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http://dx.doi.org/10.3795/KSME-A.2007.31.5.570

A Study on the Performance Improvement of the Micromachined Convective Accelerometer  

Youn, Sung-Kie (한국과학기술원 기계공학과)
Oh, Jun-Seok (한국항공우주연구원)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.31, no.5, 2007 , pp. 570-577 More about this Journal
Abstract
A micromachined convective accelerometer is a recently developed device. Typical micromachined accelerometers use a solid proof mass for measuring acceleration. But a micromachined convective accelerometer does not use a solid proof mass. A micromachined convective accelerometer is composed of a heating resistor and temperature sensors. This device measures acceleration by using convective heat transfer phenomenon. Therefore characteristics of a micromachined convective accelerometer are different as compared with typical micromachined accelerometer. In this research, we analyze the convective accelerometer by using transient convective heat transfer analysis. Based on the results of a convective accelerometer, we propose a new model which has improved performance.
Keywords
Convective Accelerometer; Thermal Accelerometer; Natural Convection;
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