• Title/Summary/Keyword: X-선 형광분석

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Improvement of detection sensitivity of impurities on Si wafer surface using synchrotron radiation (방사광을 이용한 Si 웨이퍼 표면불순물 검출감도 향상)

  • 김흥락;김광일;강성건;김동수;윤화식;류근걸;김영주
    • Journal of the Korean Vacuum Society
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    • v.8 no.1
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    • pp.13-19
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    • 1999
  • Total reflection X-ray fluorescence spectroscopy using synchrotron radiation source called as TRSFA was explored to achieve high sensitivities to impurity metals on Si wafer surface. It consists of monochromating part to select a specific wavelength, slit part to shield direct beam and to control monochromated beam, and main chamber to dectect fluorescent X-ray counts of impurities on si wafer. Monochromated X-ray of 10.90 KeV was selected and the optimum total reflection condition on silicon wafer was obtained through tuning the dead time and fluorescent X-ray count of Si and Fe. TRSFA system could increase the sensitivity as high as 50 times in comparision with TRXFA using normal X-ray source. But the trend was varied since the surface conditions of Si wafers and, therefore, the reflectivities were different. Furthemore, there seems to be a promising path to reaching a detection limit useful to the next generation metal impurities control, because Fe impurity below to the $5\times10^{9}\textrm{atomas/cm}^2$ can be detectable through the developed TRSFA system.

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Solid-state Lighting용 형광체 $BaTiO_3$:$Pr^{3+}$:$Ga^{3+}$의 발광특성에 대한 연구

  • Lee, Dong-Ju;Yu, Yeong-Gi;Gang, Seong-Gu
    • Proceedings of the Optical Society of Korea Conference
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    • 2008.02a
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    • pp.403-405
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    • 2008
  • Solid state lighting 용 적색 형광체로 적용하기 위하여 $BaTiO_3$:$Pr^{3+}$:$Ga^{3+}$를 다음과 같이 합성하였다. 출발 물질로 $BaCO_3$,$Pr(NO_3)_3$ $6H_2O$, $TiO_2$, $Ga_2O_3$을 사용 하였으며, $BaTiO_3$:$Pr^{3+}\;_x$(x=$0.001{\sim}0.2$):$Ga^{3+}\;_y$(y=0.05, 0.1, 0.5 1, 2, 3)를 각각의 조성대로 혼합한 후 $600^{\circ}C$에서 10시간 전처리 하였다. 전처리한 시료를 시편으로 제조하여 $1200^{\circ}C$ 공기중에 4시간 소성하여 최종물질인 $BaTiO_3$:$Pr^{3+}\;_x$:$Ga^{3+}\;_y$을 얻었다. 이 화합물을 X-선 회절 분석 결과 공간군 P4MM을 갖는 페로브스카이트임을 알 수 있었다. 이 화합물을 적색형광체로 적용하기 위해 PL과 PLE측정을 통하여 형광특성을 알아본 결과 618nm에서 x=0.011, y=1.0 일 때 특성이 가장 우수한 것으로 나타났다.

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A Preliminary Study of Korean Geostansdards Using Mesozoic Granites (중생대 화강암을 이용한 한국산 지질 표준물질 제작을 위한 예비연구)

  • Jin, Mi-Eun;Sun, Gwang Min;Park, Sang Gu;Jwa, Yong-Joo
    • Journal of the Korean earth science society
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    • v.38 no.6
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    • pp.421-426
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    • 2017
  • In this study, we selected three representative granite samples and conducted petrological observation to establish the Korean geostandards. Samples were taken from the two Jurassic (KJG-1, KJG-2) and one Cretaceous (KCG-1) granites in South Korea. The powder samples were prepared by the standard pulverization process, and glass beads were made for geochemical analysis using X-ray fluorescence (XRF) method, and finally, major element contents of the samples were acquired. The analytical data are shown with mean, standard deviation and relative standard deviation. The accuracy of the analysis was confirmed within an estimated error range of about 5% by comparing the recommended true values of the USGS and GSJ geostandards. Also, we checked the analytical precision by calculating a relative standard deviation of about 3% from the XRF analytical results for the three samples.

A Quantitative Interpretation of the Overlapped X-Ray Fluorescence Spectra by Target Transformation Factor Analysis (Target Transformation Factor Analysis에 의한 겹침 X-선 형광 스펙트라의 정량적 해석)

  • Kim Seungwon;Lee, Chul;Choi Sang Won;Kang Hyung Tae
    • Journal of the Korean Chemical Society
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    • v.36 no.5
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    • pp.720-726
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    • 1992
  • Multivariate analysis such as factor analysis was applied to interpret multivariate data, which were obtained from the overlapped X-ray fluorescence spectra. X-ray fluorescence spectra of 11 reference samples were obtained by the wavelength dispersive spectrometer at a specified range of angle such as $33.50∼34.50^{\circ}$. The data matrix was made from the spectra of 8 samples. The results of abstract factor analysis gave three factors. By the target testing with 8 elements contained in the reference samples, the three factors were found to be Pb, As and Cu. The concentration of these elements in the test samples was determined by target transformation factor analysis regardless overlapping individual peaks.

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An Efficient Background Modeling and Correction Method for EDXRF Spectra (EDXRF 스펙트럼을 위한 효율적인 배경 모델링과 보정 방법)

  • Park, Dong Sun;Jagadeesan, Sukanya;Jin, Moonyong;Yoon, Sook
    • Journal of the Institute of Electronics and Information Engineers
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    • v.50 no.8
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    • pp.238-244
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    • 2013
  • In energy dispersive X-ray fluorescence analysis, the removal of the continuum on which the X-ray spectrum is superimposed is one of the most important processes, since it has a strong influence on the analysis result. The existing methods which have been used for it usually require tight constraints or prior information on the continuum. In this paper, an efficient background correction method is proposed for Energy Dispersive X-ray fluorescence (EDXRF) spectra. The proposed method has two steps of background modeling and background correction. It is based on the basic concept which differentiates background areas from the peak areas in a spectrum and the SNIP algorithm, one of the popular methods for background removal, is used to enhance the performance. After detecting some points which belong to the background from a spectrum, its background is modeled by a curve fitting method based on them. And then the obtained background model is subtracted from the raw spectrum. The method has been shown to give better results than some of traditional methods, while working under relatively weak constraints or prior information.

형광체를 사용한 색변환층을 가진 백색 유기발광 소자의 메커니즘 분석

  • Song, U-Seung;Kim, Dae-Hun;Kim, Tae-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.524-524
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    • 2013
  • 백색 유기발광소자는 전색 디스플레이나 조명용 광원으로 쓰일 수 있기 때문에 많은 연구가 진행되고 있다. 백색 유기발광소자를 제작하기 위해서는 보통 청색, 녹색 및 적색을 가지는 발광층을 적층하거나 세 가지 색을 가지는 혼합하여 단일 발광층으로 제작할 수 있으나 구조가 복잡해지고 제작이 어려워지는 단점이 있다. 본 연구에서는 sol-gel 방법으로 제작된 무기물 형광체를 색변환 층으로 사용하였고, 청색 유기발광소자를 광원으로 하여 백색 유기발광소자를 제작하였다. 청색 유기 물질을 발광층으로 사용하여 제작한 청색 유기발광소자를 광원으로 사용하였고 다른 온도에서 소결된 무기물 형광체를 색변환층으로 사용하여 백색 유기발광소자를 제작하여 발광 특성을 관찰하였다. 다른 소결 온도에서 형성된 무기물 형광체의 주사 전자현미경 측정과 X-선 회절 층정을 통해서 무기물 형광체의 형성 및 표면 형태를 관찰하였다. 제작한 무기 형광체를 색변환층으로 사용하여 백색 유기발광소자를 제작하였고, 인가한 전압에 따른 전계발광 특성 변화를 통해서 색변환 메커니즘을 규명하였다.

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A study on development of CRM by means of XRF analysis for fine ceramic ($BaTiO_3$) (티탄산바륨 소재의 XRF 분석용 CRM 개발에 관한 연구)

  • Kim, Young Man;Jeong, Chan Yee;Lim, Chang Ho;Song, Taek Yong;Lee, Dong Soo
    • Analytical Science and Technology
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    • v.9 no.4
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    • pp.382-391
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    • 1996
  • In this study, 12 different chemical species of fine ceramic($BaTiO_3$) were synthesized as the standard materials for the fast and accurate measurements of X-ray fluorescence spectrometry. Samples were diluted to sixteen times with the filling compound ($Li_2B_4O_7+LiBO_2$) in order to remove the matrix effect, and to get the convenient storage and homogeneity of ingredients. The matrix effects among the ingredients were corrected by the empirical coefficient method based on the Lucas-Tooth and Price model. The standard curve on 12 standard materials containing 15 elements were obtained by using X-ray fluorescence spectrometry at three different laboratories. The correlation factors of BaO, PbO, SrO, $Fe_2O_3$, $La_2O_3$, $SnO_2$, ZnO, $ZrO_2$, CaO indicated the relati vely good agreement over 0.995 among the three different laboratories. $SiO_2$ and $Al_2O_3$ showed the poor linearity because of their low fluorescence intensities.

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Discrimination of Geographical Origin for Scutellaria baicalensis Using Energy Dispersive X-ray Fluorescence Spectrometer (에너지 분산형 X-선 형광분석기를 이용한 황금의 원산지 판별)

  • Moon, Ji-Young;Lee, Ye-Ji;Kang, Jung-Mi;Cho, Soon-Jun;Noh, Bong-Soo
    • Korean Journal of Food Science and Technology
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    • v.44 no.4
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    • pp.484-487
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    • 2012
  • A discrimination technique for domestic and imported Scutellaria baicalensis was developed using an energy dispersive X-ray fluorescence spectrometer (ED-XRF). Mineral content ratios, of a total of 43 species, including P, S, Cl, K, Ca, Mn, Fe, Cu, and Zn, were measured among 204 samples. Macro element content ratios and trace element content ratios were determined using the standardless fundamental parameters (SLFP) analysis. Inorganic element ratios of P, S, K, Ca, Cl, Mn, and Fe were significantly different between domestic and imported samples. The result from the canonical discriminant analysis showed that the accuracy of geographical origin discrimination was 95.15%; the correlation coefficient was 0.888. It was concluded that this technique could be used as a useful method in discriminating the geographical origins between domestic and imported Scutellaria baicalensis.

X-ray Spectroscopy for Planetary Surface Analysis and Future Trend (TX-선을 이용한 행성표면 분석기술과 향후 연구동향)

  • Kim, Kyeong-Ja;Lee, Ju-Hee;Lee, Seung-Ryeol;Sim, Eun-Sup
    • The Journal of the Petrological Society of Korea
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    • v.19 no.4
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    • pp.245-254
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    • 2010
  • Technology of surface investigation using X-ray is one of widely used technology nowadays. This technique has been numerously used for planetary surface investigations for both orbital and rover scientific instruments. Korea has a plan to send an orbiter and lander to the Moon by the early 2020s. Therefore, the time has come for Korean researchers to develop major scientific instruments and start to do research on basic research for the Moon. Because of this situation, we firstly investigate X-ray technology, which is essential as one of core techniques of planetary remote sensing from the orbit and ground. This paper presents the current status of planetary exploration using X-ray techniques and new development of worldwide X-ray technology which could be adapted for prospective planetary missions.

Fluorescence Characteristics of Gd2O2S:Tb3+ Intensifying Screen According to Increase of Tube Voltage (관전압 증가에 따른 Gd2O2S:Tb3+ 증감지의 형광특성)

  • Je, Jaeyong
    • Journal of the Korean Society of Radiology
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    • v.8 no.5
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    • pp.261-264
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    • 2014
  • In this study, $Gd_2O_2S:Tb^{3+}$ was used as the component of the intensifying screen, and this study aims at analysis of fluorescent feature depending on the increase of tube voltage using spectrometer. When the released fluorescence was measured according to the increase of tube voltage, blue, green and red was observed, among which, $^5D_4-^7F_5$ which is applicable to green, was strongest. In addition, when the fluorescent of 50 kVp and 120 kVp were compared, 50 kVp was proved to release only 9.56% fluorescence of 120 kVp. In case when tube voltage which is higher than 100 kVp is used for the X-ray using $Gd_2O_2S:Tb^{3+}$ intensifying screen, the amount and strength of the fluorescence reaching the film increase drastically, so attention is demanded to get images of proper concentration.