• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.45-48
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• 2000

High dielectric (Ba,Sr)TiO$_3$ thin films were etched in an inductively coupled plasma (ICP) as a function of C1$_2$/Ar gas mixing ratio. Under Cl$_2$(20)/Ar(80), the maximum etch rate of the BST films was 400$\AA$/min and selectivities of BST to Pt and PR were obtained 0.4 and 0.2, respectively. We investigated the etched surface of BST by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and x-ray diffraction (XRD). From the result of XPS analysis, we found that residues of Ba-Cl and Ti-Cl bonds remained on the surface of the etched BST for high boiling point. The surface roughness decreased as Cl$_2$ increases in Cl$_2$/Ar plasma because of non-volatile etching products. This changed the nature of the crystallinity of BST. From the result of XRD analysis, the crystalliility of etched BST film maintained as similar to as-deposited BST under Ar only and Cl$_2$(20)/Ar(80). However, (100) orientation intensity of etched BST film abruptly decreased at Cl$_2$ only plasma. It was caused that Cl compounds were redeposited on the etched BST surface and damaged to crystallinity of BST film during the etch process.

• Analytical Science and Technology
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• v.7 no.3
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• pp.301-313
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• 1994

X-Ray Photoelectron Spectroscopy(XPS) and Rutherford Backscattering Spectroscopy(RBS) are used for the analysis of additives, examination of chemical structure and determination of identity with qualitative and quantitative analysis of surface elements, binding energy level and depth profiling in the surface. We analyzed surface of polyethylene, acrylonitrile butadien rubber, polypropylene, glass, fiber and paper treated with $XeF_2$ or C-F plasma by XPS and RBS. It was found that fluoro element was penetrated to sample surface and the distribution of surface elements are different than untreated samples.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.15 no.6
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• pp.244-251
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• 2005

The relationship between particle size of hydro-thermally synthesized barium titanate powders (BT01, BT02, BT03, BT04, BT05) and the powder properties was investigated by means of particle size, specific surface area, zeta potential, XPS, XRD and SEM. Particle size determined by laser light scattering is closely related with specific surface area and the tetragonality (c/a) obtained from XRD. The specific surface area of the samples inversely decreased with increasing particle size except BT03 powder. BT03 sample showed higher surface area than BT04 sample of equivalent particle size, which was attributed mostly to the agglomeration of particles in terms of SEM image and XRD analysis. Zeta potential increased with increasing particle size with the exception of BT02 and BT03 which showed larger minus value of zeta potential in comparison with other BT powders. Beta potential results of BT02 and BT03 are considered to be related with the dissolution of $Ba^{2+}$ ion in these powers which was examined by XPS.

• Earthquakes and Structures
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• v.10 no.4
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• pp.939-963
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• 2016

According to the new directives about the rational and efficient use of energy, thermal bridges in buildings have to be avoided, and the thermal insulation (TI) layer should run without interruptions all around the building - even under its foundations. The paper deals with the seismic response of multi-storeyed reinforced concrete (RC) frame building structures founded on an extruded polystyrene (XPS) layer placed beneath the foundation slab. The purpose of the paper is to elucidate the problem of buildings founded on a TI layer from the seismic resistance point of view, to assess the seismic behaviour of such buildings, and to search for the critical parameters which can affect the structural and XPS layer response. Nonlinear dynamic and static analyses were performed, and the seismic response of fixed-base (FB) and thermally insulated (TI) variants of nonlinear RC building models were compared. Soil-structure interaction was also taken into account for different types of soil. The results showed that the use of a TI layer beneath the foundation slab of a superstructure generally induces a higher peak response compared to that of a corresponding system without TI beneath the foundation slab. In the case of stiff structures located on firm soil, amplification of the response might be substantial and could result in exceedance of the superstructure's moment-rotation plastic hinge capacities or allowable lateral roof and interstorey drift displacements. In the case of heavier, slenderer, and higher buildings subjected to stronger seismic excitations, the overall response is governed by the rocking mode of oscillation, and as a consequence the compressive strength of the XPS could be insufficient. On the other hand, in the case of low-rise and light-weight buildings, the friction capacity between the layers of the applied TI foundation set might be exceeded so that sliding could occur.

• Bulletin of the Korean Chemical Society
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• v.35 no.3
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• pp.793-797
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• 2014

To develop a methodology for absolute determination of the surface areal density of functional groups on organic and bio thin films, medium energy ion scattering (MEIS) spectroscopy was utilized to provide references for calibration of X-ray photoelectron spectroscopy (XPS) or Fourier transformation-infrared (FT-IR) intensities. By using the MEIS, XPS, and FT-IR techniques, we were able to analyze the organic thin film of a Ru dye compound ($C_{58}H_{86}O_8N_8S_2Ru$), which consists of one Ru atom and various stoichiometric functional groups. From the MEIS analysis, the absolute surface areal density of Ru atoms (or Ru dye molecules) was determined. The surface areal densities of stoichiometric functional groups in the Ru dye compound were used as references for the calibration of XPS and FT-IR intensities for each functional group. The complementary use of MEIS, XPS, and FT-IR to determine the absolute surface areal density of functional groups on organic and bio thin films will be useful for more reliable development of applications based on organic thin films in areas such as flexible displays, solar cells, organic sensors, biomaterials, and biochips.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.70.1-70.1
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• 2012

In-situ X-ray photoelectron spectroscopy (XPS) and infrared (IR) spectroscopy studies of SOFC cathode materials will be discussed in this presentation. The mixed conducting perovskites (ABO3) containing rare and alkaline earth metals on the A-site and a transition metal on the B-site are commonly used as cathodes for solid oxide fuel cells (SOFC). However, the details of the oxygen reduction reaction are still not clearly understood. The information about the type of adsorbed oxygen species and their concentration is important for a mechanistic understanding of the oxygen incorporation into these cathode materials. XPS has been widely used for the analysis of adsorbed species and surface structure. However, the conventional XPS experiments have the severe drawback to operate at room temperature and with the sample under ultrahigh vacuum (UHV) conditions, which is far from the relevant conditions of SOFC operation. The disadvantages of conventional XPS can be overcome to a large extent with a "high pressure" XPS setup installed at the BESSY II synchrotron. It allows sample depth profiling over 2 nm without sputtering by variation of the excitation energy, and most importantly measurements under a residual gas pressure in the mbar range. It is also well known that the catalytic activity for the oxygen reduction is very sensitive to their electrical conductivity and oxygen nonstoichiometry. Although the electrical conductivity of perovskite oxides has been intensively studied as a function of temperature or oxygen partial pressure (Po2), in-situ measurements of the conductivity of these materials in contact with the electrolyte as a SOFC configuration have little been reported. In order to measure the in-plane conductivity of an electrode film on the electrolyte, a substrate with high resistance is required for excluding the leakage current of the substrate. It is also hardly possible to measure the conductivity of cracked thin film by electrical methods. In this study, we report the electrical conductivity of perovskite $La_{0.6}Sr_{0.4}CoO_{3-{\delta}}$ (LSC) thin films on yttria-stabilized zirconia (YSZ) electrolyte quantitatively obtained by in-situ IR spectroscopy. This method enables a reliable measurement of the electronic conductivity of the electrodes as part of the SOFC configuration regardless of leakage current to the substrate and cracks in the film.

• Proceedings of the Korean Vacuum Society Conference
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• 1996.02a
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• pp.170-170
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• 1996

• Proceedings of the Korean Vacuum Society Conference
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• 1996.02a
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• pp.171-171
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• 1996

• Proceedings of the Korean Vacuum Society Conference
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• 1996.02a
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• pp.162-162
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• 1996

• Journal of the Korean Ceramic Society
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• v.34 no.2
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• pp.209-215
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• 1997

Aluminum nitride(AIN) thin films were deposited by reactive single ion beam sputtering using N2 or NH3 as reactive gas. The structural, compositional and optical properties of AIN thin films were characterized by XRD, GAXRD, TEM, SEM, XPS UV/VIS spectrophotometer, and FT-IR. All the deposited AIN thin films were amorphous by the analysis fo XRD and GAXRD. However, TEM analysis showed that AIN nano-crystallites were uniformly distributed in the films. The presence of Al-N bonds were also confirmed by FT-IR and XPS analyses. The optical bandgap of AIN films increased up to 6.2 eV and the transmittance was a-bout 100% in visible range with approaching the stoichimetric composition. Irrespective of using N2 or NH3 as reactive gas, the deposited AIN thin films had very smooth surface morphologies. Their refractive index ranged from 1.6 to 1.7.