• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.369-369
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• 2011

In the current work, we demonstrate the gas phase plasma synthesis of ultrafine boron nanoparticles by decomposing boron trichloride (BCl3) gas in an argon-hydrogen thermal plasma and quenching the hot plasma by expansion through a ceramic nozzle, driving the homogeneous nucleation of nanoparticles. It is shown that ultrafine nanoparticles can be produced from the experiments. We also show the characterization results regarding the oxidation of boron nanoparticles at room temperature using X-ray Photoelectron Spectroscopy (XPS) and the combined Scanning Transmission Electron Microscope (STEM) and Electron Energy Loss Spectroscopy (EELS).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.326-326
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• 2011

반도체 소자의 집적화/소형화에 따라, 낮은 비저항을 가진 구리(Cu)를 이용한 배선공정에 관한 연구가 활발하게 진행되고 있다. 구리배선 공정에 있어 전기 도금법이 다양하게 적용됨에 따라, 구리도금 박막 형성을 위해 사용되는 Cu seed 층의 상태는 배선으로 형성된 Cu박막 특성에 크게 영향을 미친다 [1-3]. 본 연구에서는 sputter 방식으로 증착된 Cu seed 층(Cu seed / Ti / Si) 위에 형성된 자연산화막을 제거하기 위하여 다양한 세정방법을 도입하여 비교 분석하였다. 계면활성제인 TS-40A를 비롯한 NH4OH 용액과 H2SO4 용액을 사용하여 Cu seed 층 위에 형성된 구리산화막을 제거함으로서 형성된 표면형상 및 표면상태를 조사분석 하였다. FE-SEM (Field Emission Scanning Electron Microscope)을 이용하여 표면 처리된 Cu seed층 표면의 형상 및 roughness 등을 측정하였고, XPS (X-ray Photoelectron Spectroscopy)를 이용하여 표면 처리된 Cu seed 표면의 화학구조 및 불순물 상태를 조사하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.262-262
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• 2012

Modifications of graphenes have been studied for catalytic applications due to their advantages such as high surface area, conductivity and thermal stability. In this research, individual graphene oxide (GO) sheets were exfoliated from graphite using Hummers and Offeman method. Pd nano-particles were deposited on the GO surface using Pd2+ ion exchange where hydroxyl groups on the GO act as nucleation sites of Pd nanoparticles and their dispersions. The thermal treatments of the Pd-GO in H2 flow produced Pd-Graphene nanocomposites. Their catalytic performances in Sonogashira reaction were investigated. Morphological and chemical structures of the GO, Pd-GO, and Pd-Graphene were investigated using FT-IR, XRD, TEM, STEM, and XPS. The catalytic performances have been investigated using microwave reactor.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2012년도 춘계학술발표대회
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• pp.98.1-98.1
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• 2012

CdS/CdTe 박막 태양전지의 경우 높은 광흡수 계수를 가지고 있는 CdTe 다결정 박막을 흡수층으로이용 한다. CdTe 다결정 박막의 경우 CdS/CdTe 계면과 박막 내부에 많은 결함들이 존재 하며, CdTe 박막 내부에 존재하는 캐리어의 수를 증가 시키기 위하여 $CdCl_2$ 활성화 공정을 거치게 된다. 이때 박막의 물성 변화를 분석 하기 위하여, X-Ray Diffractometer (XRD), X-ray Photoelectron Spectroscopy (XPS)를 이용하여 박막 표면 분석을 진행 하였다. 이를 통해 박막 표면에서 산소가 Cd와 Te과 결합하면서 산화막이 생성되는 것을 확인하였다. 박막 표면에 생성된 산화막은 후면 금속 전극 형성을 위해, 용액 공정을 통하여 제거 되는데, 이때 CdTe 박막 표면에서 Cd이 용액에 의해 제거 되는 것을 확인 하였다.

• 한국염색가공학회지
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• 제16권1호
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• pp.10-17
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• 2004

Wool fabrics were treated with deep UV for 10 to 30min and then dyed with C.I. Acid Yellow 99, C.I, Acid Red 57 and C.I. Acid Blue 62. FT-IR and XPS have been used to prove the chemical composition of wool fiber surfaces. The mechanical property and colorfastness were also studied. The intencities of the peaks of C=O group at $1700^cm^{-1}$ were increased with increasing irradiation time. Relative $O_{1s},\; N_{1s}\; and\; S_{2p}$ intensities increased considerably and oxygen was incorporated in the form of CO and COO on the fiber surface. The dye uptakes of wool fabrics dyed with three acid dyes were proportional to irradiation times and in inversely proportional to irradiation distances. It was found that the tensile strength of wool fabrics were gradually deteriorated with the UV irradiation times. The colorfastness, such as washing, light and rubbing, of UV irradiated wool fabrics dyed with acid dyes were good.

• 한국전기전자재료학회논문지
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• 제15권12호
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• pp.1011-1015
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• 2002

In this study, Au thin films were etched with a Cl$_2$/Ar gas combination in an inductively coupled plasma. The highest etch rate of the Au thin film was 3500 A/min at a Cl$_2$/(Cl$_2$+Ar) gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. There is Au-Cl bonding by chemical reaction between Cl and Au. During the etching of Au thin films in Cl$_2$/Ar plasma, Au-Cl bond is formed, and these products can be removed by the physical bombardment of Ar ions[l].

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 연구회
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• pp.62-65
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• 2001

The effects of accelerated UV radiation on EPDM used for a polymeric insulator were investigated by contact angle, surface voltage decay after corona charging, SEM-EDX, ATR-FTIR and XPS. EPDM occurs as loss of hydrophobicity by UV treatment, which followed by surface cracking and chalking. The surface voltage decay on UV-treated EPDM show that the shorter decay time corresponded to the treated samples with a longer UV exposure time. The surface oxygen and aluminum content were found to increase and carbon decrease, as is observed in EDX analysis. The ATR-FTIR and XPS indicated that C-C and C-H groups decreased and the highly oxidized carbon bonds such as C-O, C=O and O-C=O increase with time. Also, the effects of surface charges on hydrophobicity based on our results is discussed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 연구회
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• pp.106-109
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• 2001

In this paper, we have investigated the degradation of shed materials of outdoor insulators by UV-radiation by using corona-charging and XPS analysis. The accumulated charges on polymeric surface having intrinsic hydrophobic property have a negative impact on retaining its hydrophobicity. Therefore, shorter decay times of surface charges are preferred. The surface voltage decay on UV-treated silicone rubber and EPDM show a different decay trend with UV treated time. From the XPS analysis, the oxidized groups of silica-like structure in silicone rubber increase with UV treatment time. For EPDM, the oxidized carbon groups of C=O, O=C-O increase as elapse of UV radiation time. These oxidized surface for each material have different electrostatic characteristics, so deposited charges may be expected to have different impacts on their surface hydrophobicity. The degradation mechanism based on our results is discussed.

• 한국세라믹학회지
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• 제37권9호
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• pp.900-908
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• 2000

일반적인 유리용융과 열처리법을 이용하여 많은 양의 금속구리 미립자가 분산된 Zinc Phosphate 유리를 제조하였다. 금속산화물로는 Cu$_2$O를, 환원제로는 SnO를 사용하였다. XRD와 전자회절로부터 열처리에 의해 금속구리의 결정상이 석출됨을 알 수 있었고, TEM에 의해 석출상의 크기는 수~20nm 정도임을 알 수 있었다. 또한 570nm에서의 광흡수 피크로부터도 금속구리의 석출을 확인할 수 있었다. 석출입자의 크기와 흡광은 석출을 위한 열처리 온도와 시간이 증가함에 따라 증가하였다. XPS 스펙트럼으로는 구리의 산화상태 중 Cu$^{2+}$ 이온의 상태만을 분명히 할 수 있었다. 매질유리의 BO/NBO의 비는 열처리 전후 크게 변화가 없었으며, 열처리 후 Cu$^{2+}$ 이온이 다소 감소되는 경향을 보였다.

• Corrosion Science and Technology
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• 제12권4호
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• pp.163-170
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• 2013

In NaCl solutions acidified with $H_2SO_4$, Fe20Cr1.1N alloy showed enhanced pitting corrosion resistance than Fe20Cr alloy. An XPS analysis revealed that the passive film of Fe20Cr1.1N alloy contained higher cationfraction of Cr than that of Fe20Cr alloy, and nitrogen was incorporated into the film. In addition, it was found that the passive film of Fe20Cr1.1N alloy was thinner and had higher oxygen vacancy density than that of Fe20Cr alloy. Based on these observations, it was concluded that the chemical composition was the determining factor for the protectiveness of the passive film of Fe20Cr based alloy in dilute $H_2SO_4$ solution.