• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• 한국산학기술학회논문지
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• 제21권11호
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• pp.554-560
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• 2020

평판 디스플레이 제조 공정에서 대상물의 위치 결정을 위해 고정밀 평면 모션 스테이지를 사용한다. 이 유형의 스테이지는 일반적으로 마찰이 없는 선형 모터와 에어 베어링을 사용하며, 고정밀 위치 센서로 레이저 간섭계를 사용한다. 스테이지의 불가피한 기생 운동에 의해 야기되는 요 모션 오차는 위치 결정 대상체의 향 변화를 의미하므로, 스테이지의 성능과 공정 정밀도 향상을 위해 요 모션 오차의 실시간 동적 보정은 매우 중요하다. 요 모션 오차 보상에는 갠트리 제어가 일반적이며, 이 방법을 공기베어링 가이드를 사용하는 스테이지에 적용하기 위해서 회전 모션을 허용하는 유연기구가 스테이지에 적용된다. 본 논문은 공기베어링과 유연기구를 갖춘 H형 XY 스테이지의 정속 구동 성능을 개선하는 방법을 제안한다. 유연기구를 포함한 스테이지의 갠트리 제어 시 선형 모터로부터 발생하는 상호 리플의 발생 원인을 분석하고, 이러한 상호 리플을 보상하는 방안으로 적응 학습 제어를 제시한다. 제시 방안의 검증을 위해 시뮬레이션을 수행하여, 보상 제어를 통해 속도 리플이 약 22 % 수준으로 감소함을 확인하였다. 그리고 요 모션 오차가 발생하는 스테이지 상태를 가정하여 리플 저감 효과를 검증하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1996년도 한국자동제어학술회의논문집(국내학술편); 포항공과대학교, 포항; 24-26 Oct. 1996
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• pp.1099-1102
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• 1996

In this paper, roll/yaw attitude control of spacecraft using a double gimbaled wheel is discussed with two feedback controllers designed. One is a PD controller with no phase difference between roll and yaw control input. The other is a PD controller with a phase lag compensator about the yaw control input. The phase lag compensator is designed as a first order system and a lag parameter is designed for the yaw angle control. There are two case simulations for each controller ; constant disturbance torques and initial errors of nutation at motion. We obtain the results through simulations that steady-state error and rising time of yaw angle are determined by the compensator. Simulation parameters used in this study are the values of KOREASAT F1.

• 한국자동차공학회논문집
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• 제12권6호
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• pp.182-190
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• 2004

This paper presents reconstruction analysis of vehicle trajectory using records of a developed black box, and results of validation tests. For reconstruction of vehicle trajectory, the black box records the longitudinal and lateral accelerations and yaw-rate of vehicle during a pre-defined time period before and after the accident. One 2-axis accelerometer is used for measuring accelerations, and one vibrating structure type gyroscope is used for measuring yaw-rate of vehicle. The vehicle's planar trajectory can be reconstructed by integrating twice accelerations along longitudinal and lateral directions with yaw-rate values. However, there may be many kinds of errors in sensor measurements. The causes of errors are as follows: mis-alignment, low frequency offset drift, high frequency noise, and projecting 3-dimensional motion into 2-dimensional motion. Therefore, some procedures are taken for error compensation. In order to evaluate the reliability and the accuracy of trajectory reconstruction results, the black box was mounted on a passenger car. The vehicle was driven and tested along various specified lanes. Through the tests, the accuracy and usefulness of the reconstruction analysis have been validated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1438-1441
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• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• 한국음향학회지
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• 제40권4호
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• pp.382-390
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• 2021

해저면 영상을 취득하기 위해 측면주사소나나 다중빔측심기 외에도 합성개구소나가 상용화되어 널리 사용되고 있으며 국내에서도 예인형 시스템 개발 등 관련 연구가 진행 중에 있다. 고해상도의 합성개구소나 영상을 얻기 위해서는 이를 탑재하고 있는 플랫폼의 운동을 정확하게 추정하는 것이 필요하며 이를 위해 정밀한 수중항법 시스템이 요구되고 있다. 본 논문에서는 합성개구소나를 탑재하고 있는 플랫폼의 운동 특성에 따라 소나 영상의 왜곡이 얼마나 발생하는지 정량적으로 분석함으로써 요구되는 항법 정확도와 항법센서의 정밀도를 설정하는데 있어서 기준이 되는 자료를 제공하고자 한다. 총 다섯가지의 운동을 고려하고 있으며 정량적 분석을 위해 정규화된 평균 제곱근 오차를 정의한다. 각 운동 특성의 변수값 변화에 따른 오차 분석 수치해석을 통해 yaw and sway 운동이 가장 큰 영상 왜곡을 야기하며 pitch and heave 운동의 영향은 크지 않음을 확인하였다.

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.26-31
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• 2008

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

• 한국정밀공학회지
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• 제23권6호
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• pp.96-103
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• 2006

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ${\mu}m$), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100{\mu}m\times100{\mu}m$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance. Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is $\sqrt{(3.96)^2+(4.10\times10^{-5}{\times}p)^2}$ measured length in nm.

• 한국전자파학회논문지
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• 제22권1호
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• pp.16-23
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• 2011

본 논문에서는 레이더 플랫폼의 요동에 의해서 흐려진 SAR(Synthetic Aperture Radar) 영상의 위상 오차를 보상하기 위하여 GPS(Global Positioning System)/IMU(Inertial Measurement Unit) 데이터를 이용한 요동 보상 기법을 소개한다. 실제 비행 궤적의 경우 대기의 왜란(turbulence)에 의한 항공기의 pitch, roll 및 yaw 운동에 의해 레이더의 플랫폼은 속도 변화가 생기고, 또한, 이상적인 궤적에서 벗어나게 된다. 이로 인한 along-track 속도 오차와 펄스간 위상 오차로 인해 SAR 영상은 흐려지게 된다. 요동 보상을 수행할 경우, 이러한 오차를 줄여서 영상의 품질을 개선할 수 있다. 시뮬레이션 결과, 레이더 플랫폼에 요동이 있을 경우 이 논문에서 소개한 요동 보상기법은 흐려진 SAR 영상의 품질을 개선하는데 효율적임을 알 수 있다.