• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 G
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• pp.2515-2517
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• 1998

The micro fresnel lens(MFL) was modeled and fabricated on a XY-stage electrostatically driven by comb actuator. The modeled MFL was approximated as a step shape with 4-phase and 4-zone plate. The focal length and diameter of the MFL is 20mm and 912${\mu}m$, respectively. The XY-stage suspending the MFL is designed to generate a large static displacement up to about 20${\mu}m$. On SOI substrates, we first fabricated MFL using the RIE(reactive Ion etching) technology and then patterned and etched bulk silicon to make XY-stage. After the fabrication of all structures on top side of the SOI substrates. $Si_3N_4$ was deposited for passivation of all structures using PECVD(plasma enhanced chemical vapor deposition). All the MFL systems width comb drive actuator were released by KOH etching from the bottom side of the SOI wafer using double-sided alignment technique. In fabrication of MFL, a dry etching conditions is established in order to improve surface roughness and to control the etched depth.

• 한국생산제조학회지
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• 제19권4호
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• pp.553-561
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• 2010

In flat panel display or semiconductor industries, they install the equipments with fine line width and high throughput for fabrication and inspection. The equipments are required to have the linear stage which can position the work-piece with high speed, fine resolution on wide range of motion. In this paper, a precision planar linear XY stage is proposed. The stage has a symmetric planar window configuration and is guided by air-bearings on granite plate. The symmetric planar window configuration makes the stage has robustness against dynamic and thermal disturbances. The air-bearings let the stage move smooth on straight guide bar and flat granite surface. The stage is actuated by linear motor with Halbach magnet array (HMA). HMA generates more confined magnetic flux than conventional array. The linear motors are optimized by using sequential quadratic programming (SQP) with the several constraints that are thermal dissipation, required power, force ripple and so on. The planar linear XY stage with the symmetric planar configuration and the linear motors is implemented and then the performance such as force ripple, resolution and stroke are evaluated.

• 대한기계학회논문집A
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• 제35권6호
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• pp.599-607
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• 2011

본 논문에서는 별도의 외부 격리 구조물이나 추가 모터가 필요 없는 XY 선형 모션 스테이지를 위한 반발력 보상 시스템을 개발하였다. 개발된 시스템은 이동 가능한 마그넷 트랙, 스프링, 추가 질량을 포함한 자체 반발력 보상 구조를 가지고 있으며 이송용 모터 코일과 마그넷 트랙의 상대 위치를 검출할 수 있는 전용 센서를 개발하여 고정밀 추력 및 위치를 제어에 적용하였다. 먼저 반발력 보상 시스템을 모델링하고 모의 시험을 통해 이동 거리, 가속도, 하중, 허용 가능한 장비 크기와 같은 설계 요소를 최적화 하였다. 반발력 보상 시스템이 구비된 XY 모션 스테이지를 제작하였으며, 해당 시스템의 성능을 실험적으로 검증하였다. 실험결과 10m/$s^2$ 가감속 시에 85%의 반발력이 반발력 보상 시스템에 의해 흡수되었다.

• 한국정밀공학회지
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• 제19권12호
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• 전기학회논문지
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• 제60권1호
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• pp.63-70
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• 2011

This paper presents the design and operating characteristics of the novel cylindrical linear motor which is designed for the long stroke XY stage. In the long stroke structure, the air gap is changed by the distortion and bending effects, and it makes additional position error in the XY stage. In order to consider the distortion and bending effects of the long stroke, the field part of the cylindrical linear motor is designed as an open structure, and the stroke is supported by the bridge guide which is positioned in the open field part. The mechanical bridge guide can reduce the bending effects of the stroke and can keep a constant air gap. The detailed design process of the proposed cylindrical linear motor is presented in this paper. The proposed motor is analyzed by the 3D FEM technology. The practical XY stage which uses the proposed motor is tested to verify the propose novel cylindrical linear motor. The FEM and experimental results show the effectiveness of the proposed motor.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.468-472
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• 2005

In this paper, the static and dynamic stiffness of the air bearing stage for micro-micro machine tool are examined experimentally. For stiffness and precision concerns, air bearing stages are adapted for 3-axis micro-milling machine which is size of $200x200\;mm^2$. The air bearings in the stage are preloaded by permanent magnets to achieve desired bearing clearance and stiffness for vertical direction. As the stiffness of the air bearing is primary interests, static stiffness test were performed on XY stage in Z direction and Z column in Y direction. Dynamic test were performed on XY stage and Z column, respectively. Both static and dynamic tests were performed in different air pressure conditions. The vertical stiffness of XY stage is about 9 N/ pm where Y stiffness of Z column is much smaller as $1\;N/{\mu}m$ because of the large moment generated by Y force on the column.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 추계학술대회 논문집
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• pp.324-325
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• 2009

• 한국정밀공학회지
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• 제15권6호
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• pp.116-123
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• 1998

An interferometric microscope with an improved lateral resolution is presented. The nanometer resolution XY stage is integrated into standard temporal phase shifting interferometer. The nanometer resolution XY stage is used to position specimen in subpixel of CCD detector, therefore CCD detector's sampling is improved. Two scanning algorithms and those simulation results are also presented. The simulation results show that scanning algorithms improve CCD detector's sampling significantly, and interferometeric microscope's lateral resolution is improved also.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.463-463
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• 2000

A dual-stage positioner for fast and fine robotic manipulations is presented. By adopting the merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. We have constructed an ultra precision XY positioner with dual-stage mechanism where the PZT driven fine stage is mounted on the motor driven XY positioner and applied it to fine tracking controls and micro-tele operations as a slave manipulator. We describe essential merits of the compound actuation mechanism and some control strategies to successfully utilize it with proper servo system design. Through experimental results, the effectiveness of the coarse/fine manipulation by the dual-stage positioner will be shown.