• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.77-78
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• 2002

A regression formula including the inlet film thickness as the parameter for the starvation factor in EHL condition is obtained by numerical analysis with Elord‘s cavitation algorithm. In addition, an apparatus for starved film thickness measurement by use of the white light interferometry is developed in order to verify the proposed regression formula. From observation results by this apparatus, the proposed regression formula can predict the reduction of central film thickness caused by starvation in a ball-plate contact with an uncertainty up to 10%

• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.9-15
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• 2003

This paper proposes a thickness measurement method of silicon-oxide and poly-silicon film deposited on 12" silicon wafer for spin etcher. Halogen lamp is used as a light source for generating a wide-band spectrum, which is guided and focused on the wafer surface through a optical fiber cable. Interference signal from the film is detected by optical sensor to determine the thickness of the film using spectrum analysis and several signal processing techniques including curve-fitting and adaptive filtering. Test wafers with three kinds of priori-known films, polysilicon(300 nm), silicon-oxide(500 nm) and silicon-oxide(600 nm), are measured while the wafer is spinning at 20 Hz and DI water flowing on the wafer surface. From experiment results the algorithm presented in the paper is proved to be effective with accuracy of maximum 0.8% error.rror.

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 하계학술발표회
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• pp.248-249
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• 2003

The characterization of laser mirrors is important for obtaining proper performance of femtosecond lasers. Characteristics of laser mirrors are usually described in terms of their reflectivity at a certain wavelength. In femtosecond laser applications, however, the dispersion property of the mirror should be considered because the temporal shape of a femtosecond light pulse changes during the reflection at the mirrors. (omitted)

• Journal of the Optical Society of Korea
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• 제12권4호
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• pp.281-287
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• 2008

An acousto-optic tunable filter based 3-D micro surface profile measurement using an equally spaced 5 spectral phase shifting is described. The 5-bucket spectral phase shifting method is compared with a Fourier-transform method in the spectral domain. It can provide a fast measurement capability while maintaining high accuracy since it needs only 5 pieces of spectrally phase shifted imaging data and a simple calculation in comparison with the Fourier transform method that requires full wavelength scanning data and relatively complicated computation. The 3-D profile data of micro objects can be obtained in a few seconds with an accuracy of ${\sim}10nm$. The 3-D profile method also has an inherent benefit in terms of being speckle-free in measuring diffuse micro objects by employing an incoherent light source. Those simplicity and practical applicability is expected to have diverse applications in 3-D micro profilometry such as semiconductors and micro-biology.

• 한국광학회지
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• 제21권1호
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• pp.21-25
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• 2010

본 논문에서는 백색광 주사 간섭계의 측정시 외부 잡음이나 진동에 의한 간섭무늬 신호 왜곡으로 인하여 높이 영상에 발생하는 점 노이즈 제거를 위해, 데이터 처리 과정에서 높이 영상에 잡음 제거 필터를 적용하여 백색광 간섭계의 잡음 제거 성능을 향상시켰다. 백색광 간섭계의 높이 영상에 산포되어 있는 점 노이즈의 제거 방법으로 주로 사용되는 미디안(median) 필터는 점 노이즈 제거에 좋은 성능을 보이지만, 특정 경우 노이즈 제거 성능이 좋지 못하여 본 논문에서는 비교 평균 필터(Comparative Mean filter)를 제안하였다. 비교 평균 필터는 중심 화소 수치와 주변의 화소 수치를 비교하여 노이즈를 판별하고, 노이즈를 참조구간 화소 수치의 평균값으로 대체하는 필터이다. 비교평균 필터는 높이영상에서 노이즈 판별을 통한 보정과정으로 인하여 복원 영상의 선명도를 유지하면서 점 노이즈 제거에 좋은 성능을 보인다. 표면이 거칠고 굴곡이 심한 시료를 측정한 결과 후처리 하지 않은 경우와 비교하여 잡음성 화소를 약 1/3로 감소시키는 성능 향상이 있었다.

• 천문학회지
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• 제47권6호
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• pp.235-253
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• 2014

Intensity interferometry, based on the Hanbury Brown-Twiss effect, is a simple and inexpensive method for optical interferometry at microarcsecond angular resolutions; its use in astronomy was abandoned in the 1970s because of low sensitivity. Motivated by recent technical developments, we argue that the sensitivity of large modern intensity interferometers can be improved by factors up to approximately 25 000, corresponding to 11 photometric magnitudes, compared to the pioneering Narrabri Stellar Interferometer. This is made possible by (i) using avalanche photodiodes (APD) as light detectors, (ii) distributing the light received from the source over multiple independent spectral channels, and (iii) use of arrays composed of multiple large light collectors. Our approach permits the construction of large (with baselines ranging from few kilometers to intercontinental distances) optical interferometers at the cost of (very) long-baseline radio interferometers. Realistic intensity interferometer designs are able to achieve limiting R-band magnitudes as good as $m_R{\approx}14$, sufficient for spatially resolved observations of main-sequence O-type stars in the Magellanic Clouds. Multi-channel intensity interferometers can address a wide variety of science cases: (i) linear radii, effective temperatures, and luminosities of stars, via direct measurements of stellar angular sizes; (ii) mass-radius relationships of compact stellar remnants, via direct measurements of the angular sizes of white dwarfs; (iii) stellar rotation, via observations of rotation flattening and surface gravity darkening; (iv) stellar convection and the interaction of stellar photospheres and magnetic fields, via observations of dark and bright starspots; (v) the structure and evolution of multiple stars, via mapping of the companion stars and of accretion flows in interacting binaries; (vi) direct measurements of interstellar distances, derived from angular diameters of stars or via the interferometric Baade-Wesselink method; (vii) the physics of gas accretion onto supermassive black holes, via resolved observations of the central engines of luminous active galactic nuclei; and (viii) calibration of amplitude interferometers by providing a sample of calibrator stars.

• Current Optics and Photonics
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• 제1권6호
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• pp.604-612
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• 2017

An effective and precise method using a scanning white-light interferometer (SWLI) for three-dimensional surface measurements, in particular for roughness measurements, has been proposed. The measurement of a microscopically sloped area using an interferometer has limitations, due to the numerical aperture of the lens. In particular, for roughness measurements, it is challenging to obtain accurate height data for a sloped area using the interferometer, due to diffraction of the light. Owing to these optical limitations of the interferometer for roughness measurements, the Ra measurements performed using an interferometer contain errors. To overcome the limitations, we propose a method consisting of the following two steps. First, we evaluate the height data and set the invalid height area to be blank, using the characteristics of the modulus peak, which has a low peak value for signals that have low reliability in the interferogram. Next, we interpolate the blank area using the adjacent reliable area. Rubert roughness standards are used to verify the proposed method. The results obtained by the proposed method are compared to those obtained with a stylus profilometer. For the considered sinusoidal samples, Ra ranges from $0.053{\mu}m$ to $6.303{\mu}m$, and we show that the interpolation method is effective. In addition, the method can be applied to a random surface where Ra ranges from $0.011{\mu}m$ to $0.164{\mu}m$. We show that the roughness results obtained using the proposed method agree well with profilometer results. The $R^2$ values for both sinusoidal and random samples are greater than 0.995.

• 한국광학회지
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• 제17권1호
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• pp.47-53
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• 2006

미국 등 세계 여러 나라에서 사용되는 기존의 총기 인식 시스템(Integrated Ballistic Identification System)은 탄흔을 2차원 현미경을 통해 측정, 해석하기 때문에 여러 가지 한계를 가지고 있다. 대표적으로 측정 표면의 거칠기나 기울기 성분, 빛의 조명 각도, 조명 광량의 균일 정도, 표면의 다중 반사나 광학적 특성에 의해 측정 결과가 크게 영향을 받는다. 이로 인해 부정확한 해석을 할 수밖에 없고, 결국 총기 인식 결과의 신뢰성이 떨어진다. 본 연구에서는 이와 같은 단점을 극복하기 위해 조명이나 표면 조건에 영향을 적게 받는 삼차원 형상 측정을 도입했다. 대표적으로 백색광 주사간섭계와 동초점현미경이 사용되었으며, 이런 측정기들은 미국 표준연구소 (National Institute of Standards and Technology, NIST)의 교정 단계를 밟아 보정했다. 그 결과 반복성과 재현성이 뛰어난 측정 결과를 얻을 수 있었다. 또한 본 논문에서 제안하는 3차원 형상 비교 알고리즘을 통해 보다 높은 신뢰도를 갖는 총기 인식이 가능해졌다.

• 제어로봇시스템학회논문지
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• 제22권2호
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• pp.139-146
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• 2016

Recently, popularity of 3D technology has been growing significantly and it has many application parts in the various fields of industry. In order to overcome the limitations of 2D machine vision technologies based on 2D image, we need the 3D measurement technologies. There are many 3D measurement methods as such scanning probe microscope, phase shifting interferometry, confocal scanning microscope, white-light scanning interferometry, and so on. In this paper, we have used the extended depth of focus (EDF) algorithm among 3D measurement methods. The EDF algorithm is the method which extracts the 3D information from 2D images acquired by short range depth camera. In this paper, we propose the EDF algorithm using the edge informations of images and the average values of all pixel on z-axis to improve the performance of conventional method. To verify the performance of the proposed method, we use the various synthetic images made by point spread function(PSF) algorithm. We can correctly make a comparison between the performance of proposed method and conventional one because the depth information of these synthetic images was known. Through the experimental results, the PSNR of the proposed algorithm was improved about 1 ~ 30 dB than conventional method.

• The Journal of Advanced Prosthodontics
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• 제10권1호
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• pp.32-42
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• 2018

PURPOSE. The purpose of this study was to derive and compare the inherent color (hue angle, chroma), translucency ($TP_{SCI}$), surface gloss (${\Delta}E^*_{SCE-SCI}$), and surface roughness ($R_a$) amongst selected shades and brands of three hybrid CAD/CAM blocks [GC Cerasmart (CS); Lava Ultimate (LU); Vita Enamic (VE)]. MATERIALS AND METHODS. The specimens (N = 225) were prepared into square-shaped ($12{\times}12mm^2$) with different thicknesses and shades. The measurements of color, translucency, and surface gloss were performed by a reflection spectrophotometer. The surface roughness and surface topography were assessed by white light interferometry. RESULTS. Results revealed that hue and chroma values were influenced by the material type, material shade, and material thickness (P < .001). The order of hue angle amongst the materials was LU > CS > VE, whereas the order of chroma was VE > CS > LU. $TP_{SCI}$ results demonstrated a significant difference in terms of material types and material thicknesses ($P{\leq}.001$). $TP_{SCI}$ values of the tested materials were ordered as LU > CS > VE. ${\Delta}E^*_{SCE-SCI}$ and $R_a$ results were significantly varied amongst the materials (P < .001) and amongst the shades (P < .05). The order of ${\Delta}E^*_{SCE-SCI}$ amongst the materials were as follows $LU>VE{\geq}CS$, whereas the order of $R_a$ was $CS{\geq}VE>LU$. CONCLUSION. Nano-ceramic and polymer-infiltrated-feldspathic ceramic-network CAD/CAM materials exhibited different optical, inherent color and surface parameters.