[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4191/KCERS.2010.47.5.467

Electrical Properties of Eco-Friendly RuO₂-Based Thick-Film Resistors Containing CaO-ZnO-B₂O₃-Al₂O₃-SiO₂ System Glass for AlN Substrate

Kim, Min-Sik (Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology)
Kim, Hyeong-Jun (Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology)
Kim, Hyung-Tae (Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology)
Kim, Dong-Jin (KMC Technology)
Kim, Young-Do (Materials Science & Engineering, Hanyang University)
Ryu, Sung-Soo (Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology)

Publication Information

Journal of the Korean Ceramic Society / v.47, no.5, 2010 , pp. 467-473 More about this Journal

Abstract

The objective of this study is to prepare lead-free thick film resistor (TFR) paste compatible with AlN substrate for hybrid microelectronics. For this purpose, CaO-ZnO- $B_2O_3-Al_2O_3-SiO_2$ glass system was chosen as a sintering aid of $RuO_2$ . The effects of the weight ratio of CaO to ZnO in glass composition, the glass content and the sintering temperature on the electrical properties of TFR were investigated. $RuO_2$ as a conductive and glass powder were dispersed in an organic binder to obtain printable paste and then thick-film was formed by screen printing, followed by sintering at the range between $750^{\circ}C$ and $900^{\circ}C$ for 10 min with a heating rate of $$50^{\circ$ $}C$$ /min in an ambient atmosphere. The addition of ZnO to glass composition and sintering at higher temperature resulted in increasing sheet resistance and decreasing temperature coefficient of resistance. Using $RuO_2$ -based resistor paste containing 40 wt%glass of CaO-20.5%ZnO-25% $B_2O_3$ -7% $Al_2O_3$ -15% $SiO_2$ composition, it is possible to produce thick film resistor on AlN substrate with sheet resistance of $10.6\Omega/\spuare$ and the temperature coefficient of resistance of 702ppm/ $^{\circ}C$ after sintering at $850^{\circ}C$ .

Keywords

Thick film resistor; $RuO_2$ ; AlN; Lead-free; CaO-ZnO- $B_2O_3-Al_2O_3-SiO_2$ glass;

Citations & Related Records

Times Cited By SCOPUS : 0

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