• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.36-36
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• 2002

To Establish of standard technique of length measurent in 2D plane, we develope AFM system. The XY scanner scans the sample only in XY plane, while the Z scanner scans the specimen only in Z-direction. Cantilever tip is controlled to has constant height relative to speciman surface by feedback of PSPD signal. To acquire high accuracy, Z-axis measuring sensor will be added.(COXI or others). In this paper we design XYZ stage suitable for this AEM system. For XY stage, single module parallel-kinnematic flexure stage is used which has high orthogonality and minimum out-of-plane motion. To obtain best performance optimal design is performed. For XY stage, to be robust about parasitic motion optimal design of maximizing Z and tilt stiffness is performed under the constraint of motion range and stage size. And for Z stage, optimal design of maximizing 1st resonant frequency is performed. Because if resonant frequency is get higher, scan speed is improved. So it makes reduce the error by sensor drift. Resultly XYZ stage each have 1st natural frequency of 115㎐, 201㎐, 2.66㎑ and range 109㎛, 110㎛, 12㎛.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.4
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• pp.868-878
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• 1998

There are recently increasing needs for precision XYZ-stage in the fields of nanotechnology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). Force measurements are made in the AFM by monitoring the deflection of a flexible element (usually a cantilever) in response to the interaction force between the probe tip and the sample and controlling the force neasyred constant topography can be obtained. The power of the STM is based on the strong distance dependence of the tunneling current in the vacuum chamber and the current is a feedback for the tip to trace the surface topography. Therefore, it is required for XYZ-stage to position samples with nanometer resolution, without any crosscouples and any parasitic motion and with fast response. Nanometer resolution is essential to investigate topography with reasonable shape. No crosscouples and parasitic motion is essential to investigate topography without any shape distortion. Fast response is essential to investigate topography without any undesirable interaction between the probe tip and sample surface ; sample scratch. To satisfy these requirements, this paper presents a novel XYZ-stage concept, it is actuated by PZT and has a monolithic flexible body that is made symmetric as possible to guide the motion of the moving body linearly. PZT actuators have a very fast response and infinite resolution. Due to the monolithic structure, this XYZ-stage has no crosscouples and by symmetry it has no parasitic motion. Analytical modeling of this XYZ-stage and its verification by FEM modeling are performed and optimal design that is to maximize 1st natural frequencies of the stage is also presented and with that design values stage is manufactured.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.429-434
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• 2002

In order to improve the accuracy in the field of simiconductor and LCD research equipment, the demand of XYZ stage which is possible to control X axis, Y axis and Z axis has been increased steadly in place of the existing XY stage which is only practicable to X & Y axis positioning control. This paper presents a new pneumatic actuator for Micro-positioning control in the XYZ stage. Air pressure in a pneumatic actuator is controlled by the E/P Regulator. The control range of pneumatic actuator is about 100 micro-meters and it's construction concept is easy to apply a practical state

• Journal of Families and Better Life
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• v.23 no.1 s.73
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• pp.1-18
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• 2005

The purpose of this study was to construct the Marital Relationship Enhancement Program based on PREP(Prevention and Relationship Enhancement Program), and to examine the effect of it for couples in the early marriage stage. To perform this program, six session of time-limited(two hour) were carried out experimental group. and subjects were assigned to experimental group(N=6 couples) and control group(N=6 couples). Scales of PREPARE II (PREmarital Personal And Relationship Evaluation), Couple Communication Scales and Commitment Scales were used as pre-post-follow instruments of this study. Major finding were as follows : 1. Marital Relationship Enhancement Program for couples in the early marriage stage has meaningful consequences for the improvement of participants' couple relationship. 2. Marital Relationship Enhancement Program had meaningful consequence for the improvement of participants' realistic expectation of marriage, communication and conflict resolution skills and leisure activities. These positive effects maintained at follow-up. However, it hadn't meaningful consequence for the improvement of participants' marital commitment. 3. Marital Relationship Enhancement Program had also meaningful consequence for the improvement of the wives' realistic expectation of marriage, communication and conflict resolution skills and leisure activities, of the husbands' communication and conflict resolution skills.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.3 no.1
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• pp.17-21
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• 2005

Shielded laser ablation system composed of laser system, image analyser, XYZ translator with motion controller, ablation chamber, manipulator and various optics was designed. Nd:YAG laser which can be tunable from 1064 nm to 266 m was selected as light source. CCD camera(< $\pm$200) was chosen to analyze a crater less than 50 un in diameter. XYZ translator was composed of three linear stage which can travel 50 w with a minimum movement of 1 um and motion controller. Before the performance test, each part of system was optically aligned. To perform the ablation test, the specimen was ablated by 50 um interval and observed by image analyser The shape of crater was almost round, indicating laser beam has homogeneous energy distribution. The resolution and magnification of image system were compatible with the design.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.677-682
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• 2007

Recently, a precision stage is widely used in the fields of the nano technology. In this paper, the precision stage which consists of linear motor, vision system, light source system and controller, is designed and developed for nano imprint machine. Stiffness design considering resonance frequency is important for the precision stage. A virtual machine simulation is useful for machine development the early design stage. Kinematic and dynamic simulations of XYZ stage are performed. To consider the resonance frequency and vibration effects flexible multibody dynamics are utilized with FE modeling of the structural components.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.62 no.9
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• pp.1283-1289
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• 2013

The purpose of this study is to find the new method for estiming the spatial variations in a light source with utilizing the optical fiber sensory system. With this aim, firstly the asymmetry in the beam profile of a light source is evaluated by using the tipped optical fiber with 0, 10, 20, 30, 40, 45-degree angle. Secondly the variation of position in a light source is estimated by adjusting the relative position between the light source unit (XYZ stage, LED, Optical fiber) and the receiver unit (Photodiode, XYZ stage). Our experimental results show that the spatial variation of a light source can be resolved in terms of the variations in beam profile with varying the tip angle of an optical fiber and adjusting the relative distance between the light source unit and the receiver.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.198-204
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• 2005

For precise micro V-grooving, ultrasonic elliptical vibration cutting (UEVC) is proposed using two parallel piezoelectric actuators, which are energized by sinusoidal voltages with a phase difference of 90 degrees. Experimental setup is composed of stacked PZT actuators, a single crystal diamond cutting tool, and a precision motorized xyz stage. It is found that the chip formed in the process of UEVC is discontinuous because of the periodic contacts and non-contacts occurring between the tool and workpiece. It is experimentally observed that the cutting force in the process of UEVC significantly reduces compared to the ordinary non-vibration cutting. In addition, the creation of burr during UEVC is significantly suppressed, which is attributable to the decrease in the specific cutting energy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.625-628
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• 2005

For precise micro-grooving and surface machining, ultrasonic cyclic elliptical cutting is proposed using two parallel piezoelectric actuators. The piezoelectric actuators are energized by sinusoidal voltages of varying phase which is essenstial to generating elliptical cutting. Experimental setup is composed of ultrasonic motor, single crystal diamond cutting tool, and precise motorized xyz stage. It is confirmed experimentally that the cutting performance, in terms of the cutting force, the burr formation, and the discontinuous chip formation is improved remarkably by applying ultrasonic elliptical vibration cutting.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1080-1083
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• 1997

Micro-stereolithography is a newly proposed technology as a means that can fabricate 3D micro-structures of free form. It makes a 3D structure by dividing the shape into many slices of relevant thickness along honzontal surfaces, hardening each layer of slice with a laser, and stacking them up to a des~red shape. Scale effect becomes important in this micro-fabrication process, d~fferently from the conventional stereolithography. To realize this micro-stereolithography technology, we developed an equipment using Ar+ laser, xyz stages, controllers and all the optic devices. Using the equipment, a number of micro-structures were successfully fabricated including a winecup of several tens of micrometers.