• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.5
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• pp.570-577
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• 2007

A micromachined convective accelerometer is a recently developed device. Typical micromachined accelerometers use a solid proof mass for measuring acceleration. But a micromachined convective accelerometer does not use a solid proof mass. A micromachined convective accelerometer is composed of a heating resistor and temperature sensors. This device measures acceleration by using convective heat transfer phenomenon. Therefore characteristics of a micromachined convective accelerometer are different as compared with typical micromachined accelerometer. In this research, we analyze the convective accelerometer by using transient convective heat transfer analysis. Based on the results of a convective accelerometer, we propose a new model which has improved performance.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.49 no.3
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• pp.124-132
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• 2000

In this paper, presented are an active surface-micromachined silicon accelerometer, force rebalance loop using parametric robust control method, and experimental results with a real micromachined accelerometer. And finally, a robust controller of the form of PID compensator was designed to construct force rebalance loop. Through the frequency response analysis, it is shown that the loop guarantees appropriate stability and robustness. Experiments with a real accelerometer demonstrated that the proposed loop effectively controls the position of the accelerometer's proof mass. It also demonstrated that the resolution of the fabricated accelerometer is better than 1mg. Compared with a commercial accelerometer the proposed force rebalance silicon accelerometer showed better performances.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.922-924
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• 2014

This paper is concerned with the analysis of natural vibration characteristics of an accelerometer used in power plant. The malfunction of the accelerometer in high-temperature environment may produce erroneous sensor signal and the erroneous signal may cause unpredicted accidents in power plants. Hence, the accelerometer which endures high temperature needs to be developed. In this study, the natural vibration characteristics of the accelerometer were investigated prior to the development of the high-temperature accelerometer. The main mechanical part of the accelerometer is a spiral spring. In this study, the dynamic characteristics of the spiral spring were investigated first by using a commercial finite element code. Numerical results show that the thickness of the spiral spring affects the dynamic characteristics. Numerical investigation on the effect of temperature on the performance of the accelerometer will follow.

• Journal of the Korean Society for Nondestructive Testing
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• v.31 no.6
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• pp.601-608
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• 2011

This paper presents the damage assessment of a building structure by using a novel optical fiber accelerometer system. Especially, a sub-scaled building model is designed and manufactured to check up the feasibility of the optical fiber accelerometer for structural health monitoring. The novel accelerometer exploits the moir$\acute{e}$ fringe optical phenomenon and two pairs of optical fibers to measure the displacement with a high accuracy, and furthermore a pendulum to convert the displacement into acceleration. A prototype of optical fiber accelerometer system has been successfully developed that consists of a sensor head, a control unit and a signal processing unit. The building model is also designed as a 4-story building with a rectangular shape of $200{\times}300$ mm of edges. Each floor is connected to the next ones by 6 steel columns which are threaded rods. Basically, a random vibration test of the building model is done with a shaker and all of acceleration data is successfully measured at the assigned points by the optical fiber accelerometer. The experiments are repeated in the undamaged state and the damaged state. The comparison of dynamic parameters including the natural frequencies and the eigenvectors is successfully carried out. Finally, the optical fiber accelerometer is proven to be prospective to evaluate dynamic characteristics of a building structure for the damage assessment.

• Journal of the korean Society of Automotive Engineers
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• v.3 no.1
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• pp.61-68
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• 1981

There are three types in frequency response accelerometer; one is lightly damped piezp type, another is oil damping stainguage type and the third is electro induction type accelerometer within electromagnetic damping. The usable frequency range of lightly damped accelerometers is limited to 0.2 of their mounted natural frequency for amplitude distortion of less than 5 percents. There have been situation where the measured motion contains unforeseen high - frequency components, which are regarded as such due to the accelerometer transfer function. There are several way to overcome amplitude distortion of the higher than anticipated frequency components; (I) to make use of the accelerometer with natural frequency three times and more as high as the measured frequency, (II) to establish data-analysis techniques which will account for the amplitude distortion, (III) to set up a notch filter circuit which has a transfer function that is the reciprocal of the accelerometer transfer function, and so on. This paper makes a report of the method as to(III), i. e., set up a few notch filter circuits, it is discussed what happens when the transfer functions, are in discord as to natural frequency of the filter and accelerometer damping vs. filter damping. And especially as for the cantilever strain gauge type accelerometer made by oneself with ease, it was compared and discussed between the ideological value and the experimental value of actual designed circuit in case of the mismatching of the transfer functions, and it was considered whether to be practicable or not, the result of which was as following; the useful frequency range of the accelerometer can be extended to near resonance if (a) the accelerometer mounted natural frequency and the filter center frequency are matched within .+-. 2 percent and (b) the damping ratios are matched within two factors. Therefore, we obtained the good result in improvement for extending frequency response characteristics of accelerometer.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.64 no.9
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• pp.1330-1336
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• 2015

It is necessary to study on acoustic and vibratory response of a MEMS resonant accelerometer before applying to military applications. In this paper, we analyze why the resonant accelerometer reacts to an acoustic wave and a high frequency vibration. And we describe experimental results on acoustic and vibratory response of the accelerometer. The accelerometer consists of a proof mass and a dual ended tuning fork. It is a differential resonant accelerometer with arranging a pair of accelerometers. The mode shape was analyzed to find out the input mode frequency by using a FEM simulation. Some experiments regarding the acoustic noise was carried out by using a tweeter and a microphone in the anechoic room. Results showed that the accelerometer reacted to the acoustic wave and vibration which had the input mode frequency as we had expected. We showed experimentally not only that the susceptibility of the accelerometer to an acoustic wave was 70 dB but also that the effectiveness of applying an acoustic absorber and a metal case was 20 dB, respectively. Also, we could minimize the vibratory response property of the accelerometer by installing a IMU with a silicone rubber mount pad.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.383.2-383
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• 2002

In this paper, an experimental technique using a reference accelerometer has been developed to measure the in-plane vibration intensity of a beam. It has the advantages of shortening measurement time and reducing accelerometer phase error comparing with the cross spectral Intensity measurement technique using an accelerometer array. The distribution of the in-plane vibration Intensity over the beam has been measured. (omitted)

• Transactions on Electrical and Electronic Materials
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• v.18 no.2
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• pp.78-88
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• 2017

Cantilever beam MEMS piezoelectric accelerometers are the simplest and most widely used accelerometer structure. This paper discusses the design of a piezoelectric accelerometer exclusively for SHM applications. While such accelerometers need to operate at a lower frequency range, they also need to possess high sensitivity and low noise floor. The availability of a simple model for deflection, charge, and voltage sensitivities will make the accelerometer design procedure less cumbersome. However, a review of the open literature suggests that such a model has not yet been proposed. In addition, previous works either depended on FEM analysis or only reported on the fabrication and characterization of piezoelectric accelerometers. Hence, this paper presents, for the first time, a simple analytical model developed for the deflection, induced voltage, and charge sensitivity of a cantilever beam piezoelectric accelerometer.The model is then verified using FEM analysis for a range of different cases. Further, the model was validated by comparing the induced voltages of an accelerometer estimated using this model with experimental voltages measured in the accelerometer after fabrication. Subsequently, the design of an accelerometer is demonstrated for SHM applications using the analytical model developed in this work. The designed accelerometer has 60 mV/g voltage sensitivity and 2.4 pC/g charge sensitivity, which are relatively high values compared to those of the piezoresistive and capacitive accelerometers for SHM applications reported earlier.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.10
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• pp.1551-1558
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• 2001

Recently, a number of underground pipelines have been drastically increased. The integrity of these buried pipelines, especially gas transmitting pipelines, is of importance due to an explosive characteristic of natural gas. The third party damage is known as one of the most critical factor which causes fatal accidents. For this reason, a number of systems detecting third party damage are under development. The major concern in the development of third party damage detection system is to transmit vibration signals out of accelerometer to signal conditioner and data acquisition system without any interference caused by noise. The objective of this paper is to develope a fiber optic accelerometer applicable to third party damage detection system. A fiber optic accelerometer was developed by use of combining principles of one degree of freedom vibration model and an extrinsic Fabry-Perot interferometer. The developed fiber optic accelerometer was designed to perform with a sensitivity of 0.06mVg, a frequency range of less than 6kHz and an amplitude range of -200g to 200g. The developed, accelerometer was compared with a piezoelectric accelerometer and calibrated. In order to verify the developed accelerometer, the field experiment was performed. From the field experiment, vibration signals and the location of impact were successfully detected. The developed accelerometer is expected to be used for the third party damage detection system which requires long distance transmission of signals.

• Journal of Information Processing Systems
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• v.19 no.2
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• pp.173-188
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• 2023

To improve the shock-resistance of piezoresistive high-g accelerometer, we propose a design of piezoresistive high-g accelerometer. The accelerometer employs special-shaped proof masses system with a cross gap. Four tiny sensing beams are bonded above the cross gap. The expression of the deformation, natural frequency and damping is deduced, and the structural parameters are optimized. The accelerometer structure is simulated and verified by finite element method (FEM) simulation. The results show that the range of the accelerometer can reach 200,000 g, the natural frequency is 453.6 kHz, and the cross-axis sensitivity of X-axis and Y-axis is 0.25% and 0.11%, respectively, which can apply to the measurement of high shock. Contrastively, the cross-axis sensitivity of X-axis and Y-axis is respectively, reduced by 93.2% and 96.9%. The sensitivity of our accelerometer is 0.88 μV/g. It is of great value for the application of piezoresistive high-g accelerometer with high shock-resistance.