• Title/Summary/Keyword: ZnO/Si

Search Result 1,048, Processing Time 0.027 seconds

저유전율을 갖는 $Mg_2$$SiO_4$-$ZnAl_2$$O_4$계 세라믹스의 $CaTiO_3$첨가에 따른 고주파 유전특성 (Effect of $CaTiO_3$Additions on the Microwave Dielectric Properties of $Mg_2$$SiO_4$-$ZnAl_2$$O_4$Ceramics with Low Dielectric Constant)

  • 박일환;김현학;김경용;김병호
    • 한국전기전자재료학회논문지
    • /
    • 제13권12호
    • /
    • pp.1017-1024
    • /
    • 2000
  • Effect of the microwave dielectric properties and the microstructure on a mole fraction(x=0.1~0.9) of (1-x)Mg$_2$SiO$_4$-xZnAl$_2$O$_4$ ceramics was investigated. When (1-x)Mg$_2$SiO$_4$-xZnAl$_2$O$_4$(x=0.1~0.9) ceramics were sintered at 130$0^{\circ}C$, 135$0^{\circ}C$ and 140$0^{\circ}C$ for 2hr, the microwave dielectric properties were obtained $\varepsilon$r=6.8~8.3, Q.f$_{0}$=36000~77600. On the other hand, the temperature coefficients of resonant frequency($\tau$$_{f}$) were obtained in the properties of -62ppm/$^{\circ}C$ to -49ppm/$^{\circ}C$. In order to adjust the temperature coefficient of resonant frequency($\tau$$_{f}$), CaTiO$_3$was added in (1-x)Mg$_2$SiO$_4$-xZnAl$_2$O$_4$ceramics. 0.7Mg$_2$SiO$_4$-0.2ZnAl$_2$O$_4$-0.1CaTiO$_3$ceramics sintered at 135$0^{\circ}C$ for 2hr showed the excellent microwave dielectric properties of $\varepsilon$r=7.7, Q.f$_{0}$=32000, and $\tau$$_{f}$=-7.9 ppm/$^{\circ}C$.EX>.>.EX>.

  • PDF

PL Property of Al-N Codoped p-type ZnO Thin Films Fabricated by DC Magnetron Sputtering

  • Liu, Yan-Yan;Jin, Hu-Jie;Park, Choon-Bae;Hoang, Geun-C.
    • Transactions on Electrical and Electronic Materials
    • /
    • 제10권3호
    • /
    • pp.89-92
    • /
    • 2009
  • High-quality Al-N doped p-type ZnO thin films were deposited on Si and buffer layer/Si by DC magnetron sputtering in a mixture of $N_2$ and $O_2$ gas. The target was ceramic ZnO mixed with $Al_2O_3$ (2 wt%). The p-type ZnO thin films showed a carrier concentration in the range of $1.5{\times}10^{15}{\sim}2.93{\times}10^{17}\;cm^{-3}$, resistivity in the range of 131.2${\sim}$2.864 ${\Omega}cm$, mobility in the range of 3.99${\sim}$31.6 $cm^2V^{-1}s^{-l}$, respectively. It was easier to dope p-type ZnO films on Si substrates than on buffer layer/Si. The film grown on Si showed the highest quality of photoluminescence (PL) characteristics. The Al donor energy level depth $(E_d)$ of Al-N codoped ZnO films was reduced to about 50 meV, and the N acceptor energy level depth $(E_a)$ was reduced to 63 meV.

Si-ZnO n-n 이종접합의 구조 및 전기적 특성 (The Structure and Electrical Properties of Si-ZnO n-n Heterojunctions)

  • 이춘호;박순자
    • 한국세라믹학회지
    • /
    • 제23권1호
    • /
    • pp.44-50
    • /
    • 1986
  • Si-ZnO n-n heterojunction diodes were prespared by r.f diode sputtering of the sintered ZnO target on n-type Si single crystal wafers and their structures and electrical properties were studied. The films were grown orientedly with the c-axis of crystallites perpendicular to the substrate surface at low r.f. powder and grown to polycrystalline films with random orientation at high r. f. powder. The crystallite size increased with the increasing substrate temperture The oriented texture films only were used to prepare the photovoltaic diodes and these didoes showed the photovoltaic effect veing positive of the ZnO side for the photons in the wavelength range of 380-1450nm. The sign reversal of phootovoltage which is the property os isotype heterojunction was not observed because of the degeneration of the ZnO films. The diode showed the forward rectification when it was biased with the ZnO side positive. The current-voltage characteristics exhibited the thermal-current type relationship J∝exp(qV/nkT) with n=1.23 at the low forward bias voltage and the tunnelling-current type relationship J∝exp($\alpha$V) where $\alpha$ was constant independent of temperature at the high forward bias voltage. The crystallite size of ZnO films were influenced largely on the photovoltaic properties of diodes ; The diodes with the films of the larger crystallites showed the poor photovoltaic properties. This reason may be cosidered that the ZnO films with the large crystallites could not grow to the electrically continuous films because the thickness of films was so thin in this experiment.

  • PDF

$SiO_2$가 첨가된 산화아연 바리스터의 미세구조 및 전기적 특성 (Microstructure and Electrical Properties of $SiO_2$-Doped Zinc Oxide Varistors)

  • 남춘우;정순철
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제10권7호
    • /
    • pp.659-667
    • /
    • 1997
  • The influence of SiO$_2$on the microstructure and electrical properties of zinc oxide varistor was investigated. Zn$_2$SiO$_4$third phase in the sintered body was found at grain boundaries, multiple grain junctions, and occasionally within ZnO grains. This phase acted as a grain growth inhibitor, which retard the grain growth of the ZnO matrix by impeding migration on the grain boundaries. As SiO$_2$ addition increases, average grain size decreased from 40.6${\mu}{\textrm}{m}$ to 26.9${\mu}{\textrm}{m}$ due to the pinning effect by Zn$_2$SiO$_4$ and drag effect by Si segregation at grain boundaries, the breakdown voltage consequently increased. When SiO$_2$ addition is increased, interface state density decreased, however, the barrier height increased by decrease of donor concentration, as a result, the nonlinear exponent increased and leakage current decreased. While, as SiO$_2$ addition increase, it was found that the apparent dielectric loss factor shows a tendency of decrease. Wholly, electrical properties of zinc oxide varistor can be said to be improved by SiO$_2$addition.

  • PDF

rf 마그네트런 스퍼터링법으로 Si 기판위에 증착한 ZnO 박막의 결정성과 photoluminescence 특성에 대한 Zn 완충층 두께의 영향 (Effects of ZnO Buffer Layer Thickness on the Crystallinity and Photoluminescence Properties of Rf Magnetron Sputter-deposited ZnO Thin Films)

  • 조용준;박안나;이종무
    • 한국재료학회지
    • /
    • 제16권7호
    • /
    • pp.445-448
    • /
    • 2006
  • Highly c-axis oriented ZnO thin films were grown on Si(100)substrates with Zn buffer layers. Effects of the Zn buffer layer thickness on the structural and optical qualities of ZnO thin films were investigated using X-ray diffraction (XRD), photoluminescence (PL) and Atomic force microscopy (AFM) analysis techniques. It was confirmed that the quality of a ZnO thin film deposited by rf magnetron sputtering was substantially improved by using a Zn buffer layer. The highest ZnO film quality was obtained with a Zn buffer layer 110 nm thick. The surface roughness of the ZnO thin film increases as the Zn buffer layer thickness increases.

양자점 감응 태양전지의 광전 특성 향상을 위한 ZnS/SiO2 이중 오버레이어 개발 (Development of ZnS/SiO2 Double Overlayers for the Enhanced Photovoltaic Properties of Quantum Dot-Sensitized Solar Cells)

  • 송인철;정성목;서주원;김재엽
    • 한국수소및신에너지학회논문집
    • /
    • 제32권6호
    • /
    • pp.656-662
    • /
    • 2021
  • For the high efficiencies of quantum dot-sensitized solar cells (QDSCs), it is important to control the severe electron recombination at the interface of photoanode/electrolyte. In this work, we optimize the surface passivation process of ZnS/SiO2 double overlayers for the enhanced photovoltaic performances of QDSCs. The overlayers of zinc sulfide (ZnS) and SiO2 are coated on the surface of QD-sensitized photoanode by successive ionic layer adsorption and reaction (SILAR) method, and sol-gel reaction, respectively. In particular, for the sol-gel reaction of SiO2, the influences of temperature of precursor solution are investigated. By application of SiO2 overlayers on the ZnS-coated photoanode, the conversion efficiency of QDSCs is increased from 5.04% to 7.35%. The impedance analysis reveals that the electron recombination at the interface of photoanode/electrolyte is obviously reduced by the SiO2 overlayers.

MOCVD을 이용하여 자발적 및 인위적으로 제어된 산화아연 나노구조 (Self- and Artificially-Controlled ZnO Nanostructures by MOCVD)

  • 김상우
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
    • /
    • pp.9-10
    • /
    • 2005
  • We report on the fabrication and characterization of self- and artificially-controlled ZnO nanostructures have been investigated to establish nanostructure blocks for ZnO-based nanoscale device application. Systematic realization of self- and artificially-controlled ZnO nanostructures on $SiO_2/Si$ substrates was proposed and successfully demonstrated utilizing metalorganic chemical vapor deposition (MOCVD) in addition with a focused ion beam (FIB) technique. Widely well-aligned two-dimensional ZnO nanodot arrays ($4{\sim}10^4$ nanodots of 130-nm diameter and 9-nm height over $150{\sim}150{\mu}m^2$ with a period of 750 nm) have been realized by MOCVD on $SiO_2/Si$ substrates patterned by FIB. A low-magnification FIB nanopatterning mode allowed the periodical nanopatterning of the substrates over a large area in a short processing time. Ga atoms incorporated into the surface areas of FIB-patterned nanoholes during FIB engraving were found to play an important role in the artificial control of ZnO, resulting in the production of ZnO nanodot arrays on the FIB-nanopatterned areas. The nanodots evolved into dot clusters and rods with increasing MOCVD growth time.

  • PDF

졸-겔법에 의한 $Zn_2$$SiO_4$:Mn, Al 녹색 형광체의 제조 및 발광 특성 (Preparation and Luminescence Properties of $Zn_2$$SiO_4$:Mn,Al Green Phosphors by Sol-gel Technique)

  • 박희동;성부용;한정화;김대수
    • 한국세라믹학회지
    • /
    • 제38권4호
    • /
    • pp.337-342
    • /
    • 2001
  • PDP(Plasma Display Panel)용 녹색 형광체인 Zn$_2$SiO$_4$:Mn에 채-dopant로 Al을 첨가하여 졸-겔법으로 합성하였다. 졸-겔법으로 제조한 형광체는 기존의 고상 반응에 의해 합성된 경우보다 낮은 온도(1000-110$0^{\circ}C$)에서 Zn$_2$SiO$_4$단일상을 형성하였으며, 300-500nm의 비교적 균일한 입자를 얻을 수 있었다. 또한, co-dopant인 Al을 첨가함으로써 발광휘도를 향상시키고, 전광시간을 줄일 수 있었다. 한편, TEOS의 가수분해시 $H_2O$/TEOS 비율을 조절하여 발광의 최적 조건을 조사하였다.

  • PDF

혼합 $ZnS-SiO_2$ 광학 박막의 제작 및 특성분석 (The fabrication and characterization of composite $ZnS-SiO_2$ optical films)

  • 성창민;이경진;류태욱;정종영;김석원;한성홍
    • 한국광학회지
    • /
    • 제9권2호
    • /
    • pp.70-75
    • /
    • 1998
  • 동시증착법을 이용하여 ZnS와 SiO$_{2}$를 증착시켜 혼합 박막을 제작하고, 제작된 ZnS-SiO$_{2}$ 혼합 박막의 광학적 특성과 결정구조를 분석하였다. 혼합 박막의 Zn:Si의 원소조성비에 따른 광학적 특성은 Drude 모델을 잘 만족함을 알 수 있었다. 이러한 혼합 박막의 굴절률 특성을 이용하여 단층의 무반사코팅을 설계.제작하였다. 한편, 이온 보조 증착하지 않은 혼합 박막은 비정질 구조를 보였으며, 이온 보조 증착한 혼합 박막은 Zn의 함유량이 43.0%, 56.6%일 때 결정질 구조를 보였다.

  • PDF

Ultraviolet Photodetection Properties of ZnO/Si Heterojunction Diodes Fabricated by ALD Technique Without Using a Buffer Layer

  • Hazra, Purnima;Singh, S.K.;Jit, S.
    • JSTS:Journal of Semiconductor Technology and Science
    • /
    • 제14권1호
    • /
    • pp.117-123
    • /
    • 2014
  • The fabrication and characterization of a Si/ZnO thin film heterojunction ultraviolet photodiode has been presented in this paper. ZnO thin film of ~100 nm thick was deposited on <100> Silicon (Si) wafer by atomic layer deposition (ALD) technique. The Photoluminescence spectroscopy confirms that as-deposited ZnO thin film has excellent visible-blind UV response with almost no defects in the visible region. The room temperature current-voltage characteristics of the n-ZnO thin film/p-Si photodiodes are measured under an UV illumination of $650{\mu}W$ at 365 nm in the applied voltage range of ${\pm}2V$. The current-voltage characteristics demonstrate an excellent UV photoresponse of the device in its reverse bias operation with a contrast ratio of ~ 1115 and responsivity of ~0.075 A/W at 2 V reverse bias voltage.