• Title/Summary/Keyword: ZrSiN

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Characteristic of Zr(Si)N film as a diffusion barrier between Cu metal and Si substrate (Cu 금속과 Si 기판 사이에서 확산방지막으로 사용하기 위한 Zr(Si)N 박막의 특성)

  • 김좌연;조병철;채상훈;김헌창;박경순
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.12 no.6
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    • pp.283-287
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    • 2002
  • We have studied Zr(Si)N film as a diffusion barrier between Cu metal and Si substrate for application of interconnection metal in ULSI circuits. Zr(Si)N film was deposited with reactive DC magnetron sputtering system using $Ar/N_2$mixed gas. The value of the resistivity was the lowest for the ZrN film using 29 : 1 of Ar : $N_2$reactant gas ratio at room temperature and decreased with increasing of Si substrate temperature. As the value of ZrN film resistivity was decreased, the direction of crystal growth was toward to (002) plane. The barrier property of ZrN film added with Si was improved. But Si was added too much in ZrN film, the barrier property was degraded. The adhesive property was improved with increasing of Si in ZrN. For the analysis of the film, XRD, Optical microscopy, Scretch tester, so on were used.

Influence of Bilayer Periods on the Mechanical Properties of CrZrN/CrZrSiN Multilayer Coatings (이중층 주기가 CrZrN/CrZrSiN 다층 코팅의 기계적 특성에 미치는 영향)

  • Kim, Hoe-Geun;Ra, Jeong-Hyeon;Bae, Gi-Tae;Lee, Sang-Yul
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.11a
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    • pp.293-293
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    • 2015
  • 최근 다층 코팅의 합성을 통해 코팅의 경도, 내마모성 등의 기계적 물성을 향상시키는 연구가 활발히 진행되고 있다. 본 연구에서는 높은 경도, 낮은 마찰계수, 우수한 고온 특성을 함께 나타내기 위해 CrZrN/CrZrSiN 다층 코팅을 설계하였고, 이중층 주기를 조절하여 CrZrN/CrZrSiN 다층 코팅의 물성변화를 확인하였다.

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Tribological Properties of the Monolithic CrZrN Coatings and CrZrN/CrZrSiN Multilayer Coatings (CrZrN 코팅과 CrZrN/CrZrSiN 다층 코팅 합성과 박막의 기계적 특성)

  • Kim, Hoe-Geun;Lee, Sang-Yul
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.11a
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    • pp.198-198
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    • 2015
  • 최근 CrZrN 코팅을 기반으로한 다양한 박막의 합성을 통해 코팅의 경도, 내마모성 등의 기계적 물성을 향상시키는 연구가 활발히 진행되고 있다. 본 연구에서는 높은 경도, 낮은 마찰계수을 나타내는 CrZrN 코팅과 이 박막의 고온 특성을 향상 하기 위한 CrZrN/CrZrSiN 다층 코팅 박막을 합성하고 그 특성을 분석하였다.

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Phase Analysis and Fracture Toughness of $Si_3N_4$-Zr(Y)$O_2$ Composites after Heat Treatment ($Si_3N_4$-Zr(Y)$O_2$ 복합체의 열처리에 따른 상분석 및 파괴인성)

  • 김재룡;김종희
    • Journal of the Korean Ceramic Society
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    • v.28 no.1
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    • pp.53-59
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    • 1991
  • The reaction product between Si3N4 and ZrO2 has been studied by heat treatment of Si3N4-Zr(Y)O2 composite in high vacuum(<10-5 torr) and in air at $700^{\circ}C$. ZrN was formed after heat treatment in vacuum and easily oxidized after heat treatment in air. The amount of ZrN is related to the Y2O3 content dissolved in ZrO2. After the heat treatment in air the toughness increased and the spalling due to the oxidation of ZrN in specimen surface was observed. As a result, it is suggested that the formation of ZrN phase in Si3N4-ZrO2 composite enhance the toughness of the composite in an oxidation conditon.

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Fabrication of Sol-Gel derived Antireflective Thin Films of $SiO_2-ZrO_2$ System (솔-젤법에 의한 $SiO_2-ZrO_2$계 무반사 박막의 제조)

  • Kim, Byong-Ho;Hong, Kwon;Namkung, Jang
    • Journal of the Korean Ceramic Society
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    • v.32 no.5
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    • pp.617-625
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    • 1995
  • In order to reduce reflectance of soda-lime glass having average reflectance of 7.35% and refractive index of 1.53, single (SiO2), double (SiO2/20SiO2-80ZrO2), and triple (SiO2/ZrO2/75SiO2-25ZrO2) layers were designed and fabricated on the glass substrate by Sol-Gel method. Stble sols of SiO2-ZrO2 binary system for antireflective (AR) coatings were synthesized with tetraethyl orthosilicate (TEOS) and zirconium n-butoxide as precursors and ethylacetoacetate (EAcAc) as a chelating agent in an atmosphere environment. Films were deposited on soda-lime glass at the withdrawal rates of 3~11 cm/min using the prepared polymeric sols by dip-coating and they were heat-treated at 45$0^{\circ}C$ for 10 min to obtain homogeneous, amorphous and crack-free films. In case of SiO2-ZrO2 binary system, refractive index of film increased with an increase of ZrO2 mol%. Designed optical constant of films could be obtained through varying the withdrawal rate. In the visible region (380~780nm), reflectance was measured with UV/VIS/NIR Spectrophotometer. Average reflectances of the prepared single-layer [SiO2 (n=1.46, t=103nm)], double-layer [SiO2 (n=1.46, t=1-4nm)/20SiO2-80ZrO2 (n=1.81, t=82nm)], and triple-layer [SiO2 (n=1.46, t=104nm)/ZrO2 (n=1.90, t=80nm)/75SiO2-25ZrO2 (n=1.61, t=94 nm)] were 4.74%, 0.75% and 0.38%, respectively.

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Preparation of Metallocene Catalysts Supported on Aminosilane and Ionic Liquids Functionalized Silica and its Ethylene Polymerization (아미노실란과 이온성 액체로 표면 기능화된 실리카에 담지된 메탈로센 촉매 합성 및 에틸렌 중합)

  • Yim, Jin-Heong;Lee, Jeong Suk;Ko, Young Soo
    • Polymer(Korea)
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    • v.39 no.1
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    • pp.169-173
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    • 2015
  • Metallocene was supported on the silica, which was functionalized with aminosilanes such as aminopropyltrimethoxysilane (1NS) or N-[3-(trimethoxysilyl)propyl]ethylenediamine (2NS), and ionic liquids such as 1-butyl-4-methylpyridinium chloride (Cl), tributylmethylammonium chloride (Amm), benzyldimethyltetradecylammonium chloride (Ben), 1-butyl-1-methylpyrrolidinium chloride (Pyr), and then ethylene polymerizations were performed. The Zr contents of $SiO_2/1NS/IL/(n-BuCp)_2ZrCl_2$ and $SiO_2/2NS/IL/(n-BuCp)_2ZrCl_2$ were lower than those of only aminosilane-treated silicas. However, the polymerization activity of $SiO_2/1NS/IL/(n-BuCp)_2ZrCl_2$ was higher than that of $SiO_2/1NS/(n-BuCp)_2ZrCl_2$. The polymerization activity of $SiO_2/2NS/IL/(n-BuCp)_2ZrCl_2$ was lower than that of $SiO_2/2NS/(n-BuCp)_2ZrCl_2$ due to much lower Zr content.

High Temperature Oxidation of TiN, Ti(C,N), TiAlSiN, TiZrAlN, TiAlCrSiN Thin Films (TiN, Ti(C,N), TiAlSiN, TiZrAlN, TiAlCrSiN 박막의 고온산화)

  • Kim, Min-Jeong;Park, Sun-Yong;Lee, Dong-Bok
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.192-192
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    • 2014
  • TiN, Ti(C,N), TiAlSiN, TiZrAlN, TiAlCrSiN 박막을 제조한 후, 이 들의 고온산화 특성을 SEM, EPMA, TGA, TEM, AES 등을 이용하여 조사하고, 산화기구를 제안하였다. 산화속도, 생성되는 산화물의 종류와 분포는 박막의 조성, 산화온도, 산화시간에 따라 변하였다.

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Effect of Si Addition on the Corrosion properties of CrZrN Thin Films (CrZrN 박막의 Si 첨가에 따른 부식 특성 향상에 관한 연구)

  • Kim, Beom-Seok;O, Jong-Ho;Kim, Jae-Yong;Lee, Sang-Yul
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2011.05a
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    • pp.190-190
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    • 2011
  • CrZrN 박막은 우수한 기계적 특성과 우수한 표면 조도특성을 가지고 있다. 본 연구에서는 CrZrN 박막에 Si를 첨가하여 CrZrN 박막의 부식 특성 향상을 알아보기 위하여 염수 분무 실험과 분극실험을 통하여 박막의 부식 특성을 평가하였다. Si의 함량이 증가함에 따라 부식 특성이 향상되는 것을 알 수 있었다.

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Effect of Si Addition on the Friction Coefficients of CrZrN Thin Films at high temperature (Cr-Zr-N 박막의 Si 첨가에 따른 고온 마모특성에 미치는 영향에 관한 연구)

  • Kim, Beom-Seok;O, Jong-Ho;Kim, Jae-Yong;Lee, Sang-Yul
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2011.05a
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    • pp.189-189
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    • 2011
  • CrZrN 박막은 CrN 박막에 비해서 향상된 기계적 특성과 우수한 표면 조도특성을 가지고 있다. 그러나 $500^{\circ}C$ 이상에서 기계적 특성이 급격히 감소하는 현상이 알려져 있다. 본 연구에서는 CrZrN 박막에 Si를 첨가하여 Si 함량에 따른 고온에서의 기계적 특성을 CrZrN 박막과 비교하였다. $500^{\circ}C$에서 마모 실험한 결과 CrZrN 박막에 비하여 소량의 Si의 첨가만으로 고온에서의 마모 특성이 향상되는 것을 확인하였다. 이것은 Si 첨가에 따라 고온에서 안정한 비정질상의 형성 영향으로 판단된다.

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