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http://dx.doi.org/10.5050/KSNVE.2011.21.2.106

MEMS Accelerometer Modeling and Performance Analysis by Considering Signal Distortion  

Kim, Yong-Il (한양대학교 대학원 기계공학과)
Yoo, Hong-Hee (한양대학교 기계공학부)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.21, no.2, 2011 , pp. 106-111 More about this Journal
Abstract
In this paper, assumed mode method on Euler beam theory is employed and signal distortion is considered to obtain the performances of a MEMS accelerometer which are a sensitivity and measurable frequency range(MFR). Not only the sensitivities and MFR but also the variations of dynamic responses and natural frequencies of the MEMS accelerometer are investigated for several sets of beam properties such as length, width, thickness and Young's modulus. It is stated that the variations of beam properties significantly influence the performances of the MEMS accelerometer and the relationship between sensitivities and MFR is inversely proportional to each other.
Keywords
MEMS; Accelerometer; Sensitivity; Measurable Frequency Range; Signal Distortion;
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Times Cited By KSCI : 1  (Citation Analysis)
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