• Title/Summary/Keyword: X-Y stage

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Electrochemical Impedance Characteristics of Anodic Oxide Layer Formed on Titanium Binary Alloy Surface

  • Lee, Kang;Choe, Han-Choel;Ko, Yeong-Mu
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2008.11a
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    • pp.30-30
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    • 2008
  • In this study, electrochemical impedance characteristics of anodic oxide layer formed on titanium binary alloy surface have been investigated. Titanium oxide layers were grown on Ti-$_XTa$ and Ti-$_XNb$(X=10, 20, 30 and 40 wt%) alloy substrates using phosphoric acid electrolytes.

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X-Ray Diffractional and IR Spectral Characteristics in Brown-Rotted Woods Decayed by T. palustris and G. trabeum (갈색부후목재(褐色腐朽木材)의 X선(線) 회절(回折) 및 IR 분석(分析))

  • Choi, Ji-Ho;Han, Ok-Soo;Kim, Yoon-Soo
    • Journal of the Korean Wood Science and Technology
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    • v.20 no.3
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    • pp.55-60
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    • 1992
  • Japanese red pine (Pinus densiflora S. et. Z.) decayed by brown-rot fungi Tyromyces palustris and Gloeophyllum trabeum were subjected to X-ray diffraction analysis and infrared spectral examinations. Pine woods decayed by T. palustris showed the increase of relative crystallinity in the initial stage of degradation. When the weight loss was above 30%, then the crystallinity went down slowly. In contrast, the wood samples degraded by G. trabeum showed the decrease of crystallinity from the beginning stage of decay. The changes of crystallinity in brown-rotted woods suggested that the degradation rate of crystalline cellulose was varied with the brown rot fungal species. X-ray diffraction analyses also indicated that crystalline cellulose was much more slowly broken down than the amorphous one. The most notable difference in the IR spectra of the brown-rotted wood samples was that the adsorption band centered at 1,730$cm^{-1}$ was significantly diminished in the decayed wood. indicating the degradation of hemicellulose by brown-rot fungi. However, no marked changes of intensities at 1,000, 1,060 and 1,040$cm^{-1}$ were observed in the brown rotted wood samples, suggesting that crystal line cellulose was resistant against the attack by brown rot fungi.

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A Comparison of Embodied Energy and Environmental Impacts between the Steel-Structured and Wall-typed Apartment Housing (철골조와 벽식조 공동주택의 환경영향 비교 연구)

  • 이강희
    • Journal of the Korean housing association
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    • v.15 no.3
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    • pp.83-91
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    • 2004
  • In a planning stage, the assessment system is required to select the proper alternative, reflected the environmental affects such as energy, $CO_2$ and $SO_x$. Unit of energy consumption, $CO_2$ emission and $SO_x$ emission among various assessment systems could be effectively utilized to select the better alternative among various building types. But researches for these areas has not been conducted systematically, but limitedly and sporadically. In this paper, it aimed at providing the unit of energy consumption, $CO_2$ emission and $SO_x$ emission to evaluate the environmental affects between the steel-structured apartment building and wall-typed apartment building. For this, the input-output analysis could be utilized in the construction stage with two-type apartment housing. This approach can be utilized to compare the various alternatives in aspect of the energy consumption and the environment affect, and to select the relatively better alternative. This study found that the unit of energy, $CO_2$ and $SO_x$ of the steel-structured apartment building is lower than that of the wall-typed building

Effects of Flooding Treatment on Physiological Characteristics of Rice Cultivars (수도 관수처리에 의한 생리적 특성의 품종간 차이)

  • 강양순;양의석;정연태;정근식
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.33 no.2
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    • pp.189-194
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    • 1988
  • To clarify the varietal differences of resistance to complete flooding, physiological characteristics in relation to flooding resistance in each growth stage of rice plants, the present study was carried out. The rate of survival after flooding at seeding stage of rice plants of the cultivar 'FR 13A' and Ind. X Jap. cultivars were 91.8% and 33.8% to 40%, respectively, while the Japonica varieties were completely dead. The tolerant varieties which has higher rate of survival showed the higher $O_2$ release, the higher catalase activity and lower peroxidase activity according to flooding treatment. Japonica type varieties showed the higher elongation of plant during flooding, lower recovery of flooding damage and the abrupt decrease of yield according to the increase of flooding periods in comparision to Ind. X Jap. crossed varieties when they were flooded at the active tillering stage. When rice plants were flooded at the booting stage, Ind. X Jap. crossed varieties had the higher photosynthesis, respiratory rate, root oxidizing power, ethylene evolution and lower yield reduction in comparision to japonica varieties.varieties.

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Development of high-precision 2-axis translation system comprised of microstage and global stage (Microstage와 global stage를 결합한 초정밀 2축 이동장치 개발)

  • 김종윤;엄태봉
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.311-314
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    • 1997
  • According to the development of industrial equipment such as semiconductor manufacturing machines, optical device, and precision machine tool, a high-precision translation system with wide range has been required. This paper describes a high-precision 2-axis translation system, which consists of microstage and global stage. In order to achieve the highresolution in the long range, some engineering techniques are used. Three linear guides with flexible coupling are adopted to reduce the motor vibration in the global stage. A simple elastic hinge structure activated by five PZT is applied to reduce the angular dev~atlon. As the result of combination of microstage and global stage associated with some engineering techniques, the 2-axis translation system can measure the 200 X 200 mrn range with the nanometer accuracy.

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EFFECT OF X-RAY IRRADIATED RAT FETUS MANDIBLE (X-선조사가 자백서하악골에 미치는 영향에 관한 실험적 연구)

  • Han Chang Gun
    • Journal of Korean Academy of Oral and Maxillofacial Radiology
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    • v.8 no.1
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    • pp.39-42
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    • 1978
  • The effect of irradiation of x-ray to developing rat mandible in the gestation stage was focused on the study of mandible development and the side effect of x-ray irradiation. The author studied the effect of x-ray irradiation with the gestated rat and their off'springs. 100 rads, 200 rads, 300 rads and 400 rads of x-ray was irradiated in regular order schematically at the lower left abdomen of gestated rat. 18½days after conception, their off'springs were sacrificed and exaimined their developing mandible with histological findings. The results were as followed. 1. In the 100-200 rads irradiated rat off'springs, bony trabeclulation was revealed irregular shape. In combine with this finding, osteoblast and fibroblast were appeared shrunken of their nucleus and location of eccentric position. 2. In the 300-400 rads irradiated rat off'springs, decrease of fibroblast and osteoblast appearance in the periosteum were prominently observed and empty lacunae were frequently appeared in their bone matrix. 3. The advent of osteoclast and resorption of cortical bone were appeared in proportion to increasing of x-ray irradiation.

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Studies on The Microbial Utilization of Agricultural Wastes (Part 5) Isolation and Selection of Cellulase Producing Fungi (농산폐자원의 미생물학적 이용에 관한 연구 (제오보) 섬유소분해효소 생산 곰팡이의 분리 및 선별)

  • Bae, Moo;Kim, Byung-Hong;Lee, Gye-Jun
    • Microbiology and Biotechnology Letters
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    • v.4 no.3
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    • pp.105-110
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    • 1976
  • In the studies of microbiological utilization of cellulosic wastes, cellulolytic fungi were isolated and screened out. At the first stage, 221 cellulolytic fungi were isolated from different sources such as soils, humus, composts and rotten wood debris by enrichment culture techniques. In the second stage, 36 strains of fungi out of those previously isolated were selected for their cellulase activities estimated by means of filter paper degradation, carboxy methyl cellulose liquefaction and cup method. Activities of C$_1$-cellulase, C$\sub$x/-cellulase and filter paper activity were adopted on the final screening stage and five different strains which are tentatively identified as Aspergillus sp.(strain No. AS-9), Penicillium sp. (strain No. KNI-1-2), Trichoderma, sp. (strain No. KI-7-2, KI-7-5, KI-4-1-1B) were selected for their high potency of C$_1$ and C$\sub$x/-cellulase activities. When rice straw milled and treated with NH$_4$OH was hydrolyzed with the crude enzyme Prepared from the culture broth of Trichoderma sp. (strain No. KI-4-1-1B), saccharification rate was obtained up to 26%.

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A Study on Precision Position Control of 1 Axis Linear BLDC Motor for a Stage (반도체 제조장비용 Stage를 위한 1축 선형 브러시리스 DC 모터의 정밀 위치제어에 관한 연구)

  • Chun, Y.H.;Kim, J.W.;Jeon, J.H.;Jeon, J.W.;Kang, D.H.
    • Proceedings of the KIEE Conference
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    • 2001.11c
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    • pp.115-118
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    • 2001
  • 일반적으로 반도체 제조 공정은 매우 복잡하고 다양한 공정들로 구성된다. 이러한 공정 중 Stage 부분은 웨이퍼에 회로 패턴을 기입하기 위하여 웨이퍼를 미리 지정된 위치로 이송하는 공정으로 매우 높은 정밀도가 요구되고 있다. Stage에 대해서는 x, y, z축 뿐아니라 각 축에 대한 회전까지도 고려한 6축 제어가 수행되어야 한다. 본 논문에서는 stage에 대한 정밀제어의 기반기술로서 선형 BLDC 모터를 이용하여 1축 위치제어 시스템의 제어에 관하여 연구하였다. 선형 BLDC 모터의 이동 중 발생하는 추럭리플을 보상하여 제어기 설계시 선형 시스템으로 고려하여 제어기를 설계할 수 있도록 하는 방법을 제안하였으며 실험을 통하여 1[${\mu}m$]의 해상도를 갖는 위치검출 엔코더를 이용하여 5[${\mu}m$]의 정밀도를 얻을 수 있었다.

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Developments of Precision Control Technologies of Stage for Semiconductor Fabrication Devices (반도체 제조 장비용 Stage 정밀제어 기술개발)

  • Jeon, J.W.;Kang, D.H.;Kim, J.W.;Jeon, J.H.;Jeon, Y.W.
    • Proceedings of the KIEE Conference
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    • 2000.11b
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    • pp.229-231
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    • 2000
  • Precision control technologies are required for Lithography devices. The Linear BLDC Motor is used for operations of the stage. The stage is installed in Lithography devices. The stage is basically controlled though three directions (x, y, z axes). This paper presents precision control technologies of the Linear BLDC Motor (only one axes) by using computer simulations. We will plan that real systems is made and tested.

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Electrostatic 2-axis MEMS Stage for an Application to Probe-based Storage Devices (Probe-based Storage Device(PSD)용 정전형 2축 MEMS 스테이지의 설계 및 제작)

  • Baeck Kyoung-Lock;Jeon Jong Up
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.11 s.176
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    • pp.173-181
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    • 2005
  • We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.