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http://dx.doi.org/10.3807/JOSK.2008.12.4.281

3-D Surface Profile Measurement Using An Acousto-optic Tunable Filter Based Spectral Phase Shifting Technique  

Kim, Dae-Suk (Division of Mechanical System Engineering, Chonbuk National University)
Cho, Yong-Jai (Division of Advanced Technology, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Optical Society of Korea / v.12, no.4, 2008 , pp. 281-287 More about this Journal
Abstract
An acousto-optic tunable filter based 3-D micro surface profile measurement using an equally spaced 5 spectral phase shifting is described. The 5-bucket spectral phase shifting method is compared with a Fourier-transform method in the spectral domain. It can provide a fast measurement capability while maintaining high accuracy since it needs only 5 pieces of spectrally phase shifted imaging data and a simple calculation in comparison with the Fourier transform method that requires full wavelength scanning data and relatively complicated computation. The 3-D profile data of micro objects can be obtained in a few seconds with an accuracy of ${\sim}10nm$. The 3-D profile method also has an inherent benefit in terms of being speckle-free in measuring diffuse micro objects by employing an incoherent light source. Those simplicity and practical applicability is expected to have diverse applications in 3-D micro profilometry such as semiconductors and micro-biology.
Keywords
Interferometry; Profilometry; Spectral phase shifting; White light; Tunable filter;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
Times Cited By Web Of Science : 11  (Related Records In Web of Science)
Times Cited By SCOPUS : 10
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