• Title/Summary/Keyword: ZnO/Si

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Electrical Properties of Eco-Friendly RuO2-Based Thick-Film Resistors Containing CaO-ZnO-B2O3-Al2O3-SiO2 System Glass for AlN Substrate (Electrical Properties of Eco-Friendly RuO2-Based Thick-Film Resistors Containing CaO-ZnO-B2O3-Al2O3-SiO2 계 유리가 적용된 질화알루미늄 기판용 RuO2계 친환경 후막저항의 전기적 특성 연구)

  • Kim, Min-Sik;Kim, Hyeong-Jun;Kim, Hyung-Tae;Kim, Dong-Jin;Kim, Young-Do;Ryu, Sung-Soo
    • Journal of the Korean Ceramic Society
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    • v.47 no.5
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    • pp.467-473
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    • 2010
  • The objective of this study is to prepare lead-free thick film resistor (TFR) paste compatible with AlN substrate for hybrid microelectronics. For this purpose, CaO-ZnO-$B_2O_3-Al_2O_3-SiO_2$ glass system was chosen as a sintering aid of $RuO_2$. The effects of the weight ratio of CaO to ZnO in glass composition, the glass content and the sintering temperature on the electrical properties of TFR were investigated. $RuO_2$ as a conductive and glass powder were dispersed in an organic binder to obtain printable paste and then thick-film was formed by screen printing, followed by sintering at the range between $750^{\circ}C$ and $900^{\circ}C$ for 10 min with a heating rate of $50^{\circ}C$/min in an ambient atmosphere. The addition of ZnO to glass composition and sintering at higher temperature resulted in increasing sheet resistance and decreasing temperature coefficient of resistance. Using $RuO_2$-based resistor paste containing 40 wt%glass of CaO-20.5%ZnO-25%$B_2O_3$-7%$Al_2O_3$-15%$SiO_2$ composition, it is possible to produce thick film resistor on AlN substrate with sheet resistance of $10.6\Omega/\spuare$ and the temperature coefficient of resistance of 702ppm/$^{\circ}C$ after sintering at $850^{\circ}C$.

Fabrication and Characterization of Dielectric Materials of Front and Back Panel for PDP

  • Chang, Myeong-Soo;Pae, Bom-Jin;Lee, Yoon-Kwan;Ryu, Byung-Gil;Park, Myung-Ho
    • Journal of Information Display
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    • v.2 no.3
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    • pp.39-43
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    • 2001
  • The glass compositions of $PbO-SiO_2-B_2O_3$ system and $P_2O_5-PbO-ZnO$ system for the transparent dielectric materials for front panel and $P_2O_5$-ZnO-BaO and $SiO_2-ZnO-B_2O_3$ for the reflective dielectric materials for back panel of PDP (Plasma Display Panel) were investigated. As a result, transparent dielectric materials for front panel showed good dielectric properties, high transparency, and proper thermal expansion matching to soda lime glass substrate. And the reflective dielectric layers for back panel were prepared from two series of parent glass and oxide filler. It was found that these glassceramics are useful materials for dielectric layers in PDP device, as they have similar thermal expansion to soda-lime glass plate, high reflectance, and low sintering temperature. In particular, the addition of $BPO_4$ and $TiO_2$ as fillers to $SiO_2-ZnO-B_2O_3$ system is considered to be the most effective for acquiring good properties of lower dielectric layer for PDP device.

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Surface Acoustic Wave Properties of ZnO Thin Films Deposited on Diamond Substrate (다이아몬드 기판상에 증착된 ZnO 압전박막의 탄성표면파 특성)

  • 김영진;정영호
    • Korean Journal of Crystallography
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    • v.7 no.2
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    • pp.175-182
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    • 1996
  • ZnO thin films were deposited on Corning 7059 glass substrates to study fundamental properties of films. According to the experimental results, (002) preferred ZnO thin films were grown by purging Ar/O2 mixed gas, but not without oxygen gas. The structure and the orientation of ZnO thin films were much affected by the substrate temperature and rf power. High quality ZnO films were obtained by increasing their values. Optimum deposition parameters were : 300W rf power, 300℃ substrate temperature, Ar/O2=70/30. To characterize SAW propagation properties, IDT was fabricated by etching Al films deposited on diamond/Si wafer with RIE. Measured λ(wavelength) was 24μm and experimental results were well matched with simulation. Center frequency was 250MHz, and the calculated phase velocity of ZnO/ diamond structure was about 6000m/s.

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Photoluminescent Properties of $\textrm{Zn}_2\textrm{SiO}_4$:Mn Green Phosphors Prepared by the Solution Reaction Method (액상반응법으로 제조한 $\textrm{Zn}_2\textrm{SiO}_4$:Mn 녹색 형광체의 발광특성)

  • Park, Eung-Seok;Jang, Ho-Jeong;Jo, Tae-Hwan
    • Korean Journal of Materials Research
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    • v.9 no.1
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    • pp.46-50
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    • 1999
  • $\textrm{Zn}_{2-x}\textrm{Mn}_{x}\textrm{SiO}_{4}$ green phosphors have been prepared by the solution reaction method and the photoluminescence and crystalline properties were studied as a function of both the firing temperature ($900^{\circ}C$~$1200^{\circ}C$) and the concentration of Mn activator (x=0.01~0.20). Under 147 nm and 254nm and excitation sources, the emission intensity of the phosphors was increased about 4 times increasing firing temperatures from $900^{\circ}C$ to $1200^{\circ}C$. From the XRD analysis, $\textrm{Zn}_{2}\textrm{SiO}_{4}$:Mn phosphors fired above $1100^{\circ}C$ showed willemite crystal structure. Under 147nm excitation, the maximum emission intensity was obtained at the Mn concentration of x=0.02 for $\textrm{Zn}_{2-x}\textrm{Mn}_{x}\textrm{SiO}_{4}$ phosphors fired at $1200^{\circ}C$ and the concentration quenching was occurred at the Mn concentration above x=0.10. The phosphor particles showed almost spherical shapes with the average size of around 2~3$\mu\textrm{m}$ by the SEM morphology.

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Photoluminescent Properties of $\textrm{Zn}_{2}\textrm{SiO}_{4}$: Mn Green Phosphors doped with Ga (Ga 도핑된 $\textrm{Zn}_{2}\textrm{SiO}_{4}$: Mn 녹색 형광체의 발광특성)

  • Park, Eung-Seok;Jang, Ho-Jeong;Jo, Tae-Hwan
    • Korean Journal of Materials Research
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    • v.8 no.9
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    • pp.860-864
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    • 1998
  • We investigated the photoluminescence and the crystalline properties with Ga doping concentrations (0-12 mol%) in $\textrm{Zn}_{1.98}\textrm{Mn}_{0.02}\textrm{SiO}_{4}$ green phosphors prepared by the solid state reaction. The photoluminescence was improved by a doping of Ga element in $\textrm{Zn}_{1.98}\textrm{Mn}_{0.02}(\textrm{Si_{1-x}\textrm{Ga}_{x})\textrm{O}_{4}$ phosphors which showed the highest emission intensity and good color purity in the doping concentration of x=0.08. The emission intensity of $\textrm{Zn}_{1.98}\textrm{Mn}_{0.02}(\textrm{Si_{1-x}\textrm{Ga}_{x})\textrm{O}_{4}$(x= 0.08) phosphors was increased to 7 times with increasing the sintering temperatures from $1100^{\circ}C$ to $1400^{\circ}C$, showing the improved crystalline quality. The decay time was not affected by Ga doping concentrations with constant values around 24ms. It was found from SEM and PSA analyses that the phosphors were composed of a large number of small grains around 1-3$10\mu\textrm{m}$ with a small amounts of agglomerated particles above $10\mu\textrm{m}$.

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The Improvement and Diagnosis of DC Degradation Properties with The Equivalent-Circuit Analysis of ZnO Varistors (ZnO 바리스터의 등가회로 분석을 통한 DC 열화특성의 향상과 진단)

  • So, Soon-Jin;Kim, Deok-Kyu;Kim, Young-Jin;So, Byung-Moon;Park, Choon-Bae
    • Proceedings of the KIEE Conference
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    • 1999.11d
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    • pp.978-980
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    • 1999
  • In this paper, DC degradation of ZnO varistor sintered in the atmospheres of nitrogen and oxygen was investigated. The content of $SiO_2$ containing 0.0, 0.2, 0.5 mol% respectively was addicted for the improvement of degradation property. ZnO varistor was fabricated in the special electrical furnace which had the vacuum system. The temperature and the voltage for the DC degradation test were $115{\pm}2^{\circ}C$, $0.85V_{1mA/cm^2}$. The time conditions for this test were 0, 2, 4, 8 hours and Current-voltage analysis is used to determine nonlinear coefficients($\alpha$). Frequency analysis are accomplished for the understanding of electrical properties as DC degradation test. In this experiment, We concluded that nonlinear coefficient decreased as the amount of $SiO_2$ addition increased, but degradation rate coefficient increased as the amount of $SiO_2$ addition increased. Also, degradation test with the analysis of equivalent circuit showed that the degradation phenomenon of ZnO varistor wasn't linearity.

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The Effects of AI-Alloying Elements on the Melt Oxidation - III. Oxidation Behavior of Pentad Alloy- (AI 합금의 원소가 용융산화에 미치는 영향 -lll. 오원계 합금의 산화거동-)

  • Ha, Yong-Soo;Kim, Chul-Soo;Kang, Chung-Yun;Kim, Il-Soo;Cho, Chang-Hyun
    • Korean Journal of Materials Research
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    • v.8 no.8
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    • pp.672-677
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    • 1998
  • The following work examines the growth rate and microstructure of the $AI_2O_3$-composite formation by melt oxdation of pentad AI-alloys. The I weight % of each metal elements Cu and Ni were added to AI-IMg-3Si-3Zn and AI-IMg- 3Si-5Zn alloys. The diffenent pentad AI-alloys were oxidized 20 hours long at 1373K and 1473K. The oxidation rates were determined by observing the weight gain. The macro- and microstructure of formed oxide layer were examined by optical microscopy. The AI-IMg-3Si-5Zn-lCu alloy revealed the best oxidation behavior, but formedoxide layer was inhomogeneous.The oxidation rate were accelerated, and the uniform growth of the oxide layer with fine microstructure were obtained by putting a thin layer of $SiO_2$ on the surface of the alloy.

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Doping and Annealing Effect on Luminescent Characteristics of $_2$ Phosphor Thin Films (ZnGa$_2$O$_4$형광박막의 발광특성에 미치는 도핑 및 어닐리의 효과)

  • 정영호;정승묵;김석범;김영진
    • Journal of the Korean Ceramic Society
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    • v.35 no.6
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    • pp.619-625
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    • 1998
  • Mn doped {{{{ {Zn {Ga }_{2 }O }_{4 } }} thin film phosphors were prepared on Si(100) wafers and ITO coated glass substrates by rf magnetron sputtering technique and the effects of the substrates dopant and the sputtering paramet-ers were analyzed, Changes of the oreintation were observed after annealine tratment. The grain size of {{{{ {Zn {Ga }_{2 }O }_{4 } }} : Mn thin film deposited on Si wafer was smaller than that on ITO/glass substrate which resulted in higher PL intensity. The PL spectra of Mn doped {{{{ {Zn {Ga }_{2 }O }_{4 } }} thin films showed sharp green luminescence spec-trum. According to CL spectrum it could be concluded that Mn ions acted as an actuator for green emission by substituting Zn atom sites.

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Implementation of High Carrier Mobility in Al-N Codoped p-Type ZnO Thin Films Fabricated by Direct Current Magnetron Sputtering with ZnO:Al2O3 Ceramic Target

  • Jin, Hujie;Xu, Bing;Park, Choon-Bae
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.4
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    • pp.169-173
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    • 2011
  • In this study, Al-N codoped p-type zinc oxide (ZnO) thin films were deposited on Si and homo-buffer layer templates in a mixture of $N_2$ and $O_2$ gas with ceramic ZnO:(2 wt% $Al_2O_3$) as a sputtering target using DC- magnetron sputtering. X-ray diffraction spectra of two-theta diffraction showed that all films have a predominant (002) peak of ZnO Wurtzite structure. As the $N_2$ fraction in the mixed $N_2$ and $O_2$ gases increased, field emission secondary electron microscopy revealed that the surface appearance of codoped films on Si varied from smooth to textured structure. The p-type ZnO thin films showed carrier concentration in the range of $1.5{\times}10^{15}-2.93{\times}10^{17}\;cm^{-3}$, resistivity in the range of 131.2-2.864 ${\Omega}cm$, and mobility in the range of $3.99-31.6\;cm^2V^{-1}s^{-1}$ respectively.

A Study on the Growth of ZnGa$_2$O$_4$ Thin Film Phosphors (ZnGa$_2$O$_4$ 박막형광체 성장에 관한 연구)

  • 정영호;김영진
    • Journal of the Korean Ceramic Society
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    • v.35 no.2
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    • pp.145-150
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    • 1998
  • ZnGa2O4 thin film phosphors were deposited on Si(100) (111) wafers by rf magnetron sputtering. The ef-fects of substrates and deposition parameters on the growing mechanisms were studied. As a results of the effect of substrate temperature tranistions of growth orientation and different growing behaviors were ob-served. Also polycrystalline ZnGa2O4 thin film could not be achieved without oxygen gas. PL spectrum of ZnGa2O4 thin films were analyzed and showed broad band luminescence spectrum.

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