• Title/Summary/Keyword: XPS.

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Study of Selective Etching of GaAs over AlGaAs and InGaP Semiconductors in High Density Planar Inductively Coupled BCl3/SF6 Plasmas (고밀도 평판형 유도결합 BCl3/SF6 플라즈마를 이용한 GaAs/AlGaAs와 InGaP 반도체의 선택적 식각에 관한 연구)

  • Yoo Seungryul;Ryu Hyunwoo;Lim Wantae;Lee Jewon;Cho Guan Sik;Jeon Minhyon;Song Hanjung;Lee BongJu;Ko Jong Soo;Go Jeung Sang;Pearton S. J.
    • Korean Journal of Materials Research
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    • v.15 no.3
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    • pp.161-165
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    • 2005
  • We investigated selective dry etching of GaAs over AlGaAs and InGaP in high density planar inductively coupled $BCl_3/SF_6$ plasmas. The process parameters were ICP source power (0-500 W), RE chuck power (0-30W) and gas composition $(60-100\%\;BCl_3\;in\;BCl_3/SF_6)$. The process results were characterized in terms of etch rate, selectivities of GaAs over AlGaAs and InGaP, surface morphology, surface roughness and residues after etching. $BCl_3/SF_6$ selective etching of GaAs showed quite good results in this study. Selectivities of GaAs $(GaAs:AlGaAs\~36:1,\;GaAs:InGaP\~45:1)$ were superior at $18BCl_3/2SF_6$, 20 W RF chuck power, 300 W ICP source power and 7.5 mTorr. Addition of $(5-15\%)SF_6\;to\;BCl_3$ produced relatively high selectivities of GaAs over AlGaAs and InGaP during etching due to decrease of etch rates of AlGaAs and InGaP (boiling points of etch products: $AlF_3\~1300^{\circ}C,\;InF_3>1200^{\circ}C$ at atmosphere) at the condition. SEM and AFM data showed slightly sloped sidewall and somewhat rough surface$(RMS\~9nm)$. XPS study on the surface of processed GaAs proved a very clean surface after dry etching. It shows that planar inductively coupled $BCl_3/SF_6$ plasmas could be a good candidate for selective dry etching of GaAs over AlGaAs and InGaP.

Development of RGD peptides grafted onto chitosan surfaces; Osteoblast interactions (RGD 펩타이드로 표면개질된 키토산막의 생물학적 영향)

  • Lee, Chang-Kyun;Hwang, Jeong-Hyo;Lee, Yong-Moo;Ku, Young;Rhyu, In-Chul;Lee, Seung-Jin;Han, Soo-Boo;Choi, Sang-Mook;Chung, Chong-Pyoung
    • Journal of Periodontal and Implant Science
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    • v.33 no.1
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    • pp.27-35
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    • 2003
  • 1. 목적 생체재료의 생체친화성을 증진시키고 치유를 촉진하기 위한 목적으로 생체재료의 생화학적 표면개질에 관한 연구가 널리 진행되고 있다. 이와 같은 목적으로 이용되어 온 부착분자에는 아미노산, 펩타이드, 단백질, 효소 및 성장인자들을 들 수 있으며, 이들 분자들을 금속, 골대체물질 및 폴리머와 같은 생체재료의 표면개질에 이용하여 왔다. 이 연구의 목적은 생체적합성이 우수하고 생분해성을 지닌 키토산으로 얇은 막을 제작한 후, 세포외 기질의 구성성분 중 세포부착에 관여하는 RGD 펩타이드를 부착시킨, 표면개질 키토산막의 생물학적 영향을 MG-63 조골양세포를 이용하여 관찰하는 것이다. 2. 방법 2% acetic acid에 키토산 가루를 녹여 만든 2% 키토산 용액으로 24-well 배양접시의 표면을 도포 후 24시간 동안 건조시켜 키토산막을 제작하였다. GRGDS 펩타이드를 cross-linker(EDC, NHS) (Sigma, MO, USA) 용액과 반응시켜서 펩타이드의 카르복실기를 활성화시켰다. 이들을 PBS 완충용액으로 수화시킨 키토산막과 결합시켜 펩타이드의 활성화된 카르복실기와 키토산의 아민기 간에 안정적인 아미드 결합(amide bond)이 형성되도록 하였다. 하루 동안 반응을 일으킨 후 PBS 완충용액과 증류수로 씻어내고 냉동 건조시킴으로써 GRGDS가 결합된 키토산막을 제작하였다. 재료 표면의 화학 성분을 알아보는데 사용되는 방법의 일종인 X-ray photoelectron spectroscopy(XPS) 분석을 통하여 부착분자가 키토산막에 결합된 여부를 확인하였다. GRGDS 펩타이드에 요오드를 결합시킨 후, 이것을 키토산막에 공유 결합시키고 XPS를 통해 요오드가 재료 표면에서 검출되는지를 검사하였다. 요오드가 검출된다면 이것은 키토산막 표면에 실제로 GRGDS 펩타이드가 존재하는 것을 의미하게 된다. 표면개질된 키토산막에 사람조골양세포인 MG-63을 접종하여 이를 실험군으로 하였고, 표면이 개질 되지 않은 키토산막을 대조군으로 하였다. 세포부착의 최적화 농도를 확인하기 위하여 GRGDS를 0.01, 0.05, 0.1, 0.25, 0.5, 1.0mg/ml의 농도로 준비하였다. 배양 후 1일, 7일째에 각 well에서 trypsin EDTA를 이용하여 세포를 분리한 후, 이를 원심 분리하여 세포수측정기를 이용하여 부착 세포의 수를 측정하여 세포의 부착 정도를 비교하였다. 배양 2시간, 24시간 후 주사전자현미경을 이용하여 키토산막에 부착된 세포의 양상을 관찰하였다. 3. 결과 XPS를 통한 표면의 화학 성분 분석 결과 GRGDS 펩타이드를 결합시킨 키토산막에서 요오드가 검출되었으며 펩타이드를 부착하지 않은 대조군에서는 검출되지 않았다. 따라서 cross-linker를 이용한 펩타이드와 키토산막의 공유결합을 확인할 수 있었다. 세포 배양 후 1일째 부착된 세포 수를 측정한 결과 0.1mg/ml 이상의 GRGDS 펩타이드 농도로 공유 결합시킨 키토산막에서 부착 세포 수가 다른 농도에 비해 유의성 있게 많이 관찰되었다. 이 농도 이하에서는 대조군과 실험군간에 세포부착의 유의한 차이가 없었다. 따라서 주사전자현미경을 이용한 부착 세포의 양상에 관한 관찰은 0.1mg/ml 농도의 펩타이드를 이용하였다. 세포 배양 7일째, 부착된 세포 수 측정 결과 GRGDS의 농도에 따른 유의성 있는 차이가 없었으며, 실험군과 대조군간에도 유의성 있는 차이가 없었다. 주사전자현미경 관찰결과 2시간 및 24시간 배양된 실험군 모두에서 별모양의 세포들이 키토산막 표면에 편평하게 잘 부착되어 있으며 많은 위족이 발달된 소견을 보인 반면, 대조군에서는 원형 또는 다각형 모양의 세포들이 실험군에 비해 부착이 덜 되어있는 양상을 보였다. 이 연구를 통하여 기능성 펩타이드를 생체재료의 표면에 공유결합 시키는 방법을 확립할 수 있었으며, RGD 펩타이드의 공유결합으로 표면개질된 키토산막이 조골세포의 부착능을 증진시킬 수 있음을 확인하였다. 표면개질된 생체재료를 소, 중동물에 적용시켜 생체 내에서의 생물학적 영향을 평가할 필요가 있으며, 이 실험의 결과는 향후 다양한 기능성 부착분자를 선발, 고안하여 임플란트용 생체재료의 표면개질에 이용하는 이른바 모방생체재료분야에 널리 활용될 수 있을 것으로 생각된다.

Effect of Continuous Cultivation Years on Soil Properties, Weed Occurrence, and Rice Yield in No-tillage Machine Transplanting and Direct Dry-seeding Culture of Rice (벼 무경운 기계이앙 및 건답직파 연속재배년수가 토양특성, 잡초발생 및 벼 생육에 미치는 영향)

  • Park, Hong-Kyu;Kim, Sang-Su;Choi, Won-Yong;Lee, Ki-Sang;Lee, Jae-Kil
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.47 no.3
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    • pp.167-173
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    • 2002
  • This experiment was conducted to figure out the change of soil physical properties, rice growth and yield with the years of continuous cultivation in direct dry-seeding and no-tillage machine transplanting. Experiments were conducted at NHAES(National Honam Agricultural Experiment Station, RDA, Iksan, Cheon Buk Province, South Korea) with a rice variety "Dongjinbyeo" from 1995 to 2000. In no-tillage machine transplanting cultivation, organic matter in soil was higher than that on direct dry-seeding and was significantly high in topsoil. Problematic weed species were E. crus-galli B., A. keisak H., and L. japonica M. Plant height and tiller number m-2 were higher in common-tillage during the total growth duration. The highest weedy rice occurrence of 27.5% was observed in live years' continuous direct dry-seeding and followed by 6.2%, in four years', and 3.7%, in three years'. The highest yield reduction of 38% was observed in five years' continuous direct dry-seeding. The reduction may resulted from the competition between weedy rice and cultivated rice.

Effects of Different Water Depths on Early Growth of Rice and Barnyard grass(Echinochloa crus-galli) (담수심차이가 벼 품종과 피의 초기생육에 미치는 영향)

  • 박성태;장안철;이수관
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.38 no.5
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    • pp.405-412
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    • 1993
  • This experiment was conducted to investigate the effects of water depths on seedling stand and early growth of califonia rice varieties, S201, M202, A301, Italico livorno and Korean variety, Hwaseongbyeo, and barnyardgrass (Echinochloa crus-galli) The coleoptile length of rice was longer with deep water depth while for the radicle length shorten. As water depth was increased, the percentage of seedling stand were decreased slightly in rice, while sharply increased in barnyardgrass. Plant height of rice with increasing water depth were longer, whereas that of barnyardgrass reduced significantly with weaker. Tiller number of rice and barnyardgrass were significantly reduced as water depth increased. Dry matter weight and healthy score of rice seedling at 35DAS were highest in 7.5cm water depth followed saturated moisture, 15, and 22.5cm water depth, while for barnyardgrass those were especially negatively affected by deep water depth. These results showed that the seedling stand and early growth of barnyardgrass was highly suppressed by deeper water levels compared with rice. Rice cultivars which are showes growth characteristics in deeper water levels at early growth stage were Italico livorno and S201 in Japonica / Indica.

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Varietal Differences in Agronomic Characters of Rice Grown on Salty Water Irrigation (벼의 생육시기별 염수처리에 따른 주요 특성의 품종간 차이)

  • 정진일;김보경;박형만;이선용
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.40 no.4
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    • pp.494-503
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    • 1995
  • The selection of salt tolerant rice variety needs an effective method in its testing. Salinity of irrigated water, 0.5% at seedling stage, 0.6% at tillering stage, and 0.9% at panicle formation stage were treated to test salt tolerance of rice using 45 cultivars. At tillering stage, salty water irrigation reduced plant height to 22.6% in early maturing rices(EMR), 30.5% in medium maturing rices(MMR), and 20.9% in medium-late maturing rices(MLMR), and also reduced number of tillers to 11.2% in EMR, 36.2% in MMR, and 36.0% in MLMR compared to rices grown in non-salty water irrigation. At panicle formation stage of rice, salty water irrigation affected plant height and tiller numbers that showed varietal differences. As salt tolerant rice cultivars, Daegwangbyeo, Namweonbyeo, Sinseonchalbyeo, Gyehwabyeo, and Daeyabyeo were selected. Jinbubyeo, Donghaebyeo, and Tamjinbyeo were weak in salty water irrigation.

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Effect of Substrata Surface Energy on Light Scattering of a Low Loss Mirror (기판의 표면에너지가 반사경의 산란에 미치는 영향)

  • Lee, Beom-Sik;Yu, Yeon-Serk;Lee, Jae-Cheul;Hur, Deog-Jae;Cho, Hyun-Ju
    • Korean Journal of Optics and Photonics
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    • v.18 no.6
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    • pp.452-460
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    • 2007
  • Ultra-low loss ZERODUR and fused silica mirrors were manufactured and their light scattering characteristics were investigated. For this purpose, ZERODUR and fused silica substrates were super-polished by the bowl feed method. The surface roughness were 0.292 ${\AA}$ and 0.326 ${\AA}$ in rms for ZERODUR and fused silica, respectively. To obtain the high reflectivity, 22 thin film layers of $SiO_2$ and $Ta_2O_5$ were deposited by Ion Beam Sputtering. The measured light scattering of ZERODUR and fused silica mirror were 30.9 ppm and 4.6 ppm, respectively. This shows that the substrate surface roughness is not the only parameter which determines the light scattering of the mirror. In order to investigate the mechanism for additional light scattering of the ZERODUR mirror, the surface roughness of the mirror was measured by AFM and was found to be 2.3 times higher than that of the fused silica mirror. It is believed that there is some mismatch at the interface between the substrate and the first thin film layer which leads to the increased mirror surface roughness. To clarify this, the contact angle measurements were performed by SEO 300A, based on the Giriflaco-Good-Fowkes-Young method. The fused silica substrates with 0.46 ${\AA}$ in its physical surface roughness shows lower contact angle than that of the ZERODUR substrate with 0.31 ${\AA}$. This indicates that the thin film surface roughness is determined by not only its surface roughness but also the surface energy of the substrate, which depends on the chemical composition or crystalline orientation of the materials. The surface energy of each substrate was calculated from a contact angle measurement, and it shows that the higher the surface energy of the substrate, the better the surface roughness of the thin film.

Effect of the Preparation Method on the Activity of CeO2-promoted Co3O4 Catalysts for N2O Decomposition (촉매 제조방법에 따른 Co-CeO2 촉매의 N2O 분해 특성 연구)

  • Kim, Hye Jeong;Kim, Min-Jae;Lee, Seung-Jae;Ryu, In-Soo;Yi, Kwang Bok;Jeon, Sang Goo
    • Clean Technology
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    • v.24 no.3
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    • pp.198-205
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    • 2018
  • This study investigated the influence of catalyst preparation on the activity of $Co-CeO_2$ catalyst for $N_2O$ decomposition. $Co-CeO_2$ catalysts were synthesized by co-precipitation and incipient wetness impregnation. In order to estimate the performance of the as prepared catalysts, direct catalytic $N_2O$ decomposition test was carried out under $250{\sim}375^{\circ}C$. As a result, the catalyst prepared by co-precipitation (CoCe-CP) showed an enhanced performance on $N_2O$ decomposition reaction even in the presence of $O_2$ and/or $H_2O$, whereas the impregnation catalyst (CoCe-IM) did not. In order to investigate the difference in catalytic activity, characterization such as XRD, BET, TEM, $H_2-TPR$, $O_2-TPD$, and XPS was conducted. It is confirmed that the particle size and specific surface area were changed depending on the catalyst preparation method and the synthesis process influenced the physical properties of the catalysts. In addition, the improvement in the activity of the catalyst prepared by co-precipitation is due to the enhanced reduction from $Co^{3+}$ to $Co^{2+}$ and the improved oxygen desorption rate. However, it has been confirmed that the surface electron state and binding energy, which are related to $N_2O$ decomposition, do not change depending on the preparation method.

Using Effective Temperatures to Determine Safety Cultivation Season in Direct Seeding Rice on Dry Paddy (작물생육 유효기온 출현시기를 이용한 건답직파 벼의 지역별 안전작기 설정)

  • 최돈향;윤경민;윤성호;박무언
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.42 no.6
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    • pp.666-672
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    • 1997
  • Twenty years' daily mean air temperature data was used to calculate the critical early seeding date(CESD), the optimum heading date(OHD), the critical late heading date for stable ripening(CHDR) and the critical late ripening date(CLRD) for rice seeded on dry paddy in different agroclimatic zones in Korea. The CESD was defined as the first day with mean air temperature of 13$^{\circ}C$, and the OHD as the first day of the 40 consecutive days with mean air temperature of 22$^{\circ}C$ or above after heading. The CHDR was defined as the date after which the cumulative daily mean air temperature would be at least 76$0^{\circ}C$. Lastly, the CLRD was defined as the last day when daily mean air temperature remains above 15$^{\circ}C$. This information was used for the estimation of periods from the earliest date of seeding to optimum heading date, the latest possible date of heading and the latest possible date of ripening in respective regions. For instance, in Suwon, those respective periods mentioned were found to be 104days, 124days, and 165days.

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Effect of Fe and BO3 Substitution in Li1+xFexTi2-x(PO4)3-y(BO3)y Glass Electrolytes (Li1+xFexTi2-x(PO4)3-y(BO3)y 계 유리 전해질에서 Fe 및 BO3 치환 효과)

  • Choi, Byung-Hyun;Jun, Hyung Tak;Yi, Eun Jeong;Hwang, Haejin
    • Journal of the Korean Electrochemical Society
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    • v.24 no.3
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    • pp.52-64
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    • 2021
  • The effect of Fe and BO3 doping on structure, thermal, and electrical properties of Li1+xFexTi2-x(PO4)3-y(BO3)y (x = 0.2, 0.5)-based glass and glass ceramics was investigated. In addition, their crystallization behavior during sintering and ionic conductivity were also investigated in terms of sintering temperature. FT-IR and XPS results indicated that Fe2+ and Fe3+ ions in Li1+xFexTi2-x(PO4)3-y(BO3)y glass worked as a network modifier (FeO6 octahedra) and also as a network former (FeO4 tetrahedra). In the case of the glass with low substitution of BO3, boron formed (PB)O4 network structure, while boron preferred BO3 triangles or B3O3 boroxol rings with increasing the BO3 content owing to boic oxide anomaly, which can result in an increased non-bridging oxygen. The glass transition temperature (GTT) and crystallization temperature (CT) was lowered as the BO3 substitution was increased, while Fe2+ lowered the GTT and raised the CT. The ionic conductivity of Li1+xFexTi2-x(PO4)3-y(BO3)y glass ceramics were 8.85×10-4 and 1.38×10-4S/cm for x = 0.2 and 0.5, respectively. The oxidation state of doped Fe and boric oxide anomaly were due to the enhanced lithium ion conductivity of glass ceramics.

Changes in Sink capacity and Source Activity of Rice Cultivars in Response to Shift of Heading date (벼 품종들의 출수기에 따른 동화산물 생산능력 및 수용기관 크기 변화)

  • Lee, Sok-Young;Kwon, Yong-Woong
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.40 no.2
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    • pp.260-267
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    • 1995
  • In temperate zone planting rice at different date subjects the Crop to different climatic condition. The present study aimed at comparison of the change in source-sink relationship of the Japonica(J) and that of IndicaxJaponica(I$\times$J) type rice cultivars caused by shift of heading date. Two J- and two I$\times$J-type cultivars were made to head on August 16, August 26, and September 5. Sink capacity was changed by shift of heading date in different mode between the types of cultivars. In both types major determinant of sink capacity was number of effective tillers, and the number of spikelets per panicle was the minor. In J-type earlier planting/heading was beneficial to increased panicle numbers and this was due mainly to a larger diurnal difference in temperature. I$\times$J-type cultivars favored a higher daily mean temperature to increase the sink capacity. The ability of source at heading, in terms of leaf area per panicle, chlorophyll content per spiklet, photosynthetic ability of leaves per unit area at 25$\^{\circ}C$, carbohydrate and N contents of leaves, was not so different among different heading dates in both types. However, the source activity was governed principally by temperature during grain filling. The J-type cultivars headed on Sept. 5 and I$\times$J-type cultivars headed later than August 16 could not have had sufficient source activity in grain filling due to lower temperature.

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