• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.361-361
• /
• 2012

사파이어 단결정은 LED 소자의 기판으로 널리 사용되고 있으며 현재 소자 수율을 향상시키기 위하여 6인치 이상의 대구경 웨이퍼를 만들기 위한 많은 노력을 경주하고 있다. 단결정, 특히 반도체 단결정 웨이퍼에서 ($00{\cdot}1$), ($10{\cdot}2$) 등의 어떠한 결정학적인 방위(crystallographic orientation)가 표면과 이루는 각도, 즉 표면방위각(off-cut 또는 misorientation angle)의 크기와 방향은 제조된 LED 소자의 물성에 영향을 끼치므로 웨이퍼를 가공할 때 정확하게 콘트롤해야 한다. 본 연구에서는 고분해능 X-선을 이용하여 표면이결정학적 방향과 이루는 면방위각을 정밀하게 결정하는 측정법을 연구하였다. 기존의 ASTM 의 측정법과는 다른 원리를 이용하고 웨이퍼의 휨(bending)이나 측정고니오 회전축의 편심과 무관하게 표면방위각을 결정하는 새로운 이론적 모델을 제시하고 그 모델을 적용하여 표면의 수직축이 대구경 사파이어 ($00{\cdot}1$) 축과 이루는 표면방위각을 정확하게 측정 분석하였다. 본 연구에서 사용한 6인치 사파이어 웨이퍼에 대하여 표면방위각은 $0.21^{\circ}$이었으며 표면각이 나타나는 방향은 웨이퍼의 primary edge 방향으로부터 $-1.2^{\circ}$ 벗어나 있는 방향이었다.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.23 no.9
• /
• pp.1146-1151
• /
• 2019

Histogram H is an x-monotone rectilinear polygon with a horizontal edge, called by a base, connecting the leftmost vertical edge and the rightmost vertical edge. Here the rectilinear polygon is a polygon with only horizontal and vertical edges and the x- monotone polygon P is a polygon in which every line orthogonal to the x-axis intersects P at most twice. Walking counterclockwise on the boundary of a histogram H yields a sequence of left turns and right turns at its vertices. Conversely, a given sequence of the turns at the vertices can be realized by a histogram. In this paper, we consider the problem of finding a histogram to realize a given turn sequence. Particularly, we will find the histograms to minimize its area and its bounding box. It will be shown that both of the problems can be solved by linear time algorithms.

• 전기의세계
• /
• v.20 no.5
• /
• pp.40-42
• /
• 1971

XY recorder는 10여년전부터 널리사용되어 오는 기록계로 2개의 자동평형전위차계로 X, Y축방향에 arm과 pen의 결합으로 양자의 좌표축의 교점에서 pen이 평형정지하는 상태에 기록지자체가 servo motor로 이동되어 기록이 가능하게 된다. 특히 타기록계에 비하여 고감도(Ex. 0.5V/cm), 고정도(Ex. 0.3%)임은 물론 y=f(x)인 x,y의 함수관계가 기록되어 타기록계에서는 얻기 어려운 특징이 있어, analog computer의 해의 기록계로서, 도한 각종 검출변환기를 전설치하여 vacuum tube 혹은 diode transistor의 특성곡선, 전기철판등의 자성재료의 자화곡선, 회전기의 회전수-전압, 전류, 출력, 효율곡선, 금속재료의 온도 혹은 인신장곡선, pipe valve의 유량-압력곡선등 전기.전지.기계.재료.물리.화학등의 다각도용도로서 연구실험은 물론 생산현장에 있어서의 시험. 정리. 감시등의 치용이 활발히 급진하는 경향에 비추어 이 기록계 사용에 고려되어야할 noise제거의 한 방법을 소개하고저 한다.

• Progress in Medical Physics
• /
• v.26 no.1
• /
• pp.6-11
• /
• 2015

The purpose of this study was to analyze the rotational errors of roll, pitch, and yaw in the whole breast cancer treated by the three-dimensional radiation therapy (3D-CRT) using TomoDirect (TD). Twenty-patient previously treated with TD 3D-CRT was selected. We performed a retrospective clinical analysis based on 80 images of megavoltage computed tomography (MVCT) including the systematic and random variation with patient setup errors and treatment setup margin (mm). In addition, a rotational error (degree) for each patient was analyzed using the automatic image registration. The treatment margin of X, Y, and Z directions were 4.2 mm, 6.2 mm, and 6.4 mm, respectively. The mean value of the rotational error for roll, pitch, and yaw were $0.3^{\circ}$, $0.5^{\circ}$, $0.1^{\circ}$, and all of systematic and random error was within $1.0^{\circ}$. The errors of patient positioning with the Y and Z directions have generally been mainly higher than the X direction. The percentage in treatment fractions in less than $2^{\circ}$ at roll, pitch, and yaw are 95.1%, 98.8%, and 97.5%, respectively. However, the edge of upper and lower (i.e., bottom) based on the center of therapy region (point) will quite a possibility that it is expected to twist even longer as the length of treatment region. The patient-specific characters should be considered for the accuracy and reproducibility of treatment and it is necessary to confirm periodically the rotational errors, including patient repositioning and repeating MVCT scan.

• Journal of Radiation Protection and Research
• /
• v.33 no.2
• /
• pp.47-51
• /
• 2008

Objective: This study analyzed errors due to rotation or tilt of the magnetic resonance (MR) imaging indicator during image acquisition for a stereotactic radiosurgery. The error correction procedure of a commercially available stereotactic neurosurgery treatment planning program has been verified. Materials and Methods: Software virtual phantoms were built with stereotactic images generated by a commercial programming language, Interactive Data Language (version 5.5). The thickness of an image slice was 0.5 mm, pixel size was $0.5{\times}0.5mm$, field of view was 256 mm, and image resolution was $512{\times}512$. The images were generated under the DICOM 3.0 standard in order to be used with Leksell GammaPlan$^{(R)}$. For the verification of the rotation error correction function of Leksell GammaPlan$^{(R)}$, 45 measurement points were arranged in five axial planes. On each axial plane, there were nine measurement points along a square of length 100 mm. The center of the square was located on the z-axis and a measurement point was on the z-axis, too. Five axial planes were placed at z=-50.0, -30.0, 0.0, 30.0, 50.0 mm, respectively. The virtual phantom was rotated by $3^{\circ}$ around one of x, y, and z-axis. It was also rotated by $3^{\circ}$ around two axes of x, y, and z-axis, and rotated by $3^{\circ}$ along all three axes. The errors in the position of rotated measurement points were measured with Leksell GammaPlan$^{(R)}$ and the correction function was verified. Results: The image registration errors of the virtual phantom images was $0.1{\pm}0.1mm$ and it was within the requirement of stereotactic images. The maximum theoretical errors in position of measurement points were 2.6 mm for a rotation around one axis, 3.7 mm for a rotation around two axes, and 4.5 mm for a rotation around three axes. The measured errors in position was $0.1{\pm}0.1mm$ for a rotation around single axis, $0.2{\pm}0.2mm$ for double and triple axes. These small errors verified that the rotation error correction function of Leksell GammaPlan$^{(R)}$ is working fine. Conclusion: A virtual phantom was built to verify software functions of stereotactic neurosurgery treatment planning program. The error correction function of a commercial treatment planning program worked within nominal error range. The virtual phantom of this study can be applied in many other fields to verify various functions of treatment planning programs.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.40 no.8
• /
• pp.543-548
• /
• 2003

In this paper, we have proposed and fabricated a two-axis rotational micro-mirror with large tilt angle. Such a micro-mirror is a key element for N$\times$N high capacity optical cross-connect switches. The micro-mirror is required to have large tilt angle to increase the capacity of the cross-connect switches. For larger micro-mirror tilt angle between the grounded mirror plate and the bottom electrode is to be large enough to provide space for the tilting of the mirror. For our proposed structure, the gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates by using the bulk micromachining technology, and combined later by employing self-align technique. As a result, a large tilt angle has been achieved without using additional actuators. The measured tilt angles were as large as $\pm$5.5$^{\circ}$ and $\pm$8.4$^{\circ}$ in the x and y direction respectively, and the pull-in voltages for the two directions were 380 V and 275 V respectively. Finally the fabricated mirror was successfully utilized to steer the optical beam. To our knowledge, our micro-mirror has the best performance among the micro-mirrors reported internationally so far.

• Journal of Aerospace System Engineering
• /
• v.12 no.2
• /
• pp.46-58
• /
• 2018

A two-axis gimbal-type X-band antenna is widely used to transmit bulk image data from high-resolution observation satellites. However, undesirable microvibrations induced by driving the antenna should be attenuated, because they are a main cause of image-quality degradation of the observation satellite. In this study, a pseudoelastic memory alloy (SMA) gear was proposed to attenuate the microvibrations by driving the antenna in an azimuth angle. In addition, the proposed gear can overcome the limitations of the conventional titanium blade gear, which is not still enough and is vulnerable to plastic deformations under excessive torque. To investigate the basic characteristics of the proposed SMA mesh washer gear, a static load test was performed on the thickness of the SMA mesh washer and the rotation of the gear. Moreover, The microvibration measurement test demonstrated that the SMA mesh washer gear proposed in this study is effective for microvibration attenuation.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.43 no.2
• /
• pp.133-140
• /
• 2015

In this paper, a roll angle estimation method of a rolling airframe using a low grade GPS and a roll rate gyro is proposed. The strength of the received signal of the GPS antenna attached on the rolling airframe is maximized when the GPS satellite is placed on the plane determined by the x-axis of the rolling airframe and the GPS antenna axis. Under the assumption that the x-axis of the rolling airframe is coincident with its velocity vector, the roll angle of the rolling airframe is calculated from the relative position vector of the satellite to the GPS when the GPS signal strength becomes maximum. The Kalman filter combined with a roll rate gyro is introduced to increase the determination accuracy of the roll angle. The performance of the proposed method is verified via 6-DOF simulations.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.25 no.4
• /
• pp.238-246
• /
• 2015

A stepping motor is widely used to operate the elevation and azimuth stage of the X-band antenna with 2-axis gimbal system for effective image data transmission from a satellite to a ground station. However, such stepping motor also generates an undesirable micro-vibration which is one of the main disturbance sources affecting image quality of the high-resolution observation satellite. In order to improve the image quality, the micro-vibration isolation of the X-band antenna system is essential. In this study, the low rotational stiffness isolator has been proposed to reduce the micro-vibration disturbance induced by elevation direction operation of the X-band antenna. In addition, its structural safety was confirmed by the structure analysis based on the derived torque budget. The effectiveness of the design was also verified through the micro-vibration measurement test.

• Radiation Oncology Journal
• /
• v.26 no.4
• /
• pp.263-270
• /
• 2008

Purpose: This study aimed to quantitatively measure the movement of tumors in real-time and evaluate the treatment accuracy, during the treatment of a liver tumor patient, who underwent radiosurgery with a Synchrony Respiratory motion tracking system of a robot CyberKnife. Materials and Methods: The study subjects included 24 liver tumor patients who underwent CyberKnife treatment, which included 64 times of treatment with the Synchrony Respiratory motion tracking system ($Synchrony^{TM}$). The treatment involved inserting 4 to 6 acupuncture needles into the vicinity of the liver tumor in all the patients using ultrasonography as a guide. A treatment plan was set up using the CT images for treatment planning uses. The position of the acupuncture needle was identified for every treatment time by Digitally Reconstructed Radiography (DRR) prepared at the time of treatment planning and X-ray images photographed in real-time. Subsequent results were stored through a Motion Tracking System (MTS) using the Mtsmain.log treatment file. In this way, movement of the tumor was measured. Besides, the accuracy of radiosurgery using CyberKnife was evaluated by the correlation errors between the real-time positions of the acupuncture needles and the predicted coordinates. Results: The maximum and the average translational movement of the liver tumor were measured 23.5 mm and $13.9{\pm}5.5\;mm$, respectively from the superior to the inferior direction, 3.9 mm and $1.9{\pm}0.9mm$, respectively from left to right, and 8.3 mm and $4.9{\pm}1.9\;mm$, respectively from the anterior to the posterior direction. The maximum and the average rotational movement of the liver tumor were measured to be $3.3^{\circ}$ and $2.6{\pm}1.3^{\circ}$, respectively for X (Left-Right) axis rotation, $4.8^{\circ}$ and $2.3{\pm}1.0^{\circ}$, respectively for Y (Crania-Caudal) axis rotation, $3.9^{\circ}$ and $2.8{\pm}1.1^{\circ}$, respectively for Z (Anterior-Posterior) axis rotation. In addition, the average correlation error, which represents the treatment's accuracy was $1.1{\pm}0.7\;mm$. Conclusion: In this study real-time movement of a liver tumor during the radiosurgery could be verified quantitatively and the accuracy of the radiosurgery with the Synchrony Respiratory motion tracking system of robot could be evaluated. On this basis, the decision of treatment volume in radiosurgery or conventional radiotherapy and useful information on the movement of liver tumor are supposed to be provided.