• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.36-44
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• 2000

X-선 사진식각공정(이하 LIGA 기술이라 함)을 이용한 초소형, 초정밀 금형 및 3차원 구조물 제작 가공기술은, 생산기반 기술 중 금형기술 및 가공기술 분야에 해당하는 기술로 포항가속기와 같은 방사선 가속기에서 생성되는 수 보대 파장의 X-선을 이용하는 기술이다. 짧은 파장을 사용하는 연유로, 일반 반도체 공정으로는 실현할 수 없는 높고, 광학적 용도까지 가능한 거울정도의 벽면 거칠기(수백${\AA}$이하)를, 그러면서도 서브 마이크론의 정밀도 (1$\mu\textrm{m}$이하)를 가지는 금형 및 3차원 구조물을 일괄 가공할 수 있는 기술이다.(중략)

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2014.05a
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• pp.826-828
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• 2014

Recently trend of product is miniaturization. As a result, We need products surface as well as products internal defect inspection. Generally, Inspection products in production process uses a lot of optical inspection. However, This is difficult to internal inspection of products. We used optical device instead of X-ray generator. At the same time, We have developed system to determine the product defect. First, obtain X-ray image from Machine vision function. Next, Measured value is recognize suitability within error range. otherwise recognize defect. Results presence of defective products can be stored by user.

• Bulletin of the Korean Space Science Society
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• 1992.10a
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• pp.9-9
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• 1992

페르세우스(Abell 426)은하단 성분은하들의 관측된 적색편이 조사 목록을 바탕으로 속도분산 값의 위치각에 따른 변화를 살펴 봄으로서 속도분포의 불균질성을 조사하였다. 속도분포의 불균질성을 위치에 따른 은하들의 접선궤도와 중심방향 궤도 지배 정도로서 살펴 보았다. 중심을 기준으로 한 환에 포함된 은하들의 속도분산은 광학과 X-선 관측을 통하여 알아 낸, 은하단이 길쭉한 방향으로 정의한, 위치각 지역에서 중심방향 궤도성분이 지배적이고 접선 방향 궤도는 이와 수직한 지역에서 지배적임을 알 수 있었다. 이러한 속도 분포의 방향성과 광학 및 X-선 관측을 토\ulcorner謗\ulcorner알아 낸 은하단의 위치각 사이 사관관계가 가지는 중요성을 최근의 X-선 관측을 통하여 알아낸 은하단 중심부에서 보이고 있는 저온 물질의 몰입을 중심으로 논하였다.

• Proceedings of the Optical Society of Korea Conference
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• 2003.02a
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• pp.22-23
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• 2003

The new method of x-ray photon correlation spectroscopy (XPCS) [1] is developed recently for probing the dynamics of surface height fluctuations as a function of lateral length scale. Measurements were performed on supported polystyrene (PS) films of thicknesses varying from 84 to 333 nm at temperatures above the PS glass transition temperature. Within a range of wave vectors spanning $10^{-3}$ to $10^{-2}$ $nm^{-1}$, good agreement is found between the measured surface dynamics and the theory of overdamped thermal capillary waves on thin films. Quantitatively, the data can be accounted for using the viscosity of bulk PS. (omitted)

• Korean Journal of Optics and Photonics
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• v.19 no.4
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• pp.249-254
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• 2008

We developed a new x-ray image sensor utilizing a reflection-mode liquid crystal panel as its sensitive element, and tested its functionality by using it to obtain an x-ray image of a printed circuit board. In the liquid crystal x-ray image sensors hitherto reported, the liquid crystal layer is in direct contact with the photoconductive film which is deposited on a glass substrate. In the fabrication of the new x-ray image sensor, a liquid crystal panel is fabricated in the first step by using a pair of glass plates of a few centimeters thicknrss. Then one of the glass substrates is ground until its thickness is reduced to about $60\;{\mu}m$. After polishing the glass plate, dielectric films for high reflectance at 630 nm, a film of amorphous selenium for photoconduction, and a transparent conductive film for electrode are deposited in sequence. The new x-ray image sensor has several merits: primarily, fabrication of a large area sensor is more easily compared with the old fashioned x-ray image sensors. Since the reflection type liquid crystal panel has a very steep response curve, the new x-ray sensor has much more sensitivity to x-rays compared with the conventional x-ray area sensor, and the radiation dosage can be reduced down to less then 20%. By combining the new x-ray sensor with CCD camera technology, real-time x-ray images can be easily captured. We report the structure, fabrication process and characteristics of the new x-ray image sensor.

• Proceedings of the Optical Society of Korea Conference
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• 2009.02a
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• pp.331-332
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• 2009

• Proceedings of the Optical Society of Korea Conference
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• 2007.02a
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• pp.153-154
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• 2007

• Proceedings of the Optical Society of Korea Conference
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• 2008.07a
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• pp.427-428
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• 2008

• Proceedings of the Optical Society of Korea Conference
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• 2005.02a
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• pp.350-351
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• 2005

• Proceedings of the Optical Society of Korea Conference
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• 2007.02a
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• pp.323-324
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• 2007