• 한국표면공학회지
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• 제32권3호
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• pp.239-243
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• 1999

At Present, 200mm wafer technology is being applied for commercial fabrications of 64, 128, and 256 M DRAM devices, and 300mm technology will be evolved for 1G DRAM devices in the early 21th century, recognizing limitations of several process technologies. In particular recognition has been realized in harmful effects of surface contamination of trace metals introduced during devicing processes. Such a guide line for surface metal contamination has been proposed as 1E9 and 1E10 atoms/$\textrm{cm}^2$ of individual metal contamination for wafering and devicing of 1G DRAM, respectively, and so its measurement limit should be at least 1E8 atoms/$\textrm{cm}^2$. The detection limit of present measurement systems is 2E9 atoms/$\textrm{cm}^2$ obtainable with TRXFA(Total Reflection X-Ray Fluorescence Analysis). TRXFA is nondestructive and the simplest in terms of operation, and it maps the whole wafer surfaces but needs detection improvement. X-Ray intensity produced with synchrotron accelerator is much higher than that of conventional X-ray sources by order of 4-5 magnitudes. Hence theoretically its reactivity with silicon surfaces is expected to be much higher than the conventional one, realizing improvement of detection limit. X-ray produced with synchrotron accelerator is illuminated at a very low angle with silicon wafer surfaces such as 0.1 degree and reflects totally. Hence informations only from surface can be collected and utilized without overlapping with bulk informations. This study shows the total reflection phenomenon and quantitative improvement of detection limit for metallic contamination. It is confirmed that synchrotron X-ray can be a very promising alternative for realizing improvement of detection limit for the next generation devices.

• 대한디지털의료영상학회논문지
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• 제12권1호
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• pp.5-8
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• 2010

Opened a court in February 10, 2006, a rule of safety management of the diagnosis radiation system was promulgated for safety of the radiation worker, patients and patients' family members. The purpose of this rule is to minimize the risk of being exposed to radiation during the process of handling X-ray. For this reason, we manufactured shielding device of mobile X-ray unit collimator for diminution of skin dose. Shielding device is made to a thickness of Pb 0.375mm. For portable chest radiography, we measured skin dose 50cm from center ray to 200cm at intervals of 20cm by Unfors Xi detector. As a result, a rule of safety management of the diagnosis radiation system has been strengthened. But there are exceptions, such as ER, OR, ICU to this rule. So shielding device could contribute to protect unnecessary radiation exposure and improve nation's health.

• 대한의용생체공학회:의공학회지
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• 제26권5호
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• pp.295-300
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• 2005

We introduce an x-ray micro tomography system capable of high resolution imaging of a local region inside a small animal. By combining two kinds of projection data, one from a full field-of-view (FOV) scan of the whole body and the other from a limited FOV scan of the region of interest, we have obtained zoomed-in images of the region of interest without any contrast a nomalies. We have integrated a micro tomography system using a micro-focus x-ray source, a $1248\times1248$ flat-panel x-ray detector, and a precision scan mechanism. Using the cross-sectional images taken with the zoom-in micro tomography system, we measured trabecular thicknesses of femur bones in postmortem rats. To compensate the limited spatial resolution in the zoom-in micro tomography images, we used the fuzzy distance transform for the calculation of the trabecular thickness. To validate the trabecular thickness measurement with the zoom-in micro tomography images, we compared the measurement results with the ones obtained from the conventional micro tomography images of the extracted bone samples.

• 대한의용생체공학회:의공학회지
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• 제38권5호
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• pp.256-263
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• 2017

By using the buildup characteristics of the radiophotoluminescence glass dosimeter(RPLGD), it is aimed to help the measurement of the accurate dose by measuring the radiation dose according to the time of the glass element. Five glass elements were arranged on the table and the source to image receptor distance(SID) was set to 100 cm for the build-up radiation dose measurement of the fluorescent glass dosimeter glass element(GD-352M). Radiation doses and saturation rates were measured over time according to irradiation time, with the tube voltage (30, 60, 90 kVp) and tube current (50, 100 mAs) Repeatability test was repeated ten times to measure the coefficient of variation. The radiation dose increased from 0.182 mGy to 12.902 mGy and the saturation rate increased from 58.3% with increasing exposure condition and time. The coefficient of variation of the glass elements of the fluorescent glass dosimeter was ranged from 0.2 to 0.77 according to the X - ray exposure conditions. X - ray exposure showed that the radiation dose and saturation rate were increased with buildup characteristics, and degeneration of glass elements was not observed. The reproducibility of the variation coefficient of the radiation generator was included within the error range and the reproducibility of the radiation dose was excellent.

• 대한방사선기술학회지:방사선기술과학
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• 제42권6호
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• pp.483-489
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• 2019

This paper obtained and compared these dose values by setting and comparing the X-ray imaging conditions (tube voltage 60 kVp, 70 kVp, 80 kVp, tube current 10 mAs, 16 mAs and X-ray field size are 10 × 10 cm, 15 × 15 cm). Each dose value was measure 10 times and represented as an average value. The purpose of this experiment is to serve as a reference for the X-ray exposure of diagnostic areas according to the type of dosimeter and to help with another dose measurement. The results of the experiment showed very little difference between the glass dosimeter(GD) and semiconductor dosimeter values due to changes in tube voltage of 60, 70, 80 kVp, regardless of field sized, but for dose area product(DAP), the difference in dose value was significant according to field size.

• Nuclear Engineering and Technology
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• 제53권1호
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• pp.266-272
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• 2021

In the pulsed electron beam generators, such as plasma focus devices and linear induction accelerators whose electron pulse width is in the range of nanosecond and less, as well as in cases where there is no direct access to electron beam, like runaway electrons in Tokamaks, measurement of the electron energy spectrum is a technical challenge. In such cases, the indirect measurement of the electron spectrum by using the bremsstrahlung radiation spectrum associated with it, is an appropriate solution. The problem with this method is that the matrix equation between the two spectrums is an ill-conditioned equation, which results in errors of the measured X-ray spectrum to be propagated with a large coefficient in the estimated electron spectrum. In this study, a method based on the neural network and the MCNP code is presented and evaluated to recover the electron spectrum from the X-ray generated by collision of the electron beam with a target. Multilayer perceptron network showed good accuracy in electron spectrum recovery, so that for the X-ray spectrum with errors of 3% and 10%, the network estimated the electron spectrum with an average standard error of 8% and 11%, on all of the energy intervals.

• 대한방사선기술학회지:방사선기술과학
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• 제31권2호
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• pp.123-127
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• 2008

목 적: 임상에서 인버터식 X선장치의 사용이 보편화됨에 따라 이에 대한 보다 정확하고 간편한 성능평가 방법이 요구되고 있다. 따라서 최근 국내에 소개되어 사용되고 있는 X-Ray Multi-Function Test Device (model : Xi (unfors)-prestige)를 이용한 성능평가의 유용성을 확인하고자 한다. 방 법: 인버터식 X선장치의 성능 평가시 접속형 측정장비로 널리 활용되고 있는 Dynalyzer III를 이용한 성능평가를 기준으로 하여 비접속형 측정장비인 X-Ray Multi-Function Test Device (model: Xi (unfors)-prestige)의 성능평가를 비교 분석하여 그 유용성을 검토하였다. 결 과: 두 측정기에 대한 X선 출력선량은 큰 차이 없이 측정되었으며 촬영조건 등의 변화에 따라서 접속형인 Dynalyzer III가 약간 증가된 값으로 측정되었으며 출력의 재현성은 두 측정기 모두 성능평가 합격 기준 0.05 이하인 0.002 이하로, 직선성은 합격기준인 0.1 이하로 평가되었다. 촬영조건의 정확도에서는 관전압은 1.8과 2, 관전류는 2.01과 2.3, 촬영시간은 T > 0.01 sec에서 ${\pm}10%$ 이하로 나타났다. 모두 성능평가 기준의 허용범위에 있는 것으로 나타났다. 결 론: X-Ray Multi-Function Test Device (model: Xi (unfors)-prestige) 측정기를 이용한 인버터식 X선장치의 X선 출력의 재현성, 직선성과 촬영조건의 정확도에 대한 성능평가의 유용성을 확인하였다.

• Journal of Astronomy and Space Sciences
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• 제12권1호
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• pp.66-77
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• 1995

비례계수관에서 생성되는 신호의 상승시간을 비교하여 X-선과 비 X-선 신호를 구분하는것이 가능하다. 과학로케트 탑재형 비례계수관에 응용하여 백그라운드를 제거하기 위한 간단한 상승시간 선별회로를 개발하였다. 제작된 전체 회로는 상승시간 측정회로, 측정된 시간을 진폭으로 변환시켜주는 시간-진폭 변환회로로 구성되며, 시산 대 진폭을 검교정할 수 있는 회로를 부가하였다. 제작된 회로를 X-선 검출 시스템에 적용한 결과 2~12 keV에너지 범위에서 전반적인 백그라운드 제거율을 80% 이상 얻을 수 있었으며, 약 12 keV 이상의 높은 에너지내에서는 상승시간 선별법을 사용하기 어려운 제한성을 확인하였다.

• Korean Journal of Radiology
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• 제22권1호
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• pp.86-96
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• 2021

CT is a diagnostic tool with many clinical applications. The CT voxel intensity is related to the magnitude of X-ray attenuation, which is not unique to a given material. Substances with different chemical compositions can be represented by similar voxel intensities, making the classification of different tissue types challenging. Compared to the conventional single-energy CT, spectral CT is an emerging technology offering superior material differentiation, which is achieved using the energy dependence of X-ray attenuation in any material. A specific form of spectral CT is dual-energy imaging, in which an additional X-ray attenuation measurement is obtained at a second X-ray energy. Dual-energy CT has been implemented in clinical settings with great success. This paper reviews the theoretical basis and practical implementation of spectral/dual-energy CT.

• 한국의학물리학회지:의학물리
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• 제33권1호
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• pp.1-9
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• 2022

Purpose: To evaluate the effective volume of the Korea Research Institute of Standards and Science free air chamber (KRISS FAC) L1 used for the primary standard device of the low-energy X-ray air kerma. Methods: The mechanical dimensions were measured using a 3-dimensional coordinate measuring machine (3-d CMM, Model UMM 500, Carl Zeiss). The diameter of the diaphragm was measured by a ring gauge calibrator (Model KRISS-DM1, KRISS). The elongation of the collector length due to electric field distortion was determined from the capacitance measurement of the KRISS FAC considering the result of the finite element method (FEM) analysis using the code QuickField v6.4. Results: The measured length of the collector was 15.8003±0.0014 mm with a 68% confidence level (k=1). The aperture diameter of the diaphragm was 10.0021±0.0002 mm (k=1). The mechanical measurement volume of the KRISS FAC L1 was 1.2415±0.0006 cm³ (k=1). The elongated length of the collector due to the electric field distortion was 0.170±0.021 mm. Considering the elongated length, the effective measurement volume of the KRISS FAC L1 was 1.2548±0.0019 cm³(k=1). Conclusions: The effective volume of the KRISS FAC L1 was determined from the mechanically measured value by adding the elongated volume due to the electric field distortion in the FAC. The effective volume will replace the existing mechanically determined volume in establishing and maintaining the primary standard of the low-energy X-ray.