each one has its own weak point. So this paper proposes a new filtering method, median filter and EKF. Median filter is used to image processing to reject impulse elements like salt and pepper noise. As the major performance evaluation parameter for the accelerometer, the high-frequency to low frequency ratio from FFT (Fast Fourier Transform) is used. Effectiveness of the proposed algorithms has been verified through the real experiments and the results are demonstrated.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.192-194
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• 1993

In this paper, a silicon piezoresistive accelerometer of which the cantilevers have uniform thickness is designed and fabricated with SOI wafer. The accelerometer consists of a seismic mass and four cantilevers, and is fabricated mainly by the anisotropic etching method using EPW etchant. The fabrication processes are that of the frontside processes including the etching of the cantilevers and the doubleside alignment holes, the diffusion of the piezoresisters and patterning of the contact windows, and the metal connection process, and that of the backside processes including the etching of the shallow cavity and the seismic mass. Because of the uniformity of thickness, the performance of the accelerometer fabricated with SOI wafer is expected to be better than that of accelerometer fabricated by the time-controlled etching method.

• KIPS Transactions on Computer and Communication Systems
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• v.6 no.2
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• pp.67-74
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• 2017

This paper proposes a method of user authentication through the patterns of arm movement with a wrist-type wearable device. Using the accelerometer sensor which is built in the device, the 3-axis accelerometer data are collected. Then, the collected data are integrated and the periodic cycle are extracted. In the cycle, the features of frequency are generated with the accelerometer. With the frequency features, 2D Gaussian mixture are modelled. For authenticating an user, the data(the accelerometer) of the user at some point are tested with confidence interval of the Gaussian distribution. The model showed a valuable results for the user authentication with an example, which is average 92% accuracy with 95% confidence interval.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.2
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• pp.106-111
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• 2011

In this paper, assumed mode method on Euler beam theory is employed and signal distortion is considered to obtain the performances of a MEMS accelerometer which are a sensitivity and measurable frequency range(MFR). Not only the sensitivities and MFR but also the variations of dynamic responses and natural frequencies of the MEMS accelerometer are investigated for several sets of beam properties such as length, width, thickness and Young's modulus. It is stated that the variations of beam properties significantly influence the performances of the MEMS accelerometer and the relationship between sensitivities and MFR is inversely proportional to each other.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.10
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• pp.1101-1109
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• 2012

Accelerometers play a key role in the structural assessment. However, the current electric type accelerometers have certain limitations to apply some structures such as heavy cabling labor, installed sea structure and sensitivity to electromagnetic fields. An optical Fiber Bragg Grating (FBG) accelerometer has many advantages over conventional electrical sensors since their immunity to electromagnetic interference and their capability to transmit signals over long distance without any additional amplifiers, and there is no corrosion from sea water. In this paper, we have developed a new FBG-based accelerometer. The accelerometer consists of two cantilevered type beams and a mass and two rollers. A bragg grating element is not directly glued to a cantilever to avoid possible non-uniform strain in the element. Instead, the bragg grating element will be attached to rotation part that rolled inducing vertical movement of the mass and support cantilever beams so that the bragg grating element is uniformly tensioned to achieve a constant strain distribution. After manufacturing, we will prove the performance and the natural frequency of the accelerometer through the experiment with a vibration shaker. The FBG-based accelerometer is developed for measuring the vibration not exceeding 50 Hz for the marine and civil structures.

• Journal of Welding and Joining
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• v.29 no.1
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• pp.115-122
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• 2011

This study is to propose an in-process monitoring system for micro resistance spot welding processes using minute accelerometer. A minute accelerometer is mounted on the upper moving electrode tip holder. With its high sensitivity and frequency response characteristics, accelerometer output signal has been successfully recorded and integrated twice to reflect electrode expansion during micro spot welding processes. The analysis of electrode expansion pattern was attempted to find its correlation with spot weld quality. Major previous findings1-6) regarding spot weld quality assessment with the electrode expansion signal in large scale resistance spot welding processes were proved to be true in this in-process monitoring system.