• 한국결정학회:학술대회논문집
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• 한국결정학회 2002년도 정기총회 및 추계학술연구발표회
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• pp.36-36
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• 2002

To Establish of standard technique of length measurent in 2D plane, we develope AFM system. The XY scanner scans the sample only in XY plane, while the Z scanner scans the specimen only in Z-direction. Cantilever tip is controlled to has constant height relative to speciman surface by feedback of PSPD signal. To acquire high accuracy, Z-axis measuring sensor will be added.(COXI or others). In this paper we design XYZ stage suitable for this AEM system. For XY stage, single module parallel-kinnematic flexure stage is used which has high orthogonality and minimum out-of-plane motion. To obtain best performance optimal design is performed. For XY stage, to be robust about parasitic motion optimal design of maximizing Z and tilt stiffness is performed under the constraint of motion range and stage size. And for Z stage, optimal design of maximizing 1st resonant frequency is performed. Because if resonant frequency is get higher, scan speed is improved. So it makes reduce the error by sensor drift. Resultly XYZ stage each have 1st natural frequency of 115㎐, 201㎐, 2.66㎑ and range 109㎛, 110㎛, 12㎛.

• 대한기계학회논문집A
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• 제22권4호
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• pp.868-878
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• 1998

There are recently increasing needs for precision XYZ-stage in the fields of nanotechnology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). Force measurements are made in the AFM by monitoring the deflection of a flexible element (usually a cantilever) in response to the interaction force between the probe tip and the sample and controlling the force neasyred constant topography can be obtained. The power of the STM is based on the strong distance dependence of the tunneling current in the vacuum chamber and the current is a feedback for the tip to trace the surface topography. Therefore, it is required for XYZ-stage to position samples with nanometer resolution, without any crosscouples and any parasitic motion and with fast response. Nanometer resolution is essential to investigate topography with reasonable shape. No crosscouples and parasitic motion is essential to investigate topography without any shape distortion. Fast response is essential to investigate topography without any undesirable interaction between the probe tip and sample surface ; sample scratch. To satisfy these requirements, this paper presents a novel XYZ-stage concept, it is actuated by PZT and has a monolithic flexible body that is made symmetric as possible to guide the motion of the moving body linearly. PZT actuators have a very fast response and infinite resolution. Due to the monolithic structure, this XYZ-stage has no crosscouples and by symmetry it has no parasitic motion. Analytical modeling of this XYZ-stage and its verification by FEM modeling are performed and optimal design that is to maximize 1st natural frequencies of the stage is also presented and with that design values stage is manufactured.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.429-434
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• 2002

In order to improve the accuracy in the field of simiconductor and LCD research equipment, the demand of XYZ stage which is possible to control X axis, Y axis and Z axis has been increased steadly in place of the existing XY stage which is only practicable to X & Y axis positioning control. This paper presents a new pneumatic actuator for Micro-positioning control in the XYZ stage. Air pressure in a pneumatic actuator is controlled by the E/P Regulator. The control range of pneumatic actuator is about 100 micro-meters and it's construction concept is easy to apply a practical state

• 가정과삶의질연구
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• 제23권1호
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• pp.1-18
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• 2005

The purpose of this study was to construct the Marital Relationship Enhancement Program based on PREP(Prevention and Relationship Enhancement Program), and to examine the effect of it for couples in the early marriage stage. To perform this program, six session of time-limited(two hour) were carried out experimental group. and subjects were assigned to experimental group(N=6 couples) and control group(N=6 couples). Scales of PREPARE II (PREmarital Personal And Relationship Evaluation), Couple Communication Scales and Commitment Scales were used as pre-post-follow instruments of this study. Major finding were as follows : 1. Marital Relationship Enhancement Program for couples in the early marriage stage has meaningful consequences for the improvement of participants' couple relationship. 2. Marital Relationship Enhancement Program had meaningful consequence for the improvement of participants' realistic expectation of marriage, communication and conflict resolution skills and leisure activities. These positive effects maintained at follow-up. However, it hadn't meaningful consequence for the improvement of participants' marital commitment. 3. Marital Relationship Enhancement Program had also meaningful consequence for the improvement of the wives' realistic expectation of marriage, communication and conflict resolution skills and leisure activities, of the husbands' communication and conflict resolution skills.

• 방사성폐기물학회지
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• 제3권1호
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• pp.17-21
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• 2005

방사선차폐 laser ablation 시스템을 레이저, 미세영역의 영상 확인을 위한 이미지 시스템, XYZ 이동장치와 조절기, ablation chamber, manipulator 및 여러 가지 광학부품들로 구성하였다. Ablation용 레이저는 UOB 및 tircaloy 시편으로부터 효율적으로 시료를 채취할 수 있도록 266 nm(6 mJ)까지 파장 변환이 가능한 Nd:YAG 레이저를 선정하였으며, 이미지 시스템은 직경 50 $\mu$m 크기의 crater를 판별할 수 있는 200 배율 이상의 규격을 갖춘 CCD 카메라로 선정하였다. 시편 미세이동장치는 XYZ방향으로 시편이동이 가능하고 최대 이동거리가 50 mm까지 , 그리고 최소 1$\mu$m 씩 정확하게 움직일 수 있는 장치로 선정하였다. 구성된 각 단위기기들에 대하여 광학 정렬을 수행한 후, 시료채취 부위를 50 $\mu$m씩 정확하게 이동하면서 레이저로 조사시킨 시료 표면을 CCD 카메라를 통하여 관찰한 결과, 표면에 생성된 crater는 원형임을 확인함으로써 단위기기별 성능을 확인할 수 있었다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.677-682
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• 2007

Recently, a precision stage is widely used in the fields of the nano technology. In this paper, the precision stage which consists of linear motor, vision system, light source system and controller, is designed and developed for nano imprint machine. Stiffness design considering resonance frequency is important for the precision stage. A virtual machine simulation is useful for machine development the early design stage. Kinematic and dynamic simulations of XYZ stage are performed. To consider the resonance frequency and vibration effects flexible multibody dynamics are utilized with FE modeling of the structural components.

• 전기학회논문지
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• 제62권9호
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• pp.1283-1289
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• 2013

The purpose of this study is to find the new method for estiming the spatial variations in a light source with utilizing the optical fiber sensory system. With this aim, firstly the asymmetry in the beam profile of a light source is evaluated by using the tipped optical fiber with 0, 10, 20, 30, 40, 45-degree angle. Secondly the variation of position in a light source is estimated by adjusting the relative position between the light source unit (XYZ stage, LED, Optical fiber) and the receiver unit (Photodiode, XYZ stage). Our experimental results show that the spatial variation of a light source can be resolved in terms of the variations in beam profile with varying the tip angle of an optical fiber and adjusting the relative distance between the light source unit and the receiver.

• 한국정밀공학회지
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• 제22권12호
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• pp.198-204
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• 2005

For precise micro V-grooving, ultrasonic elliptical vibration cutting (UEVC) is proposed using two parallel piezoelectric actuators, which are energized by sinusoidal voltages with a phase difference of 90 degrees. Experimental setup is composed of stacked PZT actuators, a single crystal diamond cutting tool, and a precision motorized xyz stage. It is found that the chip formed in the process of UEVC is discontinuous because of the periodic contacts and non-contacts occurring between the tool and workpiece. It is experimentally observed that the cutting force in the process of UEVC significantly reduces compared to the ordinary non-vibration cutting. In addition, the creation of burr during UEVC is significantly suppressed, which is attributable to the decrease in the specific cutting energy.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.625-628
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• 2005

For precise micro-grooving and surface machining, ultrasonic cyclic elliptical cutting is proposed using two parallel piezoelectric actuators. The piezoelectric actuators are energized by sinusoidal voltages of varying phase which is essenstial to generating elliptical cutting. Experimental setup is composed of ultrasonic motor, single crystal diamond cutting tool, and precise motorized xyz stage. It is confirmed experimentally that the cutting performance, in terms of the cutting force, the burr formation, and the discontinuous chip formation is improved remarkably by applying ultrasonic elliptical vibration cutting.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.1080-1083
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• 1997

Micro-stereolithography is a newly proposed technology as a means that can fabricate 3D micro-structures of free form. It makes a 3D structure by dividing the shape into many slices of relevant thickness along honzontal surfaces, hardening each layer of slice with a laser, and stacking them up to a des~red shape. Scale effect becomes important in this micro-fabrication process, d~fferently from the conventional stereolithography. To realize this micro-stereolithography technology, we developed an equipment using Ar+ laser, xyz stages, controllers and all the optic devices. Using the equipment, a number of micro-structures were successfully fabricated including a winecup of several tens of micrometers.