Deposition of SiCxNy thin film as a X-ray mask membrane for LIGA using ECR plasma CVD (ECR Plasma CVD를 이용한 LIGA용 X-ray mask membrane SiCxNy 박막의 증착)
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- Proceedings of the International Microelectronics And Packaging Society Conference
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- 2000.11a
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- pp.31-34
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- 2000