• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.1884-1886
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• 2005

KrF 펄스 레이저 증착법(pulsed laser deposition: PLD)으로 ZnO 박막을 증착하여 평판 디스플레이 소자 구동용 박막 트랜지스터(thin film transistor) 소자를 제작하였다. 전도성이 높은 실리콘웨이퍼(c-Si, 하부전극) 기판 위에 LPCVD 법으로 silicon nitride 박막을 절연막으로 형성하고, 다양한 공정 조건에서 펄스 레이저 증착법으로 제작한 ZnO 박막을 증착하여 채널층으로 하였으며, Al 박막을 증착하고 패터닝하여 소스 및 드레인 전극으로 하였다. ZnO 박막의 증착 시에 기판 온도를 다양하게 조절하고 산소 분압을 변화시켜 ZnO 박막의 특성을 조절하였다. 제작된 박막의 표면특성은 AFM(atomic force microscopy)로 분석하고, 결정특성은 XRD(X-ray diffraction)로 조사하였다. ZnO 박막의 전기적 특성은 Hall-van der Pauw 법으로 측정하였고, 광학 투과도(optical transparency)를 UV-visible photometer로 조사하였다. ZnO-TFT 소자는 $10^6$ 수준의 on-off ratio와 $2.4{\sim}6.1cm^2/V{\cdot}s$의 전계효과이동도(field effect mobility)를 보였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.9
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• pp.818-824
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• 2008

The Separated Pulsed Laser Deposition (SPLD) technique uses two chambers that are separated by a conic metallic wall with a central orifice. The pressures of ablation chamber and deposition chamber were controlled by the differential vacuum system. We deposited zinc oxide (ZnO) thin films by SPLD method to obtain high quality thin films. When the bias voltage of +500 V was applied between a substrate and an orifice, the ZnO thin film was deposited efficiently. The deposited ZnO thin film at ablation chamber gas pressure of Ar 5 mTorr showed the sharpest ultraviolet absorption edge indicatory the band gap of about 3.1 eV. ZnO thin films were deposited using effect of electric and magnetic fields in the SPLD method. E${\times}$B drift happened by an electric fields and a magnetic fields, activated plasma plume, as a result the film surface became very smooth. When the bias voltage of +500 V and magnet of 0,1 T were applied the ZnO thin films surface state showed high quality. Grain size was 41.99 nm and RMS was 0.84 nm.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.122-122
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• 2010

ZnO is a widely investigated material for the blue and ultraviolet solid-state emitters and detectors. It has been promoted due to a wide-band gap semiconductor which has large exciton binding energy of 60 meV, chemical stability and low radiation damage. However, there are many problems to be solved for the growth of p-type ZnO for practical device applications. Many researchers have made an efforts to achieve p-type conductivity using group-V element of N, P, As, and Sb. In this letter, we have studied the optical characteristics of the antimony-doped ZnO (ZnO:Sb) thin films by means of photoluminescence (PL), PL excitation, temperature-dependent PL, and time-resolved PL techniques. We observed donor-to-acceptor-pair transition at about 3.24 eV with its phonon replicas with a periodic spacing of about 72 meV in the PL spectra of antimony-doped ZnO (ZnO:Sb) thin films at 12 K. We also investigate thermal activation energy and carrier recombination lifetime for the samples. Our result reflects that the antimony doping can generate shallow acceptor states, leading to a good p-type conductivity in ZnO.

• Journal of the Korean Ceramic Society
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• v.46 no.4
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• pp.372-378
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• 2009

The coloring agents $Cr_2O_3$ and $CrCl_3$ were manipulated in this study to synthesize ZnO-$Al_2O_3-Cr_2O_3$ system pigments by changing their mixing ratio. The addition of varying amounts of mineralizer was also tested to obtain better color development of the pink pigment. In the synthesis of ZnO- $Al(OH)_3-Cr_2O_3-CrCl_3$ pigments, the best composition is $Cr_2O_3$-0.1 mole and $CrCl_3$-0.2 mole when $Cr_2O_3$ is partially substituted with $CrCl_3$ to synthesize them. Among the $ZnAl_{1.6-x}Cr_{0.2+x}O_4$ compositions to which a mineralizer was not added, ZnO-1mole, $Al(OH)_3$-1.7 mole, $Cr_2O_3$-0.075 mole, and $CrCl_3$-0.15 mole showed a desirable pink hue. The measurements of pigments $L^*$, $a^*$ and $b^*$, were $L^*$ 81.81, $a^*$ 16.65 and $b^*$ 0.45, and when the synthesized pigments were applied to a zinc glaze, the measurements were $L^*$ 60.41, $a^*$ 28.39, and $b^*$ 16.97. When adding a mineralizer, a 2 wt% addition resulted in the most favorable pink color. The composition for the most favorable result that included a mineralizer was $Al(OH)_3$-1.8 mole, $Cr_2O_3$-0.05 mole, and $CrCl_3$-0.1 mole, and the calcination temperature was $1250^{\circ}C$. The pigment color analysis showed $L^*$ 82.52, $a^*$17.14 and $b^*$-1.18, and the measurements of $L^*$, $a^*$ and $b^*$ in the glaze were $L^*$ 60.97, $a^*$ 28.77 and $b^*$ 13.72.

• Journal of the Korean Ceramic Society
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• v.37 no.5
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• pp.491-496
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• 2000

Single phae Pb(Mg1/3Nb2/3)O3-based solid solutions, the Mg2+ of which are replaced by 20mol% of Ni2+, Zn2+, Cd2+, and the Pb2+ of which are replaced by 0∼20 mol% of La3+, were synthesized and their ordering structures of B-site cations were investigated by XRD and TEM. The B'-site cations (Mg2+, Ni2+, Zn2+, Cd2+) are disordered while these B'-site cations and the B"-site cations (Nb5+) are nonstoichiometrically 1:1 ordered within the ordered nano-domains dispersed in the Nb5+-rich disordered matrix. The charge imbalance between the B'-rich ordered nano-domains and the B"-rich disordered matrix are compensated by the doping of electron donor such as La3+, which enhances the degree of nonstoichiometric 1:1 ordering. For a given La3+ content, the degree of nonstoichiometric 1:1 ordering increases as the average ionic size difference between the B'-and B"-site cations increases, Ni2+

• Journal of the Microelectronics and Packaging Society
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• v.6 no.4
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• pp.55-59
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• 1999

One of lead free glass, Bi based solder glass is investigated for electronic packaging application. The melting temperature of glass about $550^{\circ}C$ at Bi based glass (70wt% $B_2O_3$ + l5wt%$B_2O_3$ + 8wt% $SiO_2$ + 2wt% $P_2O_5$ + 4wt% $A1_2O_3$ +lwt% ZnO) and varied with $P_2O_5$ content in this system. Crystallized glasses were obtainded after 1hr heat teratment at $450^{\circ}C$ with 10wt% of $P_2O_5$ addition. Much higher melting temperature was observed at $B_2O_3$ rich composition area.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.182-182
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• 2010

본 연구에서는 Pt 배면전극에 다양한 조건에서의 ZnO를 성장하여 Schottky 구조를 제작, 접합 특성 및 자외선 검출 특성을 연구하였다. $Al_2O_3$ 기판에 Mirror-like하며 고결정성을 갖는 Pt(111) 배면전극을 형성 후, ZnO 박막의 성장 조건에 따른 접합 특성을 확인하기 위하여 기판온도와 산소분압을 각각 $400{\sim}600^{\circ}C$ ($50^{\circ}C$ 단계), 0~60 sccm (15 sccm 단계)로 성장하였다. 이에 따른 구조적 특성변화를 확인하기 위하여 주사전자현미경 및 X선 회절 특성을 분석하였으며, 전류-전압 특성 곡선을 분석을 통하여 최적의 Schottky contact 형성을 위한 ZnO 성장조건을 규명하고자 하였다. $H_2O_2$를 이용한 표면처리와 Rapid Thermal Annealing (RTA)를 이용한 열처리 과정을 통하여 표면 처리 전 후의 전기적 특성과 광학적 특성의 변화를 비교 분석하였다. 또한 Ohmic 접촉으로 상부전극을 형성, ZnO Schottky photodiode 구조를 제작하여 UV-A, B, C 영역에 따른 UV반응 특성을 분석하였다.

• Journal of the Korean Vacuum Society
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• v.19 no.3
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• pp.206-210
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• 2010

Al-doped ZnO thin films were deposited with various Ar flow rate by RF magnetron sputtering, and theire properties were studied. A high-quality thin film was obtained by controlling the Ar flow rate, and the influence of the Ar flow rate on the Al-doped ZnO thin film was confirmed. In all Al-doped ZnO thin films, light transmittance had above 80%. Through Hall measurement and X-ray photoelectron spectrometer, the sample of 60 sccm, which had the lowest resistivity, showed the lower Al concentration. This result was attributed to oxygen vacancy rather than Al concentration.

• Journal of Magnetics
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• v.20 no.3
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• pp.246-251
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• 2015

This study was aimed to study the effect of Zn content on the hyperfine parameters and the structural variation of $Ni_{1-x}Zn_xFe_2O_4$ for x = 0, 0.2, 0.4, 0.6, and 0.8. To achieve this, a sol-gel route was used for the preparation of samples and the obtained ferrites were investigated by X-ray diffraction, scanning electron microscopy, and $M{\ddot{o}}ssbauer$ spectroscopy. The formation of spinel phase without any impurity peak was identified by X-ray diffraction of all the samples. Moreover, the estimated crystallite size by X-ray line broadening indicates a decrease with increasing Zn content. This result was in agreement with the scanning electron microscopy result, indicating the reduction in grain growth with further zinc substitution. The room-temperature $M{\ddot{o}}ssbauer$ spectra show that the hyperfine fields at both the A and B sites decreased with increasing Zn content; however, the rate of reduction is not the same for different sites. Moreover, the best fit parameter showed that the quadrupole splitting values of B site increased from the pure nickel ferrite to the sample with x = 0.8.

• Korean Journal of Materials Research
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• v.12 no.10
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• pp.784-790
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• 2002

For mass product of nanocrystalline ZnO ultrafine powders, self-sustaining combustion process(SCP) and ultrasonic spray combustion method(USCM) were applied at the same time. Ultrasonic spray gun was attached on top of the vertical type furnace. The droplet was sprayed into reaction zone of the furnace to form SCP which produces spherical shape with soft agglomerate crystalline ZnO particles. To characterize formed particles, fuel and oxidizing agent for SCP were used glycine and zinc nitrate or zinc hydroxide. Respectively, with changing combustion temperature and mixture ratio of oxidizing agent and fuel, the best ultrasonic spray conditions were obtained. To observe ultrasonic spray effect, two types of powder synthesis processes were compared. One was directly sprayed into furnace from the precursor solution (Type A), the other directly was heated on the hot plate without using spray gun (Type B). Powder obtained by type A was porous sponge shape with heavy agglomeration, but powder obtained using type B was finer primary particle size, spherical shape with weak agglomeration and bigger value of specific surface area. 9/ This can be due to much lower reaction temperature of type B at ignition time than type A. Synthesized nanocrystalline ZnO powders at the best ultrasonic spray conditions have primary particle size in range 20~30nm and specific surface area is about 20m$^2$/g.